Three-component, negative-type, alkaline-developable, thermally stable, and photosensitive polymer based on poly(2,6-dihydroxy-1,5-naphthalene), a crosslinker, and a photoacid generator
K Tsuchiya; Y Shibasaki; M Suzuki; M Ueda
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 2004年05月