Generation methods for high pressure plasmas to be operated in wide parameter ranges and their applications.
Grant-in-Aid for Scientific Research (B)
Graduate School of Engineering, Kyoto University
Kunihide TACHIBANA
From 01 Apr. 2003, To 31 Mar. 2005, Project Closed
プラズマ表面処理;大気圧プラズマ;マイクロプラズマ集積型;誘電体バリヤ放電;プラズマCVD;SiO_2薄膜;誘電体バリア放電, Plasma surface treatment;Atmospheric pressure plasma;Microplasma integrated type;Dielectric barrier discharge;Plasma CVD;SiO_2 film