Model predictive control of Czochralski process producing 300 mm single crystal silicon ingot
Shota Kato; Hironobu Yoshioka; Sanghong Kim; Manabu Kano; Toshiyuki Fujiwara; Masahiko Mizuta; Shinji Hasebe
The 8th International Symposium on Design, Operation and Control of Chemical Processes (PSE Asia 2019), 2019年01月, 査読有り, 筆頭著者