Microfabrication of Lead-Free (K,Na)Nbo3 Piezoelectric Thin Films by Dry Etching
Kurokawa, F; Yokokawa, R; Kotera, H; Horikiri, F; Shibata, K; Sato, M; Hida, H; Kanno, I
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2013), 2013年