Morphological changes of nanostructures on silicon induced by C60-ion irradiation
Oishi, N.; Murao, Y.; Nitta, N.; Tsuchida, H.; Tomita, S.; Sasa, K.; Hirata, K.; Shibata, H.; Hirano, Y.; Yamada, K.; Chiba, A.; Saitoh, Y.; Narumi, K.; Hoshino, Y.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2022年12月, 査読有り