Prospects of mist CVD for fabrication of β-Ga₂O₃ MESFETs on β-Ga₂O₃ (010) substrates
Takane, Hitoshi; Ando, Yuji; Takahashi, Hidemasa; Makisako, Ryutaro; Ikeda, Hikaru; Ueda, Tetsuzo; Suda, Jun; Tanaka, Katsuhisa; Fujita, Shizuo; Sugaya, Hidetaka
Applied Physics Express, 2023年08月