Crystal anisotropy on strength of single crystal silicon measured by tensile testing
Taku,Wakita; Yoshikazu,Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tsuyoshi,Ikehara
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 44, Jul. 2010, Peer-reviewed