Basic Information

Faculty

• Faculty of Engineering

Concurrent Affiliation

• Center for the Promotion of Interdisciplinary Education and Research (C-PiER), ナノテクノロジーハブ拠点, ユニット長

Professional Memberships

• Institute of Electrical and Electronics Engineers
• The Institute of Electrical Engineers of Japan
• The Japan Society of Mechanical Engineers
• Materials Research Society
• SPIE, the international society for optics and photonics
• The Japan Society of Applied Physics

Academic Degree

• (The University of Tokyo)
• (Nagoya University)

Academic Resume (Graduate Schools)

• The University of Tokyo, School of Engineering, Department of Precision Mechanical Engineering, 修了
• Nagoya University, Graduate School of Engineering, Department of Microsystem Engineering, 修了

Academic Resume (Undergraduate School/Majors)

• The University of Tokyo, Faculty of Engineering, Department of Precision Mechanical Engineering, 卒業

Research History

• From Sep. 2019, To Present

  Kyoto University, Graduate School of Engineering Department of Micro Engineering, Professor
• From Apr. 2007, To Aug. 2019

  Kyoto University, Graduate School of Engineering Department of Micro Engineering, Associate Professor
• From Apr. 2005, To Mar. 2007

  Kyoto University, Graduate School of Engineering Department of Micro Engineering, Associate Professor
• From Mar. 2004, To Mar. 2005

  Kyoto University, Graduate School of Engineering Department of Mechanical Engineering, Associate Professor
• From Apr. 1993, To Feb. 2004

  Toyota Central R&D Labs., Inc.

Profile

• Profile

  I am currently engaged in the research of silicon surface micromachining, its application in MEMS, the mechanical property evaluation of micro materials, and the reliability of MEMS devices.

Language of Instruction

• Japanese
• English

ID,URL

• ORCID ID

  0000-0002-7846-5831

• J-Global ID

  200901019744781826

• Researcher number

  60378792

• External link

  http://www.nms.me.kyoto-u.ac.jp/

Website(s) (URL(s))

• http://www.nms.me.kyoto-u.ac.jp/

researchmap URL

• https://researchmap.jp/toshiyukitsuchiya

Research

Research Topics, Overview of the research

• Research Topics

  Mechanical Properties Evaluation of Nano-/Micro-Materials, Micro Electromechanical Systems, MEMS, Microsystem, Inertial Sensor

• Overview of the research

  I have been researching on microelectromechanical systems (MEMS), which is tiny sensors and actuators fabricated using semiconductor fabrication technologies. The main research topic is electrostatic MEMS, including accelerometers, vibrating gyroscopes and micromirrors. In addition, I am working on the mechanical reliability evaluation of MEMS and the mechanical properties evaluations of nano/micro materials used for MEMS.

Research Interests

• Mechanical Properties Evaluation of Micro Materials
• Reliability of Micro/Nano Machines
• Inertial Sensors
• Micro Systems,MEMS (Micro Electro Mechanical Systems)
• 慣性力センサ
• マイクロマシン
• マイクロシステム工学
• MEMS
• 薄膜材料の機械物性評価
• Mechanical Properties Evaluation of Thin films
• MEMS (Micro Electro Mechanical Systems)
• Micro System Engineering

Research Areas

• Informatics, Mechanics and mechatronics
• Informatics, Robotics and intelligent systems
• Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Machine materials and mechanics
• Nanotechnology/Materials, Nano/micro-systems
• Nanotechnology/Materials, Nanomaterials

Papers

• Estimating depth-directional thermal conductivity profiles using neural network with dropout in frequency-domain thermoreflectance

  Yasuaki Ikeda; Yuki Akura; Masaki Shimofuri; Amit Banerjee; Toshiyuki Tsuchiya; Jun Hirotani

  Journal of Applied Physics, 07 Feb. 2025

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• Wavelength dependence of thermoreflectance coefficient of TiNi thin film

  Taichi Murakami; Masaki Shimofuri; Toshiyuki Tsuchiya; Shugo Miyake

  Japanese Journal of Applied Physics, 01 Mar. 2025

  
• Flexible 3ω sensors on submicron-thick parylene substrates for thermal conductivity measurements of liquids and soft materials

  Ryuto Yamasaki; Yuki Matsunaga; Yuki Akura; Masaki Shimofuri; Amit Banerjee; Toshiyuki Tsuchiya; Jun Hirotani

  Applied Physics Letters, 02 Jan. 2025

  
• Frequency-domain thermoreflectance with beam offset without the spot distortion for accurate thermal conductivity measurement of anisotropic materials

  Yuki Akura; Yasuaki Ikeda; Yuki Matsunaga; Masaki Shimofuri; Amit Banerjee; Toshiyuki Tsuchiya; Jun Hirotani

  Review of Scientific Instruments, 01 Jan. 2025

  
• Casimir-Lifshitz Force Dominated Minimum Spacing of Single Crystal Silicon Cleavage Plane Nanogap

  Shimofuri Masaki; Hirai Yoshikazu; Tsuchiya Toshiyuki

  JSAP Annual Meetings Extended Abstracts, 26 Feb. 2021

  
• Measurement of Field-Assisted Thermal Electron Tunneling between Single Crystal Silicon Cleavage Plane Nanogap

  SHIMOFURI Masaki; YOSHIMURA Koki; BUN Kazuhiko; HIRAI Yoshikazu; BANERJEE Amit; TSUCHIYA Toshiyuki

  The Proceedings of Mechanical Engineering Congress, Japan, 2021

  
• Heat Transfer Measurement between Nanogap with Single Crystal Silicon (111) Cleavage Plane

  Shimofuri Masaki; Hirai Yoshikazu; Tsuchiya Toshiyuki

  JSAP Annual Meetings Extended Abstracts, 26 Aug. 2020

  
• Device fabrication for measuring thermionic emission between vacuum nanogaps created by cleavage fracture of single crystal silicon

  YOSHIMURA Koki; BUN Kazuhiko; SHIMOFURI Masaki; HIRAI Yoshikazu; TSUCHIYA Toshiyuki

  The Proceedings of Mechanical Engineering Congress, Japan, 2020

  
• Fabrication of nanogap by cleavage of single-crystal silicon in vacuum and measurement of field emission between its clean fracture surfaces

  BUN Kazuhiko; SHIMOFURI Masaki; HIRAI Yoshikazu; TSUCHIYA Toshiyuki

  The Proceedings of Mechanical Engineering Congress, Japan, 2020

  
• Measurement of gap distance dependence on thermal transfer between nanogap created by single crystal silicon cleavage using MEMS electrostatic actuator

  SHIMOFURI Masaki; HIRAI Yoshikazu; TSUCHIYA Toshiyuki

  The Proceedings of Mechanical Engineering Congress, Japan, 2020

  
• Measurement of Near-field Heat Radiative Transfer Between Nanogap With Single Crystal Silicon Cleavage Planes

  Shimofuri Masaki; Hirai Yoshikazu; Tsuchiya Toshiyuki; Tabata Osamu

  JSAP Annual Meetings Extended Abstracts, 04 Sep. 2019

  
• Cleavage fracture fabricated nanogap device in SEM for gap control and current measurement

  BUN Kazuhiko; SHIMOFURI Masaki; Banerjee Amit; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  The Proceedings of Mechanical Engineering Congress, Japan, 2019

  
• Spacing-controlling MEMS device for evaluating heat transfer between nanogap

  Shimofuri Masaki; Hirai Yoshikazu; Tsuchiya Toshiyuki; Tabata Osamu

  The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019

  
• Measurement of temperature difference between cleavage plane nanogap using microscopic Raman spectroscopy

  SHIMOFURI Masaki; MORI Yasuaki; Banerjee Amit; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  The Proceedings of Mechanical Engineering Congress, Japan, 2018

  
• A Planar Single-Actuator Bi-Stable Switch Based on Latch-Lock Mechanism

  Yang Gao; Toshiki Ema; Zeyuan Cao; Sheng Ni; Elena Y. L. Chan; Osamu Tabata; Toshiyuki Tsuchiya; Xiaohong Wang; Man Wong

  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 01 Jun. 2019

  
• Gravity and Film Stress Analysis for Mems Deformable Mirror with Electrostatic Piston Array

  Toshiyuki Tsuchiya; Toshiki Ema; Yoshikazu Hirai; Christopher Welham; Hideyuki Maekoba

  21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, 20 Jun. 2021

  
• Microfabrication of Alkali Vapor Cells with Lower the Outgassing and Temperature Utilizing Silicon 3D Structure

  Katsuo Nakamura; Yuichi Kimoto; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 01 Jan. 2019

  
• High-efficient proton conductor nanochannels array based on a ferroelectric proton transfer phase substrate towards a μ-fuel cell

  Y. Pihosh; H. Seo; K. Mawatari; Y. Kazoe; O. Tabata; T. Tsuchiya; T. Kitamori

  20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2016, 2016

  
• Development of high-efficient proton conductor nanochannels array based on ferroelectric material

  H. Seo; Y. Pihosh; Y. Kazoe; K. Mawatari; K. Kitamura; O. Tabata; T. Tsuchiya; T. Kitamori

  MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2015

  
• Adsorption Characteristics and Mechanical Responses of Lubricants Containing Polymer Additives under Fluid Lubrication with a Narrow Gap

  Tomoko Hirayama; Naoki Yamashita; Waka Yamamoto; Kenta Shirode; Akira Okada; Naoya Hatano; Toshiyuki Tsuchiya; Masako Yamada

  Langmuir, 14 Mar. 2024, Peer-reviewed

  
• Enhancing responsivity and detection limit in tunable nano-electromechanical system resonator mass sensors

  Wei Yu; Amit Banerjee; Jun Hirotani; Toshiyuki Tsuchiya

  Japanese Journal of Applied Physics, 01 Mar. 2024, Peer-reviewed, Last author

  
• Achieving Ultrawide Tunability in Monolithically Fabricated Si Nanoresonator Devices

  Wei Yu; Yuma Ohara; Claude Meffan; Jun Hirotani; Amit Banerjee; Toshiyuki Tsuchiya

  Nano Letters, 15 Dec. 2023, Peer-reviewed, Last author

  
• Alternating a-C:H coating effect on torsional strength of silicon beam for micromirrors

  Yuanlin Xia; Lei Zhong; Jiaxing Tan; Zhuqing Wang; Amit Banerjee; Jun Hirotani; Toshiyuki Tsuchiya

  Sensors and Actuators A: Physical, Dec. 2023, Peer-reviewed, Last author

  
• Numerical calculation of thermoreflectance coefficient of c-Si for wavelengths of 200–800 nm and temperatures of 300–500 K

  Masaki Shimofuri; Taichi Murakami; Shugo Miyake; Amit Banerjee; Jun Hirotani; Toshiyuki Tsuchiya

  Japanese Journal of Applied Physics, 01 Nov. 2023, Peer-reviewed, Last author

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• Design and Fabrication of Ionic Liquid Electrospray Thruster with Two-Stage Electrodes

  Akane NISHIMURA; Hirohide KATSUTA; Yoshinori TAKAO; Toshiyuki TSUCHIYA

  Journal of Evolving Space Activities, Mar. 2023, Peer-reviewed, Last author, Corresponding author

  
• Multilayered Microfluidic Device for Controllable Flow Perfusion of Gut-Liver on a Chip

  Jiandong Yang; Satoshi Imamura; Yoshikazu Hirai; Ken Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata

  21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, 20 Jun. 2021

  
• Highly Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip

  Takashi Miyazaki; Jiandong Yang; Satoshi Imamura; Yoshikazu Hirai; Ken Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 25 Jan. 2021

  
• A Planar Single-Actuator Bi-Stable Mechanical Latch as an Electrical Switch

  Yang Bu; Yue Jiang; Saeko Kawano; Bryan S.T. Tam; Sheng Ni; Liying Lin; Osamu Tabata; Toshiyuki Tsuchiya; Xiaohong Wang; Man Wong

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan. 2020

  
• Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire

  Tomoya Nakamura; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan. 2020

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• Heart-liver on a chip integrated with a microelectrode array to monitor extracellular field potentials of cardiomyocytes

  Dongxiao Zhang; Yoshikazu Hirai; Ken Ichiro Kamei; Osamu Tabata; Toshiyuki Tsuchiya

  MicroTAS 2020 - 24th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2020

  
• Integrated gut-liver on a chip for modelling non-alcoholic fatty liver disease in vitro

  Jiandong Yang; Yoshikazu Hirai; Ken Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata

  23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019, 2019

  
• Fluidic-capacitor integrated microfluidic platform to mimic heart beating for generation of functional liver organoids

  Jiaxu Wu; Yoshikazu Hirai; Ken Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata

  22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018, 2018

  
• Non-linear processing with a surface acoustic wave reservoir computer

  C Meffan; T Ijima; A Banerjee; J Hirotani; T Tsuchiya

  MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, May 2023, Peer-reviewed

  
• Gap distance dependence on field emission at the nanogap between silicon cleavage surfaces

  Y Akura; M Shimofuri; A Banerjee; J Hirotani; T Tsuchiya

  JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Mar. 2023, Peer-reviewed

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• Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device

  M Shimofuri; A Banerjee; J Hirotani; Y Hirai; T Tsuchiya

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Feb. 2023, Peer-reviewed

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• Microfabrication of polydimethylsiloxane-parylene hybrid microelectrode array integrated into a multi-organ-on-a-chip

  DX Zhang; JD Yang; Y Hirai; K Kamei; O Tabata; T Tsuchiya

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jan. 2023, Peer-reviewed

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• Water vapor plasma-assisted low-temperature bonding of cyclo-olefin polymer for microchannel with integrated leak detector

  M Tsukamoto; H Terai; M Tsumaya; S Kurosawa; O Tsuji; M Sato; Y Inoue; K Kawano; T Matsushima; T Tsuchiya

  MRS ADVANCES, Nov. 2022, Peer-reviewed

  
• Integrated-gut-liver-on-a-chip platform as an in vitro human model of non-alcoholic fatty liver disease.

  Jiandong Yang; Yoshikazu Hirai; Kei Iida; Shinji Ito; Marika Trumm; Shiho Terada; Risako Sakai; Toshiyuki Tsuchiya; Osamu Tabata; Ken-Ichiro Kamei

  Communications biology, 23 Mar. 2023

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• Force measurement using integrated shear strain gauge in parallel tensile testing for single crystal silicon

  YASUDA Kanji; UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  The Proceedings of Mechanical Engineering Congress, Japan, 2017

  
• Effect of Deposition Voltage on Tensile Properties of Single Crystal Silicon Microstructure Fully Coated by Plasma CVD DLC Film

  ZHANG Wenlei; UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  The Proceedings of Mechanical Engineering Congress, Japan, 2017

  
• Parallel Tensile Testing Device with Integrated Shear Strain Gauge for Single Crystal Silicon Micro Structure

  YASUDA Kanji; UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  The Proceedings of Mechanical Engineering Congress, Japan, 2016

  
• Tensile testing of Si microstructures fully coated with submicrometer-thick DLC film deposited using PECVD

  ZHANG Wenlei; UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  The Proceedings of Mechanical Engineering Congress, Japan, 2016

  
• Effect of tensile orientation on slip and fracture of (110) silicon at high temperature

  UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  The Proceedings of Mechanical Engineering Congress, Japan, 2016

  
• Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon

  Yuanlin Xia; Makoto Suzuki; Peidong Xue; Yoshikazu Hirai; Toshiyuki Tsuchiya

  International Journal of Fatigue, Sep. 2022, Peer-reviewed, Last author

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• Effect of alternating a-C:H multilayer full coating on fracture behavior of single-crystal silicon-based microstructure in tensile and toughness tests

  Yuanlin Xia; Yoshikazu Hirai; Toshiyuki Tsuchiya

  Materials Science and Engineering: A, Oct. 2021, Peer-reviewed

  
• Reliability Characterization of MEMS Materials

  TSUCHIYA Toshiyuki

  The Journal of the Institute of Electrical Engineers of Japan, 01 Jul. 2005

  
• 5507 Spring constant measurement of MEMS structure using electromagnetic balance

  MIYAMOTO Kenji; JOMORI Tomoya; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  The proceedings of the JSME annual meeting, 2006

  
• Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gei Processing

  TUCHIYA Toshiyuki; ITOH Toshihiro; SASAKI Gen; SUGA Tadatomo

  Journal of the Ceramic Society of Japan, 01 Mar. 1996

  
• Gut-liver-axis microphysiological system for studying cellular fluidic shear stress and inter-tissue interaction

  JD Yang; S Imamura; Y Hirai; T Tsuchiya; O Tabata; KI Kamei

  BIOMICROFLUIDICS, Jul. 2022, Peer-reviewed

  
• Mateiral Technologies of Silicon Sensor Devices (Special Issue Micromechanical Devices)

  TSUCHIYA Toshiyuki

  Journal of the Japan Society of Precision Engineering, 05 May 1999

  
• 国際会議報告：The 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS2013 報告

  土屋 智由

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）, 2013

  
• 432 Anisotropy effects in single crystal silicon on bend testing

  IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki

  The proceedings of the JSME annual meeting, 2008

  
• 429 Effect of Surface Oxidation on Tensile Strength of Single Crystal Silicon

  TSUCHIYA Toshiyuki; MIYAMOTO Kenji; SUGANO Koji; Tabata Osamu

  The proceedings of the JSME annual meeting, 2008

  
• 3310 Design Consideration on Tactile Sensor for Minimal Invasive Surgery

  TAMURA Tomohisa; EL-Bab Ahmed M.R.Fath; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  The proceedings of the JSME annual meeting, 2007

  
• 2837 Development of High-Temperature Thin-Film Tensile Tester

  TSUCHIYA Toshiyuki; IKEDA Teturo; SUGANO Koji; Tabata Osamu

  The proceedings of the JSME annual meeting, 2007

  
• Microfabricated alkali metal vapor cells filled with an on-chip dispensing component

  Shun Kiyose; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya

  Japanese Journal of Applied Physics, 01 Jun. 2021

  
• Design strategy of electrode patterns based on finite element analysis in microfluidic device for Trans‐Epithelial Electrical Resistance (TEER) measurement

  Takashi Miyazaki; Yoshikazu Hirai; Ken‐ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata

  Electronics and Communications in Japan, Jun. 2021

  
• Uniform needle-emitter arrays for ionic liquid electrospray thrusters with precise thrust control

  Fumiya Tachibana; Toshiyuki Tsuchiya; Yoshinori Takao

  Japanese Journal of Applied Physics, Mar. 2021, Peer-reviewed

  
• Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate

  Kazutaka Obitani; Kazutaka Araya; Masanori Yachi; Toshiyuki Tsuchiya

  Journal of Microelectromechanical Systems, Jan. 2021, Peer-reviewed

  
• 経上皮電気抵抗測定の高精度化に向けたOrgan-on-a-Chipの設計法

  宮崎 貴史; 平井 義和; 亀井 謙一郎; 土屋 智由; 田畑 修

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）, 2021, Peer-reviewed

  
• Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded a-C:H film

  Yuanlin Xia; Yoshikazu Hirai; Toshiyuki Tsuchiya

  SURFACE & COATINGS TECHNOLOGY, Jan. 2021, Peer-reviewed

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• Spin transport in a lateral spin valve with a suspended Cu channel

  Kenjiro Matsuki; Ryo Ohshima; Livio Leiva; Yuichiro Ando; Teruya Shinjo; Toshiyuki Tsuchiya; Masashi Shiraishi

  SCIENTIFIC REPORTS, Jul. 2020, Peer-reviewed

  
• Surface-enhanced Raman spectroscopy with gold nanoparticle dimers created by sacrificial DNA origami technique

  Naoki Yamashita; Seongsu Park; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  MICRO & NANO LETTERS, May 2020, Peer-reviewed

  
• Laser-driven optothermal microactuator operated in water

  Qingyang You; Yingda Wang; Ziyao Zhang; Haijun Zhang; Toshiyuki Tsuchiya; Osamu Tabata

  APPLIED OPTICS, Feb. 2020, Peer-reviewed

  
• Design Strategy of Electrode Patterns Based on Finite Element Analysis in Microfluidic Device for Trans-Epithelial Electrical Resistance (TEER) Measurement

  Miyazaki Takashi; Hirai Yoshikazu; Kamei Ken-ichiro; Tsuchiya Toshiyuki; Tabata Osamu

  IEEJ Transactions on Sensors and Micromachines, 2020

  
• Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids

  Jiaxu Wu; Yoshikazu Hirai; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata

  ELECTRONICS AND COMMUNICATIONS IN JAPAN, Oct. 2019, Peer-reviewed

  
• Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope

  Yunyi Shu; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2019, Peer-reviewed

  
• Ferroelectric Extended Nanofluidic Channels for Room‐Temperature Microfuel Cells

  Yuriy Pihosh; Yutaka Kazoe; Kazuma Mawatari; Hangyeol Seo; Osamu Tabata; Toshiyuki Tsuchiya; Kenji Kitamura; Masahiro Tosa; Ivan Turkevych; Takehiko Kitamori

  Advanced Materials Technologies, Jun. 2019, Peer-reviewed

  
• Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film

  Wenlei Zhang; Kazutaka Obitani; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  SENSORS AND ACTUATORS A-PHYSICAL, Feb. 2019, Peer-reviewed

  
• Specific Binding of DNA Origami on a Nanoscale Pattern Formed by AFM Lithography

  山下直輝; Park Seongsu; Ma Zhipeng; Ma Zhipeng; 川合健太郎; 平井義和; 土屋智由; 田畑修; 田畑修

  電気学会論文誌 E, Jan. 2019, Peer-reviewed

  
• 顕微ラマン分光を用いた単結晶シリコンへき開ナノギャップ間の温度差測定

  霜降 真希; 平井 義和; 土屋 智由; 田畑 修

  実験力学, Jan. 2019, Peer-reviewed

  
• Novel Microfluidic Device Integrated with a Fluidic-Capacitor to Mimic Heart Beating for Generation of Functional Liver Organoids

  Wu Jiaxu; Hirai Yoshikazu; Kamei Ken-ichiro; Tsuchiya Toshiyuki; Tabata Osamu

  IEEJ Transactions on Sensors and Micromachines, Jan. 2019, Peer-reviewed

  
• 単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測

  土屋 智由; 鈴木 淳也; 片岡 達哉; 平井 義和; 菅野 公二; 田畑 修

  実験力学, Jan. 2019, Peer-reviewed

  
• A microfluidic device to investigate the effect of shear stress on metastasis

  UEDA Keita; HAGIHARA Takeshi; HIRAI Yoshikazu; KONDO Jumpei; INOUE Masahiro; TSUCHIYA Toshiyuki; KAMEI Ken-ichiro; TABATA Osamu

  The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019

  
• Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges

  Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  SENSORS AND MATERIALS, Sep. 2018, Peer-reviewed

  
• Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array

  Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), 01 Jul. 2018, Peer-reviewed

  
• Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film

  Wenlei Zhang; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  Applied Surface Science, 15 Jun. 2018, Peer-reviewed

  
• Tensile strength of Silicon Nanowires batch-fabricated into electrostatic MEMS testing device

  Toshiyuki Tsuchiya; Tetsuya Hemmi; Jun-Ya Suzuki; Yoshikazu Hirai; Osamu Tabata

  Applied Sciences (Switzerland), 28 May 2018, Peer-reviewed

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• Numerical Investigation of Steady and Transient Ion Beam Extraction Mechanisms for Electrospray Thrusters

  Kazuma Emoto; Toshiyuki Tsuchiya; Yoshinori Takao

  Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Mar. 2018, Peer-reviewed

  
• High-Yield Bridged Assembly of ssDNA-Modified SWCNT Using Dielectrophoresis

  Yusuke Shiomi; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya

  International Journal of Automation Technology, 05 Jan. 2018

  
• Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs

  Zhipeng Ma; Yunfei Huang; Seongsu Park; Kentaro Kawai; Do-Nyun Kim; Yoshikazu Hirai; Toshiyuki Tsuchiya; Hirofumi Yamada; Osamu Tabata

  Small, 04 Jan. 2018, Peer-reviewed

  
• リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明 (特集 平成29年度センサ・マイクロマシン部門総合研究会)

  稲垣 達也; 朴 晟洙; 山下 直輝; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修

  電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines, Jan. 2018, Peer-reviewed

  
• Revealing the influential factor on dimerizing of triangular DNA origami by linker

  Tatsuya Inagaki; Seongsu Park; Naoki Yamashita; Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2018, Peer-reviewed

  
• Mathematical modeling and analysis of MEMS deformable mirror actuated by electrostatic piston array

  Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2018, Peer-reviewed

  
• Fabrication of ionic liquid-based pressure sensor with high sensitivity utilizing three-dimensional lithography and its characterization

  TSUJI Yusuke; HIRAI Yoshikazu; KAMEI Ken-ichiro; TSUCHIYA Toshiyuki; TABATA Osamu

  The Proceedings of the Symposium on Micro-Nano Science and Technology, 2018

  
• Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique

  Naoki Yamashita; Zhipeng Ma; Seongsu Park; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  MICRO & NANO LETTERS, Nov. 2017, Peer-reviewed

  
• Microfabricated emitter array for an ionic liquid electrospray thruster

  Kaito Nakagawa; Toshiyuki Tsuchiya; Yoshinori Takao

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2017, Peer-reviewed

  
• Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design

  Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed

  
• Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method

  Wenlei Zhang; Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed

  
• Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap

  Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed

  
• Dry Etching and Low-Temperature Direct Bonding Process of Lithium Niobate Wafer for Fabricating Micro/Nano Channel Device

  Toshiyuki Tsuchiya; SUGANO KOJI; Hideki Takahashi; H. Seo; Yuriy Pihosh; Yutaka Kazoe; Kazuma Mawatari; Takehiko Kitamori; Osamu Tabata

  The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2017), Jun. 2017, Peer-reviewed

  
• Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro

  Ken-ichiro Kamei; Yoshiki Kato; Yoshikazu Hirai; Shinji Ito; Junko Satoh; Atsuko Oka; Toshiyuki Tsuchiya; Yong Chen; Osamu Tabata

  RSC ADVANCES, 2017, Peer-reviewed

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• 抗がん剤の副作用を再現する生体外ヒトモデル Body on a Chi

  亀井 謙一郎; 平井 義和; 加藤 義基; 土屋 智由; 田畑 修

  バイオエンジニアリング講演会講演論文集, 2017

  
• Sensitivity characterization of pressure sensor using ionic liquid by finite element analysis

  TSUJI Yusuke; NAKANO Yu; HIRAI Yoshikazu; KAMEI Ken-ichiro; TSUCHIYA Toshiyuki; TABATA Osamu

  The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017

  
• Fracture behavior of single crystal silicon with thermal oxide layer

  Toshiyuki Tsuchiya; Kenji Miyamoto; Koji Sugano; Osamu Tabata

  ENGINEERING FRACTURE MECHANICS, Sep. 2016, Peer-reviewed

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• Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon

  Tsuyoshi Ikehara; Toshiyuki Tsuchiya

  MICROSYSTEMS & NANOENGINEERING, Jul. 2016, Peer-reviewed

  
• Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers

  Zhipeng Ma; Seongsu Park; Naoki Yamashita; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2016, Peer-reviewed

  
• Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures

  Zhipeng Ma; Seongsu Park; Naoki Yamashita; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, Jun. 2016, Peer-reviewed

  
• 培養細胞を用いたスクリーニング系の構築、毒性評価 抗がん剤副作用を再現する生体外モデルBody on a Chipの開発

  亀井 謙一郎; 平井 義和; 加藤 義基; 土屋 智由; 田畑 修

  組織培養研究, Mar. 2016

  
• Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper

  Toshiyuki Tsuchiya; Yusuke Kogita; Akira Taniyama; Yoshikazu Hirai; Koji Sugano; Osamu Tabata

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Feb. 2016, Peer-reviewed

  
• Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding < 110 > and < 100 > single crystal silicon beams

  M. Elwi Mitwally; T. Tsuchiya; O. Tabata; S. Sedky

  MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Feb. 2016, Peer-reviewed

  
• Development of a Body-on-a-Chip Using 3-D Microstructuring Technique

  Yoshiki Kato; Yoshikazu Hirai; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2016, Peer-reviewed

  
• Graphene film development on flexible substrate using a new technique: temperature dependency of gauge factor for graphene-based strain sensors

  Sahour Sayed; Mohammed Gamil; Ahmed Fath El-Bab; Koichi Nakamura; Toshiyuki Tsuchiya; Osamu Tabata; Ahmed Abd El-Moneim

  SENSOR REVIEW, 2016, Peer-reviewed

  
• Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures

  Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky

  SENSORS AND MATERIALS, 2016, Peer-reviewed

  
• Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography

  Xiaoxu Ma; Yoshiki Kato; Floris van Kempen; Yoshikazu Hirai; Toshiyuki Tsuchiya; Fred van Keulen; Osamu Tabata

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Dec. 2015, Peer-reviewed

  
• Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers

  Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  MICRO & NANO LETTERS, Dec. 2015, Peer-reviewed

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• Analysis of aggregation reaction of silver nanoparticles in microchannel for highly sensitive Surface-Enhanced Raman Spectroscopy

  Koji Sugano; Hiroshi Katayama; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 01 Nov. 2015, Peer-reviewed

  
• Fabrication and characterization of chain-like arrangement of gold nanoparticles using nanotemplates

  Koji Sugano; Ryoji Hiraoka; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 01 Nov. 2015, Peer-reviewed

  
• Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy

  Zhipeng Ma; Young-Joo Kim; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Do-Nyun Kim; Osamu Tabata

  Micro & Nano Letters, Oct. 2015, Peer-reviewed

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• High-speed pulsed mixing in a short distance with high-frequency switching of pumping from three inlets

  K. Sugano; A. Nakata; T. Tsuchiya; O. Tabata

  JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Aug. 2015, Peer-reviewed

  
• ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis

  Yoshikazu Hirai; Daisuke Takagi; Satoshi Anai; Yoshitomo Chihara; Toshiyuki Tsuchiya; Kiyohide Fujimoto; Yoshihiko Hirao; Osamu Tabata

  SENSORS AND ACTUATORS B-CHEMICAL, Jul. 2015, Peer-reviewed

  
• High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure

  Akio Uesugi; Takahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2015, Peer-reviewed

  
• High-temperature tensile testing machine for investigation of brittle-ductile transition behaviour of single crystal silicon microstructure

  Akio Uesugi; akahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  Japanese Journal of Applied Physics, Jan. 2015, Peer-reviewed

  
• Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding and single crystal silicon beams

  Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky

  Microsystem Technologies, Jan. 2015, Peer-reviewed

  
• Surface roughness modification of free standing single crystal silicon microstructures using KrF excimer laser treatment for mechanical performance improvement

  Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky

  Journal of Surface Engineered Materials and Advanced Technology, 2015, Peer-reviewed

  
• ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価

  菅野公二; 平岡亮二; 土屋智由; 田畑修

  電気学会論文誌（センサ・マイクロマシン部門誌）, 2015, Peer-reviewed

  
• Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment

  Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2014, Peer-reviewed

  
• Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers

  Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Mar. 2014, Peer-reviewed

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• Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators

  Praveen Singh Thakur; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Mar. 2014, Peer-reviewed

  
• Study on vibration-coupling control of out-of-plane coupled resonator for anti-shock tuning fork gyroscopes

  Praveen Singh Thakur; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2014, Peer-reviewed

  
• Effects of etching surface roughness on the fatigue characteristics of single-crystal silicon

  Tsuyoshi Ikehara; Toshiyuki Tsuchiya

  IEEJ Transactions on Sensors and Micromachines, 2014, Peer-reviewed

  
• On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet

  K. Tsujimoto; K. Ban; Y. Hirai; K. Sugano; T. Tsuchiya; N. Mizutani; O. Tabata

  Journal of Micromechanics and Microengineering, Nov. 2013, Peer-reviewed

  
• Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer

  Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  Electronics and Communications in Japan, May 2013, Peer-reviewed

  
• Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity

  Tomoki Tanemura; Shuichi Yamashita; Hiroyuki Wado; Yukihiro Takeuchi; Toshiyuki Tsuchiya; Osamu Tabata

  JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Mar. 2013, Peer-reviewed

  
• (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響

  上杉 晃生; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  日本機械学会論文集Ａ編, Jan. 2013

  
• Molecular level study of negative thick-film resist in MEMS by employing a coarse-grained molecular dynamics simulation

  Yoshikazu Hirai; Hiromasa Yagyu; Yoshihide Makino; Akio Uesugi; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2013, Peer-reviewed

  
• Effect of surface morphology and crystal orientations on tensile fracture property of (110) single crystal silicon

  Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 2013, Peer-reviewed

  
• Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration

  Tomoki Tanemura; Shuichi Yamashita; Hiroyuki Wado; Yukihiro Takeuchi; Toshiyuki Tsuchiya; Osamu Tabata

  JAPANESE JOURNAL OF APPLIED PHYSICS, Nov. 2012, Peer-reviewed

  
• Fatigue of 1 mu m-scale gold by vibration with reduced resonant frequency

  Takashi Sumigawa; Kenta Matsumoto; Toshiyuki Tsuchiya; Takayuki Kitamura

  MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, Oct. 2012, Peer-reviewed

  
• Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics

  Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  POLYMER, Sep. 2012, Peer-reviewed

  
• Low-Cycle to Ultrahigh-Cycle Fatigue Lifetime Measurement of Single-Crystal-Silicon Specimens Using a Microresonator Test Device

  Tsuyoshi Ikehara; Toshiyuki Tsuchiya

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Aug. 2012, Peer-reviewed

  
• Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes

  Thakur Praveen Singh; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Jun. 2012, Peer-reviewed

  
• Micromachined Tactile Sensor for Soft-Tissue Compliance Detection

  Ahmed M. R. Fath El Bab; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Mohamed E. H. Eltaib; Mohamed M. Sallam

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Jun. 2012, Peer-reviewed

  
• Improved Designs for an Electrothermal In-Plane Microactuator

  Alex Man Ho Kwan; Sichao Song; Xing Lu; Lei Lu; Ying-Khai Teh; Ying-Fei Teh; Eddie Wing Cheung Chong; Yan Gao; William Hau; Fan Zeng; Man Wong; Chunmei Huang; Akira Taniyama; Yoshihide Makino; So Nishino; Toshiyuki Tsuchiya; Osamu Tabata

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Jun. 2012, Peer-reviewed

  
• Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to C-60 Nanowire Testing

  Toshiyuki Tsuchiya; Yasutake Ura; Koji Sugano; Osamu Tabata

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Jun. 2012, Peer-reviewed

  
• Mechanical and electrical clamping of DEP assembled SWCNT using electroless gold deposition

  Tatsuya Kataoka; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed

  
• Out-of-plane bending vibration fracture test of polycrystalline silicon thin-film membrane

  Tomoki Tanemura; Shuichi Yamashita; Hiroyuki Wado; Yukihiro Takeuchi; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed

  
• Tensile test on (110) <110> thin film single crystal silicon with different processing conditions

  Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed

  
• Noise-induced chaos in the electrostatically actuated MEMS resonators

  Wen-Ming Zhang; Osamu Tabata; Toshiyuki Tsuchiya; Guang Meng

  PHYSICS LETTERS A, Jul. 2011, Peer-reviewed

  
• Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer

  Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2011, Peer-reviewed

  
• Fabrication of Gold Nanoparticle Pattern Using Combination of Self-Assembly and Two-Step Transfer

  Koji Sugano; Takashi Ozaki; Toshiyuki Tsuchiya; Osamu Tabata

  SENSORS AND MATERIALS, 2011, Peer-reviewed

  
• Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique

  K.Tsujimoto; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata

  International workshop on micro/nano-engineering, 2011, Peer-reviewed

  
• Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system

  Koji Sugano; Yuki Uchida; Osamu Ichihashi; Hideo Yamada; Toshiyuki Tsuchiya; Osamu Tabata

  MICROFLUIDICS AND NANOFLUIDICS, Dec. 2010, Peer-reviewed

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• Embedded Microstructure Fabrication Using Developer-Permeability of Semi-Cross-Linked Negative Resist

  Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Oct. 2010, Peer-reviewed

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• A three-dimensional microstructuring technique exploiting the positive photoresist property

  Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Jun. 2010, Peer-reviewed

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• Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment

  T. Tsuchiya; Y. Yamaji; K. Sugano; O. Tabata

  EXPERIMENTAL MECHANICS, Apr. 2010, Peer-reviewed

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• Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens

  T. Ikehara; T. Tsuchiya

  MICRO & NANO LETTERS, Feb. 2010, Peer-reviewed

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• Mixing speed-and temperature-controlled microreactor for gold nanoparticle synthesis

  Koji Sugano; Yuki Uchida; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2010, Peer-reviewed

  
• Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection

  Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2010, Peer-reviewed

  
• Development of Amplitude-Controlled Parallel-Fatigue-Test System for Micro-Electromechanical Resonators

  Tsuyoshi Ikehara; Toshiyuki Tsuchiya

  SENSORS AND MATERIALS, 2010, Peer-reviewed

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• Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating

  Toshiyuki Tsuchiya; Tetsuro Ikeda; Akifumi Tsunematsu; Koji Sugano; Osamu Tabata

  SENSORS AND MATERIALS, 2010, Peer-reviewed

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• A multiple Degrees of Freedom Equivalent Circuit for a Comb-Drive Actuator

  Yuuki Nishimori; Hideta Ooiso; Shunsuke Mochizuki; Nobuyo Fujiwara; Toshiyuki Tsuchiya; Gen Hashiguchi

  JAPANESE JOURNAL OF APPLIED PHYSICS, Dec. 2009, Peer-reviewed

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• Development and Experimental Validation of Automatic Conversion Procedure from Mechanical to Electrical Connection for MEMS Equivalent Circuit

  Nobuyo Fujiwara; Kazuo Asami; Yasuroh Iriye; Tomoyuki Koike; Toshiyuki Tsuchiya; Gen Hashiguchi

  IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, May 2009, Peer-reviewed

  
• Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes

  Toshiyuki Tsuchiya; Hiroyuki Hamaguchi; Koji Sugano; Osamu Tabata

  IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, May 2009, Peer-reviewed

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• Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films

  Tsuyoshi Ikehara; Toshiyuki Tsuchiya

  JOURNAL OF APPLIED PHYSICS, May 2009, Peer-reviewed

  
• Free-standing C(60) nanowire fabricated using XeF(2) sacrificial dry etching

  Toshiyuki Tsuchiya; Yasutake Ura; Tomoya Jomori; Koji Sugano; Osamu Tabata

  JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, Jan. 2009, Peer-reviewed

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• Free-standing (C60) nanowire fabricated using XeF2 sacrificial dry etching

  Toshiyuki Tsuchiya; Yasutake Ura; Tomoya Jomori; Koji Sugano; Osamu Tabata

  Journal of Micro/Nanolithography, MEMS, and MOEMS, 2009, Peer-reviewed

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• Micro machined tactile sensor for soft tissue compliance detection

  A. M. R. Fath El Bab; K. Sugano; T. Tsuchiya; O. Tabata; M. E. H. Eltaib; M. M. Sallam

  PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, Peer-reviewed

  
• MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity

  Yoshikazu Hirai; Hideaki Yoshimune; Kazuya Tsujimoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 2009, Peer-reviewed

  
• 単結晶シリコン引張試験における表面酸化の影響評価

  土屋 智由; 宮本 憲治; 菅野 公二; 田畑 修

  日本機械学会2008年度年次大会, Aug. 2008

  
• High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens

  T. Ikehara; T. Tsuchiya

  JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Jul. 2008, Peer-reviewed

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• Micro/nanoimprinting of glass under high temperature using a CVD diamond mold

  M. Komori; H. Uchiyama; H. Takebe; T. Kusuura; K. Kobayashi; H. Kuwahara; T. Tsuchiya

  JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Jun. 2008, Peer-reviewed

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• Design of a soft X-ray source with periodic microstructure using resonance transition radiation for tabletop synchrotron

  Koji Sugano; Weiyu Sun; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, May 2008, Peer-reviewed

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• Mechanical calibration of MEMS springs with sub-micro-Newton force resolution

  Kenji Miyamoto; Tomoya Jornori; Koji Sugano; Osamu Tabata; Toshiyuki Tsuchiya

  SENSORS AND ACTUATORS A-PHYSICAL, May 2008, Peer-reviewed

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• Air damping in a fan-shaped rotational resonator with comb electrodes

  Yuki Uchida; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Tsuyoshi Ikehara

  IEEJ Transactions on Sensors and Micromachines, 2008, Peer-reviewed

  
• Design and Simulation of a Tactile Sensor for Soft-Tissue

  Ahmed M. R. Fath El Bab; Tomohisa Tamura; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Mohamed E. H. Eltaib; Mohamed M. Sallam

  電気学会センサ・マイクロマシン部門誌, 2008, Peer-reviewed

  
• DNAを利用したAuナノ微粒子のシーケンシャルセルフアセンブル

  日下部 達哉; 種村 友貴; 樋口 雄一; 菅野 公二; 土屋 智由; 田畑 修

  粉体工学会, 2008, Peer-reviewed

  
• 超小型触覚ディスプレイ用垂直駆動SMA 薄膜アクチュエータの設計

  吉川 弥; 篠部 晃生; 菅野 公二; 土屋 智由; 石田 章; 田畑 修

  電気学会センサ・マイクロマシン準部門誌, 2008

  
• Design construction of beam structured vertical drive SMA thin film actuator for small tactile display

  Wataru Yoshikawa; Akio Sasabe; Kouji Sugano; Toshiyuki Tsuchiya; Akira Ishida; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2008, Peer-reviewed

  
• Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer

  Takashi Ozaki; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Jun. 2007

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• High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system

  Tsuyoshi Ikehara; Toshiyuki Tsuchiya

  IEICE ELECTRONICS EXPRESS, May 2007

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• Moving mask UV lithography for three-dimensional structuring

  Yoshikazu Hirai; Yoshiteru Inamoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Feb. 2007

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• Sequential Stacking Self-Assembly using Interfacial Tension of Two Different Droplets

  Higuchi Yuichi; Sugano Koji; Tsuchiya Toshiyuki; Tabata Osamu

  The Journal of the Institute of Electrical Engineers of Japan, 2007, Peer-reviewed

  
• Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films

  T Tsuchiya; M Hirata; N Chiba; R Udo; Y Yoshitomi; T Ando; K Sato; K Takashima; Y Higo; Y Saotome; H Ogawa; K Ozaki

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Oct. 2005

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• Tensile testing of silicon thin films

  T Tsuchiya

  FATIGUE & FRACTURE OF ENGINEERING MATERIALS & STRUCTURES, Aug. 2005

  
• Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films

  T Tsuchiya; M Hirata; N Chiba

  THIN SOLID FILMS, Jul. 2005

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• A z-axis differential capacitive SOI accelerometer with vertical comb electrodes

  T Tsuchiya; H Funabashi

  SENSORS AND ACTUATORS A-PHYSICAL, Oct. 2004

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• CVD法と熱処理で作製した多結晶Si膜の粒界物性評価

  中野 由崇; 土屋 智由; 坂田 二郎

  電気学会論文誌E（センサマイクロマシン準部門誌）, 2004, Peer-reviewed

  
• Characteristics of Grain Boundaries in Polycrystalline Si Films fabricated by Chemical Vapor Deposition and Subsequent Annealing

  Yoshitaka Nakano; Toshiyuki Tsuchiya; Jiro Sakata

  IEEJ Transactions on Sensors and Micromachines, 2004, Peer-reviewed

  
• 薄膜引張試験による多結晶シリコン膜のヤング率測定

  土屋 智由; 船橋 博文

  The Transaction E of The Institute of Electrical Engineering of Japan (電気学会E部門論文誌), 2003

  
• Mechanical Properties Evaluation for MEMS/NEMS

  TSUCHIYA Toshiyuki

  Bulletin of the Japan Institute of Metals, 20 Oct. 2002

  
• Formation of porous grain boundaries in polycrystalline silicon thin films

  Y Kageyama; Y Murase; T Tsuchiya; H Funabashi; J Sakata

  JOURNAL OF APPLIED PHYSICS, Jun. 2002, Peer-reviewed

  
• Tensile testing system for sub-micrometer thick films

  T Tsuchiya; M Shikida; K Sato

  SENSORS AND ACTUATORS A-PHYSICAL, Apr. 2002, Peer-reviewed

  
• Polysilicon vibrating gyroscope vacuum-encapsulated on-chip micro chamber

  Toshiyuki Tsuchiya; Yasuyuki Kageyama; Hirofumi Funabashi; Jiro Sakata

  Sensors and Actuators, A: Physical, 01 May 2001, Peer-reviewed

  
• Vibrating gyroscope consisting of three layers of polysilicon thin films

  Toshiyuki Tsuchiya; Yasuyuki Kageyama; Hirofumi Funabashi; Jiro Sakata

  Sensors and Actuators, A: Physical, 15 May 2000, Peer-reviewed

  
• Tensile testing of insulating thin films; humidity effect on tensile strength of SiO2 films

  T Tsuchiya; A Inoue; J Sakata

  SENSORS AND ACTUATORS A-PHYSICAL, May 2000, Peer-reviewed

  
• Tensile Testing of Insulating Thin Films using Electrostatic Force Grip

  Toshiyuki Tsuchiya; Jiro Sakata

  IEEJ Transactions on Sensors and Micromachines, 1999, Peer-reviewed

  
• Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films

  T Tsuchiya; O Tabata; J Sakata; Y Taga

  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Mar. 1998, Peer-reviewed

  
• Tensile Testing of Polycrystalline Silicon Thin Films Using Electrostatic Force Grip

  Toshiyuki Tsuchiya; Osamu Tabata; Jiro Sakata; Yasunori Taga

  IEEJ Transactions on Sensors and Micromachines, 1996, Peer-reviewed

  
• Poisson's Ratio Evaluation of LPCVD Silicon Nitride Film

  Osamu Tabata; Toshiyuki Tsuchiya

  The Transaction E of The Institute of Electrical Engineering of Japan, 1996, Peer-reviewed

  

Misc.

• Fluorescence spectrum measurement of NV center in a microfluidic device

  舌雅也; 渡辺嵩都; 四竈泰一; 亀井謙一郎; 土屋智由; 田畑修; 平井義和

  応用物理学会秋季学術講演会講演予稿集(CD-ROM), 2022

  
• マイクロ・ナノ工学

  佐藤 一雄; 庄子 習一; 橋口 原; 鈴木 雄二; 三木 則尚; 土屋 智由; 鷲津 正夫

  日本機械学會誌 = Journal of the Japan Society of Mechanical Engineers, 05 Aug. 2008

  
• 静電チャックを用いた薄膜引張り試験装置

  土屋 智由

  機械設計, Jun. 2002

  
• Round Robin Test for Evaluation of Tensile Strength of Single Crystal Silicon

  TSUCHIYA Toshiyuki; SAKATA Jiro; SHIKIDA Mitsuhiro; SATO Kazuo; OGAWA Hirofumi

  電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 13 Sep. 2000

  
• 薄膜の引張強度評価 (特集 マイクロセンサ用薄膜の機械的物性評価と解析)

  土屋 智由

  豊田中央研究所R&Dレビュ-, Mar. 1999

  
• Tensile Testing of Insulating Thin Films Using Electrostatic Force Grip

  TSUCHIYA Toshiyuki; SAKATA Jiro

  電気学会研究会資料. SMP, センサ材料・プロセス技術研究会, 18 Nov. 1997

  
• Tensile Testing of Insulating Thin Films ; Humidity Effect on Tensile Strength of SiO_2 Films

  TSUCHIYA Toshiyuki; INOUE Atsuko; SAKATA Jiro

  電気学会研究会資料. MM, マイクロマシン研究会, 07 Sep. 1999

  
• Fatigue Life Prediction for Single Crystal Silicon Resonator

  TSUCHIYA Toshiyuki; INOUE Atsuko; SAKATA Jiro; HASHIMOTO Masato; YOKOYAMA Atsuko; SUGIMOTO Masahiro

  電気学会研究会資料. MM, マイクロマシン研究会, 05 Nov. 1998

  
• Mechanical Reliability in MEMS

  TSUCHIYA Toshiyuki

  The Journal of reliability engineering association of Japan, 01 Apr. 2005

  
• 多結晶Si膜の粒界キャラクタリゼーション (特集 マイクロセンサ用薄膜の機械的物性評価と解析)

  中野 由崇; 井上 敦子; 土屋 智由

  豊田中央研究所R&Dレビュ-, Mar. 1999

  
• Development of Low X-ray Scattering Chamber for Recording Single-Molecule Conformational Changes of Proteins with the Diffracted X-ray Tracking Method

  清水 啓史; 田渕 友樹; 田原 樹生; 岩本 真幸; 平井 義和; 土屋 智由; 田畑 修

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017

  
• シリコンの機械的信頼性

  土屋 智由

  機械の研究, Mar. 2015

  
• 京都大学大学院 工学研究科 マイクロエンジニアリング専攻 ナノ・マイクロシステム工学研究室

  田畑 修; 土屋 智由

  電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Jul. 2006

  
• Molecular Detection by Surface-Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimers Formed by Sacrificial DNA Origami Technique

  山下直輝; PARK Seongsu; 川合健太郎; 平井義和; 土屋智由; 田畑修

  センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 2019

  
• 心臓拍動を模倣した圧力刺激印加による肝オルガノイド成熟化を目指すマイクロ流体デバイス

  三浦大知; 平井義和; 亀井謙一郎; 土屋智由

  化学とマイクロ・ナノシステム学会研究会講演要旨集, 2021

  
• OS1418-467 Dynamic stress measurement of single crystal silicon microstructures using micro Raman spectroscopy

  TSUCHIYA Toshiyuki; KOGITA Yusuke; HIRAI Yoshikazu; TABATA Osamu

  M&M材料力学カンファレンス, 21 Nov. 2015

  
• 731 Sensitivity matrix measurement of MEMS three-axis accelerometer using single-axis shaker

  TSUCHIYA Toshiyuki; NAKANO Atsushi; HIRAI Yoshikazu; TABATA Osamu; UMEDA Akira

  Dynamics and Design Conference : D & D, 25 Aug. 2015

  
• 2122 Self-Assembly Process using Electrostatic Adhesion Energy By Contact Electrification and its Modeling

  Sato Ryo; TANEMURA Tomoki; HIGUCHI Yuichi; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  Conference on Information, Intelligence and Precision Equipment : IIP, 17 Mar. 2008

  
• 2121 Manipulation system for nano / micro components integration via transportation and self-assembly

  HIGUCHI Yuichi; KUSAKABE Tatsuya; TANEMURA Tomoki; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  Conference on Information, Intelligence and Precision Equipment : IIP, 17 Mar. 2008

  
• 29pm1-F-2 Integration of Silicon Nanowire to SOI-MEMS and Diameter Control Using Thermal Oxidation

  HEMMI Tetsuya; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  マイクロ・ナノ工学シンポジウム, 21 Oct. 2015

  
• 29pm3-PN-49 Tensile Fracture Behaviors of (110) Silicon Microstructures at High Temperature

  UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  マイクロ・ナノ工学シンポジウム, 21 Oct. 2015

  
• J2210305 Crystal orientation dependence of fracture probability in single crystal silicon

  IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki

  Mechanical Engineering Congress, Japan, 13 Sep. 2015

  
• J2210406 Time-resolved micro-Raman stress measurement using electrostatic MEMS optical chopper

  TSUCHIYA Toshiyuki; KOGITA Yusuke; HIRAI Yoshikazu; TABATA Osamu

  Mechanical Engineering Congress, Japan, 13 Sep. 2015

  
• J2210404 Tensile-Mode Fatigue Testing of Silicon Micro Structure with Integrated Strain Gauge

  UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  Mechanical Engineering Congress, Japan, 13 Sep. 2015

  
• 1119 Tensile Testing of Carbon Nano Materials using Electrostatic MEMS Device

  JOMORI Tomoya; MIYAMOTO Kenji; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  Conference on Information, Intelligence and Precision Equipment : IIP, 19 Mar. 2007

  
• Sacrificial DNA Origami Technique and its Application to Gold Nanoparticle Dimers with Nanogap

  山下 直輝; 朴 晟洙; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017

  
• Rapid molecular sensing based on on-chip size-separation process of DNA origami

  Park Seongsu; Ma Zhipeng; Yamashita Naoki; Hirai Yoshikazu; Tsuchiya Toshiyuki; Tabata Osamu

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017

  
• Effect of Emitter-Tip Boundary Conditions on Ion Beam Profiles for Numerical Analysis of Electrospray Thrusters

  江本 一磨; 土屋 智由; 鷹尾 祥典

  年会講演会講演集, 13 Apr. 2017

  
• Development of Cs Vapor Cell Microfabricated with Porous Alumina Dispenser for Chip-Scale Atomic Clock

  寺島 健太; 平井 義和; 土屋 智由; 田畑 修

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 02 Oct. 2016

  
• A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY

  松井 祐樹; 平井 義和; 土屋 智由; 田畑 修

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015

  
• Development of a Body-on-a-Chip Using 3D Microstructuring Techniques

  加藤 義基; 平井 義和; 亀井 謙一郎; 土屋 智由; 田畑 修

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015

  
• Crystal-orientation dependent fatigue fracture and stress analysis in microscale silicon

  池原 毅; 土屋 智由

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015

  
• Analysis of TEER measurement error depending on electrode patterns using finite element analysis

  宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  電気学会全国大会講演論文集(CD-ROM), 2020

  
• 非アルコール性脂肪性肝疾患を再現する肝臓-小腸・オン・チップ

  亀井謙一郎; 楊建東; 飯田慶; 寺田志穂; 土屋智由; 田畑修; 平井義和

  化学とマイクロ・ナノシステム学会研究会講演要旨集, 2020

  
• Design Strategy of Electrode Patterns Based on Finite Element Analysis in Microfluidic Device for Trans-Epithelial Electrical Resistance (TEER) Measurement

  宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  電気学会論文誌 E, 2020

  
• Design of microelectrode array for transepithelial electrical resistance measurement based on electric current density analysis

  宮崎貴史; 平井義和; 亀井謙一郎; 田畑修; 田畑修; 土屋智由

  マイクロエレクトロニクスシンポジウム論文集, 2020

  
• Improved Sensitivity of Ionic Liquid-Based Pressure Sensor Embedded in PDMS Microfluidic Devices

  辻 勇亮; 平井 義和; 亀井 謙一郎; 土屋 智由; 田畑 修

  マイクロエレクトロニクスシンポジウム論文集, 12 Sep. 2019

  
• Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion

  Ikkei Yamauchi; Tomoki Tabuchi; Yoshikazu Hirai; Masayuki Iwamoto; Toshiyuki Tsuchiya; Hirofumi Shimizu; Osamu Tabata

  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 01 Jun. 2019

  
• Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation

  Masaki Shimofuri; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 01 Jun. 2019

  
• Research and Development of Ultra-Small High-Thrust-Density Electrospray Thrusters

  Yoshinori TAKAO; Toshiyuki TSUCHIYA; Masayoshi NAGAO; Katsuhisa MURAKAMI

  Aeronautical and Space Sciences Japan, 05 Jan. 2019, Peer-reviewed

  
• 有限要素解析を用いた経上皮電気抵抗測定マイクロ流体デバイス内電極形状の設計

  宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  電気学会全国大会講演論文集(CD-ROM), 2019

  
• PDMS製マイクロ流体デバイスへ実装可能な高感度イオン液体型圧力センサ

  辻勇亮; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  マイクロエレクトロニクスシンポジウム論文集, 2019

  
• A microfluidic device to investigate the effect of shear stress on metastasis

  植田啓太; 萩原健; 平井義和; 近藤純平; 井上正宏; 土屋智由; 亀井謙一郎; 田畑修

  日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2019

  
• Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells

  Yoshikazu Hirai; Katsuo Nokamura; Yuichi Kimoto; Toshiyuki Tsuchiya; Osamu Tabata

  IFCS 2018 - IEEE International Frequency Control Symposium, 31 Dec. 2018

  
• Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon

  Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018, 01 Nov. 2018

  
• Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope

  Yunyi Shu; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 11 May 2018

  
• Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography

  Yoshikazu Hirai; Yusuke Tsuji; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 24 Apr. 2018

  
• Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array

  Akiko Uno; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 24 Apr. 2018

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• Fabrication of microfluidic device with integrated Ag/AgCl electrode for trans-epithelial electrical resistance measurement

  宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  電気学会研究会資料, 2018

  
• 3次元リソグラフィを応用したイオン液体型高感度圧力センサの作製と特性評価

  辻勇亮; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2018

  
• Microfabrication of Cs-filled MEMS cell using sequential plasma activated bonding

  Kenta Terashima; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings, 27 Oct. 2017

  
• Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique

  Naoki Yamashita; Zhipeng Ma; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata; Kentaro Kawai

  2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, 25 Aug. 2017

  
• MEMS based fabrication of conformal electrode pairs for thermotunneling cooling

  Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai, 31 Jul. 2017

  
• Thermomechanical noise of arrayed capacitive accelerometers with 300-NM-gap sensing electrodes

  Toshiyuki Tsuchiya; Yuki Matsui; Yoshikazu Hirai; Osamu Tabata

  TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 26 Jul. 2017

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• Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks

  Yoshikazu Hirai; Kenta Terashima; Katsuo Nakamura; Toshiyuki Tsuchiya; Osamu Tabata

  TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 26 Jul. 2017

  
• Revealing the Influential Factor on Dimerizing of Triangular DNA Origami by Linker

  稲垣 達也; 朴 晟洙; 山下 直輝; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修

  電気学会研究会資料. MSS, 29 Jun. 2017

  
• Simulation study of SU-8 structures realized by single-step projection photolithography

  K. Nakamura; Y. Hirai; T. Tsuchiya; O. Tabata; F. Larramendy; O. Paul

  Proceedings of IEEE Sensors, 05 Jan. 2017

  
• 心筋細胞外電位測定のためのPDMS埋め込み型電極アレイ

  大牧達矢; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  電気学会全国大会講演論文集(CD-ROM), 2017

  
• 心筋細胞外電位計測を目指したPDMS埋め込み型電極アレイの作製プロセス

  大牧達也; 平井義和; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  化学とマイクロ・ナノシステム学会研究会講演要旨集, 2017

  
• 微小圧力計測を目的としたPDMS製イオン液体型圧力センサ

  辻勇亮; 中野優; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  化学とマイクロ・ナノシステム学会研究会講演要旨集, 2017

  
• 有限要素解析を用いたイオン液体型圧力センサの感度特性評価

  辻勇亮; 中野優; 平井義和; 亀井謙一郎; 土屋智由; 田畑修

  日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2017

  
• 抗がん剤の副作用を再現する生体外ヒトモデルBody on a Chip

  亀井謙一郎; 平井義和; 加藤義基; 土屋智由; 田畑修

  バイオエンジニアリング講演会講演論文集(CD-ROM), 2017

  
• TENSILE PROPERITIES OF SINGLE-CRYSTAL-SILICON FULLY COATED WITH SUBMICROMETER-THICK PECVD DLC

  Wenlei Zhang; Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017

  
• MEMS deformable mirror actuated by electrostatic piston array

  Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  International Conference on Optical MEMS and Nanophotonics, 13 Sep. 2016

  
• Numerical Investigation of Ion Beam Extraction Mechanism for Ionic Liquid Electrospray Thruster

  江本 一磨; 土屋 智由; 鷹尾 祥典

  宇宙科学技術連合講演会講演集, 06 Sep. 2016

  
• Dependence of Beam Extraction Characteristics on Electrode Structures for Ionic Liquid Electrospray Thruster

  中川 洋人; 土屋 智由; 鷹尾 祥典

  宇宙科学技術連合講演会講演集, 06 Sep. 2016

  
• Characteristics of Ion Beam Extraction for Ionic Liquid Electrospray Thruster

  中川 洋人; 土屋 智由; 鷹尾 祥典

  年会講演会講演集, 14 Apr. 2016

  
• 抗がん剤副作用を再現する生体外モデルBody on a Chipの開発

  亀井謙一郎; 平井義和; 平井義和; 加藤義基; 土屋智由; 田畑修

  組織培養研究, 2016

  
• Photoresist Micro-Chamber for the Diffracted X-ray Tracking Method Recording Single-Molecule Conformational Changes

  Kio Tahara; Yoshikazu Hirai; Hirohumi Shimizu; Toshiyuki Tsuchiya; Osamu Tabata

  Procedia Engineering, 2016

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• Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device

  Toshiyuki Tsuchiya; Tetsuya Hemmi; Jun Ya Suzuki; Yoshikazu Hirai; Osamu Tabata

  Procedia Structural Integrity, 01 Jan. 2016

  
• Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °c of (110) Single Crystal Silicon Microstructures

  Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  Procedia Structural Integrity, 01 Jan. 2016

  
• MEMS3軸加速度センサのマトリックス感度並列計測

  土屋智由; 中野篤; 平井義和; 田畑修; 梅田章

  第62回応用物理学会春季学術講演会, Mar. 2015

  
• DNAオリガミ架橋構造のシリコン基板への選択的形成

  朴晟洙; 馬志鵬; 平井義和; 土屋智由; 田畑修; 森裕都

  平成27年電気学会全国大会, Mar. 2015

  
• 抗がん剤副作用を生体外で再現するBody on a Chipの開発

  亀井謙一郎; 平井義和; 平井義和; 加藤義基; 土屋智由; 田畑修

  化学とマイクロ・ナノシステム学会研究会講演要旨集, 2015

  
• Multiple patterning with process optimization method for maskless DMD-based grayscale lithography

  X. Ma; Y. Kato; F. Kempen; Y. Hirai; T. Tsuchiya; F. Keulen; O. Tabata

  Procedia Engineering, 2015

  Access this misc :

  
• Optimization methods for 3D lithography process utilizing DMD-based maskless grayscale photolithography system

  Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris van Kempen; Fred van Keulen; Toshiyuki Tsuchiya; Osamu Tabata

  OPTICAL MICROLITHOGRAPHY XXVIII, 2015

  
• ULTRASENSITIVE SURFACE-ENHANCED RAMAN SPECTROSCOPY USING DIRECTIONALLY ARRAYED GOLD NANOPARTICLE DIMERS

  Koji Sugano; Daimon Matsui; Toshiyuki Tsuchiya; Osamu Tabata

  2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015

  
• FET PROPERTIES OF SINGLE-WALLED CARBON NANOTUBES INDIVIDUALLY ASSEMBLED UTILIZING SINGLE STRAND DNA

  Kosuke Hokazono; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015

  
• A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY UTILIZING SIZE EFFECT

  Y. Matsui; Y. Hirai; T. Tsuchiya; O. Tabata

  2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015

  
• SIZE EFFECT ON BRITTLE-DUCTILE TRANSITION TEMPERATURE OF SILICON BY MEANS OF TENSILE TESTING

  A. Uesugi; Y. Hirai; T. Tsuchiya; O. Tabata

  2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015

  
• SELECTIVE ASSEMBLY OF DNA NANOSTRUCTURE BRIDGING ONTO A TRENCHED SILICON SUBSTRATE

  Y. Mori; Z. Ma; S. Park; Y. Hirai; T. Tsuchiya; O. Tabata

  2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015, Peer-reviewed

  
• MICROFLUIDIC DEVICE TO INTERCONNECT MULTIPLE ORGANS VIA FLUIDIC CIRCULATION: TOWARDS BODY-ON-A-CHIP

  Y. Kato; Y. Hirai; K. Kamei; T. Tsuchiya; O. Tabata

  2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015

  
• Direct characterization of radial modulus of DNA nanotube by AFM nanoindentation

  Zhipeng Ma; Young-Joo Kim; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Do-Nyum Kim; Osamu Tabata

  2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2015

  
• 灌流システムを搭載した副作用検査デバイス 〜ヒトES/iPS由来のBody on a chipを目指して〜

  加藤義基; 平井 義和; 亀井謙一郎; 土屋智由; 田畑修

  細胞アッセイ技術の現状と将来, Jan. 2015

  
• Highly-sensitive surface enhanced raman spectroscopy with directionally-arrayed gold nanoparticle dimers

  K. Sugano; D. Matsui; Toshiyuki Tsuchiya; Osamu Tabata

  The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), Nov. 2014

  
• MEMS慣性力センサの信頼性

  土屋 智由

  第6回「マイクロ・ナノ工学シンポジウム」, Oct. 2014

  
• マイクロ構造上の面粗さによる強度低下の簡単な見積もり方法

  土屋 智由

  第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014

  
• An Optimization Tool for 3D Lithography Utilizing DMD-based Maskless Exposure System

  Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris van Kempen; Fred van Keulen; Toshiyuki Tsuchiya; Osamu Tabata

  第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014

  
• 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光

  菅野 公二; 松井 大門; 土屋 智由; 田畑 修

  第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014

  
• 単結晶シリコンマイクロ構造体の引張応力下における脆性延性遷移

  上杉晃生; 平井義和; 土屋智由; 田畑修

  第6回「マイクロ・ナノ工学シンポジウム」, Oct. 2014

  
• 一本鎖DNAにより孤立アセンブルした単層カーボンナノチューブの電気特性

  外薗洸佑; 鈴木淳也; 平井義和; 土屋智由; 田畑修

  第6回「集積化 MEMS シンポジウム」, Oct. 2014

  
• Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature

  A. Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  The 27th International Microprocesses and Nanotechnology Conference, Fukuoka, Japan (4-7 October, 2014), Oct. 2014

  
• Development of a High Efficient Proton Conductor Media using Extended-Nano Space under the outer Electric Field

  Y. Pihosh; N. Kabeta; K. Mawatari; Y. Kazoe; K. Kitamura; Osamu Tabata; Toshiyuki Tsuchiya; T. Kitamori

  The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), Oct. 2014

  
• Revealing the radial elastic modulus of multi-layered DNA origami by AFM nanoindentation

  Zhipeng Ma; Seongsu Park; Yuto Mori; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  第58回日本学術会議材料工学連合講演会, 日本学術会議材料工学委員会,他関連34学協会, Oct. 2014

  
• J2240303 High-Temperature Tensile Testing of Single Crystal Silicon Micro Structure in Vacuum Using Concentrated Infrared Light Heating

  UESUGI Akio; YASUTOMI Takahiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  Mechanical Engineering Congress, Japan, 07 Sep. 2014

  
• 多段ICP-RIEプロセスにより一括作製したシリコンナノワイヤのMEMS引張試験

  土屋智由; 鈴木淳也; 平井義和; 田畑修

  日本機械学会2014年度年次大会,, Sep. 2014

  
• 時間分解顕微ラマン分光のための両側静電駆動MEMS光チョッパ

  小北雄亮; 谷山彰; 平井義和; 土屋智由; 田畑修

  日本機械学会2014年度年次大会, Sep. 2014

  
• 赤外集光加熱を用いた単結晶シリコンマイクロ構造体の真空中高温引張試験

  上杉晃生; 安富貴浩; 平井義和; 土屋智由; 田畑修

  日本機械学会2014年度年次大会, Sep. 2014

  
• シリコン微小構造の表面粗さによる応力効果の推定

  池原 毅; 土屋 智由

  日本機械学会2014年度年次大会, Sep. 2014

  
• MEMS3軸加速度センサの並列校正手法の検討

  土屋智由; 中野篤; 平井義和; 田畑修

  Dynamics and Design Conference 2014(D&D2014), 日本機械学会, Aug. 2014

  
• 単結晶シリコンの高温機械的特性評価に向けた赤外光集光加熱による真空中高温引張試験

  上杉晃生; 平井義和; 土屋智由; 田畑修

  日本実験力学会2014年度年次講演会, Aug. 2014

  
• エキシマレーザ照射による単結晶シリコンマイクロ構造の表面改質おび引張強度向上

  土屋智由; Mohamed E. Mitwally; 平井義和; 田畑修; Sherif Sedky

  日本機械学会M&M2014材料力学カンファレンス,, Jul. 2014

  
• Towards batch assembly and integration of single-walled carbon nanotubes to micro-electromechanical devices

  Toshiyuki Tsuchiya

  2014 CMOS Emerging Technologies Research, Grenoble, Jul. 2014

  
• Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment

  Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2014

  
• An optimization approach for 3D photolithography utilizing DMD maskless exposure system

  Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris Kempen; Fred Keulen; Toshiyuki Tsuchiya; Osamu Tabata

  The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Jun. 2014

  
• Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C

  Akio Uesugi; Takahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Jun. 2014

  
• 5-アミノレブリン酸による蛍光検出を使った膀胱癌細胞分別マイクロ流体システム

  平井義和; 高木大介; 穴井智; 千原良友; 土屋智由; 藤本清秀; 平尾佳彦; 田畑修

  平成26年度電気学会センサ・マイクロマシン部門総合研究会(バイオ・マイクロシステム研究会), 電気学会, May 2014

  
• 一方向に配列した金ナノ粒子二量体構造の表面増強ラマン分光特性評価

  菅野公二; 松井大門; 土屋智由; 田畑修

  平成26年度電気学会センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会), 電気学会, May 2014

  
• 蛍光検知とマイクロ流路を用いた光力学尿細胞診

  高木大介; 平井義和; 穴井智; 千原良友; 土屋智由; 藤本清秀; 平尾佳彦; 田畑修

  第23回泌尿器科分子・細胞研究会, 泌尿器科分子・細胞研究会, Mar. 2014

  
• Photoresist-Based Microfluidic Cell Sorter for Photodynamic Urine Diagnosis

  Yoshikazu Hirai; Daisuke Takagi; Satoshi Anai; Yoshitomo Chihara; Toshiyuki Tsuchiya; Kiyohide Fujimoto; Yoshihiko Hirao; Osamu Tabata

  28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014

  
• Tensile Testing with Concentrated Infrared Light Heating in Vacuum for Single Crystal Silicon Mechanical Characterization at High Temperature

  上杉 晃生; 平井 義和; 土屋 智由; 田畑 修

  日本実験力学会講演論文集, Jan. 2014

  
• DOUBLE-SIDE-DRIVE ELECTROSTATIC OPTICAL CHOPPER FOR TIME-RESOLVED RAMAN SPECTROSCOPY

  Yusuke Kogita; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya

  2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014

  
• LARGE-DISPLACEMENT ELECTROSTATIC DEFORMABLE MIRROR USING MOVABLE BOTTOM ELECTRODES

  Toshiyuki Tsuchiya; Vijay Kumar Singh; Yoshikazu Hirai; Osamu Tabata

  2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014

  
• 蛍光検出とマイクロ流路を用いた尿中癌細胞分別システム

  高木大介; 平井義和; 穴井智; 千原良友; 藤本清秀; 土屋智由; 平尾佳彦; 田畑修

  化学とマイクロ・ナノシステム学会第28回研究会, 化学とマイクロ・ナノシステム学会, Dec. 2013

  
• 原子磁気センサのための新規なオンチップアルカリ金属蒸気セルの作製手法と評価

  辻本和也; 藩和宏; 平井義和; 菅野公二; 土屋智由; 水谷夏彦; 田畑修

  第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, Nov. 2013

  
• 時間分解顕微ラマン分光によるSi振動子の動的応力測定のための両側静電駆動型MEMS光チョッパ

  小北雄亮; 谷山彰; 平井義和; 田畑修; 土屋智由

  第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, Nov. 2013

  
• 粗視化モデルを用いたMEMS化学増幅型ネガレジストの分子構造依存性解析

  成瀬圭介; 柳生裕聖; 平井義和; 土屋智由; 田畑修

  第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, Nov. 2013

  
• 多結晶シリコン薄膜の面外共振振動による疲労破壊に及ぼす温度・湿度の影響評価

  種村友貴; 山下秀一; 和戸弘幸; 竹内幸裕; 田畑修; 土屋智由

  M&M2013材料力学カンファレンス, 日本機械学会, Oct. 2013

  
• (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性

  上杉晃生; 平井義和; 菅野公二; 土屋智由; 田畑修

  日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013

  
• 多段ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工

  鈴木淳也; 平井義和; 菅野公二; 土屋智由; 田畑修

  日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013

  
• 単結晶シリコン振動子の疲労寿命に対する側壁粗さの影響

  池原 毅; 土屋 智由

  日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013

  
• ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル

  外薗洸佑; 鈴木淳也; 平井義和; 菅野公二; 土屋智由; 田畑修

  日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013

  
• Atomic MEMS のための新規なアルカリ金属蒸気セル作製手法

  辻本和也; 平井義和; 菅野公二; 土屋智由; 藩和宏; 水谷夏彦; 田畑修

  2013年電子情報通信学会・ソサイエティ大会, 電子情報通信学会, Sep. 2013

  
• 3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価

  中野篤; 平井義和; 菅野公二; 土屋智由; 田畑修

  Dynamics and Design Conference 2013(D&D2013), 日本機械学会, Aug. 2013

  
• 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性

  谷山彰; 小北雄亮; 平井義和; 田畑修; 土屋智由

  日本実験力学会2013年度年次講演会, Aug. 2013

  
• Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations

  Akio Uesugi; Yoshikazu Hirai; Koji Sugan; Toshiyuki Tsuchiya; Osamu Tabata

  ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), Jul. 2013

  
• Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography

  Y. Kato; Yoshikazu Hirai; F. van Kempen; F. van Keulen; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology, Apr. 2013

  
• 節付きBoschプロセスによるシリコン3層構造の作製

  北村彰男; 平井義和; 菅野公二; 土屋智由; 田畑修

  平成25年電気学会全国大会, Mar. 2013

  
• グレースケールDMD露光用3次元微細加工プロセスシミュレータ

  加藤義基; 平井義和; Floris van Kempen; Fred van Keulen; 菅野公二; 土屋智由; 田畑修

  平成25年電気学会全国大会, Mar. 2013

  
• DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY

  T. Akishiba; N. Tamura; T. Ichii; Y. Hirai; K. Sugano; T. Tsuchiya; H. Sugimura; O. Tabata

  26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 2013

  
• A MEMS Optical Chopper for Dynamic Stress Measurement of Single Crystalline Silicon Resonator Using Time-Resolved Micro Raman Spectroscopy

  小北 雄亮; 谷山 彰; 平井 義和; 土屋 智由; 田畑 修

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Jan. 2013

  
• New fabrication method and evaluation of alkali-metal vapor cells for atomic magnetometer

  辻本 和也; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Jan. 2013

  
• Angular rate sensitivity of SOI capacitive three-axis accelerometer

  中野 篤; 平井 義和; 土屋 智由; 田畑 修

  「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Jan. 2013

  
• Microfluidic Cell Sorter for Photodynamic Urine Diagnosis

  Daisuke Takagi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata; Satoshi Anai; Yoshitomo Chihara; Kiyohide Fujimoto; Yoshihiko Hirao

  2013 IEEE 7TH INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (NANOMED), 2013

  
• Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon

  A. Uesugi; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata

  2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013

  
• SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection

  K. Sugano; H. Katayama; Y. Hirai; T. Tsuchiya; O. Tabata

  2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013

  
• On-chip MEMS tensile testing device for mechanical characterization of nano-materials

  Toshiyuki Tsuchiya

  The first Bristol Univ.-Kyoto Univ. Joint Symposium, Jan. 2013

  
• Dynamic response of pull-in type MEMS optical chopper for time-resolved micro-Raman spectroscopy

  谷山 彰; 小北 雄亮; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  日本実験力学会講演論文集, Jan. 2013, Peer-reviewed

  
• AS-2-9 Atomic MEMSのための新規なアルカリ金属蒸気セル作製手法(AS-2.超小型量子発振器・センサ,シンポジウムセッション)

  辻本 和也; 平井 義和; 菅野 公二; 土屋 智由; 藩 和宏; 水谷 夏彦; 田畑 修

  電子情報通信学会ソサイエティ大会講演論文集, Jan. 2013

  
• Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table

  Atsushi Nakano; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Akira Umeda

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2013

  
• SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection

  K. Sugano; H. Katayama; Y. Hirai; T. Tsuchiya; O. Tabata

  2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013, Peer-reviewed

  
• Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon

  A. Uesugi; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata

  2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013, Peer-reviewed

  
• DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY

  T. Akishiba; N. Tamura; T. Ichii; Y. Hirai; K. Sugano; T. Tsuchiya; H. Sugimura; O. Tabata

  26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 2013, Peer-reviewed

  
• Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table

  Atsushi Nakano; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Akira Umeda

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2013, Peer-reviewed

  
• 粗視化分子動力学シミュレーションによる架橋度制御ネガレジストの分子透過係数解析

  柳生 裕聖; 平井 義和; 牧野 圭秀; 菅野 公二; 土屋 智由; 田畑 修

  第29回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2012

  
• シリコンセンサとマイクロ・ナノ材料 -MEMSデバイスの高信頼・高機能化に向けて-

  土屋 智由

  東京工業大学 精密工学研究所公開 技術講演会, Oct. 2012

  
• 単層カーボンナノチューブの MEMS 引張試験における顕微ラマン分光を用いたひずみ測定

  鈴木 淳也; 片岡 達哉; 平井 義和; 菅野 公二; 土屋智由; 田畑 修

  第4回「マイクロ・ナノ工学シンポジウム」, Oct. 2012

  
• 多結晶シリコン薄膜の面外曲げ振動を用いた疲労寿命評価

  種村 友貴; 山下 秀一; 和戸 弘幸; 竹内 幸裕; 土屋 智由; 田畑 修

  第4回「マイクロ・ナノ工学シンポジウム」, Oct. 2012

  
• 701 Analysis of Dynamic Cross Sensitivity of Capacitive Three-axis MEMS Accelerometer

  TSUCHIYA Toshiyuki; Nakano Atsushi; UMEDA Akira; Tabata Osamu

  Dynamics and Design Conference : D & D, 17 Sep. 2012

  
• 702 Evaluation of Effects of Rotational Motion on Vibration Table in Sensitivity Matrix Calibration of 3-axis Accelerometer

  Nakano Atsushi; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu; UMEDA Akira

  Dynamics and Design Conference : D & D, 17 Sep. 2012

  
• 静電容量型3軸MEMS加速度センサの動的横感度の解析

  土屋 智由; 中野 篤; 梅田 章; 田畑 修

  日本機械学会Dynamics and Design Conference 2012, Sep. 2012

  
• 3軸加速度センサのマトリックス感度校正における振動台回転運動の影響評価

  中野 篤; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修; 梅田 章

  日本機械学会Dynamics and Design Conference 2012, Sep. 2012

  
• 加工条件の異なる(110)<111>単結晶シリコン薄膜の引張試験

  上杉 晃生; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  日本機械学会M&M2012材料力学カンファレンス, Sep. 2012

  
• MEMSを応用したマイクロ・ナノ材料の機械的信頼性評価

  土屋 智由

  日本機械学会 2012 年度年次大会, Sep. 2012

  
• Untitled

  Toshiyuki Tsuchiya; Osamu Tabata

  MICRO & NANO LETTERS, Aug. 2012

  
• Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist

  Daimon Matsui; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), Jul. 2012

  
• Fabrication of nanogap electrodes by gold nanorod growth on substrate

  NISHINO So; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu; TAKENAKA Yoshiko

  電気学会マイクロマシン・センサシステム研究会資料, 11 Jun. 2012

  
• Analysis of aggregation reaction for silver nanoparticle dimers toward highly sensitive SERS

  KATAYAMA Hiroshi; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会マイクロマシン・センサシステム研究会資料, 11 Jun. 2012

  
• 金ナノロッドの基板上成長によるナノギャップ電極の作製

  西野聡; 菅野公二; 武中能子; 平井義和; 土屋智由; 田畑修

  平成24年度電気学会マイクロマシン・センサシステム部門総合研究会(マイクロマシン・センサシステム研究会, Jun. 2012

  
• 高感度SERS分析に向けた銀ナノ粒子二量体の凝集反応解析

  片山拓; 菅野公二; 平井義和; 土屋智由; 田畑修

  ステム部門総合研究会(マイクロマシン・センサシステム研究会), Jun. 2012

  
• Out-of-plane Bending Reliability Test for Intrinsic Mechanical Strength of Polycrystalline Silicon Thin Film Using Etching-damage-less Membrane

  Tomoki Tanemura; Shuichi Yamashita; Hiroyuki Wado; Yukihiro Takeuchi; Toshiyuki Tsuchiya; Osamu Tabata

  2012 MRS Spring Meeting, San Francisco, Apr. 2012

  
• Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes

  Praveen Thakur Singh; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  2012 MRS Spring Meeting, San Francisco, Apr. 2012

  
• Temperature dependency of DNA origami self-assembly rate

  C. Huang; T. Akishiba; N. Tamura; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012

  
• Fabrication of nanogap electrodes by gold nanorod growth on substrate

  S. Nishino; Y. Takenaka; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012

  
• Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics

  H. Yagyu; Yoshikazu Hirai; A. Uesugi; Y. Makino; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012

  
• Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer

  T. Kataoka; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012

  
• 自己変位検出型静電櫛歯等価回路モデルを用いたMEMS振動ジャイロ解析

  徳崎裕幸; 平井義和; 菅野公二; 田畑 修; 土屋智由

  応用物理学会 第59回 応用物理学関係連合講演会, Mar. 2012

  
• Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS

  Toshiyuki Tsuchiya; Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Osamu Tabata

  IFIP Advances in Information and Communication Technology, 2012

  
• Fabrication of nanogap electrodes by gold nanorod growth on substrate

  NISHINO So; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu; TAKENAKA Yoshiko

  電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2012

  
• Analysis of aggregation reaction for silver nanoparticle dimers toward highly sensitive SERS

  KATAYAMA Hiroshi; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2012

  
• Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer

  T. Tsuchiya; O. Tabata; A. Umeda

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2012

  
• ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR

  A. Kitamura; Y. Hirai; K. Sugano; O. Tabata; T. Tsuchiya

  2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012

  
• DYNAMIC SENSITIVITY MATRIX MEASUREMENT FOR SINGLE-MASS SOI 3-AXIS ACCELEROMETER

  T. Tsuchiya; O. Tabata; A. Umeda

  2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012, Peer-reviewed

  
• Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application

  Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  Materials Research Society Symposium Proceedings, 2012, Peer-reviewed

  
• ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR

  A. Kitamura; Y. Hirai; K. Sugano; O. Tabata; T. Tsuchiya

  2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012, Peer-reviewed

  
• 国際会議報告：IEEE-NEMS 2012 報告

  土屋 智由

  IEEJ Transactions on Sensors and Micromachines, 2012

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• Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation

  Hiromasa Yagyu; Yoshikazu Hirai; Yoshihide Makino; Koji Sugano; Tsuchiya Toshiyuki; Osamu Tabata

  26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, Peer-reviewed

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• Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer

  T. Tsuchiya; O. Tabata; A. Umeda

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2012, Peer-reviewed

  
• HIGH-SPEED PULSED MIXING WITH HIGH-FREQUENCY SWITCHING OF PUMPING FROM THREE MICROPUMPS

  Koji Sugano; Akihiro Nakata; Hideaki Yoshimune; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2, 2012, Peer-reviewed

  
• Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist

  Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  Proceedings of International Workshop on Micro/Nano-Engineering, Dec. 2011

  
• Sealing technique of potassium vapor cells for chip-scale atomic magnetometer

  HIRAI Yoshikazu; TSUJIMOTO Kazuya; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会電子回路研究会資料, 21 Nov. 2011

  
• Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application

  H. Yagyu; Yoshikazu Hirai; A. Uesugi; Y. Makino; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  2011 MRS Fall Meeting, Nov. 2011

  
• 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術

  平井義和; 辻本和也; 菅野公二; 土屋智由; 田畑修

  電気学会電子回路研究会（圧電デバイス・材料）, Nov. 2011

  
• 5-5 Cross comparison of fatigue behavior obtained by different testing methods on silicon thin film specimens

  Kamiya Shoji; Tsuchiya Toshiyuki; Ikehara Tsuyoshi; Ando Taeko; Namazu Takahiro; Takashima Kazuki

  マイクロ・ナノ工学シンポジウム, 25 Sep. 2011

  
• 228 Study on the Standardization of Multi-axis Inertia Sensors : 2^ report : Comparison of the measurement on the sensitivity matrix

  UMEDA Akira; Tsuchiya Toshiyuki; FUKATSU Keisuke

  Dynamics and Design Conference : D & D, 04 Sep. 2011

  
• 多軸慣性センサの標準に関する研究（第二報：感度マトリックスの比較測定）

  梅田 章; 土屋 智由; 深津 恵輔

  日本機械学会 Dynamics and Design Conference 2011, Sep. 2011

  
• 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング

  片岡達也; 平井義和; 菅野公二; 土屋智由; 田畑修

  第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011

  
• MEMS厚膜ネガレジストの粗視化分子動力学モデル

  平井義和; 柳生裕聖; 上杉晃生; 牧野圭秀; 菅野公二; 土屋智由; 田畑修

  第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011

  
• ナノトレンチテンプレートを用いたナノギャップ制御可能なナノ粒子セルフアセンブリ

  菅野公二; 平岡亮二; Martin Klaumnzer; Michael Voigt; Wolfgang Peukert; 土屋智由; 田畑 修

  第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011

  
• ナノギャップ電極の作製に向けた金ナノロッドの基板上成長

  西野聡; 菅野公二; 武仲能子; 田畑修; 土屋智由; 平井義和

  日本化学会第63回コロイドおよび界面化学討論会, Sep. 2011

  
• エポキシ系ネガレジスト機械的特性の架橋度依存性

  上杉晃生; 牧野圭秀; 柳生裕聖; 平井義和; 菅野公二; 土屋智由; 田畑修

  日本機械学会2011年度年次大会, Sep. 2011

  
• ガラスフリットリフローによる犠牲マイクロ流路気密封止技術の確立と小型原子磁気センサ実装への応用

  辻本和也; 平井義和; 菅野公二; 土屋智由; 田畑修

  関西ワークショップ2011, エレクトロニクス実装学会,, Jul. 2011

  
• High-precision and High-yield Self-Assembly of Gold Nanoparticles using Nano-scale Trenches

  SUGANO Koji; HIRAOKA Ryoji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011

  
• Synthesis of Gold Nanoparticle using High-speed Pulsed Mixing Microfluidic Device

  SUGANO Koji; YOSHIMUNE Hideaki; NAKATA Akihiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011

  
• Equivalent Circuit Analysis of Nonlinearity Response in Electrostatic Comb Resonator

  KITAMURA Akio; HIRAI Yoshikazu; SUGANO Kouji; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011

  
• 電気等価回路を用いた静電櫛歯型MEMS振動子の非線形応答解析

  北村 彰男; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  平成23年度電気学会マイクロマシン・センサシステム部門総合研究会, Jun. 2011

  
• ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル

  菅野公二; 平岡亮二; 平井義和; 土屋智由; 田畑修

  平成23年度電気学会マイクロマシン・センサシステム部門総合研究会(マイクロマシン・センサシステム研究会), Jun. 2011

  
• Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane

  平井 義和; 上杉 晃生; 牧野 圭秀; 柳生 裕聖; 菅野 公二; 土屋 智由; 田畑 修

  The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011),, pp. 62-63, Jun. 2011, Peer-reviewed

  
• 716 Development of resonant fatigue test method for nano-scale component

  MATSUMOTO K.; SUMIGAWA T.; TSUCHIYA T.; KITAMURA T.

  日本材料学会学術講演会講演論文集, 24 May 2011

  
• 微小構造体の共振疲労試験手法の開発

  松本 健太; 澄川 貴志; 土屋 智由; 北村 隆行

  日本材料学会 第６０期学術講演会, May 2011

  
• 高速脈動混合マイクロ流体デバイスを用いた均一粒子径金ナノ粒子の合成

  吉宗 秀晃; 中田 哲博; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  平成23年電気学会全国大会, Mar. 2011

  
• Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity

  Praveen Singh Thakur; 菅野 公二; 土屋 智由; 田畑 修

  The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Feb. 2011, Peer-reviewed

  
• 716 微小構造体の共振疲労試験手法の開発(疲労荷重下の破壊II,破壊の発生・進展とその解析・評価・計測,オーガナイスドセッション7)

  松本 健太; 澄川 貴志; 土屋 智由; 北村 隆行

  学術講演会講演論文集, Jan. 2011

  
• High-precision and High-yield Self-Assembly of Gold Nanoparticles using Nano-scale Trenches

  SUGANO Koji; HIRAOKA Ryoji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2011

  
• Sealing technique of potassium vapor cells for chip-scale atomic magnetometer

  HIRAI Yoshikazu; TSUJIMOTO Kazuya; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会研究会資料. ECT, 電子回路研究会, Jan. 2011

  
• LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY

  A. Taniyama; Y. Hirai; K. Sugano; O. Tabata; T. Ikehara; T. Tsuchiya

  2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011

  
• Equivalent Circuit Analysis of Nonlinearity Response in Electrostatic Comb Resonator

  KITAMURA Akio; HIRAI Yoshikazu; SUGANO Kouji; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2011

  
• Synthesis of Gold Nanoparticle using High-speed Pulsed Mixing Microfluidic Device

  SUGANO Koji; YOSHIMUNE Hideaki; NAKATA Akihiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2011

  
• Measurement of high-cycle fatigue lives of micrometer-sized single-crystal silicon specimens

  T. Ikehara; Toshiyuki Tsuchiya

  International Symposium on Plasticity and Its Current Applications, Jan. 2011

  
• Preface to the Special Issue on "Process Technologies"

  TSUCHIYA Toshiyuki

  The Journal of the Institute of Electrical Engineers of Japan, 01 Jan. 2011

  
• Designs for improving the performance of an electro-thermal in-plane actuator

  Alex Man Ho Kwan; Sichao Song; Xing Lu; Lei Lu; Ying Khai Teh; Ying Fei Teh; Eddie Wing Cheung Chong; Yan Gao; William Hau; Fan Zeng; Man Wong; Chunmei Huang; Akira Taniyama; Yoshihide Makino; So Nishino; Toshiyuki Tsuchiya; Osamu Tabata

  2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 2011, Peer-reviewed

  
• Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS

  Toshiyuki Tsuchiya; Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Osamu Tabata

  2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 2011, Peer-reviewed

  
• Epoxy-based permeable membrane fabrication for 3D microfluidic device

  Yoshikazu Hirai; Yusuke Nakai; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed

  
• Configurable assembly of DNA origami on MEMS by microfluidic device

  Chunmei Huang; Takahiro Saeki; Masayuki Endo; Hiroshi Sugiyama; Chen-Hsun Weng; Gwo-Bin Lee; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed

  
• Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection

  Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed

  
• SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER

  K. Tsujimoto; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata

  2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed

  
• LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY

  A. Taniyama; Y. Hirai; K. Sugano; O. Tabata; T. Ikehara; T. Tsuchiya

  2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed

  
• Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics

  Y. Hirai; A. Uesugi; Y. Makino; H. Yagyu; K. Sugano; T. Tsuchiya; O. Tabata

  2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed

  
• High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis

  K. Sugano; H. Yoshimune; A. Nakata; Y. Hirai; T. Tsuchiya; O. Tabata

  2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed

  
• Analysis of acceleration sensitivity in MEMS tuning fork gyroscope

  Praveen Singh Thakur; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed

  
• Nanogap-controllable self-assembly of gold nanoparticles using nanotrench template

  K. Sugano; R. Hiraoka; T. Tsuchiya; O. Tabata; M. Klaumunzer; M. Voigt; W. Peukert

  2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed

  
• High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels

  Koji Sugano; Hideaki Yoshimune; Akihiro Nakata; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

  NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed

  
• Modal harmonie simulation of decoupled resonators for developing MEMS tuning fork gyroeope with low acceleration sensitivity

  Thakur Praveen Singh; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed

  
• Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope

  Thakur Praveen Singh; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  EUROSENSORS XXV, 2011

  
• CROSS COMPARISON OF FATIGUE LIFETIME TESTING ON SILICON THIN FILM SPECIMENS

  S. Kamiya; T. Tsuchiya; T. Ikehara; K. Sato; T. Ando; T. Namazu; K. Takashima

  2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed

  
• Testing Methods for Micro- and Nano-Materials

  TSUCHIYA Toshiyuki

  Journal of the JSTP, 25 Nov. 2010

  
• Nanogap-controllable Arrangement of Gold Nanoparticles Using Template-Assisted Self-Assembly

  Koji Sugano; Ryoji Hiraoka; Toshiyuki Tsuchiya; Osamu Tabata

  Core-to-Core 2010 World Network Seminar on Advanced Particle Science and Technology, Nov. 2010

  
• MNM-3A-4 Crystallographic anisotropy analysis in fracture of micro-sized (110) single crystal silicon using Weibull statistics

  Wakita Taku; Hirai Yoshikazu; Sugano Koji; Tabata Osamu; Ikehara Tsuyoshi; Tsuchiya Toshiyuki

  日本機械学会マイクロ・ナノ工学シンポジウム講演論文集, 12 Oct. 2010

  
• MNM-P11-3 Performance analysis of vibrating gyroscope using equivalent circuit of electrostatic comb transducer with built-in displacement detection

  TOKUSAKI Hiroyuki; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  マイクロ・ナノ工学シンポジウム, 12 Oct. 2010

  
• (110)単結晶Si マイクロ試験片における破壊の結晶異方性のワイブル統計解析

  脇田 拓; 平井 義和; 菅野 公二; 田畑 修; 土屋 智由; 池原 毅

  第2回「マイクロ・ナノ工学シンポジウム」, 日本機械学会, Oct. 2010

  
• 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析

  徳崎 裕幸; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  第2回「マイクロ・ナノ工学シンポジウム」, 日本機械学会, Oct. 2010

  
• MNM-P11-3 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析(P11 電気等価回路から考えるMEMS設計手法)

  徳崎 裕幸; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  マイクロ・ナノ工学シンポジウム, Oct. 2010

  
• MNM-3A-4 (110)単結晶Siマイクロ試験片における破壊の結晶異方性のワイブル統計解析(セッション 3A 単結晶・多結晶シリコンの疲労寿命評価とメカニズムの解明)

  脇田 拓; 平井 義和; 菅野 公二; 田畑 修; 池原 毅; 土屋 智由

  マイクロ・ナノ工学シンポジウム, Oct. 2010

  
• チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術

  辻本 和也; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  第27回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2010

  
• T0302-1-1 Crystal anisotropy on fracture behavior of (110) single-crystal silicon on tensile testing

  Wakita Taku; Hirai Yoshikazu; Sugano Koji; Tabata Osamu; Tsuchiya Toshiyuki; Ikehara Tsuyoshi

  The proceedings of the JSME annual meeting, 04 Sep. 2010

  
• T0302-2-2 Local stress analysis of single-crystalline resonator using micro Raman spectroscopy

  TANIYAMA Akira; HIRAI Yoshikazu; SUGANO Koji; TABATA Osamu; IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki

  The proceedings of the JSME annual meeting, 04 Sep. 2010

  
• T0302-1-1 Crystal anisotropy on fracture behavior of (110) single-crystal silicon on tensile testing

  Wakita Taku; Hirai Yoshikazu; Sugano Koji; Tabata Osamu; Tsuchiya Toshiyuki; Ikehara Tsuyoshi

  The proceedings of the JSME annual meeting, Sep. 2010

  
• T0302-2-2 Local stress analysis of single-crystalline resonator using micro Raman spectroscopy

  TANIYAMA Akira; HIRAI Yoshikazu; SUGANO Koji; TABATA Osamu; IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki

  The proceedings of the JSME annual meeting, Sep. 2010

  
• 単結晶Si の引張試験における破壊の結晶異方性評価

  脇田 拓; 平井 義和; 菅野公二; 田畑 修; 土屋 智由; 池原 毅

  日本機械学会2010年度年次大会, Sep. 2010

  
• 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析

  谷山 彰; 平井 義和; 菅野 公二; 田畑 修; 池原 毅; 土屋 智由

  日本機械学会2010年度年次大会, Sep. 2010

  
• MEMSを用いたナノスケールの材料計測

  土屋 智由

  計測自動制御学会関西支部平成２２年度講習会, Jul. 2010

  
• Crystal anisotropy on strength of single crystal silicon measured by tensile testing

  Taku,Wakita; Yoshikazu,Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tsuyoshi,Ikehara

  The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 44, Jul. 2010, Peer-reviewed

  
• Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell

  Kazuya,Tsujimoto; Yoshikazu,Hirai; 菅野 公二; Tsuchiya, Toshiyuki; Tabata, Osamu

  The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 211, Jul. 2010, Peer-reviewed

  
• ３方向からの交互脈動送液による高速２液混合

  菅野公二; 中田哲博; 平井義和; 土屋智由; 田畑修

  電気学会マイクロマシン・センサシステム研究会資料, 17 Jun. 2010

  
• MEMS2010報告

  土屋 智由

  電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, Jun. 2010

  
• High-Speed Mixing of Two Solutions using Alternate Pulsed Flow from Three Inlets Microchannels

  SUGANO Koji; NAKATA Akihiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jun. 2010

  
• MEMS2010報告

  土屋 智由

  電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Jun. 2010

  
• 第26回「センサ・マイクロマシンと応用システム」シンポジウム

  土屋 智由; 小野 崇人; 村上 裕二

  電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, Mar. 2010

  
• 第26回「センサ・マイクロマシンと応用システム」シンポジウム

  土屋 智由; 小野 崇人; 村上 裕二

  電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Mar. 2010

  
• 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価

  脇田拓; 菅野公二; 土屋智由; 田畑修; 池原 毅

  第1回マイクロ・ナノ工学シンポジウム,, pp. 39-40, Mar. 2010, Peer-reviewed

  
• Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens

  T. Ikehara; T. Tsuchiya

  MICRO & NANO LETTERS, Feb. 2010, Peer-reviewed

  Access this misc :

  
• DNA-grafted-polymer mediated self-assembly of micro components

  Guillermo Lopez; Tomoki Tanemura; Ryo Sato; Takahiro Saeki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Masahiro Fujita; Mizuo Maeda

  2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 2010, Peer-reviewed

  
• Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection

  Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  IEEJ Transactions on Sensors and Micromachines, 2010, Peer-reviewed

  
• DNA Mediated self-assembly of micro-scale components and sites

  R. Sato; T. Tanemura; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata

  7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 2010, Peer-reviewed

  
• チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路機密封止技術

  辻本和也; 平井義和; 菅野公二; 土屋智由; 田畑修

  第27 回「センサーマイクロマシンと応用システム」シンポジウム(2010.10.14), 2010, Peer-reviewed

  
• Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices Using Developer Permeability of Negative Thick-Film Resists

  Y. Hirai; Y. Nakai; K. Sugano; T. Tsuchiya; O. Tabata

  EUROSENSORS XXIV CONFERENCE, 2010, Peer-reviewed

  
• New compensation technique for the soft tissue stiffness measurements using two sensor probes configuration

  A. M. R. Fath El Bab; K. Sugano; T. Tsuchiya; O. Tabata; M. E. H. Eltaib; M. M. Sallam

  EUROSENSORS XXIV CONFERENCE, 2010, Peer-reviewed

  
• Technologies, applications, and reliabilities of microelectromechanical systems (MEMS)

  土屋 智由

  The 9th Society of Exploration Geophysicist of Japan International Symposium,, p. 22, Dec. 2009, Peer-reviewed

  
• Development of MEMS Equivalent Circuit Generator

  FUJIWARA Nobuyo; ASAUMI Kazuo; KOIKE Tomoyuki; TSUCHIYA Toshiyuki; HASHIGUCHI Gen

  Technical report of IEICE. SDM, 05 Nov. 2009

  
• MEMS等価回路ジェネレータの開発(プロセス・デバイス・回路シミュレーション及び一般)

  藤原 信代; 浅海 和雄; 小池 智之; 土屋 智由; 橋口 原

  電子情報通信学会技術研究報告. SDM, シリコン材料・デバイス, Nov. 2009

  
• Technologies, applications, and reliabilities of microelectromechanical systems (MEMS)

  Toshiyuki Tsuchiya

  The 9th Society of Exploration Geophysicist of Japan International Symposium, Oct. 2009

  
• マイクロリアクタによる金ナノ粒子合成技術を紹介します

  菅野公二; 土屋 智由; 田畑 修

  APPIE 産学官連携フェア2009, Oct. 2009

  
• ナノ粒子を所望のパターンに配列する

  菅野公二; 平岡亮二; 土屋 智由; 田畑 修

  APPIE 産学官連携フェア2009, Oct. 2009

  
• 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価

  脇田 拓; 菅野 公二; 土屋 智由; 田畑 修; 池原 毅

  第1回マイクロ・ナノ工学シンポジウム, Oct. 2009

  
• 厚膜ネガレジストの埋め込み型流路作製のためのフォトリソグラフィ条件の決定手法

  平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 533-538, Oct. 2009, Peer-reviewed

  
• 十字型混合流路による2液脈動混合の高速化

  中田 哲博; 菅野 公二; 土屋 智由; 田畑 修

  第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 483-486, Oct. 2009, Peer-reviewed

  
• 自己変位検出機能を有する面内2自由度静電櫛歯電極の等価回路

  徳崎裕幸; 菅野公二; 土屋智由; 田畑 修

  第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 518-523, Oct. 2009, Peer-reviewed

  
• T0302-2-3 Electrical equivalent circuit model of comb transducers valid for DC operating point analysis

  TOKUSAKI Hiroyuki; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  The proceedings of the JSME annual meeting, 12 Sep. 2009

  
• T0302-1-1 Low cycle fracture test of a MEMS resonator

  IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki

  The proceedings of the JSME annual meeting, 12 Sep. 2009

  
• Capacitive micromachined ultrasonic transducers with novel membrane design

  M. Sato; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata

  Procedia Chemistry, Sep. 2009

  
• MEMS共振デバイスの低サイクル破壊試験

  池原 毅; 土屋 智由

  日本機械学会2009年度年次大会, Sep. 2009

  
• MEMS素子のモデリング技術

  土屋 智由

  電子情報通信学会 2009年ソサイエティ大会 エレクトロニクス講演論文集2, Sep. 2009

  
• 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築

  徳崎 裕幸; 菅野 公二; 土屋 智由; 田畑 修

  日本機械学会2009年度年次大会, Sep. 2009

  
• T0302-2-3 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築(マイクロ・ナノ力学とシステム設計論(2))

  徳崎 裕幸; 菅野 公二; 土屋 智由; 田畑 修

  年次大会講演論文集 : JSME annual meeting, Sep. 2009

  
• CT-1-2 MEMS素子のモデリング技術(チュートリアルセッション,CT-1.More than Mooreを実現するMEMS融合LSI技術,ソサイエティ企画)

  土屋 智由

  電子情報通信学会ソサイエティ大会講演論文集, Sep. 2009

  
• T0302-1-1 Low cycle fracture test of a MEMS resonator

  IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki

  The proceedings of the JSME annual meeting, Sep. 2009

  
• CT-1-2 Device Modeling in CMOS-MEMS

  Tsuchiya Toshiyuki

  Proceedings of the Society Conference of IEICE, 01 Sep. 2009

  
• Mixing speed- and temperature-controlled Microreactor for Gold Nanoparticle Synthesis

  SUGANO Koji; UCHIDA Yuki; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会マイクロマシン・センサシステム研究会資料, 23 Jul. 2009

  
• Development of MEMS Equivalent Circuit Generator

  ASAUMI Kazuo; FUJIWARA Nobuyo; MIZUTA Chieki; MOCHIZUKI Shunsuke; KOIKE Tomoyuki; TSUCHIYA Toshiyuki; HASHIGUCHI Gen

  電気学会研究会資料. PHS, フィジカルセンサ研究会, 23 Jul. 2009

  
• 平成21年度電気学会センサ・マイクロマシン部門総合研究会

  菅野公二; 内田雄喜; 平井 義和; 土屋 智由; 田畑 修

  平成21年度電気学会センサ・マイクロマシン部門総合研究会, Jul. 2009

  
• Mixing speed- and temperature-controlled Microreactor for Gold Nanoparticle Synthesis

  SUGANO Koji; UCHIDA Yuki; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jul. 2009

  
• Development of MEMS Equivalent Circuit Generator

  ASAUMI Kazuo; FUJIWARA Nobuyo; MIZUTA Chieki; MOCHIZUKI Shunsuke; KOIKE Tomoyuki; TSUCHIYA Toshiyuki; HASHIGUCHI Gen

  電気学会研究会資料. PHS, フィジカルセンサ研究会, Jul. 2009

  
• Modeling of Self-face-alignment Process Using Contact Potential Difference

  佐藤 亮; 種村 友貴; Guillermo,Lopez Hinojosa; Mohammed,Serry ElSayed Ahmed; 菅野 公二; 土屋 智由; 田畑 修

  International Conference on Electronics Packaging (ICEP2009),, pp. 959-962, Apr. 2009, Peer-reviewed

  
• Fabrication of Large-scale Nanoparticle Array Using Combination of Self-Assembly and 2-step Transfer

  SUGANO K; OZAKI T; TSUCHIYA T; TABATA O

  Int Conf Electron Packag, Apr. 2009, Peer-reviewed

  
• 静電容量型ＭＥＭＳデバイスを用いたカーボンナノ材料引張試験

  浦靖武; 菅野公二; 土屋智由; 田畑修

  電気学会全国大会講演論文集, 17 Mar. 2009, Peer-reviewed

  
• 第25回「センサ・マイクロマシンと応用システム」シンポジウム

  橋口 原; 土屋 智由; 高尾 英邦; 山下 馨; 藤田 孝之; 佐々木 実; 阪田 知巳; 古賀 章浩; 安達 洋; 廣田 正樹; 中本 高道; 毛塚 博史; 室 英夫; 林 健司; 三木 則尚; 中西 博昭; 竹内 昌治; 杉山 正和; 小西 聡; 村上 裕二; 日暮 栄治; 澤田 廉士; 積 知範

  電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Mar. 2009

  
• 静電容量型MEMSデバイスを用いたカーボンナノ材料引張試験

  浦 靖武; 菅野 公二; 土屋 智由; 田畑 修

  電気学会全国大会, Mar. 2009, Peer-reviewed

  
• CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS

  土屋 智由

  Japan-Taiwan CMOS-MEMS Workshop 2009,, pp. 81-97, Mar. 2009, Peer-reviewed

  
• 3DOF equivalent circuit model of a comb-drive actuator

  Y. Nishimori; N. Fujiwara; H. Ooiso; T. Tsuchiya; S. Mochizuoki; G. Hashiguchi

  TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009

  
• Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist

  Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata

  TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009, Peer-reviewed

  
• Tensile testing of fullerene nano wire using electrostatic MEMS device

  Yasutake Ura; K. Sugano; T. Tsuchiya; O. Tabata

  TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009, Peer-reviewed

  
• Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist

  Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata

  TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009, Peer-reviewed

  
• SEQUENTIAL AND SELECTIVE SELF-ASSEMBLY OF MICRO COMPONENTS BY DNA GRAFTED POLYMER

  T. Tanemura; G. Lopez; R. Sato; K. Sugano; T. Tsuchiya; O. Tabata; M. Fujita; M. Maeda

  IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, Peer-reviewed

  
• Effective Fabrication Method for Monolithic 3-dimensional Embedded Microstructure using the Moving-mask UV Lithography Technique

  HIRAI Yoshikazu; INAMOTO Yoshiteru; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  Proc Sens Symp Sens Micromachines Appl Syst, 22 Oct. 2008, Peer-reviewed

  
• Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system

  FUJIWARA N; ASAUMI K; IRIYE Y; KOIKE T; TSUCHIYA T; HASHIGUCHI G

  Proc Sens Symp Sens Micromachines Appl Syst, 22 Oct. 2008, Peer-reviewed

  
• Semi-analytical Formula for the Capacitance of Vertical Comb Electrodes and its Applications

  MOCHIZUKI Shunsuke; TSUCHIYA Toshiyuki; HASHIGUCHI Gen; KOIKE Tomoyuki; MIZUTA Chieki

  Proc Sens Symp Sens Micromachines Appl Syst, 22 Oct. 2008, Peer-reviewed

  
• Semi-analytical formula for the capacitance of vertical comb electrodes and its applications

  Mochizuki Shunsuke; Toshiyuki Tsuchiya; Hashiguchi Gen; Koike Tomoyuki; Mizuta Chieki

  25th Sensor Symposium, Oct. 2008, Peer-reviewed

  
• Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system

  Fujiwara N; Asaumi K; Irie Y; Koike T; Toshiyuki Tsuchiya; Hashiguchi G

  25th Sensor Symposium, Oct. 2008, Peer-reviewed

  
• Effective fabrication method for monolithic 3-dimensional embedded microstructure using the moving-mask UV lithography technique

  Yoshikazu Hirai; Yoshiteru Inamoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  25th Sensor Symposium, Oct. 2008, Peer-reviewed

  
• Electrical Equivalent Circuit Model of Microfluidic System Containing Piezoelectric Valveless Micropump and Viscoelastic PDMS Microchannnel

  中田 哲博; 田中 伸治; 菅野 公二; 土屋 智由; 田畑 修

  The 12th International Conference on Miniturized Systems for Chemistry and Life Sciences,, pp. 730-732, Oct. 2008, Peer-reviewed

  
• 3-dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property

  Yoshikazu, Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu

  The 22nd international conference EUROSENSORS (EUROSENSORS XXII),, pp. 1559-1602, Sep. 2008, Peer-reviewed

  
• バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路

  中田哲博; 田中伸治; 菅野公二; 土屋智由; 田畑修

  日本機械学会年次大会講演論文集, 02 Aug. 2008, Peer-reviewed

  
• 単結晶シリコンの曲げ試験における結晶異方性の効果

  池原毅; 土屋智由

  日本機械学会年次大会講演論文集, 02 Aug. 2008, Peer-reviewed

  
• 単結晶シリコンの曲げ試験における結晶異方性の効果

  池原 毅; 土屋 智由

  日本機械学会2008年度年次大会, Aug. 2008, Peer-reviewed

  
• バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路

  中田 哲博; 田中 伸治; 菅野 公二; 土屋 智由; 田畑 修

  日本機械学会2008年度年次大会, Aug. 2008, Peer-reviewed

  
• 単結晶シリコン引張試験における表面酸化の影響評価

  土屋 智由; 宮本 憲治; 菅野 公二; 田畑 修

  日本機械学会2008年度年次大会,8, pp. 157-158, Aug. 2008, Peer-reviewed

  
• セルフアセンブルによるマイクロ/ナノコンポーネントのMEMSへの集積化

  佐藤 亮; 種村 友貴; 菅野 公二; 土屋 智由; 田畑 修

  エレクトロニクス実装学会関西ワークショップ2008, Jul. 2008

  
• 単結晶シリコンMEMSデバイスの破壊と疲労

  土屋 智由

  応用物理学会結晶工学分科会第129回研究会,, pp. 23-30, Jul. 2008, Peer-reviewed

  
• ポジ型厚膜レジストの溶解速度の露光波長依存性と３次元加工への応用

  平井義和; 菅野公二; 土屋智由; 田畑修

  電気学会マイクロマシン・センサシステム研究会資料, 12 Jun. 2008, Peer-reviewed

  
• ポジ型厚膜レジストの溶解速度の露光波長依存性と３次元加工への応用

  平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  平成20年度電気学会マイクロマシン・センサシステム部門総合研究会, Jun. 2008, Peer-reviewed

  
• 電気等価回路モデルによる高周波駆動バルブレス圧電マイクロポンプの特性解析

  菅野 公二; 田中 伸治; 土屋 智由; 田畑 修

  平成20年度電気学会センサ・マイクロマシン部門総合研究会, Jun. 2008

  
• Contact Potential Difference for Face Alignment of Submillimeter Components with Chemical Reaction Kinetics

  T. Tanemura; Y. Higuchi; T. Kusakabe; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Karl F Bhringer

  FNANO2008, Apr. 2008

  
• 第24回「センサ・マイクロマシンと応用システム」シンポジウム

  橋口 原; 土屋 智由; 高尾 英邦

  電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Mar. 2008

  
• 微小コンポーネントの接触帯電によるセルフフェースアライメントプロセスのモデリング

  佐藤 亮; 種村 友貴; 樋口 雄一; 菅野 公二; 土屋 智由; 田畑 修

  機械学会 情報・知能・精密機器部門(IIP部門)講演会, Mar. 2008

  
• 任意基板への微小要素の集積化のためのマニピュレーションシステム

  樋口 雄一; 日下部 達哉; 種村 友貴; 佐藤 亮; 菅野 公二; 土屋 智由; 田畑 修

  機械学会 情報・知能・精密機器部門(IIP部門)講演会, Mar. 2008

  
• 櫛歯型垂直変位電極を用いた基板面内軸回転検出振動型SOI ジャイロスコープ

  濱口 裕之; 菅野 公二; 土屋 智由; 田畑 修

  電気学会全国大会,3, pp. 195-196, Mar. 2008, Peer-reviewed

  
• レジスト現像特性の露光波長依存性を応用した厚膜レジストの３次元微細加工技術

  平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  電気学会全国大会,3, pp. 138-139, Mar. 2008, Peer-reviewed

  
• Y-AXIS VIBRATING SOI GYROSCOPE USING VERTICAL COMB ELECTRODES

  H. Hamaguchi; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), 2008

  
• Contact potential difference for sequential assembly and face alignment of submillimeter components

  T. Tanemura; Y. Higuchi; T. Kusakabe; K. Sugano; T. Tsuchiya; O. Tabata

  MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed

  
• Manipulation system for nano/micro components integration via transportation and self-assembly

  Y. Higuchi; T. Kusakabe; T. Tanemura; K. Sugano; T. Tsuchiya; O. Tabata

  MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed

  
• Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator

  T. Ikehara; T. Tsuchiya

  MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed

  
• Effect of surface oxide layer on mechanical properties of single crystalline silicon

  Kenji Miyamoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES, 2008, Peer-reviewed

  
• 第7章 7.2 力学センサ

  土屋 智由

  日本学術振興会 薄膜第131委員会編，薄膜ハンドブック第2版,, p. 1, 2008, Peer-reviewed

  
• Design and simulation of a tactile sensor for soft-tissue compliance detection

  Ahmed M.R. Fath El Bab; Tomohisa Tamura; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Mohamed E. H. Eltaib; Mohamed M. Sallam

  IEEJ Transactions on Sensors and Micromachines, 2008, Peer-reviewed

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• Contact potential difference for sequential assembly and face alignment of submillimeter components

  T. Tanemura; Y. Higuchi; T. Kusakabe; K. Sugano; T. Tsuchiya; O. Tabata

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2008, Peer-reviewed

  
• DNA mediated sequential self-assembly of nano/micro components

  T. Kusakabe; T. Tanemura; Y. Higuchi; K. Sugano; T. Tsuchiya; O. Tabata

  MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed

  
• Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing

  T. Ozaki; K. Sugano; T. Tsuchiya; O. Tabata

  MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed

  
• Manipulation system for nano/micro components integration via transportation and self-assembly

  Y. Higuchi; T. Kusakabe; T. Tanemura; K. Sugano; T. Tsuchiya; O. Tabata

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2008, Peer-reviewed

  
• Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching

  T. Tsuchiya; T. Jomori; Y. Ura; K. Sugano; O. Tabata

  MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed

  
• Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator

  T. Ikehara; T. Tsuchiya

  MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed

  
• Mechanical properties evaluation for MEMS materials and their standardization (Chapter 1)

  Tsuchiya, Toshiyuki; Oliver Brand; Gary K. Fedder; Christofer Hierold; Jan G. Korvink; Tabata, Osamu

  Advanced Micro and Nanosystems, Reliability of MEMS,, p. 1, Dec. 2007, Peer-reviewed

  
• Effect of surface oxidation on mechanical properties of single crystalline silicon

  MIYAMOTO Kenji; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  Proc Sens Symp Sens Micromachines Appl Syst, 16 Oct. 2007, Peer-reviewed

  
• Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes

  UCHIDA Yuki; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu; IKEHARA Tsuyoshi

  Proc Sens Symp Sens Micromachines Appl Syst, 16 Oct. 2007, Peer-reviewed

  
• Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes

  Uchida Yuki; Kouji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  Proceedings of the 24th Sensor Symposium, Oct. 2007, Peer-reviewed

  
• Design and Simulation of a Micro Tactile Sensor for Soft-Tissue Compliance Detection

  Ahmed M. R. Fath El Bab; Mohamed E; H. Eltaib; Mohamed M. Sallam; Tomohisa, Tamura; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu

  Proceedings of the 24th Sensor Symposium,, pp. 248-251, Oct. 2007, Peer-reviewed

  
• 3313 Self-Assembly Using Electrostatic Adhesion Energy By Contact Electrification

  TANEMURA Tomoki; KUSAKABE Tatsuya; HIGUCHI Yuichi; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  The proceedings of the JSME annual meeting, Sep. 2007

  
• 低侵襲触覚センサーの構造設計

  田村 智久; ファス エルバブアハメッド; 菅野 公二; 土屋 智由; 田畑 修

  日本機械学会2007年度年次大会, Sep. 2007

  
• 移動マスクUV露光法によるポジ型厚幕レジストの3次元加工と形状シミュレーション技術

  平井 義和; 稲本 好輝; 菅野 公二; 土屋 智由; 田畑 修

  日本機械学会2007年度年次大会, Sep. 2007

  
• Silicon and Related Materials (Chapter 1)

  Tsuchiya, Toshiyuki; Yogesh B. Gianchandani; Tabata, Osamu; Hans Zappe Ed

  Comprehensive Microsystems,, p. 1, Sep. 2007, Peer-reviewed

  
• 高温薄膜引張試験装置の開発

  土屋 智由; 池田 哲郎; 土屋 智由; 田畑 修

  日本機械学会2007年度年次大会,1, pp. 729-730, Sep. 2007, Peer-reviewed

  
• Parallel fatigue test of micromachined single crystal silicon using lateral resonating device

  Tsuyoshi, Ikehara; Tsuchiya, Toshiyuki

  MicroNanoReliability 2007 Conference,, p. 107, Sep. 2007, Peer-reviewed

  
• ナノテンプレートを用いたセルフアセンブルによる粒子パターン形成

  尾崎 貴志; 菅野 公二; 土屋 智由; 田畑 修

  粉体工学会第43回夏期シンポジウム, Aug. 2007

  
• DNAの選択性およい温度特性を利用したAuナノ微粒子のセルフアセンブル

  日下部 達哉; 種村 友貴; 樋口 雄一; 菅野 公二; 土屋 智由

  粉体工学会第43回夏期シンポジウム,, pp. 19-20, Aug. 2007, Peer-reviewed

  
• Flow Analysis of Valveless Piezoelectric Micropump with Electrical Equivalent Circuit Model and Its Experimental Validation

  TANAKA Shinji; ICHIHASHI Osamu; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会総合研究会, Jul. 2007

  
• Development profile simulation tool adopting Fast Marching Method for the Moving-mask UV lithography method

  HIRAI Yoshikazu; INAMOTO Yoshiteru; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会総合研究会, Jul. 2007

  
• マイクロ流体デバイスを用いた混合速度制御による金ナノ粒子作製

  菅野 公二; 田中 伸治; 市橋 治; 土屋 智由; 田畑 修

  化学とマイクロシステム, Jun. 2007

  
• Moving-mask UV lithography and embedded microchannels

  Yoshireru, Inamoto; Yoshikazu, Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu

  The 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007),, pp. 31-32, Jun. 2007, Peer-reviewed

  
• MEMS Reliability

  Tsuchiya, Toshiyuki

  The 20th International Conference on Microelectronic Test Structures,, pp. 105-123, May 2007, Peer-reviewed

  
• 移動マスクUV露光法による埋め込み型流路の作製

  稲本 好輝; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修

  平成19年，電気学会全国大会, Mar. 2007

  
• DNA修飾した微小コンポーネントのシーケンシャルセルフアセンブリ

  日下部達哉; 菅野公二; 土屋 智由; 田畑 修

  文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, Mar. 2007

  
• EB描画によるナノパターンを用いたナノ粒子アセンブル

  菅野 公二; 尾崎 貴志; 土屋 智由; 田畑 修

  文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, Mar. 2007

  
• 静電容量型MEMS デバイスを用いたカーボンナノ材料引張試験

  城森 知也; 宮本 憲治; 菅野 公二; 土屋 智由; 田畑 修

  日本機械学会情報・知能・精密機器部門講演会, Mar. 2007

  
• Design and Simulation of a Tactile Sensor for Soft-Tissue Compliance Detection

  Ahmed M. R. Fath; El Bab; Tomohisa Tamura; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Mohamed E; H. Eltaib; Mohamed M. Sallam

  Proceedings of The 24th Sensor Symposium, 2007

  
• Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes

  Yuki Uchida; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Tsuyoshi Ikehara

  Proceedings of The 24th Sensor Symposium, 2007

  
• A differential capacitive three-axis SOI accelerometer using vertical comb electrodes

  H. Hamaguchi; K. Sugano; T. Tsuchiya; O. Tabata

  TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007

  
• A differential capacitive three-axis SOI accelerometer using vertical comb electrodes

  H. Hamaguchi; K. Sugano; T. Tsuchiya; O. Tabata

  TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed

  
• Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer

  Takashi Ozaki; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, Peer-reviewed

  
• Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments

  Yusuke Yamaji; Koji Sugano; Osamu Tabata; Toshiyuki Tsuchiya

  PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, Peer-reviewed

  
• Mechanical Calibration of MEMS Speing with 0.1-μm Force Resolution

  Miyamoto Kenji; Kouji Sugano; Osamu Tabata; Toshiyuki Tsuchiya

  The 20th IEEE International Conference on Micro Electro Mechanical Systems, Jan. 2007, Peer-reviewed

  
• Effect of surface oxidation on mechanical properties of single crystalline silicon

  Miyamoto Kenji; Kouji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  Proceedings of The 24th Sensor Symposium, 2007, Peer-reviewed

  
• Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron

  Koji Sugano; Weiyu Sun; Toshiyuki Tsuchiya; Osamu Tabata

  PORTABLE SYNCHROTRON LIGHT SOURCES AND ADVANCED APPLICATIONS, 2007, Peer-reviewed

  
• Tensile testing of single crystal silicon thin films at 800 degrees C using IR heating

  T. Ikeda; K. Sugano; T. Tsuchiya; O. Tabata

  TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed

  
• Analysis of valveless piezoelectric micropump using electrical equivalent circuit model

  S. Tanaka; O. Ichihashi; K. Sugano; T. Tsuchiya; O. Tabata

  TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed

  
• Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring

  Y. Hirai; Y. Inamoto; K. Sugano; T. Tsuchiya; O. Tabata

  TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed

  
• A differential caeacitive three-axis SOI accelerometer using vertical comb electrodes

  H. Hamaguchi; K. Sugano; T. Tsuchiya; O. Tabata

  TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 2007, Peer-reviewed

  
• Mechanical reliability of micro/nano-structures in MEMS devices

  Toshiyuki Tsuchiya

  MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 2007, Peer-reviewed

  
• Temperature controlled capillary driven sequential stacking self-assembly using two different adhesives

  Yuichi Higuchi; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  6TH INTERNATIONAL IEEE CONFERENCE ON POLYMERS AND ADHESIVES IN MICROELECTRONICS AND PHOTONICS, PROCEEDINGS 2007, 2007, Peer-reviewed

  
• Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer

  T. Ozaki; K. Sugano; T. Tsuchiya; O. Tabata

  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2007, Peer-reviewed

  
• Mechanical calibration of MEMS spring with 0.1-mu N force resolution

  Kenji Miyamoto; Tomoya Jomori; Koji Sugano; Osamu Tabata; Toshiyuki Tsuchiya

  PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, Peer-reviewed

  
• Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron

  Koji Sugano; Weiyu Sun; Toshiyuki Tsuchiya; Osamu Tabata

  AIP Conference Proceedings, 2007, Peer-reviewed

  
• 単層カーボンナノチューブ引張試験のための静電容量型MEMS デバイスの構造設計

  城森 知也; 宮本 憲治; 菅野 公二; 土屋 智由; 田畑 修

  第50回日本学術会議材料工学連合講演会, Dec. 2006

  
• 高温薄膜引張試験機の試作および単結晶シリコン薄膜の物性評価

  池田 哲郎; 菅野 公二; 土屋 智由; 田畑 修

  第50回日本学術会議材料工学連合講演会, Dec. 2006

  
• Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing

  OZAKI Takashi; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  Proc Sens Symp Sens Micromachines Appl Syst, 05 Oct. 2006, Peer-reviewed

  
• A differential capacitive three-axis SOI accelerometer using vertical comb electrodes

  HAMAGUCHI Hiroyuki; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  Proc Sens Symp Sens Micromachines Appl Syst, 05 Oct. 2006, Peer-reviewed

  
• 移動マスクUV露光法による厚膜レジストの三次元微細加工技術

  平井 義和; Inamoto; 菅野 公二; 土屋 智由; 田畑 修

  Proceedings of the 23rd Sensor Symposium, Oct. 2006

  
• Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing

  Ozaki Takashi; Kouji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  Proceedings of the 23rd Sensor Symposium, Oct. 2006, Peer-reviewed

  
• 電磁式天秤を用いたマイクロ構造のバネ定数測定

  宮本 憲治; 城森 知也; 菅野 公二; 土屋 智由; 田畑 修

  日本機械学会2006年年次大会, Sep. 2006

  
• Tensile and Tensile-mode Fatigue Test of Single Crystal Silicon in Various Environments

  Yusuke, Yamaji; Sugano, Kouji; Tabata, Osamu; Tsuchiya, Toshiyuki

  Asia-Pacific Conference of Transducers and Micro-Nano Technology,, p. 230, Jun. 2006, Peer-reviewed

  
• 薄膜材料の高温引張試験に関する基礎検討

  池田哲郎; 菅野公二; 土屋 智由; 田畑 修

  電気学会E部門総合研究会, May 2006

  
• 電気等価回路モデルによるバルブレス圧電マイクロポンプの設計・解析

  菅野 公二; 山田 英雄; 市橋 治; 土屋 智由; 田畑 修

  電気学会E部門総合研究会, May 2006

  
• Tensile mode fatigue test of silicon thin films using electrostatic grip system

  Tsuchiya, Toshiyuki; Yusuke, Yamaji; Sugano, Kouji; Tabata, Osamu

  The 9th International Fatigue Congress,, p. 47, May 2006, Peer-reviewed

  
• 単結晶シリコン薄膜の環境制御引張疲労試験

  山地 祐輔; 菅野 公二; 土屋 智由; 田畑 修

  電気学会全国大会, Mar. 2006

  
• Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps

  K Sugano; H Yamada; O Ichihashi; T Tsuchiya; O Tabata

  MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, Peer-reviewed

  
• 加速度センサ(第5章第１項)

  土屋 智由; 前田 龍太郎; 澤田 廉士; 青柳 桂一

  MEMS/NEMSの最先端技術と応用展開,, pp. 165-171, 2006, Peer-reviewed

  
• Vertical drive micro actuator using SMA thin film for a smart button

  W Yoshikawa; A Sasabe; K Sugano; T Tsuchiya; O Tabata; A Ishida

  MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, Peer-reviewed

  
• Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps

  K Sugano; H Yamada; O Ichihashi; T Tsuchiya; O Tabata

  MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, Peer-reviewed

  
• Tensile-Mode Fatigue Test of Single Crystal Silicon Thin Films Using Electrostatic Grip

  Yusuke Yamaji; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, Oct. 2005

  
• Gold Nanoparticles Synthesis With Pulsed Mixing Method

  Hideo Yamada; Osamu Ichihashi; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

  PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, Oct. 2005

  
• Mechanical Testing of Integrated Microsystems

  Toshiyuki Tsuchiya

  FIS conference on future integrated systems, Cambridge, Aug. 2005

  
• Particle Adhesion Forces Measurements in Solutions for Particle Assemble

  ICHIHASHI Osamu; LEE JooWon; ISII Masahiro; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu

  電気学会E部門総合研究会, Jun. 2005

  
• Material Properties: Measurement and Data

  Tabata, Osamu; Tsuchiya, Toshiyuki; J. G. Korvink; O. Paul Ed

  MEMS a practical guide to design,, pp. 53-87, 2005, Peer-reviewed

  
• Tensile testing of MEMS materials

  Toshiyuki Tsuchiya

  Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, 2005, Peer-reviewed

  
• 3-nm gap fabrication using gas phase sacrificial etching for quantum devices

  K Hamaguchi; T Tsuchiya; K Shimaoka; H Funabashi

  MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, Peer-reviewed

  
• Mechanical reliability evaluation and its standardization of thin films used in MEMS

  T. Tsuchiya

  Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications, 2004, Peer-reviewed

  
• Cross comparison of thin film tensile-testing methods examined with single-crystal silicon, polysilicon, nickel, and titanium films

  Toshiyuki Tsuchiya; Masakazu Hirata; Norio Chiba; Ryujiro Udo; Yuji Yoshitomi; Taeko Ando; Kazuo Sato; Kazuki Takashima; Yakichi Higo; Yasunori Saotome; Hirofumi Ogawa; Koichi Ozaki

  Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 Jul. 2003

  
• Tensile test of bulk- and surface-micromachined 0.1-mu m thick silicon film using electrostatic force grip system

  T Tsuchiya; J Sakata; M Shikida; K Sato

  MATERIALS SCIENCE OF MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES IV, 2002, Peer-reviewed

  
• Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions

  T Tsuchiya; J Sakata; Y Taga

  THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII, 1998, Peer-reviewed

  
• Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films

  T Tsuchiya; O Tabata; J Sakata; Y Taga

  MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, 1997

  

Presentations

• Material and Device Reliability in Si MEMS Sensors

  TSUCHIYA Toshiyuki

  The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), 08 Jul. 2012, Invited

  
• CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS (NEDO project)

  TSUCHIYA Toshiyuki

  Japan-Taiwan CMOS-MEMS Workshop 2009, 23 Mar. 2009, Invited

  
• Accelerated lifetime test method for structural materials in MEMS devices using resonant vibration

  TSUCHIYA Toshiyuki

  Korea-Japan-China MEMS Standardization Workshop 2008, 20 Jun. 2008, Invited

  
• Mechanical reliability of micro/nano-structures in MEMS devices

  TSUCHIYA Toshiyuki

  20th International Microprocesses and Nanotechnology Conference (MNC2007), 05 Nov. 2007, Invited

  
• MEMS Reliability

  TSUCHIYA Toshiyuki

  The 20th International Conference on Microelectronic Test Structures, 19 Mar. 2007, Invited

  
• Humidity effect on tensile strength and fatigue properties of single crystal silicon microstructures

  Tsuchiya, Toshiyuki

  Korea-Japan-China MEMS Standardization Workshop 2006,,, pp. 105-116, 22 Jun. 2006, Invited

  
• Tensile testing of MEMS materials(2005)

  TSUCHIYA Toshiyuki

  Tech. Digest of the 13th International Conference of Solid-State Sensors and Actuators (Transduces ’05), 05 Jun. 2005, Invited

  
• Mechanical reliability evaluation and its standardization of thin film used in MEMS

  TSUCHIYA Toshiyuki

  Technical Papers of Conference on Micro-Nano-Technologies for Aerospace Applications (CANEUS 2004), 01 Nov. 2004, Invited

  

Books and Other Publications

• 小さなものをつくるためのナノ/サブミクロン評価法 : μmからnm寸法のものをつくるための材料,物性,形状,機能の評価法

  肥後, 矢吉; 谷川, 紘; 鈴木, 健一郎; 磯野, 吉正; 荻, 博次; 土屋, 智由; 石山, 千恵美

  コロナ社, Jul. 2015

  Find Kyoto University's collection of books :

  
• 小さなものをつくるためのナノ／サブミクロン評価法

  肥後矢吉; 谷川紘; 鈴木健一郎; 磯野吉正; 萩博次; 土屋智由; 石山千恵美, Joint work

  コロナ社, Jul. 2015, Not refereed

  
• Reliability of MEMS : testing of materials and devices

  土屋, 智由; 田畑, 修

  Wiley-VCH, 2013

  Find Kyoto University's collection of books :

  
• シリコンの破壊と疲労

  土屋智由; 佐藤一雄; 服部敏雄, 第1編 第12章 3節

  エヌ・ティー・エス, 2012, Not refereed

  
• 力学センサ

  TSUCHIYA Toshiyuki, 第7章 7.2

  オーム社, 2008, Not refereed

  
• Reliability of MEMS

  Toshiyuki Tsuchiya; Oliver Brand; Gary K. Fedder; Christofer Hierold; Jan G. Korvink; Osamu Tabata, Mechanical properties evaluation for MEMS materials and their standardization (Chapter 1)

  John Wiley & Sons Inc, Dec. 2007, Not refereed

  
• Comprehensive Microsystems

  Toshiyuki Tsuchiya; Yogesh B. Gianchandani; Osamu Tabata; Hans Zappe, Silicon and Related Materials (Chapter 1)

  Elsevier Science, Sep. 2007, Not refereed

  
• MEMS/NEMSの最先端技術と応用展開

  土屋智由; 前田龍太郎; 澤田廉士; 青柳桂一, 加速度センサ(第5章第１項) pp. 165-171

  フロンティア出版, 2006, Not refereed