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Tsuchiya, Toshiyuki

Graduate School of Engineering, Division of Micro Engineering Professor

Tsuchiya, Toshiyuki
list
    Last Updated :2022/11/22

    Basic Information

    Faculty

    • 工学部

    Concurrent Affiliation

    • Center for the Promotion of Interdisciplinary Education and Research (C-PiER), ナノテクノロジーハブ拠点, ユニット長

    Professional Memberships

    • Institute of Electrical and Electronics Engineers
    • The Institute of Electrical Engineers of Japan
    • The Japan Society of Mechanical Engineers
    • Materials Research Society
    • SPIE, the international society for optics and photonics
    • The Japan Society of Applied Physics

    Academic Degree

    • (The University of Tokyo)
    • (Nagoya University)

    Academic Resume (Graduate Schools)

    • The University of Tokyo, School of Engineering, Department of Precision Mechanical Engineering, 修了
    • Nagoya University, Graduate School of Engineering, Department of Microsystem Engineering, 修了

    Academic Resume (Undergraduate School/Majors)

    • The University of Tokyo, Faculty of Engineering, Department of Precision Mechanical Engineering, 卒業

    Research History

    • From Sep. 2019, To Present
      Kyoto University, Graduate School of Engineering Department of Micro Engineering, Professor
    • From Apr. 2007, To Aug. 2019
      Kyoto University, Graduate School of Engineering Department of Micro Engineering, Associate Professor
    • From Apr. 2005, To Mar. 2007
      Kyoto University, Graduate School of Engineering Department of Micro Engineering, Associate Professor
    • From Mar. 2004, To Mar. 2005
      Kyoto University, Graduate School of Engineering Department of Mechanical Engineering, Associate Professor
    • From Apr. 1993, To Feb. 2004
      Toyota Central R&D Labs., Inc.

    Profile

    • Profile

      I am currently engaged in the research of silicon surface micromachining, its application in MEMS, the mechanical property evaluation of micro materials, and the reliability of MEMS devices.

    Language of Instruction

    • Japanese
    • English

    ID,URL

    Website(s) (URL(s))

    researchmap URL

    list
      Last Updated :2022/11/22

      Research

      Research Topics, Overview of the research

      • Research Topics

        Mechanical Properties Evaluation of Nano-/Micro-Materials, Micro Electromechanical Systems, MEMS, Microsystem, Inertial Sensor
      • Overview of the research

        I have been researching on microelectromechanical systems (MEMS), which is tiny sensors and actuators fabricated using semiconductor fabrication technologies. The main research topic is electrostatic MEMS, including accelerometers, vibrating gyroscopes and micromirrors. In addition, I am working on the mechanical reliability evaluation of MEMS and the mechanical properties evaluations of nano/micro materials used for MEMS.

      Research Interests

      • Mechanical Properties Evaluation of Micro Materials
      • Reliability of Micro/Nano Machines
      • Inertial Sensors
      • Micro Systems,MEMS (Micro Electro Mechanical Systems)
      • 慣性力センサ
      • マイクロマシン
      • マイクロシステム工学
      • MEMS
      • 薄膜材料の機械物性評価
      • Mechanical Properties Evaluation of Thin films
      • MEMS (Micro Electro Mechanical Systems)
      • Micro System Engineering

      Research Areas

      • Informatics, Mechanics and mechatronics
      • Informatics, Robotics and intelligent systems
      • Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Machine materials and mechanics
      • Nanotechnology/Materials, Nano/micro-systems
      • Nanotechnology/Materials, Nanomaterials

      Papers

      • Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon
        Yuanlin Xia; Makoto Suzuki; Peidong Xue; Yoshikazu Hirai; Toshiyuki Tsuchiya
        International Journal of Fatigue, Sep. 2022, Peer-reviewed, Last author
      • Effect of alternating a-C:H multilayer full coating on fracture behavior of single-crystal silicon-based microstructure in tensile and toughness tests
        Yuanlin Xia; Yoshikazu Hirai; Toshiyuki Tsuchiya
        Materials Science and Engineering: A, Oct. 2021, Peer-reviewed
      • Reliability Characterization of MEMS Materials
        TSUCHIYA Toshiyuki
        The Journal of the Institute of Electrical Engineers of Japan, 01 Jul. 2005
      • 5507 Spring constant measurement of MEMS structure using electromagnetic balance
        MIYAMOTO Kenji; JOMORI Tomoya; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        The proceedings of the JSME annual meeting, 2006
      • Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gei Processing
        TUCHIYA Toshiyuki; ITOH Toshihiro; SASAKI Gen; SUGA Tadatomo
        Journal of the Ceramic Society of Japan, 01 Mar. 1996
      • Gut-liver-axis microphysiological system for studying cellular fluidic shear stress and inter-tissue interaction
        Jiandong Yang; Yoshikazu Hirai; Satoshi Imamura; Toshiyuki Tsuchiya; Osamu Tabata; Ken-ichiro Kamei
        02 Feb. 2022
      • Mateiral Technologies of Silicon Sensor Devices (Special Issue Micromechanical Devices)
        TSUCHIYA Toshiyuki
        Journal of the Japan Society of Precision Engineering, 05 May 1999
      • 国際会議報告:The 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS2013 報告
        土屋 智由
        電気学会論文誌E(センサ・マイクロマシン部門誌), 2013
      • 432 Anisotropy effects in single crystal silicon on bend testing
        IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki
        The proceedings of the JSME annual meeting, 2008
      • 429 Effect of Surface Oxidation on Tensile Strength of Single Crystal Silicon
        TSUCHIYA Toshiyuki; MIYAMOTO Kenji; SUGANO Koji; Tabata Osamu
        The proceedings of the JSME annual meeting, 2008
      • 3310 Design Consideration on Tactile Sensor for Minimal Invasive Surgery
        TAMURA Tomohisa; EL-Bab Ahmed M.R.Fath; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        The proceedings of the JSME annual meeting, 2007
      • 2837 Development of High-Temperature Thin-Film Tensile Tester
        TSUCHIYA Toshiyuki; IKEDA Teturo; SUGANO Koji; Tabata Osamu
        The proceedings of the JSME annual meeting, 2007
      • Microfabricated alkali metal vapor cells filled with an on-chip dispensing component
        Shun Kiyose; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
        Japanese Journal of Applied Physics, 01 Jun. 2021
      • Design strategy of electrode patterns based on finite element analysis in microfluidic device for Trans‐Epithelial Electrical Resistance (TEER) measurement
        Takashi Miyazaki; Yoshikazu Hirai; Ken‐ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
        Electronics and Communications in Japan, Jun. 2021
      • Uniform needle-emitter arrays for ionic liquid electrospray thrusters with precise thrust control
        Fumiya Tachibana; Toshiyuki Tsuchiya; Yoshinori Takao
        Japanese Journal of Applied Physics, Mar. 2021, Peer-reviewed
      • Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate
        Kazutaka Obitani; Kazutaka Araya; Masanori Yachi; Toshiyuki Tsuchiya
        Journal of Microelectromechanical Systems, Jan. 2021, Peer-reviewed
      • 経上皮電気抵抗測定の高精度化に向けたOrgan-on-a-Chipの設計法
        宮崎 貴史; 平井 義和; 亀井 謙一郎; 土屋 智由; 田畑 修
        電気学会論文誌E(センサ・マイクロマシン部門誌), 2021, Peer-reviewed
      • Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded a-C:H film
        Yuanlin Xia; Yoshikazu Hirai; Toshiyuki Tsuchiya
        SURFACE & COATINGS TECHNOLOGY, Jan. 2021
      • Spin transport in a lateral spin valve with a suspended Cu channel
        Kenjiro Matsuki; Ryo Ohshima; Livio Leiva; Yuichiro Ando; Teruya Shinjo; Toshiyuki Tsuchiya; Masashi Shiraishi
        SCIENTIFIC REPORTS, Jul. 2020, Peer-reviewed
      • Surface-enhanced Raman spectroscopy with gold nanoparticle dimers created by sacrificial DNA origami technique
        Naoki Yamashita; Seongsu Park; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        MICRO & NANO LETTERS, May 2020, Peer-reviewed
      • Laser-driven optothermal microactuator operated in water
        Qingyang You; Yingda Wang; Ziyao Zhang; Haijun Zhang; Toshiyuki Tsuchiya; Osamu Tabata
        APPLIED OPTICS, Feb. 2020, Peer-reviewed
      • Design Strategy of Electrode Patterns Based on Finite Element Analysis in Microfluidic Device for Trans-Epithelial Electrical Resistance (TEER) Measurement
        Miyazaki Takashi; Hirai Yoshikazu; Kamei Ken-ichiro; Tsuchiya Toshiyuki; Tabata Osamu
        IEEJ Transactions on Sensors and Micromachines, 2020
      • Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids
        Jiaxu Wu; Yoshikazu Hirai; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
        ELECTRONICS AND COMMUNICATIONS IN JAPAN, Oct. 2019, Peer-reviewed
      • Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope
        Yunyi Shu; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2019, Peer-reviewed
      • Ferroelectric Extended Nanofluidic Channels for Room‐Temperature Microfuel Cells
        Yuriy Pihosh; Yutaka Kazoe; Kazuma Mawatari; Hangyeol Seo; Osamu Tabata; Toshiyuki Tsuchiya; Kenji Kitamura; Masahiro Tosa; Ivan Turkevych; Takehiko Kitamori
        Advanced Materials Technologies, Jun. 2019, Peer-reviewed
      • Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film
        Wenlei Zhang; Kazutaka Obitani; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        SENSORS AND ACTUATORS A-PHYSICAL, Feb. 2019, Peer-reviewed
      • AFMリソグラフィで作製したナノ領域へのDNAオリガミの特異的固定
        山下 直輝; 朴 晟洙; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修
        電気学会論文誌E(センサ・マイクロマシン部門誌), Jan. 2019, Peer-reviewed
      • 顕微ラマン分光を用いた単結晶シリコンへき開ナノギャップ間の温度差測定
        霜降 真希; 平井 義和; 土屋 智由; 田畑 修
        実験力学, Jan. 2019, Peer-reviewed
      • Novel Microfluidic Device Integrated with a Fluidic-Capacitor to Mimic Heart Beating for Generation of Functional Liver Organoids
        Wu Jiaxu; Hirai Yoshikazu; Kamei Ken-ichiro; Tsuchiya Toshiyuki; Tabata Osamu
        IEEJ Transactions on Sensors and Micromachines, Jan. 2019, Peer-reviewed
      • 単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測
        土屋 智由; 鈴木 淳也; 片岡 達哉; 平井 義和; 菅野 公二; 田畑 修
        実験力学, Jan. 2019, Peer-reviewed
      • A microfluidic device to investigate the effect of shear stress on metastasis
        UEDA Keita; HAGIHARA Takeshi; HIRAI Yoshikazu; KONDO Jumpei; INOUE Masahiro; TSUCHIYA Toshiyuki; KAMEI Ken-ichiro; TABATA Osamu
        The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019
      • Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges
        Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        SENSORS AND MATERIALS, Sep. 2018, Peer-reviewed
      • Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array
        Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), 01 Jul. 2018, Peer-reviewed
      • Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film
        Wenlei Zhang; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Applied Surface Science, 15 Jun. 2018, Peer-reviewed
      • Tensile strength of Silicon Nanowires batch-fabricated into electrostatic MEMS testing device
        Toshiyuki Tsuchiya; Tetsuya Hemmi; Jun-Ya Suzuki; Yoshikazu Hirai; Osamu Tabata
        Applied Sciences (Switzerland), 28 May 2018, Peer-reviewed
      • Numerical Investigation of Steady and Transient Ion Beam Extraction Mechanisms for Electrospray Thrusters
        Kazuma Emoto; Toshiyuki Tsuchiya; Yoshinori Takao
        Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Mar. 2018, Peer-reviewed
      • High-Yield Bridged Assembly of ssDNA-Modified SWCNT Using Dielectrophoresis
        Yusuke Shiomi; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
        International Journal of Automation Technology, 05 Jan. 2018
      • Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs
        Zhipeng Ma; Yunfei Huang; Seongsu Park; Kentaro Kawai; Do-Nyun Kim; Yoshikazu Hirai; Toshiyuki Tsuchiya; Hirofumi Yamada; Osamu Tabata
        Small, 04 Jan. 2018, Peer-reviewed
      • リンカーによる三角形DNAオリガミ二量体形成における支配要因の解明 (特集 平成29年度センサ・マイクロマシン部門総合研究会)
        稲垣 達也; 朴 晟洙; 山下 直輝; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修
        電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines, Jan. 2018, Peer-reviewed
      • Revealing the influential factor on dimerizing of triangular DNA origami by linker
        Tatsuya Inagaki; Seongsu Park; Naoki Yamashita; Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2018, Peer-reviewed
      • Mathematical modeling and analysis of MEMS deformable mirror actuated by electrostatic piston array
        Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2018, Peer-reviewed
      • Fabrication of ionic liquid-based pressure sensor with high sensitivity utilizing three-dimensional lithography and its characterization
        TSUJI Yusuke; HIRAI Yoshikazu; KAMEI Ken-ichiro; TSUCHIYA Toshiyuki; TABATA Osamu
        The Proceedings of the Symposium on Micro-Nano Science and Technology, 2018
      • Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique
        Naoki Yamashita; Zhipeng Ma; Seongsu Park; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        MICRO & NANO LETTERS, Nov. 2017, Peer-reviewed
      • Microfabricated emitter array for an ionic liquid electrospray thruster
        Kaito Nakagawa; Toshiyuki Tsuchiya; Yoshinori Takao
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2017, Peer-reviewed
      • Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design
        Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed
      • Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method
        Wenlei Zhang; Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed
      • Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap
        Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed
      • Dry Etching and Low-Temperature Direct Bonding Process of Lithium Niobate Wafer for Fabricating Micro/Nano Channel Device
        Toshiyuki Tsuchiya; SUGANO KOJI; Hideki Takahashi; H. Seo; Yuriy Pihosh; Yutaka Kazoe; Kazuma Mawatari; Takehiko Kitamori; Osamu Tabata
        The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2017), Jun. 2017, Peer-reviewed
      • Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro
        Ken-ichiro Kamei; Yoshiki Kato; Yoshikazu Hirai; Shinji Ito; Junko Satoh; Atsuko Oka; Toshiyuki Tsuchiya; Yong Chen; Osamu Tabata
        RSC ADVANCES, 2017, Peer-reviewed
      • 抗がん剤の副作用を再現する生体外ヒトモデル Body on a Chi
        亀井 謙一郎; 平井 義和; 加藤 義基; 土屋 智由; 田畑 修
        バイオエンジニアリング講演会講演論文集, 2017
      • Sensitivity characterization of pressure sensor using ionic liquid by finite element analysis
        TSUJI Yusuke; NAKANO Yu; HIRAI Yoshikazu; KAMEI Ken-ichiro; TSUCHIYA Toshiyuki; TABATA Osamu
        The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017
      • Fracture behavior of single crystal silicon with thermal oxide layer
        Toshiyuki Tsuchiya; Kenji Miyamoto; Koji Sugano; Osamu Tabata
        ENGINEERING FRACTURE MECHANICS, Sep. 2016, Peer-reviewed
      • Crystal orientation-dependent fatigue characteristics in micrometer-sized single-crystal silicon
        Tsuyoshi Ikehara; Toshiyuki Tsuchiya
        MICROSYSTEMS & NANOENGINEERING, Jul. 2016, Peer-reviewed
      • Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers
        Zhipeng Ma; Seongsu Park; Naoki Yamashita; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2016, Peer-reviewed
      • Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures
        Zhipeng Ma; Seongsu Park; Naoki Yamashita; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, Jun. 2016, Peer-reviewed
      • 培養細胞を用いたスクリーニング系の構築、毒性評価 抗がん剤副作用を再現する生体外モデルBody on a Chipの開発
        亀井 謙一郎; 平井 義和; 加藤 義基; 土屋 智由; 田畑 修
        組織培養研究, Mar. 2016
      • Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper
        Toshiyuki Tsuchiya; Yusuke Kogita; Akira Taniyama; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Feb. 2016, Peer-reviewed
      • Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding < 110 > and < 100 > single crystal silicon beams
        M. Elwi Mitwally; T. Tsuchiya; O. Tabata; S. Sedky
        MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Feb. 2016, Peer-reviewed
      • Development of a Body-on-a-Chip Using 3-D Microstructuring Technique
        Yoshiki Kato; Yoshikazu Hirai; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2016, Peer-reviewed
      • Graphene film development on flexible substrate using a new technique: temperature dependency of gauge factor for graphene-based strain sensors
        Sahour Sayed; Mohammed Gamil; Ahmed Fath El-Bab; Koichi Nakamura; Toshiyuki Tsuchiya; Osamu Tabata; Ahmed Abd El-Moneim
        SENSOR REVIEW, 2016, Peer-reviewed
      • Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures
        Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky
        SENSORS AND MATERIALS, 2016, Peer-reviewed
      • Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography
        Xiaoxu Ma; Yoshiki Kato; Floris van Kempen; Yoshikazu Hirai; Toshiyuki Tsuchiya; Fred van Keulen; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Dec. 2015, Peer-reviewed
      • Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers
        Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        MICRO & NANO LETTERS, Dec. 2015, Peer-reviewed
      • Analysis of aggregation reaction of silver nanoparticles in microchannel for highly sensitive Surface-Enhanced Raman Spectroscopy
        Koji Sugano; Hiroshi Katayama; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 01 Nov. 2015, Peer-reviewed
      • Fabrication and characterization of chain-like arrangement of gold nanoparticles using nanotemplates
        Koji Sugano; Ryoji Hiraoka; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 01 Nov. 2015, Peer-reviewed
      • Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy
        Zhipeng Ma; Young-Joo Kim; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Do-Nyun Kim; Osamu Tabata
        Micro & Nano Letters, Oct. 2015, Peer-reviewed
      • High-speed pulsed mixing in a short distance with high-frequency switching of pumping from three inlets
        K. Sugano; A. Nakata; T. Tsuchiya; O. Tabata
        JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Aug. 2015, Peer-reviewed
      • ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis
        Yoshikazu Hirai; Daisuke Takagi; Satoshi Anai; Yoshitomo Chihara; Toshiyuki Tsuchiya; Kiyohide Fujimoto; Yoshihiko Hirao; Osamu Tabata
        SENSORS AND ACTUATORS B-CHEMICAL, Jul. 2015, Peer-reviewed
      • ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis
        Yoshikazu Hirai; Daisuke Takagi; Satoshi Anai; Yoshitomo Chihara; Toshiyuki Tsuchiya; Kiyohide Fujimoto; Yoshihiko Hirao; Osamu Tabata
        SENSORS AND ACTUATORS B-CHEMICAL, Jul. 2015, Peer-reviewed
      • High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure
        Akio Uesugi; Takahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2015, Peer-reviewed
      • High-temperature tensile testing machine for investigation of brittle-ductile transition behaviour of single crystal silicon microstructure
        Akio Uesugi; akahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Japanese Journal of Applied Physics, Jan. 2015, Peer-reviewed
      • Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding and single crystal silicon beams
        Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky
        Microsystem Technologies, Jan. 2015, Peer-reviewed
      • Surface roughness modification of free standing single crystal silicon microstructures using KrF excimer laser treatment for mechanical performance improvement
        Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky
        Journal of Surface Engineered Materials and Advanced Technology, 2015, Peer-reviewed
      • ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価
        菅野公二; 平岡亮二; 土屋智由; 田畑修
        電気学会論文誌(センサ・マイクロマシン部門誌), 2015, Peer-reviewed
      • Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment
        Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2014, Peer-reviewed
      • Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers
        Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Mar. 2014, Peer-reviewed
      • Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators
        Praveen Singh Thakur; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Mar. 2014, Peer-reviewed
      • Study on vibration-coupling control of out-of-plane coupled resonator for anti-shock tuning fork gyroscopes
        Praveen Singh Thakur; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2014, Peer-reviewed
      • Effects of etching surface roughness on the fatigue characteristics of single-crystal silicon
        Tsuyoshi Ikehara; Toshiyuki Tsuchiya
        IEEJ Transactions on Sensors and Micromachines, 2014, Peer-reviewed
      • On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet
        K. Tsujimoto; K. Ban; Y. Hirai; K. Sugano; T. Tsuchiya; N. Mizutani; O. Tabata
        Journal of Micromechanics and Microengineering, Nov. 2013, Peer-reviewed
      • Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
        Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Electronics and Communications in Japan, May 2013, Peer-reviewed
      • Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity
        Tomoki Tanemura; Shuichi Yamashita; Hiroyuki Wado; Yukihiro Takeuchi; Toshiyuki Tsuchiya; Osamu Tabata
        JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Mar. 2013, Peer-reviewed
      • (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響
        上杉 晃生; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会論文集A編, Jan. 2013
      • Molecular level study of negative thick-film resist in MEMS by employing a coarse-grained molecular dynamics simulation
        Yoshikazu Hirai; Hiromasa Yagyu; Yoshihide Makino; Akio Uesugi; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2013, Peer-reviewed
      • Effect of surface morphology and crystal orientations on tensile fracture property of (110) single crystal silicon
        Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 2013, Peer-reviewed
      • Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration
        Tomoki Tanemura; Shuichi Yamashita; Hiroyuki Wado; Yukihiro Takeuchi; Toshiyuki Tsuchiya; Osamu Tabata
        JAPANESE JOURNAL OF APPLIED PHYSICS, Nov. 2012, Peer-reviewed
      • Fatigue of 1 mu m-scale gold by vibration with reduced resonant frequency
        Takashi Sumigawa; Kenta Matsumoto; Toshiyuki Tsuchiya; Takayuki Kitamura
        MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, Oct. 2012, Peer-reviewed
      • Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
        Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        POLYMER, Sep. 2012, Peer-reviewed
      • Low-Cycle to Ultrahigh-Cycle Fatigue Lifetime Measurement of Single-Crystal-Silicon Specimens Using a Microresonator Test Device
        Tsuyoshi Ikehara; Toshiyuki Tsuchiya
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Aug. 2012, Peer-reviewed
      • Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes
        Thakur Praveen Singh; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Jun. 2012, Peer-reviewed
      • Micromachined Tactile Sensor for Soft-Tissue Compliance Detection
        Ahmed M. R. Fath El Bab; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Mohamed E. H. Eltaib; Mohamed M. Sallam
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Jun. 2012, Peer-reviewed
      • Improved Designs for an Electrothermal In-Plane Microactuator
        Alex Man Ho Kwan; Sichao Song; Xing Lu; Lei Lu; Ying-Khai Teh; Ying-Fei Teh; Eddie Wing Cheung Chong; Yan Gao; William Hau; Fan Zeng; Man Wong; Chunmei Huang; Akira Taniyama; Yoshihide Makino; So Nishino; Toshiyuki Tsuchiya; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Jun. 2012, Peer-reviewed
      • Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to C-60 Nanowire Testing
        Toshiyuki Tsuchiya; Yasutake Ura; Koji Sugano; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Jun. 2012, Peer-reviewed
      • Mechanical and electrical clamping of DEP assembled SWCNT using electroless gold deposition
        Tatsuya Kataoka; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed
      • Out-of-plane bending vibration fracture test of polycrystalline silicon thin-film membrane
        Tomoki Tanemura; Shuichi Yamashita; Hiroyuki Wado; Yukihiro Takeuchi; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed
      • Tensile test on (110) <110> thin film single crystal silicon with different processing conditions
        Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed
      • Noise-induced chaos in the electrostatically actuated MEMS resonators
        Wen-Ming Zhang; Osamu Tabata; Toshiyuki Tsuchiya; Guang Meng
        PHYSICS LETTERS A, Jul. 2011, Peer-reviewed
      • Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
        Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2011, Peer-reviewed
      • Fabrication of Gold Nanoparticle Pattern Using Combination of Self-Assembly and Two-Step Transfer
        Koji Sugano; Takashi Ozaki; Toshiyuki Tsuchiya; Osamu Tabata
        SENSORS AND MATERIALS, 2011, Peer-reviewed
      • Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique
        K.Tsujimoto; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        International workshop on micro/nano-engineering, 2011, Peer-reviewed
      • Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system
        Koji Sugano; Yuki Uchida; Osamu Ichihashi; Hideo Yamada; Toshiyuki Tsuchiya; Osamu Tabata
        MICROFLUIDICS AND NANOFLUIDICS, Dec. 2010, Peer-reviewed
      • Embedded Microstructure Fabrication Using Developer-Permeability of Semi-Cross-Linked Negative Resist
        Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Oct. 2010, Peer-reviewed
      • A three-dimensional microstructuring technique exploiting the positive photoresist property
        Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Jun. 2010, Peer-reviewed
      • Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment
        T. Tsuchiya; Y. Yamaji; K. Sugano; O. Tabata
        EXPERIMENTAL MECHANICS, Apr. 2010, Peer-reviewed
      • Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens
        T. Ikehara; T. Tsuchiya
        MICRO & NANO LETTERS, Feb. 2010, Peer-reviewed
      • Mixing speed-and temperature-controlled microreactor for gold nanoparticle synthesis
        Koji Sugano; Yuki Uchida; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2010, Peer-reviewed
      • Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection
        Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2010, Peer-reviewed
      • Development of Amplitude-Controlled Parallel-Fatigue-Test System for Micro-Electromechanical Resonators
        Tsuyoshi Ikehara; Toshiyuki Tsuchiya
        SENSORS AND MATERIALS, 2010, Peer-reviewed
      • Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating
        Toshiyuki Tsuchiya; Tetsuro Ikeda; Akifumi Tsunematsu; Koji Sugano; Osamu Tabata
        SENSORS AND MATERIALS, 2010, Peer-reviewed
      • A multiple Degrees of Freedom Equivalent Circuit for a Comb-Drive Actuator
        Yuuki Nishimori; Hideta Ooiso; Shunsuke Mochizuki; Nobuyo Fujiwara; Toshiyuki Tsuchiya; Gen Hashiguchi
        JAPANESE JOURNAL OF APPLIED PHYSICS, Dec. 2009, Peer-reviewed
      • Development and Experimental Validation of Automatic Conversion Procedure from Mechanical to Electrical Connection for MEMS Equivalent Circuit
        Nobuyo Fujiwara; Kazuo Asami; Yasuroh Iriye; Tomoyuki Koike; Toshiyuki Tsuchiya; Gen Hashiguchi
        IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, May 2009, Peer-reviewed
      • Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes
        Toshiyuki Tsuchiya; Hiroyuki Hamaguchi; Koji Sugano; Osamu Tabata
        IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, May 2009, Peer-reviewed
      • Effects of anisotropic elasticity on stress concentration in micro mechanical structures fabricated on (001) single-crystal silicon films
        Tsuyoshi Ikehara; Toshiyuki Tsuchiya
        JOURNAL OF APPLIED PHYSICS, May 2009, Peer-reviewed
      • Free-standing C(60) nanowire fabricated using XeF(2) sacrificial dry etching
        Toshiyuki Tsuchiya; Yasutake Ura; Tomoya Jomori; Koji Sugano; Osamu Tabata
        JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, Jan. 2009, Peer-reviewed
      • Free-standing (C60) nanowire fabricated using XeF2 sacrificial dry etching
        Toshiyuki Tsuchiya; Yasutake Ura; Tomoya Jomori; Koji Sugano; Osamu Tabata
        Journal of Micro/Nanolithography, MEMS, and MOEMS, 2009, Peer-reviewed
      • Micro machined tactile sensor for soft tissue compliance detection
        A. M. R. Fath El Bab; K. Sugano; T. Tsuchiya; O. Tabata; M. E. H. Eltaib; M. M. Sallam
        PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, Peer-reviewed
      • MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity
        Yoshikazu Hirai; Hideaki Yoshimune; Kazuya Tsujimoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 2009, Peer-reviewed
      • 単結晶シリコン引張試験における表面酸化の影響評価
        土屋 智由; 宮本 憲治; 菅野 公二; 田畑 修
        日本機械学会2008年度年次大会, Aug. 2008
      • High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens
        T. Ikehara; T. Tsuchiya
        JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Jul. 2008, Peer-reviewed
      • Micro/nanoimprinting of glass under high temperature using a CVD diamond mold
        M. Komori; H. Uchiyama; H. Takebe; T. Kusuura; K. Kobayashi; H. Kuwahara; T. Tsuchiya
        JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Jun. 2008, Peer-reviewed
      • Design of a soft X-ray source with periodic microstructure using resonance transition radiation for tabletop synchrotron
        Koji Sugano; Weiyu Sun; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, May 2008, Peer-reviewed
      • Mechanical calibration of MEMS springs with sub-micro-Newton force resolution
        Kenji Miyamoto; Tomoya Jornori; Koji Sugano; Osamu Tabata; Toshiyuki Tsuchiya
        SENSORS AND ACTUATORS A-PHYSICAL, May 2008, Peer-reviewed
      • Air damping in a fan-shaped rotational resonator with comb electrodes
        Yuki Uchida; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Tsuyoshi Ikehara
        IEEJ Transactions on Sensors and Micromachines, 2008, Peer-reviewed
      • Design and Simulation of a Tactile Sensor for Soft-Tissue
        Ahmed M. R. Fath El Bab; Tomohisa Tamura; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Mohamed E. H. Eltaib; Mohamed M. Sallam
        電気学会センサ・マイクロマシン部門誌, 2008, Peer-reviewed
      • DNAを利用したAuナノ微粒子のシーケンシャルセルフアセンブル
        日下部 達哉; 種村 友貴; 樋口 雄一; 菅野 公二; 土屋 智由; 田畑 修
        粉体工学会, 2008, Peer-reviewed
      • 超小型触覚ディスプレイ用垂直駆動SMA 薄膜アクチュエータの設計
        吉川 弥; 篠部 晃生; 菅野 公二; 土屋 智由; 石田 章; 田畑 修
        電気学会センサ・マイクロマシン準部門誌, 2008
      • Design construction of beam structured vertical drive SMA thin film actuator for small tactile display
        Wataru Yoshikawa; Akio Sasabe; Kouji Sugano; Toshiyuki Tsuchiya; Akira Ishida; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2008, Peer-reviewed
      • Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer
        Takashi Ozaki; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Jun. 2007
      • High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system
        Tsuyoshi Ikehara; Toshiyuki Tsuchiya
        IEICE ELECTRONICS EXPRESS, May 2007
      • Moving mask UV lithography for three-dimensional structuring
        Yoshikazu Hirai; Yoshiteru Inamoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Feb. 2007
      • Sequential Stacking Self-Assembly using Interfacial Tension of Two Different Droplets
        Higuchi Yuichi; Sugano Koji; Tsuchiya Toshiyuki; Tabata Osamu
        The Journal of the Institute of Electrical Engineers of Japan, 2007, Peer-reviewed
      • Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films
        T Tsuchiya; M Hirata; N Chiba; R Udo; Y Yoshitomi; T Ando; K Sato; K Takashima; Y Higo; Y Saotome; H Ogawa; K Ozaki
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Oct. 2005
      • Tensile testing of silicon thin films
        T Tsuchiya
        FATIGUE & FRACTURE OF ENGINEERING MATERIALS & STRUCTURES, Aug. 2005
      • Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films
        T Tsuchiya; M Hirata; N Chiba
        THIN SOLID FILMS, Jul. 2005
      • A z-axis differential capacitive SOI accelerometer with vertical comb electrodes
        T Tsuchiya; H Funabashi
        SENSORS AND ACTUATORS A-PHYSICAL, Oct. 2004
      • CVD法と熱処理で作製した多結晶Si膜の粒界物性評価
        中野 由崇; 土屋 智由; 坂田 二郎
        電気学会論文誌E(センサマイクロマシン準部門誌), 2004, Peer-reviewed
      • Characteristics of Grain Boundaries in Polycrystalline Si Films fabricated by Chemical Vapor Deposition and Subsequent Annealing
        Yoshitaka Nakano; Toshiyuki Tsuchiya; Jiro Sakata
        IEEJ Transactions on Sensors and Micromachines, 2004, Peer-reviewed
      • 薄膜引張試験による多結晶シリコン膜のヤング率測定
        土屋 智由; 船橋 博文
        The Transaction E of The Institute of Electrical Engineering of Japan (電気学会E部門論文誌), 2003
      • Mechanical Properties Evaluation for MEMS/NEMS
        TSUCHIYA Toshiyuki
        Bulletin of the Japan Institute of Metals, 20 Oct. 2002
      • Formation of porous grain boundaries in polycrystalline silicon thin films
        Y Kageyama; Y Murase; T Tsuchiya; H Funabashi; J Sakata
        JOURNAL OF APPLIED PHYSICS, Jun. 2002, Peer-reviewed
      • Tensile testing system for sub-micrometer thick films
        T Tsuchiya; M Shikida; K Sato
        SENSORS AND ACTUATORS A-PHYSICAL, Apr. 2002, Peer-reviewed
      • Polysilicon vibrating gyroscope vacuum-encapsulated on-chip micro chamber
        Toshiyuki Tsuchiya; Yasuyuki Kageyama; Hirofumi Funabashi; Jiro Sakata
        Sensors and Actuators, A: Physical, 01 May 2001, Peer-reviewed
      • Vibrating gyroscope consisting of three layers of polysilicon thin films
        Toshiyuki Tsuchiya; Yasuyuki Kageyama; Hirofumi Funabashi; Jiro Sakata
        Sensors and Actuators, A: Physical, 15 May 2000, Peer-reviewed
      • Tensile testing of insulating thin films; humidity effect on tensile strength of SiO2 films
        T Tsuchiya; A Inoue; J Sakata
        SENSORS AND ACTUATORS A-PHYSICAL, May 2000, Peer-reviewed
      • Tensile Testing of Insulating Thin Films using Electrostatic Force Grip
        Toshiyuki Tsuchiya; Jiro Sakata
        IEEJ Transactions on Sensors and Micromachines, 1999, Peer-reviewed
      • Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films
        T Tsuchiya; O Tabata; J Sakata; Y Taga
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Mar. 1998, Peer-reviewed
      • Tensile Testing of Polycrystalline Silicon Thin Films Using Electrostatic Force Grip
        Toshiyuki Tsuchiya; Osamu Tabata; Jiro Sakata; Yasunori Taga
        IEEJ Transactions on Sensors and Micromachines, 1996, Peer-reviewed
      • Poisson's Ratio Evaluation of LPCVD Silicon Nitride Film
        Osamu Tabata; Toshiyuki Tsuchiya
        The Transaction E of The Institute of Electrical Engineering of Japan, 1996, Peer-reviewed

      Misc.

      • マイクロ・ナノ工学
        佐藤 一雄; 庄子 習一; 橋口 原; 鈴木 雄二; 三木 則尚; 土屋 智由; 鷲津 正夫
        日本機械学會誌 = Journal of the Japan Society of Mechanical Engineers, 05 Aug. 2008
      • 静電チャックを用いた薄膜引張り試験装置
        土屋 智由
        機械設計, Jun. 2002
      • Round Robin Test for Evaluation of Tensile Strength of Single Crystal Silicon
        TSUCHIYA Toshiyuki; SAKATA Jiro; SHIKIDA Mitsuhiro; SATO Kazuo; OGAWA Hirofumi
        電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 13 Sep. 2000
      • 薄膜の引張強度評価 (特集 マイクロセンサ用薄膜の機械的物性評価と解析)
        土屋 智由
        豊田中央研究所R&Dレビュ-, Mar. 1999
      • Tensile Testing of Insulating Thin Films Using Electrostatic Force Grip
        TSUCHIYA Toshiyuki; SAKATA Jiro
        電気学会研究会資料. SMP, センサ材料・プロセス技術研究会, 18 Nov. 1997
      • Tensile Testing of Insulating Thin Films ; Humidity Effect on Tensile Strength of SiO_2 Films
        TSUCHIYA Toshiyuki; INOUE Atsuko; SAKATA Jiro
        電気学会研究会資料. MM, マイクロマシン研究会, 07 Sep. 1999
      • Fatigue Life Prediction for Single Crystal Silicon Resonator
        TSUCHIYA Toshiyuki; INOUE Atsuko; SAKATA Jiro; HASHIMOTO Masato; YOKOYAMA Atsuko; SUGIMOTO Masahiro
        電気学会研究会資料. MM, マイクロマシン研究会, 05 Nov. 1998
      • Mechanical Reliability in MEMS
        TSUCHIYA Toshiyuki
        The Journal of reliability engineering association of Japan, 01 Apr. 2005
      • 多結晶Si膜の粒界キャラクタリゼーション (特集 マイクロセンサ用薄膜の機械的物性評価と解析)
        中野 由崇; 井上 敦子; 土屋 智由
        豊田中央研究所R&Dレビュ-, Mar. 1999
      • Development of Low X-ray Scattering Chamber for Recording Single-Molecule Conformational Changes of Proteins with the Diffracted X-ray Tracking Method
        清水 啓史; 田渕 友樹; 田原 樹生; 岩本 真幸; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017
      • シリコンの機械的信頼性
        土屋 智由
        機械の研究, Mar. 2015
      • 京都大学大学院 工学研究科 マイクロエンジニアリング専攻 ナノ・マイクロシステム工学研究室
        田畑 修; 土屋 智由
        電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Jul. 2006
      • Molecular Detection by Surface-Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimers Formed by Sacrificial DNA Origami Technique
        山下直輝; PARK Seongsu; 川合健太郎; 平井義和; 土屋智由; 田畑修
        センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 2019
      • 心臓拍動を模倣した圧力刺激印加による肝オルガノイド成熟化を目指すマイクロ流体デバイス
        三浦大知; 平井義和; 亀井謙一郎; 土屋智由
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2021
      • OS1418-467 Dynamic stress measurement of single crystal silicon microstructures using micro Raman spectroscopy
        TSUCHIYA Toshiyuki; KOGITA Yusuke; HIRAI Yoshikazu; TABATA Osamu
        M&M材料力学カンファレンス, 21 Nov. 2015
      • 731 Sensitivity matrix measurement of MEMS three-axis accelerometer using single-axis shaker
        TSUCHIYA Toshiyuki; NAKANO Atsushi; HIRAI Yoshikazu; TABATA Osamu; UMEDA Akira
        Dynamics and Design Conference : D & D, 25 Aug. 2015
      • 2122 Self-Assembly Process using Electrostatic Adhesion Energy By Contact Electrification and its Modeling
        Sato Ryo; TANEMURA Tomoki; HIGUCHI Yuichi; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        Conference on Information, Intelligence and Precision Equipment : IIP, 17 Mar. 2008
      • 2121 Manipulation system for nano / micro components integration via transportation and self-assembly
        HIGUCHI Yuichi; KUSAKABE Tatsuya; TANEMURA Tomoki; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        Conference on Information, Intelligence and Precision Equipment : IIP, 17 Mar. 2008
      • 29pm1-F-2 Integration of Silicon Nanowire to SOI-MEMS and Diameter Control Using Thermal Oxidation
        HEMMI Tetsuya; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        マイクロ・ナノ工学シンポジウム, 21 Oct. 2015
      • 29pm3-PN-49 Tensile Fracture Behaviors of (110) Silicon Microstructures at High Temperature
        UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        マイクロ・ナノ工学シンポジウム, 21 Oct. 2015
      • J2210305 Crystal orientation dependence of fracture probability in single crystal silicon
        IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki
        Mechanical Engineering Congress, Japan, 13 Sep. 2015
      • J2210406 Time-resolved micro-Raman stress measurement using electrostatic MEMS optical chopper
        TSUCHIYA Toshiyuki; KOGITA Yusuke; HIRAI Yoshikazu; TABATA Osamu
        Mechanical Engineering Congress, Japan, 13 Sep. 2015
      • J2210404 Tensile-Mode Fatigue Testing of Silicon Micro Structure with Integrated Strain Gauge
        UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        Mechanical Engineering Congress, Japan, 13 Sep. 2015
      • 1119 Tensile Testing of Carbon Nano Materials using Electrostatic MEMS Device
        JOMORI Tomoya; MIYAMOTO Kenji; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        Conference on Information, Intelligence and Precision Equipment : IIP, 19 Mar. 2007
      • Sacrificial DNA Origami Technique and its Application to Gold Nanoparticle Dimers with Nanogap
        山下 直輝; 朴 晟洙; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017
      • Rapid molecular sensing based on on-chip size-separation process of DNA origami
        Park Seongsu; Ma Zhipeng; Yamashita Naoki; Hirai Yoshikazu; Tsuchiya Toshiyuki; Tabata Osamu
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017
      • Effect of Emitter-Tip Boundary Conditions on Ion Beam Profiles for Numerical Analysis of Electrospray Thrusters
        江本 一磨; 土屋 智由; 鷹尾 祥典
        年会講演会講演集, 13 Apr. 2017
      • Development of Cs Vapor Cell Microfabricated with Porous Alumina Dispenser for Chip-Scale Atomic Clock
        寺島 健太; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 02 Oct. 2016
      • A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY
        松井 祐樹; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015
      • Development of a Body-on-a-Chip Using 3D Microstructuring Techniques
        加藤 義基; 平井 義和; 亀井 謙一郎; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015
      • Crystal-orientation dependent fatigue fracture and stress analysis in microscale silicon
        池原 毅; 土屋 智由
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015
      • Analysis of TEER measurement error depending on electrode patterns using finite element analysis
        宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        電気学会全国大会講演論文集(CD-ROM), 2020
      • 非アルコール性脂肪性肝疾患を再現する肝臓-小腸・オン・チップ
        亀井謙一郎; 楊建東; 飯田慶; 寺田志穂; 土屋智由; 田畑修; 平井義和
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2020
      • Design Strategy of Electrode Patterns Based on Finite Element Analysis in Microfluidic Device for Trans-Epithelial Electrical Resistance (TEER) Measurement
        宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        電気学会論文誌 E, 2020
      • Design of microelectrode array for transepithelial electrical resistance measurement based on electric current density analysis
        宮崎貴史; 平井義和; 亀井謙一郎; 田畑修; 田畑修; 土屋智由
        マイクロエレクトロニクスシンポジウム論文集, 2020
      • Improved Sensitivity of Ionic Liquid-Based Pressure Sensor Embedded in PDMS Microfluidic Devices
        辻 勇亮; 平井 義和; 亀井 謙一郎; 土屋 智由; 田畑 修
        マイクロエレクトロニクスシンポジウム論文集, 12 Sep. 2019
      • Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion
        Ikkei Yamauchi; Tomoki Tabuchi; Yoshikazu Hirai; Masayuki Iwamoto; Toshiyuki Tsuchiya; Hirofumi Shimizu; Osamu Tabata
        2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 01 Jun. 2019
      • Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation
        Masaki Shimofuri; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 01 Jun. 2019
      • Research and Development of Ultra-Small High-Thrust-Density Electrospray Thrusters
        Yoshinori TAKAO; Toshiyuki TSUCHIYA; Masayoshi NAGAO; Katsuhisa MURAKAMI
        Aeronautical and Space Sciences Japan, 05 Jan. 2019, Peer-reviewed
      • 有限要素解析を用いた経上皮電気抵抗測定マイクロ流体デバイス内電極形状の設計
        宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        電気学会全国大会講演論文集(CD-ROM), 2019
      • PDMS製マイクロ流体デバイスへ実装可能な高感度イオン液体型圧力センサ
        辻勇亮; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        マイクロエレクトロニクスシンポジウム論文集, 2019
      • A microfluidic device to investigate the effect of shear stress on metastasis
        植田啓太; 萩原健; 平井義和; 近藤純平; 井上正宏; 土屋智由; 亀井謙一郎; 田畑修
        日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2019
      • Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells
        Yoshikazu Hirai; Katsuo Nokamura; Yuichi Kimoto; Toshiyuki Tsuchiya; Osamu Tabata
        IFCS 2018 - IEEE International Frequency Control Symposium, 31 Dec. 2018
      • Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon
        Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018, 01 Nov. 2018
      • Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
        Yunyi Shu; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 11 May 2018
      • Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography
        Yoshikazu Hirai; Yusuke Tsuji; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 24 Apr. 2018
      • Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array
        Akiko Uno; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 24 Apr. 2018
      • Fabrication of microfluidic device with integrated Ag/AgCl electrode for trans-epithelial electrical resistance measurement
        宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        電気学会研究会資料, 2018
      • 3次元リソグラフィを応用したイオン液体型高感度圧力センサの作製と特性評価
        辻勇亮; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2018
      • Microfabrication of Cs-filled MEMS cell using sequential plasma activated bonding
        Kenta Terashima; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings, 27 Oct. 2017
      • Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique
        Naoki Yamashita; Zhipeng Ma; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata; Kentaro Kawai
        2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, 25 Aug. 2017
      • MEMS based fabrication of conformal electrode pairs for thermotunneling cooling
        Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai, 31 Jul. 2017
      • Thermomechanical noise of arrayed capacitive accelerometers with 300-NM-gap sensing electrodes
        Toshiyuki Tsuchiya; Yuki Matsui; Yoshikazu Hirai; Osamu Tabata
        TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 26 Jul. 2017
      • Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks
        Yoshikazu Hirai; Kenta Terashima; Katsuo Nakamura; Toshiyuki Tsuchiya; Osamu Tabata
        TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 26 Jul. 2017
      • Revealing the Influential Factor on Dimerizing of Triangular DNA Origami by Linker
        稲垣 達也; 朴 晟洙; 山下 直輝; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修
        電気学会研究会資料. MSS, 29 Jun. 2017
      • Simulation study of SU-8 structures realized by single-step projection photolithography
        K. Nakamura; Y. Hirai; T. Tsuchiya; O. Tabata; F. Larramendy; O. Paul
        Proceedings of IEEE Sensors, 05 Jan. 2017
      • 心筋細胞外電位測定のためのPDMS埋め込み型電極アレイ
        大牧達矢; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        電気学会全国大会講演論文集(CD-ROM), 2017
      • 心筋細胞外電位計測を目指したPDMS埋め込み型電極アレイの作製プロセス
        大牧達也; 平井義和; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2017
      • 微小圧力計測を目的としたPDMS製イオン液体型圧力センサ
        辻勇亮; 中野優; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2017
      • 有限要素解析を用いたイオン液体型圧力センサの感度特性評価
        辻勇亮; 中野優; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2017
      • 抗がん剤の副作用を再現する生体外ヒトモデルBody on a Chip
        亀井謙一郎; 平井義和; 加藤義基; 土屋智由; 田畑修
        バイオエンジニアリング講演会講演論文集(CD-ROM), 2017
      • TENSILE PROPERITIES OF SINGLE-CRYSTAL-SILICON FULLY COATED WITH SUBMICROMETER-THICK PECVD DLC
        Wenlei Zhang; Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017
      • MEMS deformable mirror actuated by electrostatic piston array
        Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        International Conference on Optical MEMS and Nanophotonics, 13 Sep. 2016
      • Numerical Investigation of Ion Beam Extraction Mechanism for Ionic Liquid Electrospray Thruster
        江本 一磨; 土屋 智由; 鷹尾 祥典
        宇宙科学技術連合講演会講演集, 06 Sep. 2016
      • Dependence of Beam Extraction Characteristics on Electrode Structures for Ionic Liquid Electrospray Thruster
        中川 洋人; 土屋 智由; 鷹尾 祥典
        宇宙科学技術連合講演会講演集, 06 Sep. 2016
      • Characteristics of Ion Beam Extraction for Ionic Liquid Electrospray Thruster
        中川 洋人; 土屋 智由; 鷹尾 祥典
        年会講演会講演集, 14 Apr. 2016
      • 抗がん剤副作用を再現する生体外モデルBody on a Chipの開発
        亀井謙一郎; 平井義和; 平井義和; 加藤義基; 土屋智由; 田畑修
        組織培養研究, 2016
      • Photoresist Micro-Chamber for the Diffracted X-ray Tracking Method Recording Single-Molecule Conformational Changes
        Kio Tahara; Yoshikazu Hirai; Hirohumi Shimizu; Toshiyuki Tsuchiya; Osamu Tabata
        Procedia Engineering, 2016
      • Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device
        Toshiyuki Tsuchiya; Tetsuya Hemmi; Jun Ya Suzuki; Yoshikazu Hirai; Osamu Tabata
        Procedia Structural Integrity, 01 Jan. 2016
      • Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °c of (110) Single Crystal Silicon Microstructures
        Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Procedia Structural Integrity, 01 Jan. 2016
      • MEMS3軸加速度センサのマトリックス感度並列計測
        土屋智由; 中野篤; 平井義和; 田畑修; 梅田章
        第62回応用物理学会春季学術講演会, Mar. 2015
      • DNAオリガミ架橋構造のシリコン基板への選択的形成
        朴晟洙; 馬志鵬; 平井義和; 土屋智由; 田畑修; 森裕都
        平成27年電気学会全国大会, Mar. 2015
      • 抗がん剤副作用を生体外で再現するBody on a Chipの開発
        亀井謙一郎; 平井義和; 平井義和; 加藤義基; 土屋智由; 田畑修
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2015
      • Multiple patterning with process optimization method for maskless DMD-based grayscale lithography
        X. Ma; Y. Kato; F. Kempen; Y. Hirai; T. Tsuchiya; F. Keulen; O. Tabata
        Procedia Engineering, 2015
      • Optimization methods for 3D lithography process utilizing DMD-based maskless grayscale photolithography system
        Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris van Kempen; Fred van Keulen; Toshiyuki Tsuchiya; Osamu Tabata
        OPTICAL MICROLITHOGRAPHY XXVIII, 2015
      • ULTRASENSITIVE SURFACE-ENHANCED RAMAN SPECTROSCOPY USING DIRECTIONALLY ARRAYED GOLD NANOPARTICLE DIMERS
        Koji Sugano; Daimon Matsui; Toshiyuki Tsuchiya; Osamu Tabata
        2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015
      • FET PROPERTIES OF SINGLE-WALLED CARBON NANOTUBES INDIVIDUALLY ASSEMBLED UTILIZING SINGLE STRAND DNA
        Kosuke Hokazono; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015
      • A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY UTILIZING SIZE EFFECT
        Y. Matsui; Y. Hirai; T. Tsuchiya; O. Tabata
        2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015
      • SIZE EFFECT ON BRITTLE-DUCTILE TRANSITION TEMPERATURE OF SILICON BY MEANS OF TENSILE TESTING
        A. Uesugi; Y. Hirai; T. Tsuchiya; O. Tabata
        2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015
      • SELECTIVE ASSEMBLY OF DNA NANOSTRUCTURE BRIDGING ONTO A TRENCHED SILICON SUBSTRATE
        Y. Mori; Z. Ma; S. Park; Y. Hirai; T. Tsuchiya; O. Tabata
        2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015, Peer-reviewed
      • MICROFLUIDIC DEVICE TO INTERCONNECT MULTIPLE ORGANS VIA FLUIDIC CIRCULATION: TOWARDS BODY-ON-A-CHIP
        Y. Kato; Y. Hirai; K. Kamei; T. Tsuchiya; O. Tabata
        2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015
      • Direct characterization of radial modulus of DNA nanotube by AFM nanoindentation
        Zhipeng Ma; Young-Joo Kim; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Do-Nyum Kim; Osamu Tabata
        2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2015
      • 灌流システムを搭載した副作用検査デバイス 〜ヒトES/iPS由来のBody on a chipを目指して〜
        加藤義基; 平井 義和; 亀井謙一郎; 土屋智由; 田畑修
        細胞アッセイ技術の現状と将来, Jan. 2015
      • Highly-sensitive surface enhanced raman spectroscopy with directionally-arrayed gold nanoparticle dimers
        K. Sugano; D. Matsui; Toshiyuki Tsuchiya; Osamu Tabata
        The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), Nov. 2014
      • MEMS慣性力センサの信頼性
        土屋 智由
        第6回「マイクロ・ナノ工学シンポジウム」, Oct. 2014
      • マイクロ構造上の面粗さによる強度低下の簡単な見積もり方法
        土屋 智由
        第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014
      • An Optimization Tool for 3D Lithography Utilizing DMD-based Maskless Exposure System
        Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris van Kempen; Fred van Keulen; Toshiyuki Tsuchiya; Osamu Tabata
        第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014
      • 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光
        菅野 公二; 松井 大門; 土屋 智由; 田畑 修
        第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014
      • 単結晶シリコンマイクロ構造体の引張応力下における脆性延性遷移
        上杉晃生; 平井義和; 土屋智由; 田畑修
        第6回「マイクロ・ナノ工学シンポジウム」, Oct. 2014
      • 一本鎖DNAにより孤立アセンブルした単層カーボンナノチューブの電気特性
        外薗洸佑; 鈴木淳也; 平井義和; 土屋智由; 田畑修
        第6回「集積化 MEMS シンポジウム」, Oct. 2014
      • Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature
        A. Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        The 27th International Microprocesses and Nanotechnology Conference, Fukuoka, Japan (4-7 October, 2014), Oct. 2014
      • Development of a High Efficient Proton Conductor Media using Extended-Nano Space under the outer Electric Field
        Y. Pihosh; N. Kabeta; K. Mawatari; Y. Kazoe; K. Kitamura; Osamu Tabata; Toshiyuki Tsuchiya; T. Kitamori
        The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), Oct. 2014
      • Revealing the radial elastic modulus of multi-layered DNA origami by AFM nanoindentation
        Zhipeng Ma; Seongsu Park; Yuto Mori; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        第58回日本学術会議材料工学連合講演会, 日本学術会議材料工学委員会,他関連34学協会, Oct. 2014
      • J2240303 High-Temperature Tensile Testing of Single Crystal Silicon Micro Structure in Vacuum Using Concentrated Infrared Light Heating
        UESUGI Akio; YASUTOMI Takahiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        Mechanical Engineering Congress, Japan, 07 Sep. 2014
      • 多段ICP-RIEプロセスにより一括作製したシリコンナノワイヤのMEMS引張試験
        土屋智由; 鈴木淳也; 平井義和; 田畑修
        日本機械学会2014年度年次大会,, Sep. 2014
      • 時間分解顕微ラマン分光のための両側静電駆動MEMS光チョッパ
        小北雄亮; 谷山彰; 平井義和; 土屋智由; 田畑修
        日本機械学会2014年度年次大会, Sep. 2014
      • 赤外集光加熱を用いた単結晶シリコンマイクロ構造体の真空中高温引張試験
        上杉晃生; 安富貴浩; 平井義和; 土屋智由; 田畑修
        日本機械学会2014年度年次大会, Sep. 2014
      • シリコン微小構造の表面粗さによる応力効果の推定
        池原 毅; 土屋 智由
        日本機械学会2014年度年次大会, Sep. 2014
      • MEMS3軸加速度センサの並列校正手法の検討
        土屋智由; 中野篤; 平井義和; 田畑修
        Dynamics and Design Conference 2014(D&D2014), 日本機械学会, Aug. 2014
      • 単結晶シリコンの高温機械的特性評価に向けた赤外光集光加熱による真空中高温引張試験
        上杉晃生; 平井義和; 土屋智由; 田畑修
        日本実験力学会2014年度年次講演会, Aug. 2014
      • エキシマレーザ照射による単結晶シリコンマイクロ構造の表面改質おび引張強度向上
        土屋智由; Mohamed E. Mitwally; 平井義和; 田畑修; Sherif Sedky
        日本機械学会M&M2014材料力学カンファレンス,, Jul. 2014
      • Towards batch assembly and integration of single-walled carbon nanotubes to micro-electromechanical devices
        Toshiyuki Tsuchiya
        2014 CMOS Emerging Technologies Research, Grenoble, Jul. 2014
      • Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment
        Mohamed E. Mitwally; Toshiyuki Tsuchiya; Osamu Tabata; Sherif Sedky
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2014
      • An optimization approach for 3D photolithography utilizing DMD maskless exposure system
        Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris Kempen; Fred Keulen; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Jun. 2014
      • Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C
        Akio Uesugi; Takahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Jun. 2014
      • 5-アミノレブリン酸による蛍光検出を使った膀胱癌細胞分別マイクロ流体システム
        平井義和; 高木大介; 穴井智; 千原良友; 土屋智由; 藤本清秀; 平尾佳彦; 田畑修
        平成26年度電気学会センサ・マイクロマシン部門総合研究会(バイオ・マイクロシステム研究会), 電気学会, May 2014
      • 一方向に配列した金ナノ粒子二量体構造の表面増強ラマン分光特性評価
        菅野公二; 松井大門; 土屋智由; 田畑修
        平成26年度電気学会センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会), 電気学会, May 2014
      • 蛍光検知とマイクロ流路を用いた光力学尿細胞診
        高木大介; 平井義和; 穴井智; 千原良友; 土屋智由; 藤本清秀; 平尾佳彦; 田畑修
        第23回泌尿器科分子・細胞研究会, 泌尿器科分子・細胞研究会, Mar. 2014
      • Photoresist-Based Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
        Yoshikazu Hirai; Daisuke Takagi; Satoshi Anai; Yoshitomo Chihara; Toshiyuki Tsuchiya; Kiyohide Fujimoto; Yoshihiko Hirao; Osamu Tabata
        28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014
      • Tensile Testing with Concentrated Infrared Light Heating in Vacuum for Single Crystal Silicon Mechanical Characterization at High Temperature
        上杉 晃生; 平井 義和; 土屋 智由; 田畑 修
        日本実験力学会講演論文集, Jan. 2014
      • DOUBLE-SIDE-DRIVE ELECTROSTATIC OPTICAL CHOPPER FOR TIME-RESOLVED RAMAN SPECTROSCOPY
        Yusuke Kogita; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
        2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014
      • LARGE-DISPLACEMENT ELECTROSTATIC DEFORMABLE MIRROR USING MOVABLE BOTTOM ELECTRODES
        Toshiyuki Tsuchiya; Vijay Kumar Singh; Yoshikazu Hirai; Osamu Tabata
        2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014
      • 蛍光検出とマイクロ流路を用いた尿中癌細胞分別システム
        高木大介; 平井義和; 穴井智; 千原良友; 藤本清秀; 土屋智由; 平尾佳彦; 田畑修
        化学とマイクロ・ナノシステム学会第28回研究会, 化学とマイクロ・ナノシステム学会, Dec. 2013
      • 原子磁気センサのための新規なオンチップアルカリ金属蒸気セルの作製手法と評価
        辻本和也; 藩和宏; 平井義和; 菅野公二; 土屋智由; 水谷夏彦; 田畑修
        第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, Nov. 2013
      • 時間分解顕微ラマン分光によるSi振動子の動的応力測定のための両側静電駆動型MEMS光チョッパ
        小北雄亮; 谷山彰; 平井義和; 田畑修; 土屋智由
        第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, Nov. 2013
      • 粗視化モデルを用いたMEMS化学増幅型ネガレジストの分子構造依存性解析
        成瀬圭介; 柳生裕聖; 平井義和; 土屋智由; 田畑修
        第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, Nov. 2013
      • 多結晶シリコン薄膜の面外共振振動による疲労破壊に及ぼす温度・湿度の影響評価
        種村友貴; 山下秀一; 和戸弘幸; 竹内幸裕; 田畑修; 土屋智由
        M&M2013材料力学カンファレンス, 日本機械学会, Oct. 2013
      • (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性
        上杉晃生; 平井義和; 菅野公二; 土屋智由; 田畑修
        日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013
      • 多段ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工
        鈴木淳也; 平井義和; 菅野公二; 土屋智由; 田畑修
        日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013
      • 単結晶シリコン振動子の疲労寿命に対する側壁粗さの影響
        池原 毅; 土屋 智由
        日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013
      • ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル
        外薗洸佑; 鈴木淳也; 平井義和; 菅野公二; 土屋智由; 田畑修
        日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013
      • Atomic MEMS のための新規なアルカリ金属蒸気セル作製手法
        辻本和也; 平井義和; 菅野公二; 土屋智由; 藩和宏; 水谷夏彦; 田畑修
        2013年電子情報通信学会・ソサイエティ大会, 電子情報通信学会, Sep. 2013
      • 3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価
        中野篤; 平井義和; 菅野公二; 土屋智由; 田畑修
        Dynamics and Design Conference 2013(D&D2013), 日本機械学会, Aug. 2013
      • 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性
        谷山彰; 小北雄亮; 平井義和; 田畑修; 土屋智由
        日本実験力学会2013年度年次講演会, Aug. 2013
      • Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations
        Akio Uesugi; Yoshikazu Hirai; Koji Sugan; Toshiyuki Tsuchiya; Osamu Tabata
        ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), Jul. 2013
      • Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography
        Y. Kato; Yoshikazu Hirai; F. van Kempen; F. van Keulen; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology, Apr. 2013
      • 節付きBoschプロセスによるシリコン3層構造の作製
        北村彰男; 平井義和; 菅野公二; 土屋智由; 田畑修
        平成25年電気学会全国大会, Mar. 2013
      • グレースケールDMD露光用3次元微細加工プロセスシミュレータ
        加藤義基; 平井義和; Floris van Kempen; Fred van Keulen; 菅野公二; 土屋智由; 田畑修
        平成25年電気学会全国大会, Mar. 2013
      • DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY
        T. Akishiba; N. Tamura; T. Ichii; Y. Hirai; K. Sugano; T. Tsuchiya; H. Sugimura; O. Tabata
        26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 2013
      • A MEMS Optical Chopper for Dynamic Stress Measurement of Single Crystalline Silicon Resonator Using Time-Resolved Micro Raman Spectroscopy
        小北 雄亮; 谷山 彰; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Jan. 2013
      • New fabrication method and evaluation of alkali-metal vapor cells for atomic magnetometer
        辻本 和也; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Jan. 2013
      • Angular rate sensitivity of SOI capacitive three-axis accelerometer
        中野 篤; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Jan. 2013
      • Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
        Daisuke Takagi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata; Satoshi Anai; Yoshitomo Chihara; Kiyohide Fujimoto; Yoshihiko Hirao
        2013 IEEE 7TH INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (NANOMED), 2013
      • Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon
        A. Uesugi; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013
      • SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection
        K. Sugano; H. Katayama; Y. Hirai; T. Tsuchiya; O. Tabata
        2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013
      • On-chip MEMS tensile testing device for mechanical characterization of nano-materials
        Toshiyuki Tsuchiya
        The first Bristol Univ.-Kyoto Univ. Joint Symposium, Jan. 2013
      • Dynamic response of pull-in type MEMS optical chopper for time-resolved micro-Raman spectroscopy
        谷山 彰; 小北 雄亮; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        日本実験力学会講演論文集, Jan. 2013, Peer-reviewed
      • AS-2-9 Atomic MEMSのための新規なアルカリ金属蒸気セル作製手法(AS-2.超小型量子発振器・センサ,シンポジウムセッション)
        辻本 和也; 平井 義和; 菅野 公二; 土屋 智由; 藩 和宏; 水谷 夏彦; 田畑 修
        電子情報通信学会ソサイエティ大会講演論文集, Jan. 2013
      • Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table
        Atsushi Nakano; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Akira Umeda
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2013
      • SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection
        K. Sugano; H. Katayama; Y. Hirai; T. Tsuchiya; O. Tabata
        2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013, Peer-reviewed
      • Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon
        A. Uesugi; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013, Peer-reviewed
      • DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY
        T. Akishiba; N. Tamura; T. Ichii; Y. Hirai; K. Sugano; T. Tsuchiya; H. Sugimura; O. Tabata
        26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 2013, Peer-reviewed
      • Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table
        Atsushi Nakano; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Akira Umeda
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2013, Peer-reviewed
      • 粗視化分子動力学シミュレーションによる架橋度制御ネガレジストの分子透過係数解析
        柳生 裕聖; 平井 義和; 牧野 圭秀; 菅野 公二; 土屋 智由; 田畑 修
        第29回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2012
      • シリコンセンサとマイクロ・ナノ材料 -MEMSデバイスの高信頼・高機能化に向けて-
        土屋 智由
        東京工業大学 精密工学研究所公開 技術講演会, Oct. 2012
      • 単層カーボンナノチューブの MEMS 引張試験における顕微ラマン分光を用いたひずみ測定
        鈴木 淳也; 片岡 達哉; 平井 義和; 菅野 公二; 土屋智由; 田畑 修
        第4回「マイクロ・ナノ工学シンポジウム」, Oct. 2012
      • 多結晶シリコン薄膜の面外曲げ振動を用いた疲労寿命評価
        種村 友貴; 山下 秀一; 和戸 弘幸; 竹内 幸裕; 土屋 智由; 田畑 修
        第4回「マイクロ・ナノ工学シンポジウム」, Oct. 2012
      • 701 Analysis of Dynamic Cross Sensitivity of Capacitive Three-axis MEMS Accelerometer
        TSUCHIYA Toshiyuki; Nakano Atsushi; UMEDA Akira; Tabata Osamu
        Dynamics and Design Conference : D & D, 17 Sep. 2012
      • 702 Evaluation of Effects of Rotational Motion on Vibration Table in Sensitivity Matrix Calibration of 3-axis Accelerometer
        Nakano Atsushi; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu; UMEDA Akira
        Dynamics and Design Conference : D & D, 17 Sep. 2012
      • 静電容量型3軸MEMS加速度センサの動的横感度の解析
        土屋 智由; 中野 篤; 梅田 章; 田畑 修
        日本機械学会Dynamics and Design Conference 2012, Sep. 2012
      • 3軸加速度センサのマトリックス感度校正における振動台回転運動の影響評価
        中野 篤; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修; 梅田 章
        日本機械学会Dynamics and Design Conference 2012, Sep. 2012
      • 加工条件の異なる(110)<111>単結晶シリコン薄膜の引張試験
        上杉 晃生; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会M&M2012材料力学カンファレンス, Sep. 2012
      • MEMSを応用したマイクロ・ナノ材料の機械的信頼性評価
        土屋 智由
        日本機械学会 2012 年度年次大会, Sep. 2012
      • Untitled
        Toshiyuki Tsuchiya; Osamu Tabata
        MICRO & NANO LETTERS, Aug. 2012
      • Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist
        Daimon Matsui; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), Jul. 2012
      • Fabrication of nanogap electrodes by gold nanorod growth on substrate
        NISHINO So; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu; TAKENAKA Yoshiko
        電気学会マイクロマシン・センサシステム研究会資料, 11 Jun. 2012
      • Analysis of aggregation reaction for silver nanoparticle dimers toward highly sensitive SERS
        KATAYAMA Hiroshi; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会マイクロマシン・センサシステム研究会資料, 11 Jun. 2012
      • 金ナノロッドの基板上成長によるナノギャップ電極の作製
        西野聡; 菅野公二; 武中能子; 平井義和; 土屋智由; 田畑修
        平成24年度電気学会マイクロマシン・センサシステム部門総合研究会(マイクロマシン・センサシステム研究会, Jun. 2012
      • 高感度SERS分析に向けた銀ナノ粒子二量体の凝集反応解析
        片山拓; 菅野公二; 平井義和; 土屋智由; 田畑修
        ステム部門総合研究会(マイクロマシン・センサシステム研究会), Jun. 2012
      • Out-of-plane Bending Reliability Test for Intrinsic Mechanical Strength of Polycrystalline Silicon Thin Film Using Etching-damage-less Membrane
        Tomoki Tanemura; Shuichi Yamashita; Hiroyuki Wado; Yukihiro Takeuchi; Toshiyuki Tsuchiya; Osamu Tabata
        2012 MRS Spring Meeting, San Francisco, Apr. 2012
      • Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes
        Praveen Thakur Singh; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        2012 MRS Spring Meeting, San Francisco, Apr. 2012
      • Temperature dependency of DNA origami self-assembly rate
        C. Huang; T. Akishiba; N. Tamura; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012
      • Fabrication of nanogap electrodes by gold nanorod growth on substrate
        S. Nishino; Y. Takenaka; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012
      • Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics
        H. Yagyu; Yoshikazu Hirai; A. Uesugi; Y. Makino; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012
      • Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer
        T. Kataoka; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012
      • 自己変位検出型静電櫛歯等価回路モデルを用いたMEMS振動ジャイロ解析
        徳崎裕幸; 平井義和; 菅野公二; 田畑 修; 土屋智由
        応用物理学会 第59回 応用物理学関係連合講演会, Mar. 2012
      • Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS
        Toshiyuki Tsuchiya; Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
        IFIP Advances in Information and Communication Technology, 2012
      • Fabrication of nanogap electrodes by gold nanorod growth on substrate
        NISHINO So; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu; TAKENAKA Yoshiko
        電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2012
      • Analysis of aggregation reaction for silver nanoparticle dimers toward highly sensitive SERS
        KATAYAMA Hiroshi; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2012
      • Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer
        T. Tsuchiya; O. Tabata; A. Umeda
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2012
      • ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR
        A. Kitamura; Y. Hirai; K. Sugano; O. Tabata; T. Tsuchiya
        2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012
      • DYNAMIC SENSITIVITY MATRIX MEASUREMENT FOR SINGLE-MASS SOI 3-AXIS ACCELEROMETER
        T. Tsuchiya; O. Tabata; A. Umeda
        2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012, Peer-reviewed
      • Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application
        Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Materials Research Society Symposium Proceedings, 2012, Peer-reviewed
      • ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR
        A. Kitamura; Y. Hirai; K. Sugano; O. Tabata; T. Tsuchiya
        2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012, Peer-reviewed
      • 国際会議報告:IEEE-NEMS 2012 報告
        土屋 智由
        IEEJ Transactions on Sensors and Micromachines, 2012
      • Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation
        Hiromasa Yagyu; Yoshikazu Hirai; Yoshihide Makino; Koji Sugano; Tsuchiya Toshiyuki; Osamu Tabata
        26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, Peer-reviewed
      • Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer
        T. Tsuchiya; O. Tabata; A. Umeda
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2012, Peer-reviewed
      • HIGH-SPEED PULSED MIXING WITH HIGH-FREQUENCY SWITCHING OF PUMPING FROM THREE MICROPUMPS
        Koji Sugano; Akihiro Nakata; Hideaki Yoshimune; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2, 2012, Peer-reviewed
      • Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist
        Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Proceedings of International Workshop on Micro/Nano-Engineering, Dec. 2011
      • 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術
        平井義和; 辻本和也; 菅野公二; 土屋智由; 田畑修
        電気学会電子回路研究会資料, 21 Nov. 2011
      • Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application
        H. Yagyu; Yoshikazu Hirai; A. Uesugi; Y. Makino; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        2011 MRS Fall Meeting, Nov. 2011
      • 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術
        平井義和; 辻本和也; 菅野公二; 土屋智由; 田畑修
        電気学会電子回路研究会(圧電デバイス・材料), Nov. 2011
      • 5-5 Cross comparison of fatigue behavior obtained by different testing methods on silicon thin film specimens
        Kamiya Shoji; Tsuchiya Toshiyuki; Ikehara Tsuyoshi; Ando Taeko; Namazu Takahiro; Takashima Kazuki
        マイクロ・ナノ工学シンポジウム, 25 Sep. 2011
      • 228 Study on the Standardization of Multi-axis Inertia Sensors : 2^ report : Comparison of the measurement on the sensitivity matrix
        UMEDA Akira; Tsuchiya Toshiyuki; FUKATSU Keisuke
        Dynamics and Design Conference : D & D, 04 Sep. 2011
      • 多軸慣性センサの標準に関する研究(第二報:感度マトリックスの比較測定)
        梅田 章; 土屋 智由; 深津 恵輔
        日本機械学会 Dynamics and Design Conference 2011, Sep. 2011
      • 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング
        片岡達也; 平井義和; 菅野公二; 土屋智由; 田畑修
        第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011
      • MEMS厚膜ネガレジストの粗視化分子動力学モデル
        平井義和; 柳生裕聖; 上杉晃生; 牧野圭秀; 菅野公二; 土屋智由; 田畑修
        第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011
      • ナノトレンチテンプレートを用いたナノギャップ制御可能なナノ粒子セルフアセンブリ
        菅野公二; 平岡亮二; Martin Klaumnzer; Michael Voigt; Wolfgang Peukert; 土屋智由; 田畑 修
        第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011
      • ナノギャップ電極の作製に向けた金ナノロッドの基板上成長
        西野聡; 菅野公二; 武仲能子; 田畑修; 土屋智由; 平井義和
        日本化学会第63回コロイドおよび界面化学討論会, Sep. 2011
      • エポキシ系ネガレジスト機械的特性の架橋度依存性
        上杉晃生; 牧野圭秀; 柳生裕聖; 平井義和; 菅野公二; 土屋智由; 田畑修
        日本機械学会2011年度年次大会, Sep. 2011
      • ガラスフリットリフローによる犠牲マイクロ流路気密封止技術の確立と小型原子磁気センサ実装への応用
        辻本和也; 平井義和; 菅野公二; 土屋智由; 田畑修
        関西ワークショップ2011, エレクトロニクス実装学会,, Jul. 2011
      • High-precision and High-yield Self-Assembly of Gold Nanoparticles using Nano-scale Trenches
        SUGANO Koji; HIRAOKA Ryoji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011
      • Synthesis of Gold Nanoparticle using High-speed Pulsed Mixing Microfluidic Device
        SUGANO Koji; YOSHIMUNE Hideaki; NAKATA Akihiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011
      • Equivalent Circuit Analysis of Nonlinearity Response in Electrostatic Comb Resonator
        KITAMURA Akio; HIRAI Yoshikazu; SUGANO Kouji; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011
      • 電気等価回路を用いた静電櫛歯型MEMS振動子の非線形応答解析
        北村 彰男; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        平成23年度電気学会マイクロマシン・センサシステム部門総合研究会, Jun. 2011
      • ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル
        菅野公二; 平岡亮二; 平井義和; 土屋智由; 田畑修
        平成23年度電気学会マイクロマシン・センサシステム部門総合研究会(マイクロマシン・センサシステム研究会), Jun. 2011
      • Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane
        平井 義和; 上杉 晃生; 牧野 圭秀; 柳生 裕聖; 菅野 公二; 土屋 智由; 田畑 修
        The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011),, pp. 62-63, Jun. 2011, Peer-reviewed
      • 716 Development of resonant fatigue test method for nano-scale component
        MATSUMOTO K.; SUMIGAWA T.; TSUCHIYA T.; KITAMURA T.
        日本材料学会学術講演会講演論文集, 24 May 2011
      • 微小構造体の共振疲労試験手法の開発
        松本 健太; 澄川 貴志; 土屋 智由; 北村 隆行
        日本材料学会 第60期学術講演会, May 2011
      • 高速脈動混合マイクロ流体デバイスを用いた均一粒子径金ナノ粒子の合成
        吉宗 秀晃; 中田 哲博; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        平成23年電気学会全国大会, Mar. 2011
      • Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity
        Praveen Singh Thakur; 菅野 公二; 土屋 智由; 田畑 修
        The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Feb. 2011, Peer-reviewed
      • 716 微小構造体の共振疲労試験手法の開発(疲労荷重下の破壊II,破壊の発生・進展とその解析・評価・計測,オーガナイスドセッション7)
        松本 健太; 澄川 貴志; 土屋 智由; 北村 隆行
        学術講演会講演論文集, Jan. 2011
      • High-precision and High-yield Self-Assembly of Gold Nanoparticles using Nano-scale Trenches
        SUGANO Koji; HIRAOKA Ryoji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2011
      • Sealing technique of potassium vapor cells for chip-scale atomic magnetometer
        HIRAI Yoshikazu; TSUJIMOTO Kazuya; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会研究会資料. ECT, 電子回路研究会, Jan. 2011
      • LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY
        A. Taniyama; Y. Hirai; K. Sugano; O. Tabata; T. Ikehara; T. Tsuchiya
        2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011
      • Equivalent Circuit Analysis of Nonlinearity Response in Electrostatic Comb Resonator
        KITAMURA Akio; HIRAI Yoshikazu; SUGANO Kouji; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2011
      • Synthesis of Gold Nanoparticle using High-speed Pulsed Mixing Microfluidic Device
        SUGANO Koji; YOSHIMUNE Hideaki; NAKATA Akihiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jan. 2011
      • Measurement of high-cycle fatigue lives of micrometer-sized single-crystal silicon specimens
        T. Ikehara; Toshiyuki Tsuchiya
        International Symposium on Plasticity and Its Current Applications, Jan. 2011
      • プロセス技術 : 解説特集の企画にあたって
        土屋 智由
        電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Jan. 2011
      • Designs for improving the performance of an electro-thermal in-plane actuator
        Alex Man Ho Kwan; Sichao Song; Xing Lu; Lei Lu; Ying Khai Teh; Ying Fei Teh; Eddie Wing Cheung Chong; Yan Gao; William Hau; Fan Zeng; Man Wong; Chunmei Huang; Akira Taniyama; Yoshihide Makino; So Nishino; Toshiyuki Tsuchiya; Osamu Tabata
        2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 2011, Peer-reviewed
      • Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS
        Toshiyuki Tsuchiya; Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
        2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 2011, Peer-reviewed
      • Epoxy-based permeable membrane fabrication for 3D microfluidic device
        Yoshikazu Hirai; Yusuke Nakai; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed
      • Configurable assembly of DNA origami on MEMS by microfluidic device
        Chunmei Huang; Takahiro Saeki; Masayuki Endo; Hiroshi Sugiyama; Chen-Hsun Weng; Gwo-Bin Lee; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed
      • Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection
        Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed
      • SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER
        K. Tsujimoto; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed
      • LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY
        A. Taniyama; Y. Hirai; K. Sugano; O. Tabata; T. Ikehara; T. Tsuchiya
        2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed
      • Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics
        Y. Hirai; A. Uesugi; Y. Makino; H. Yagyu; K. Sugano; T. Tsuchiya; O. Tabata
        2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed
      • High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis
        K. Sugano; H. Yoshimune; A. Nakata; Y. Hirai; T. Tsuchiya; O. Tabata
        2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed
      • Analysis of acceleration sensitivity in MEMS tuning fork gyroscope
        Praveen Singh Thakur; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed
      • Nanogap-controllable self-assembly of gold nanoparticles using nanotrench template
        K. Sugano; R. Hiraoka; T. Tsuchiya; O. Tabata; M. Klaumunzer; M. Voigt; W. Peukert
        2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed
      • High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels
        Koji Sugano; Hideaki Yoshimune; Akihiro Nakata; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed
      • Modal harmonie simulation of decoupled resonators for developing MEMS tuning fork gyroeope with low acceleration sensitivity
        Thakur Praveen Singh; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed
      • Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope
        Thakur Praveen Singh; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        EUROSENSORS XXV, 2011
      • CROSS COMPARISON OF FATIGUE LIFETIME TESTING ON SILICON THIN FILM SPECIMENS
        S. Kamiya; T. Tsuchiya; T. Ikehara; K. Sato; T. Ando; T. Namazu; K. Takashima
        2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed
      • Testing Methods for Micro- and Nano-Materials
        TSUCHIYA Toshiyuki
        Journal of the JSTP, 25 Nov. 2010
      • Nanogap-controllable Arrangement of Gold Nanoparticles Using Template-Assisted Self-Assembly
        Koji Sugano; Ryoji Hiraoka; Toshiyuki Tsuchiya; Osamu Tabata
        Core-to-Core 2010 World Network Seminar on Advanced Particle Science and Technology, Nov. 2010
      • MNM-3A-4 Crystallographic anisotropy analysis in fracture of micro-sized (110) single crystal silicon using Weibull statistics
        Wakita Taku; Hirai Yoshikazu; Sugano Koji; Tabata Osamu; Ikehara Tsuyoshi; Tsuchiya Toshiyuki
        日本機械学会マイクロ・ナノ工学シンポジウム講演論文集, 12 Oct. 2010
      • MNM-P11-3 Performance analysis of vibrating gyroscope using equivalent circuit of electrostatic comb transducer with built-in displacement detection
        TOKUSAKI Hiroyuki; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        マイクロ・ナノ工学シンポジウム, 12 Oct. 2010
      • (110)単結晶Si マイクロ試験片における破壊の結晶異方性のワイブル統計解析
        脇田 拓; 平井 義和; 菅野 公二; 田畑 修; 土屋 智由; 池原 毅
        第2回「マイクロ・ナノ工学シンポジウム」, 日本機械学会, Oct. 2010
      • 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析
        徳崎 裕幸; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        第2回「マイクロ・ナノ工学シンポジウム」, 日本機械学会, Oct. 2010
      • MNM-P11-3 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析(P11 電気等価回路から考えるMEMS設計手法)
        徳崎 裕幸; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        マイクロ・ナノ工学シンポジウム, Oct. 2010
      • MNM-3A-4 (110)単結晶Siマイクロ試験片における破壊の結晶異方性のワイブル統計解析(セッション 3A 単結晶・多結晶シリコンの疲労寿命評価とメカニズムの解明)
        脇田 拓; 平井 義和; 菅野 公二; 田畑 修; 池原 毅; 土屋 智由
        マイクロ・ナノ工学シンポジウム, Oct. 2010
      • チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術
        辻本 和也; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        第27回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2010
      • T0302-1-1 Crystal anisotropy on fracture behavior of (110) single-crystal silicon on tensile testing
        Wakita Taku; Hirai Yoshikazu; Sugano Koji; Tabata Osamu; Tsuchiya Toshiyuki; Ikehara Tsuyoshi
        The proceedings of the JSME annual meeting, 04 Sep. 2010
      • T0302-2-2 Local stress analysis of single-crystalline resonator using micro Raman spectroscopy
        TANIYAMA Akira; HIRAI Yoshikazu; SUGANO Koji; TABATA Osamu; IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki
        The proceedings of the JSME annual meeting, 04 Sep. 2010
      • T0302-1-1 (110)単結晶Siの引張試験における破壊の結晶異方性評価([T0302-1]高信頼マイクロ・ナノデバイスのための設計・計測技術(1):シリコンの破壊と疲労)
        脇田 拓; 平井 義和; 菅野 公二; 田畑 修; 土屋 智由; 池原 毅
        年次大会講演論文集 : JSME annual meeting, Sep. 2010
      • T0302-2-2 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析([T0302-2]高信頼マイクロ・ナノデバイスのための設計・計測技術(2):応力・ひずみ計測)
        谷山 彰; 平井 義和; 菅野 公二; 田畑 修; 池原 毅; 土屋 智由
        年次大会講演論文集 : JSME annual meeting, Sep. 2010
      • 単結晶Si の引張試験における破壊の結晶異方性評価
        脇田 拓; 平井 義和; 菅野公二; 田畑 修; 土屋 智由; 池原 毅
        日本機械学会2010年度年次大会, Sep. 2010
      • 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析
        谷山 彰; 平井 義和; 菅野 公二; 田畑 修; 池原 毅; 土屋 智由
        日本機械学会2010年度年次大会, Sep. 2010
      • MEMSを用いたナノスケールの材料計測
        土屋 智由
        計測自動制御学会関西支部平成22年度講習会, Jul. 2010
      • Crystal anisotropy on strength of single crystal silicon measured by tensile testing
        Taku,Wakita; Yoshikazu,Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tsuyoshi,Ikehara
        The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 44, Jul. 2010, Peer-reviewed
      • Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell
        Kazuya,Tsujimoto; Yoshikazu,Hirai; 菅野 公二; Tsuchiya, Toshiyuki; Tabata, Osamu
        The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 211, Jul. 2010, Peer-reviewed
      • 3方向からの交互脈動送液による高速2液混合
        菅野公二; 中田哲博; 平井義和; 土屋智由; 田畑修
        電気学会マイクロマシン・センサシステム研究会資料, 17 Jun. 2010
      • MEMS2010報告
        土屋 智由
        電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, Jun. 2010
      • High-Speed Mixing of Two Solutions using Alternate Pulsed Flow from Three Inlets Microchannels
        SUGANO Koji; NAKATA Akihiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jun. 2010
      • MEMS2010報告
        土屋 智由
        電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Jun. 2010
      • 第26回「センサ・マイクロマシンと応用システム」シンポジウム
        土屋 智由; 小野 崇人; 村上 裕二
        電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, Mar. 2010
      • 第26回「センサ・マイクロマシンと応用システム」シンポジウム
        土屋 智由; 小野 崇人; 村上 裕二
        電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Mar. 2010
      • 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価
        脇田拓; 菅野公二; 土屋智由; 田畑修; 池原 毅
        第1回マイクロ・ナノ工学シンポジウム,, pp. 39-40, Mar. 2010, Peer-reviewed
      • Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens
        T. Ikehara; T. Tsuchiya
        MICRO & NANO LETTERS, Feb. 2010, Peer-reviewed
      • DNA-grafted-polymer mediated self-assembly of micro components
        Guillermo Lopez; Tomoki Tanemura; Ryo Sato; Takahiro Saeki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Masahiro Fujita; Mizuo Maeda
        2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 2010, Peer-reviewed
      • Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection
        Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2010, Peer-reviewed
      • DNA Mediated self-assembly of micro-scale components and sites
        R. Sato; T. Tanemura; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 2010, Peer-reviewed
      • チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路機密封止技術
        辻本和也; 平井義和; 菅野公二; 土屋智由; 田畑修
        第27 回「センサーマイクロマシンと応用システム」シンポジウム(2010.10.14), 2010, Peer-reviewed
      • Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices Using Developer Permeability of Negative Thick-Film Resists
        Y. Hirai; Y. Nakai; K. Sugano; T. Tsuchiya; O. Tabata
        EUROSENSORS XXIV CONFERENCE, 2010, Peer-reviewed
      • New compensation technique for the soft tissue stiffness measurements using two sensor probes configuration
        A. M. R. Fath El Bab; K. Sugano; T. Tsuchiya; O. Tabata; M. E. H. Eltaib; M. M. Sallam
        EUROSENSORS XXIV CONFERENCE, 2010, Peer-reviewed
      • Technologies, applications, and reliabilities of microelectromechanical systems (MEMS)
        土屋 智由
        The 9th Society of Exploration Geophysicist of Japan International Symposium,, p. 22, Dec. 2009, Peer-reviewed
      • Development of MEMS Equivalent Circuit Generator
        FUJIWARA Nobuyo; ASAUMI Kazuo; KOIKE Tomoyuki; TSUCHIYA Toshiyuki; HASHIGUCHI Gen
        Technical report of IEICE. SDM, 05 Nov. 2009
      • MEMS等価回路ジェネレータの開発(プロセス・デバイス・回路シミュレーション及び一般)
        藤原 信代; 浅海 和雄; 小池 智之; 土屋 智由; 橋口 原
        電子情報通信学会技術研究報告. SDM, シリコン材料・デバイス, Nov. 2009
      • Technologies, applications, and reliabilities of microelectromechanical systems (MEMS)
        Toshiyuki Tsuchiya
        The 9th Society of Exploration Geophysicist of Japan International Symposium, Oct. 2009
      • マイクロリアクタによる金ナノ粒子合成技術を紹介します
        菅野公二; 土屋 智由; 田畑 修
        APPIE 産学官連携フェア2009, Oct. 2009
      • ナノ粒子を所望のパターンに配列する
        菅野公二; 平岡亮二; 土屋 智由; 田畑 修
        APPIE 産学官連携フェア2009, Oct. 2009
      • 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価
        脇田 拓; 菅野 公二; 土屋 智由; 田畑 修; 池原 毅
        第1回マイクロ・ナノ工学シンポジウム, Oct. 2009
      • 厚膜ネガレジストの埋め込み型流路作製のためのフォトリソグラフィ条件の決定手法
        平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 533-538, Oct. 2009, Peer-reviewed
      • 十字型混合流路による2液脈動混合の高速化
        中田 哲博; 菅野 公二; 土屋 智由; 田畑 修
        第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 483-486, Oct. 2009, Peer-reviewed
      • 自己変位検出機能を有する面内2自由度静電櫛歯電極の等価回路
        徳崎裕幸; 菅野公二; 土屋智由; 田畑 修
        第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 518-523, Oct. 2009, Peer-reviewed
      • T0302-2-3 Electrical equivalent circuit model of comb transducers valid for DC operating point analysis
        TOKUSAKI Hiroyuki; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        The proceedings of the JSME annual meeting, 12 Sep. 2009
      • T0302-1-1 Low cycle fracture test of a MEMS resonator
        IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki
        The proceedings of the JSME annual meeting, 12 Sep. 2009
      • Capacitive micromachined ultrasonic transducers with novel membrane design
        M. Sato; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        Procedia Chemistry, Sep. 2009
      • MEMS共振デバイスの低サイクル破壊試験
        池原 毅; 土屋 智由
        日本機械学会2009年度年次大会, Sep. 2009
      • MEMS素子のモデリング技術
        土屋 智由
        電子情報通信学会 2009年ソサイエティ大会 エレクトロニクス講演論文集2, Sep. 2009
      • 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築
        徳崎 裕幸; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会2009年度年次大会, Sep. 2009
      • T0302-2-3 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築(マイクロ・ナノ力学とシステム設計論(2))
        徳崎 裕幸; 菅野 公二; 土屋 智由; 田畑 修
        年次大会講演論文集 : JSME annual meeting, Sep. 2009
      • CT-1-2 MEMS素子のモデリング技術(チュートリアルセッション,CT-1.More than Mooreを実現するMEMS融合LSI技術,ソサイエティ企画)
        土屋 智由
        電子情報通信学会ソサイエティ大会講演論文集, Sep. 2009
      • T0302-1-1 Low cycle fracture test of a MEMS resonator
        IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki
        The proceedings of the JSME annual meeting, Sep. 2009
      • CT-1-2 Device Modeling in CMOS-MEMS
        Tsuchiya Toshiyuki
        Proceedings of the Society Conference of IEICE, 01 Sep. 2009
      • 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ
        菅野公二; 内田雄喜; 平井義和; 土屋智由; 田畑修
        電気学会マイクロマシン・センサシステム研究会資料, 23 Jul. 2009
      • Development of MEMS Equivalent Circuit Generator
        ASAUMI Kazuo; FUJIWARA Nobuyo; MIZUTA Chieki; MOCHIZUKI Shunsuke; KOIKE Tomoyuki; TSUCHIYA Toshiyuki; HASHIGUCHI Gen
        電気学会研究会資料. PHS, フィジカルセンサ研究会, 23 Jul. 2009
      • 平成21年度電気学会センサ・マイクロマシン部門総合研究会
        菅野公二; 内田雄喜; 平井 義和; 土屋 智由; 田畑 修
        平成21年度電気学会センサ・マイクロマシン部門総合研究会, Jul. 2009
      • Mixing speed- and temperature-controlled Microreactor for Gold Nanoparticle Synthesis
        SUGANO Koji; UCHIDA Yuki; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, Jul. 2009
      • Development of MEMS Equivalent Circuit Generator
        ASAUMI Kazuo; FUJIWARA Nobuyo; MIZUTA Chieki; MOCHIZUKI Shunsuke; KOIKE Tomoyuki; TSUCHIYA Toshiyuki; HASHIGUCHI Gen
        電気学会研究会資料. PHS, フィジカルセンサ研究会, Jul. 2009
      • Modeling of Self-face-alignment Process Using Contact Potential Difference
        佐藤 亮; 種村 友貴; Guillermo,Lopez Hinojosa; Mohammed,Serry ElSayed Ahmed; 菅野 公二; 土屋 智由; 田畑 修
        International Conference on Electronics Packaging (ICEP2009),, pp. 959-962, Apr. 2009, Peer-reviewed
      • Fabrication of Large-scale Nanoparticle Array Using Combination of Self-Assembly and 2-step Transfer
        SUGANO K; OZAKI T; TSUCHIYA T; TABATA O
        Int Conf Electron Packag, Apr. 2009, Peer-reviewed
      • 静電容量型MEMSデバイスを用いたカーボンナノ材料引張試験
        浦靖武; 菅野公二; 土屋智由; 田畑修
        電気学会全国大会講演論文集, 17 Mar. 2009, Peer-reviewed
      • 第25回「センサ・マイクロマシンと応用システム」シンポジウム
        橋口 原; 土屋 智由; 高尾 英邦; 山下 馨; 藤田 孝之; 佐々木 実; 阪田 知巳; 古賀 章浩; 安達 洋; 廣田 正樹; 中本 高道; 毛塚 博史; 室 英夫; 林 健司; 三木 則尚; 中西 博昭; 竹内 昌治; 杉山 正和; 小西 聡; 村上 裕二; 日暮 栄治; 澤田 廉士; 積 知範
        電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Mar. 2009
      • 静電容量型MEMSデバイスを用いたカーボンナノ材料引張試験
        浦 靖武; 菅野 公二; 土屋 智由; 田畑 修
        電気学会全国大会, Mar. 2009, Peer-reviewed
      • CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS
        土屋 智由
        Japan-Taiwan CMOS-MEMS Workshop 2009,, pp. 81-97, Mar. 2009, Peer-reviewed
      • 3DOF equivalent circuit model of a comb-drive actuator
        Y. Nishimori; N. Fujiwara; H. Ooiso; T. Tsuchiya; S. Mochizuoki; G. Hashiguchi
        TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009
      • Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist
        Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009, Peer-reviewed
      • Tensile testing of fullerene nano wire using electrostatic MEMS device
        Yasutake Ura; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009, Peer-reviewed
      • Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist
        Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009, Peer-reviewed
      • SEQUENTIAL AND SELECTIVE SELF-ASSEMBLY OF MICRO COMPONENTS BY DNA GRAFTED POLYMER
        T. Tanemura; G. Lopez; R. Sato; K. Sugano; T. Tsuchiya; O. Tabata; M. Fujita; M. Maeda
        IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, Peer-reviewed
      • Effective Fabrication Method for Monolithic 3-dimensional Embedded Microstructure using the Moving-mask UV Lithography Technique
        HIRAI Yoshikazu; INAMOTO Yoshiteru; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        Proc Sens Symp Sens Micromachines Appl Syst, 22 Oct. 2008, Peer-reviewed
      • Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system
        FUJIWARA N; ASAUMI K; IRIYE Y; KOIKE T; TSUCHIYA T; HASHIGUCHI G
        Proc Sens Symp Sens Micromachines Appl Syst, 22 Oct. 2008, Peer-reviewed
      • Semi-analytical Formula for the Capacitance of Vertical Comb Electrodes and its Applications
        MOCHIZUKI Shunsuke; TSUCHIYA Toshiyuki; HASHIGUCHI Gen; KOIKE Tomoyuki; MIZUTA Chieki
        Proc Sens Symp Sens Micromachines Appl Syst, 22 Oct. 2008, Peer-reviewed
      • Semi-analytical formula for the capacitance of vertical comb electrodes and its applications
        Mochizuki Shunsuke; Toshiyuki Tsuchiya; Hashiguchi Gen; Koike Tomoyuki; Mizuta Chieki
        25th Sensor Symposium, Oct. 2008, Peer-reviewed
      • Development and experimental validation of automatic conversion procedure from mechanical to electrical connection for MEMS equivalent circuit generation system
        Fujiwara N; Asaumi K; Irie Y; Koike T; Toshiyuki Tsuchiya; Hashiguchi G
        25th Sensor Symposium, Oct. 2008, Peer-reviewed
      • Effective fabrication method for monolithic 3-dimensional embedded microstructure using the moving-mask UV lithography technique
        Yoshikazu Hirai; Yoshiteru Inamoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        25th Sensor Symposium, Oct. 2008, Peer-reviewed
      • Electrical Equivalent Circuit Model of Microfluidic System Containing Piezoelectric Valveless Micropump and Viscoelastic PDMS Microchannnel
        中田 哲博; 田中 伸治; 菅野 公二; 土屋 智由; 田畑 修
        The 12th International Conference on Miniturized Systems for Chemistry and Life Sciences,, pp. 730-732, Oct. 2008, Peer-reviewed
      • 3-dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property
        Yoshikazu, Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
        The 22nd international conference EUROSENSORS (EUROSENSORS XXII),, pp. 1559-1602, Sep. 2008, Peer-reviewed
      • バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路
        中田哲博; 田中伸治; 菅野公二; 土屋智由; 田畑修
        日本機械学会年次大会講演論文集, 02 Aug. 2008, Peer-reviewed
      • 単結晶シリコンの曲げ試験における結晶異方性の効果
        池原毅; 土屋智由
        日本機械学会年次大会講演論文集, 02 Aug. 2008, Peer-reviewed
      • 単結晶シリコンの曲げ試験における結晶異方性の効果
        池原 毅; 土屋 智由
        日本機械学会2008年度年次大会, Aug. 2008, Peer-reviewed
      • バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路
        中田 哲博; 田中 伸治; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会2008年度年次大会, Aug. 2008, Peer-reviewed
      • 単結晶シリコン引張試験における表面酸化の影響評価
        土屋 智由; 宮本 憲治; 菅野 公二; 田畑 修
        日本機械学会2008年度年次大会,8, pp. 157-158, Aug. 2008, Peer-reviewed
      • セルフアセンブルによるマイクロ/ナノコンポーネントのMEMSへの集積化
        佐藤 亮; 種村 友貴; 菅野 公二; 土屋 智由; 田畑 修
        エレクトロニクス実装学会関西ワークショップ2008, Jul. 2008
      • 単結晶シリコンMEMSデバイスの破壊と疲労
        土屋 智由
        応用物理学会結晶工学分科会第129回研究会,, pp. 23-30, Jul. 2008, Peer-reviewed
      • ポジ型厚膜レジストの溶解速度の露光波長依存性と3次元加工への応用
        平井義和; 菅野公二; 土屋智由; 田畑修
        電気学会マイクロマシン・センサシステム研究会資料, 12 Jun. 2008, Peer-reviewed
      • ポジ型厚膜レジストの溶解速度の露光波長依存性と3次元加工への応用
        平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        平成20年度電気学会マイクロマシン・センサシステム部門総合研究会, Jun. 2008, Peer-reviewed
      • 電気等価回路モデルによる高周波駆動バルブレス圧電マイクロポンプの特性解析
        菅野 公二; 田中 伸治; 土屋 智由; 田畑 修
        平成20年度電気学会センサ・マイクロマシン部門総合研究会, Jun. 2008
      • Contact Potential Difference for Face Alignment of Submillimeter Components with Chemical Reaction Kinetics
        T. Tanemura; Y. Higuchi; T. Kusakabe; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Karl F Bhringer
        FNANO2008, Apr. 2008
      • 第24回「センサ・マイクロマシンと応用システム」シンポジウム
        橋口 原; 土屋 智由; 高尾 英邦
        電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 01 Mar. 2008
      • 微小コンポーネントの接触帯電によるセルフフェースアライメントプロセスのモデリング
        佐藤 亮; 種村 友貴; 樋口 雄一; 菅野 公二; 土屋 智由; 田畑 修
        機械学会 情報・知能・精密機器部門(IIP部門)講演会, Mar. 2008
      • 任意基板への微小要素の集積化のためのマニピュレーションシステム
        樋口 雄一; 日下部 達哉; 種村 友貴; 佐藤 亮; 菅野 公二; 土屋 智由; 田畑 修
        機械学会 情報・知能・精密機器部門(IIP部門)講演会, Mar. 2008
      • 櫛歯型垂直変位電極を用いた基板面内軸回転検出振動型SOI ジャイロスコープ
        濱口 裕之; 菅野 公二; 土屋 智由; 田畑 修
        電気学会全国大会,3, pp. 195-196, Mar. 2008, Peer-reviewed
      • レジスト現像特性の露光波長依存性を応用した厚膜レジストの3次元微細加工技術
        平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        電気学会全国大会,3, pp. 138-139, Mar. 2008, Peer-reviewed
      • Y-AXIS VIBRATING SOI GYROSCOPE USING VERTICAL COMB ELECTRODES
        H. Hamaguchi; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), 2008
      • Contact potential difference for sequential assembly and face alignment of submillimeter components
        T. Tanemura; Y. Higuchi; T. Kusakabe; K. Sugano; T. Tsuchiya; O. Tabata
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • DNA mediated sequential self-assembly of nano/micro components
        T. Kusakabe; T. Tanemura; Y. Higuchi; K. Sugano; T. Tsuchiya; O. Tabata
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing
        T. Ozaki; K. Sugano; T. Tsuchiya; O. Tabata
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • Manipulation system for nano/micro components integration via transportation and self-assembly
        Y. Higuchi; T. Kusakabe; T. Tanemura; K. Sugano; T. Tsuchiya; O. Tabata
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching
        T. Tsuchiya; T. Jomori; Y. Ura; K. Sugano; O. Tabata
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator
        T. Ikehara; T. Tsuchiya
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • Design and simulation of a tactile sensor for soft-tissue compliance detection
        Ahmed M.R. Fath El Bab; Tomohisa Tamura; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Mohamed E. H. Eltaib; Mohamed M. Sallam
        IEEJ Transactions on Sensors and Micromachines, 2008, Peer-reviewed
      • Effect of surface oxide layer on mechanical properties of single crystalline silicon
        Kenji Miyamoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES, 2008, Peer-reviewed
      • 第7章 7.2 力学センサ
        土屋 智由
        日本学術振興会 薄膜第131委員会編,薄膜ハンドブック第2版,, p. 1, 2008, Peer-reviewed
      • Design and simulation of a tactile sensor for soft-tissue compliance detection
        Ahmed M.R. Fath El Bab; Tomohisa Tamura; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Mohamed E. H. Eltaib; Mohamed M. Sallam
        IEEJ Transactions on Sensors and Micromachines, 2008, Peer-reviewed
      • Contact potential difference for sequential assembly and face alignment of submillimeter components
        T. Tanemura; Y. Higuchi; T. Kusakabe; K. Sugano; T. Tsuchiya; O. Tabata
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2008, Peer-reviewed
      • DNA mediated sequential self-assembly of nano/micro components
        T. Kusakabe; T. Tanemura; Y. Higuchi; K. Sugano; T. Tsuchiya; O. Tabata
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing
        T. Ozaki; K. Sugano; T. Tsuchiya; O. Tabata
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • Manipulation system for nano/micro components integration via transportation and self-assembly
        Y. Higuchi; T. Kusakabe; T. Tanemura; K. Sugano; T. Tsuchiya; O. Tabata
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2008, Peer-reviewed
      • Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching
        T. Tsuchiya; T. Jomori; Y. Ura; K. Sugano; O. Tabata
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator
        T. Ikehara; T. Tsuchiya
        MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, Peer-reviewed
      • Mechanical properties evaluation for MEMS materials and their standardization (Chapter 1)
        Tsuchiya, Toshiyuki; Oliver Brand; Gary K. Fedder; Christofer Hierold; Jan G. Korvink; Tabata, Osamu
        Advanced Micro and Nanosystems, Reliability of MEMS,, p. 1, Dec. 2007, Peer-reviewed
      • Effect of surface oxidation on mechanical properties of single crystalline silicon
        MIYAMOTO Kenji; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        Proc Sens Symp Sens Micromachines Appl Syst, 16 Oct. 2007, Peer-reviewed
      • Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes
        UCHIDA Yuki; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu; IKEHARA Tsuyoshi
        Proc Sens Symp Sens Micromachines Appl Syst, 16 Oct. 2007, Peer-reviewed
      • Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes
        Uchida Yuki; Kouji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Proceedings of the 24th Sensor Symposium, Oct. 2007, Peer-reviewed
      • Design and Simulation of a Micro Tactile Sensor for Soft-Tissue Compliance Detection
        Ahmed M. R. Fath El Bab; Mohamed E; H. Eltaib; Mohamed M. Sallam; Tomohisa, Tamura; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
        Proceedings of the 24th Sensor Symposium,, pp. 248-251, Oct. 2007, Peer-reviewed
      • 3313 Self-Assembly Using Electrostatic Adhesion Energy By Contact Electrification
        TANEMURA Tomoki; KUSAKABE Tatsuya; HIGUCHI Yuichi; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        The proceedings of the JSME annual meeting, Sep. 2007
      • 低侵襲触覚センサーの構造設計
        田村 智久; ファス エルバブアハメッド; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会2007年度年次大会, Sep. 2007
      • 移動マスクUV露光法によるポジ型厚幕レジストの3次元加工と形状シミュレーション技術
        平井 義和; 稲本 好輝; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会2007年度年次大会, Sep. 2007
      • Silicon and Related Materials (Chapter 1)
        Tsuchiya, Toshiyuki; Yogesh B. Gianchandani; Tabata, Osamu; Hans Zappe Ed
        Comprehensive Microsystems,, p. 1, Sep. 2007, Peer-reviewed
      • 高温薄膜引張試験装置の開発
        土屋 智由; 池田 哲郎; 土屋 智由; 田畑 修
        日本機械学会2007年度年次大会,1, pp. 729-730, Sep. 2007, Peer-reviewed
      • Parallel fatigue test of micromachined single crystal silicon using lateral resonating device
        Tsuyoshi, Ikehara; Tsuchiya, Toshiyuki
        MicroNanoReliability 2007 Conference,, p. 107, Sep. 2007, Peer-reviewed
      • ナノテンプレートを用いたセルフアセンブルによる粒子パターン形成
        尾崎 貴志; 菅野 公二; 土屋 智由; 田畑 修
        粉体工学会第43回夏期シンポジウム, Aug. 2007
      • DNAの選択性およい温度特性を利用したAuナノ微粒子のセルフアセンブル
        日下部 達哉; 種村 友貴; 樋口 雄一; 菅野 公二; 土屋 智由
        粉体工学会第43回夏期シンポジウム,, pp. 19-20, Aug. 2007, Peer-reviewed
      • 電気等価回路を用いたバルブレス圧電マイクロポンプの流れ特性解析とその実験的評価
        田中 伸治; 市橋 治; 菅野 公二; 土屋 智由; 田畑 修
        電気学会総合研究会, Jul. 2007
      • Fast Marching Methodを適用した移動マスクUV露光用加工形状シミュレーション技術
        平井 義和; 稲本 好輝; 菅野 公二; 土屋 智由; 田畑 修
        電気学会総合研究会, Jul. 2007
      • マイクロ流体デバイスを用いた混合速度制御による金ナノ粒子作製
        菅野 公二; 田中 伸治; 市橋 治; 土屋 智由; 田畑 修
        化学とマイクロシステム, Jun. 2007
      • Moving-mask UV lithography and embedded microchannels
        Yoshireru, Inamoto; Yoshikazu, Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
        The 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007),, pp. 31-32, Jun. 2007, Peer-reviewed
      • MEMS Reliability
        Tsuchiya, Toshiyuki
        The 20th International Conference on Microelectronic Test Structures,, pp. 105-123, May 2007, Peer-reviewed
      • 移動マスクUV露光法による埋め込み型流路の作製
        稲本 好輝; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        平成19年,電気学会全国大会, Mar. 2007
      • DNA修飾した微小コンポーネントのシーケンシャルセルフアセンブリ
        日下部達哉; 菅野公二; 土屋 智由; 田畑 修
        文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, Mar. 2007
      • EB描画によるナノパターンを用いたナノ粒子アセンブル
        菅野 公二; 尾崎 貴志; 土屋 智由; 田畑 修
        文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, Mar. 2007
      • 静電容量型MEMS デバイスを用いたカーボンナノ材料引張試験
        城森 知也; 宮本 憲治; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会情報・知能・精密機器部門講演会, Mar. 2007
      • Design and Simulation of a Tactile Sensor for Soft-Tissue Compliance Detection
        Ahmed M. R. Fath; El Bab; Tomohisa Tamura; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Mohamed E; H. Eltaib; Mohamed M. Sallam
        Proceedings of The 24th Sensor Symposium, 2007
      • Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes
        Yuki Uchida; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Tsuyoshi Ikehara
        Proceedings of The 24th Sensor Symposium, 2007
      • A differential capacitive three-axis SOI accelerometer using vertical comb electrodes
        H. Hamaguchi; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007
      • A differential capacitive three-axis SOI accelerometer using vertical comb electrodes
        H. Hamaguchi; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed
      • Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer
        Takashi Ozaki; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, Peer-reviewed
      • Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments
        Yusuke Yamaji; Koji Sugano; Osamu Tabata; Toshiyuki Tsuchiya
        PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, Peer-reviewed
      • Mechanical Calibration of MEMS Speing with 0.1-μm Force Resolution
        Miyamoto Kenji; Kouji Sugano; Osamu Tabata; Toshiyuki Tsuchiya
        The 20th IEEE International Conference on Micro Electro Mechanical Systems, Jan. 2007, Peer-reviewed
      • Effect of surface oxidation on mechanical properties of single crystalline silicon
        Miyamoto Kenji; Kouji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Proceedings of The 24th Sensor Symposium, 2007, Peer-reviewed
      • Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron
        Koji Sugano; Weiyu Sun; Toshiyuki Tsuchiya; Osamu Tabata
        PORTABLE SYNCHROTRON LIGHT SOURCES AND ADVANCED APPLICATIONS, 2007, Peer-reviewed
      • Tensile testing of single crystal silicon thin films at 800 degrees C using IR heating
        T. Ikeda; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed
      • Analysis of valveless piezoelectric micropump using electrical equivalent circuit model
        S. Tanaka; O. Ichihashi; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed
      • Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring
        Y. Hirai; Y. Inamoto; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed
      • A differential caeacitive three-axis SOI accelerometer using vertical comb electrodes
        H. Hamaguchi; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 2007, Peer-reviewed
      • Mechanical reliability of micro/nano-structures in MEMS devices
        Toshiyuki Tsuchiya
        MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 2007, Peer-reviewed
      • Temperature controlled capillary driven sequential stacking self-assembly using two different adhesives
        Yuichi Higuchi; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        6TH INTERNATIONAL IEEE CONFERENCE ON POLYMERS AND ADHESIVES IN MICROELECTRONICS AND PHOTONICS, PROCEEDINGS 2007, 2007, Peer-reviewed
      • Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer
        T. Ozaki; K. Sugano; T. Tsuchiya; O. Tabata
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2007, Peer-reviewed
      • Mechanical calibration of MEMS spring with 0.1-mu N force resolution
        Kenji Miyamoto; Tomoya Jomori; Koji Sugano; Osamu Tabata; Toshiyuki Tsuchiya
        PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, Peer-reviewed
      • Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron
        Koji Sugano; Weiyu Sun; Toshiyuki Tsuchiya; Osamu Tabata
        AIP Conference Proceedings, 2007, Peer-reviewed
      • 単層カーボンナノチューブ引張試験のための静電容量型MEMS デバイスの構造設計
        城森 知也; 宮本 憲治; 菅野 公二; 土屋 智由; 田畑 修
        第50回日本学術会議材料工学連合講演会, Dec. 2006
      • 高温薄膜引張試験機の試作および単結晶シリコン薄膜の物性評価
        池田 哲郎; 菅野 公二; 土屋 智由; 田畑 修
        第50回日本学術会議材料工学連合講演会, Dec. 2006
      • Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing
        OZAKI Takashi; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        Proc Sens Symp Sens Micromachines Appl Syst, 05 Oct. 2006, Peer-reviewed
      • A differential capacitive three-axis SOI accelerometer using vertical comb electrodes
        HAMAGUCHI Hiroyuki; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        Proc Sens Symp Sens Micromachines Appl Syst, 05 Oct. 2006, Peer-reviewed
      • 移動マスクUV露光法による厚膜レジストの三次元微細加工技術
        平井 義和; Inamoto; 菅野 公二; 土屋 智由; 田畑 修
        Proceedings of the 23rd Sensor Symposium, Oct. 2006
      • Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing
        Ozaki Takashi; Kouji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Proceedings of the 23rd Sensor Symposium, Oct. 2006, Peer-reviewed
      • 電磁式天秤を用いたマイクロ構造のバネ定数測定
        宮本 憲治; 城森 知也; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会2006年年次大会, Sep. 2006
      • Tensile and Tensile-mode Fatigue Test of Single Crystal Silicon in Various Environments
        Yusuke, Yamaji; Sugano, Kouji; Tabata, Osamu; Tsuchiya, Toshiyuki
        Asia-Pacific Conference of Transducers and Micro-Nano Technology,, p. 230, Jun. 2006, Peer-reviewed
      • 薄膜材料の高温引張試験に関する基礎検討
        池田哲郎; 菅野公二; 土屋 智由; 田畑 修
        電気学会E部門総合研究会, May 2006
      • 電気等価回路モデルによるバルブレス圧電マイクロポンプの設計・解析
        菅野 公二; 山田 英雄; 市橋 治; 土屋 智由; 田畑 修
        電気学会E部門総合研究会, May 2006
      • Tensile mode fatigue test of silicon thin films using electrostatic grip system
        Tsuchiya, Toshiyuki; Yusuke, Yamaji; Sugano, Kouji; Tabata, Osamu
        The 9th International Fatigue Congress,, p. 47, May 2006, Peer-reviewed
      • 単結晶シリコン薄膜の環境制御引張疲労試験
        山地 祐輔; 菅野 公二; 土屋 智由; 田畑 修
        電気学会全国大会, Mar. 2006
      • Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps
        K Sugano; H Yamada; O Ichihashi; T Tsuchiya; O Tabata
        MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, Peer-reviewed
      • 加速度センサ(第5章第1項)
        土屋 智由; 前田 龍太郎; 澤田 廉士; 青柳 桂一
        MEMS/NEMSの最先端技術と応用展開,, pp. 165-171, 2006, Peer-reviewed
      • Vertical drive micro actuator using SMA thin film for a smart button
        W Yoshikawa; A Sasabe; K Sugano; T Tsuchiya; O Tabata; A Ishida
        MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, Peer-reviewed
      • Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps
        K Sugano; H Yamada; O Ichihashi; T Tsuchiya; O Tabata
        MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, Peer-reviewed
      • Tensile-Mode Fatigue Test of Single Crystal Silicon Thin Films Using Electrostatic Grip
        Yusuke Yamaji; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, Oct. 2005
      • Gold Nanoparticles Synthesis With Pulsed Mixing Method
        Hideo Yamada; Osamu Ichihashi; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, Oct. 2005
      • Mechanical Testing of Integrated Microsystems
        Toshiyuki Tsuchiya
        FIS conference on future integrated systems, Cambridge, Aug. 2005
      • 粒子アセンブルにおける液中微粒子の付着力評価
        市橋 治; 李 周原; 石井 昌宏; 菅野 公二; 土屋 智由; 田畑 修
        電気学会E部門総合研究会, Jun. 2005
      • Material Properties: Measurement and Data
        Tabata, Osamu; Tsuchiya, Toshiyuki; J. G. Korvink; O. Paul Ed
        MEMS a practical guide to design,, pp. 53-87, 2005, Peer-reviewed
      • Tensile testing of MEMS materials
        Toshiyuki Tsuchiya
        Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, 2005, Peer-reviewed
      • 3-nm gap fabrication using gas phase sacrificial etching for quantum devices
        K Hamaguchi; T Tsuchiya; K Shimaoka; H Funabashi
        MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, Peer-reviewed
      • Mechanical reliability evaluation and its standardization of thin films used in MEMS
        T. Tsuchiya
        Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications, 2004, Peer-reviewed
      • Cross comparison of thin film tensile-testing methods examined with single-crystal silicon, polysilicon, nickel, and titanium films
        Toshiyuki Tsuchiya; Masakazu Hirata; Norio Chiba; Ryujiro Udo; Yuji Yoshitomi; Taeko Ando; Kazuo Sato; Kazuki Takashima; Yakichi Higo; Yasunori Saotome; Hirofumi Ogawa; Koichi Ozaki
        Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 Jul. 2003
      • Tensile test of bulk- and surface-micromachined 0.1-mu m thick silicon film using electrostatic force grip system
        T Tsuchiya; J Sakata; M Shikida; K Sato
        MATERIALS SCIENCE OF MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES IV, 2002, Peer-reviewed
      • Tensile strength and fracture toughness of surface micromachined polycrystalline silicon thin films prepared under various conditions
        T Tsuchiya; J Sakata; Y Taga
        THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII, 1998, Peer-reviewed
      • Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films
        T Tsuchiya; O Tabata; J Sakata; Y Taga
        MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, 1997

      Presentations

      • Material and Device Reliability in Si MEMS Sensors
        TSUCHIYA Toshiyuki
        The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), 08 Jul. 2012, Invited
      • CMOS-MEMS Design and Analysis Platform Development in Fine-MEMS (NEDO project)
        TSUCHIYA Toshiyuki
        Japan-Taiwan CMOS-MEMS Workshop 2009, 23 Mar. 2009, Invited
      • Accelerated lifetime test method for structural materials in MEMS devices using resonant vibration
        TSUCHIYA Toshiyuki
        Korea-Japan-China MEMS Standardization Workshop 2008, 20 Jun. 2008, Invited
      • Mechanical reliability of micro/nano-structures in MEMS devices
        TSUCHIYA Toshiyuki
        20th International Microprocesses and Nanotechnology Conference (MNC2007), 05 Nov. 2007, Invited
      • MEMS Reliability
        TSUCHIYA Toshiyuki
        The 20th International Conference on Microelectronic Test Structures, 19 Mar. 2007, Invited
      • Humidity effect on tensile strength and fatigue properties of single crystal silicon microstructures
        Tsuchiya, Toshiyuki
        Korea-Japan-China MEMS Standardization Workshop 2006,,, pp. 105-116, 22 Jun. 2006, Invited
      • Tensile testing of MEMS materials(2005)
        TSUCHIYA Toshiyuki
        Tech. Digest of the 13th International Conference of Solid-State Sensors and Actuators (Transduces ’05), 05 Jun. 2005, Invited
      • Mechanical reliability evaluation and its standardization of thin film used in MEMS
        TSUCHIYA Toshiyuki
        Technical Papers of Conference on Micro-Nano-Technologies for Aerospace Applications (CANEUS 2004), 01 Nov. 2004, Invited
      • 小さなものをつくるためのナノ/サブミクロン評価法 : μmからnm寸法のものをつくるための材料,物性,形状,機能の評価法
        肥後, 矢吉; 谷川, 紘; 鈴木, 健一郎; 磯野, 吉正; 荻, 博次; 土屋, 智由; 石山, 千恵美
        コロナ社, Jul. 2015
      • 小さなものをつくるためのナノ/サブミクロン評価法
        肥後矢吉; 谷川紘; 鈴木健一郎; 磯野吉正; 萩博次; 土屋智由; 石山千恵美, Joint work
        コロナ社, Jul. 2015, Not refereed
      • Reliability of MEMS : testing of materials and devices
        土屋, 智由; 田畑, 修
        Wiley-VCH, 2013
      • シリコンの破壊と疲労
        土屋智由; 佐藤一雄; 服部敏雄, 第1編 第12章 3節
        エヌ・ティー・エス, 2012, Not refereed
      • 力学センサ
        TSUCHIYA Toshiyuki, 第7章 7.2
        オーム社, 2008, Not refereed
      • Reliability of MEMS
        Toshiyuki Tsuchiya; Oliver Brand; Gary K. Fedder; Christofer Hierold; Jan G. Korvink; Osamu Tabata, Mechanical properties evaluation for MEMS materials and their standardization (Chapter 1)
        John Wiley & Sons Inc, Dec. 2007, Not refereed
      • Comprehensive Microsystems
        Toshiyuki Tsuchiya; Yogesh B. Gianchandani; Osamu Tabata; Hans Zappe, Silicon and Related Materials (Chapter 1)
        Elsevier Science, Sep. 2007, Not refereed
      • MEMS/NEMSの最先端技術と応用展開
        土屋智由; 前田龍太郎; 澤田廉士; 青柳桂一, 加速度センサ(第5章第1項) pp. 165-171
        フロンティア出版, 2006, Not refereed

      Industrial Property Rights

      • 特開2020-204506, 特願2019-111920, 振動ジャイロ
        帯谷 和敬; 土屋 智由; 荒屋 和貴; 谷内 雅紀
      • 特許第6598013号, 特開2016-085967, 特願2015-207235, プロトン伝導体および燃料電池
        嘉副 裕; ピホシュ ユーリ; 馬渡 和真; 北森 武彦; 北村 健二; 長田 貴弘; 田畑 修; 土屋 智由
      • 特許第6183012号, 特開2015-014543, 特願2013-142115, 半導体パッケージ
        種村 友貴; 山下 秀一; 和戸 弘幸; 土屋 智由
      • 特許第6176001号, 特開2014-130129, 特願2013-182150, ジャイロセンサ
        城森 知也; 土屋 智由
      • 特許第5884603号, 特開2013-210283, 特願2012-080693, ロールオーバージャイロセンサ
        城森 知也; 土屋 智由
      • 特開2015-161765, 特願2014-036315, 静電駆動可変ミラー
        土屋 智由
      • 特願2012-261335, ロールオーバージャイロセンサ
        城森知也; 土屋智由
      • 特許第5034043号, 特開2008-064603, 特願2006-242852, 加速度センサ、および加速度検出装置
        土屋 智由
      • 特許第4967204号, 特開2003-046091, 特願2001-234277, 微小構造体とその製造方法
        藤塚 徳夫; 船橋 博文; 土屋 智由
      • 特開2010-085506, 特願2008-251947, 光スキャナ及びこの光スキャナを備えた画像表示装置
        中村 博親; 各務 克巳; 田畑 修; 土屋 智由
      • 特開2009-210955, 特願2008-055733, 光スキャナ
        各務 克巳; 中村 博親; 田畑 修; 土屋 智由
      • 特許第4174351号, 特開2003-337138, 特願2003-059581, 可動電極を有する装置、可動ミラー装置、振動型ジャイロスコープ及びこれらの製造方法
        土屋 智由; 船橋 博文; 藤塚 徳夫; 光嶋 康一; 酒井 峰一
      • 特開2004-349398, 特願2003-143553, 熱電子変換素子および熱電子変換装置
        船橋 博文; 村田 香苗; 土屋 智由
      • 特許第3566809号, 特開平10-056186, 特願平8-212832, 多結晶シリコン薄膜の製造方法および多結晶シリコン薄膜構造体素子
        景山 恭行; 土屋 智由; 坂田 二郎; 山崎 信也; 橋本 雅人; 青 建一; 金丸 健次
      • 特許第3468127号, 特開2000-124188, 特願平10-306358, 多孔質透過膜及び微小容器の製造方法
        景山 恭行; 土屋 智由; 船橋 博文; 坂田 二郎
      • 特許第3376925号, 特開2000-055931, 特願平10-239496, 振動型半導体センサ及びその製造方法
        船橋 博文; 土屋 智由; 坂田 二郎; 景山 恭行; 藤塚 徳夫
      • 特許第3360683号, 特開2002-221474, 特願2001-019472, 薄膜引張試験装置
        土屋 智由
      • 特許第3331957号, 特開平11-288929, 特願平10-103798, 被処理構造体の表面処理方法
        坂田 二郎; 土屋 智由; 船橋 博文
      • 特許第3319257号, 特開平9-184794, 特願平7-343865, 薄膜引張試験方法および装置
        土屋 智由; 田畑 修
      • 特開2000-138381, 特願平10-327459, 密閉容器及びその製造方法
        船橋 博文; 土屋 智由; 坂田 二郎; 景山 恭行
      • 特開2000-124470, 特願平10-306360, 微小真空容器及びその製造方法
        景山 恭行; 土屋 智由; 船橋 博文; 坂田 二郎
      • 特開2000-124469, 特願平10-306359, 微小密閉容器及びその製造方法
        坂田 二郎; 景山 恭行; 土屋 智由; 船橋 博文
      • 特開2000-055670, 特願平10-236331, 振動式検出器
        土屋 智由; 船橋 博文; 坂田 二郎
      • 特開平10-185787, 特願平8-347448, 疲労試験装置
        土屋 智由; 坂田 二郎; 多賀 康訓

      Awards

      • Apr. 2000
        電気学会, 電気学会論文発表賞
      • 01 Nov. 2018
        日本機械学会 マイクロ・ナノ工学部門, 貢献表彰
      • 01 Feb. 2019
        日本機械学会 マイクロ・ナノ工学部門, 優秀講演論文表彰
      • 20 Oct. 2008
        経済産業省 産業技術環境局, 経済産業省工業標準化事業表彰 産業技術環境局長表彰 国際標準化奨励者 受賞
      • 15 Oct. 2012
        International Electrotechnical Commission, IEC 1906 Award

      External funds: Kakenhi

      • 微小電極間エレクトロスプレー現象解明による超小型宇宙推進機の多用途化
        Grant-in-Aid for Scientific Research (B)
        Basic Section 24010:Aerospace engineering-related
        Yokohama National University
        鷹尾 祥典
        From 01 Apr. 2021, To 31 Mar. 2024, Granted
        電気推進;電界放出;イオン液体;超小型衛星;推力可変
      • Heat Transfer Measurement on Nanogap -Investigation of Transition from Radiation to Heat Conduction
        Grant-in-Aid for Scientific Research (B)
        Basic Section 19020:Thermal engineering-related
        Kyoto University
        土屋 智由
        From 01 Apr. 2021, To 31 Mar. 2024, Granted
        ナノギャップ;熱輸送;伝熱;サーモリフレクタンス;MEMS
      • Reservoir computing with MEMS resonators
        Grant-in-Aid for JSPS Fellows
        Basic Section 20010:Mechanics and mechatronics-related
        Kyoto University
        From 28 Apr. 2021, To 31 Mar. 2023, Granted
      • MEMS共振器を用いたリザバーコンピューティング
        Grant-in-Aid for JSPS Fellows
        Basic Section 20010:Mechanics and mechatronics-related
        Kyoto University
        From 13 Nov. 2020, To 31 Mar. 2023, Declined
      • Ultracompact electrospray space propulsion that can dramatically increase thrust density and secure redundant system
        Grant-in-Aid for Scientific Research (B)
        Basic Section 24010:Aerospace engineering-related
        Yokohama National University
        Yoshinori TAKAO
        From 01 Apr. 2018, To 31 Mar. 2021, Project Closed
        エレクトロスプレー;イオン液体;イオンビーム;電気推進;超小型衛星;電界放出;高密度
      • Drastic improvement of efficiency for micro space propulsion using 3D-MEMS fabrication technique
        Grant-in-Aid for Challenging Exploratory Research
        Yokohama National University
        Yoshinori Takao
        From 01 Apr. 2015, To 31 Mar. 2017, Project Closed
        エレクトロスプレー;イオン液体;イオンビーム;超小型衛星;電気推進;粒子計算;微細加工
      • Thermal properties mesurement device for nanogap
        Grant-in-Aid for Challenging Exploratory Research
        Kyoto University
        Toshiyuki Tsuchiya
        From 01 Apr. 2014, To 31 Mar. 2016, Project Closed
        ナノギャップ;熱膨張アクチュエータ;静電櫛歯アクチュエータ;へき開破壊;単結晶シリコン;熱電子放出;MEMS;熱アクチュエータ;静電アクチュエータ;SOI
      • Time-resolved local-stress measurement of MEMS resonating structure using micro Raman spectroscopy
        Grant-in-Aid for Challenging Exploratory Research
        Kyoto University
        Toshiyuki TSUCHIYA
        From 01 Apr. 2012, To 31 Mar. 2014, Project Closed
        動的局所応力計測;シリコン;顕微ラマン分光;光チョッパー;静電アクチュエータ;振動子;時間分解応力測定;共振子;マイクロマシン;光チョッパ
      • Explanation of reaction layer fatigue in silicon microstructure for development of highly-reliable MEMS devices
        Grant-in-Aid for Young Scientists (S)
        Kyoto University
        Toshiyuki TSUCHIYA
        From 01 Apr. 2007, To 31 Mar. 2012, Project Closed
        シリコン;MEMS;引張試験;疲労試験;酸化;信頼性;単結晶シリコン;二酸化シリコン;腐食疲労;寿命予測;顕微ラマン分光;力学特性;共振振動;信頼化;酸素析出欠陥;高温試験
      • カーボンナノ構造体力学特性評価のための静電力駆動、静電容量検出MEMSデバイス
        Grant-in-Aid for Exploratory Research
        Kyoto University
        土屋 智由
        From 01 Apr. 2007, To 31 Mar. 2008, Project Closed
        フラーレン;MEMS;機械特性;引張試験;静電容量;電子ビーム露光;静電アクチュエータ;SOI
      • MEMSデバイスの高信頼化のための単結晶シリコンの表面反応疲労現象の理解と制御
        Grant-in-Aid for Young Scientists (A)
        Kyoto University
        土屋 智由
        From 01 Apr. 2006, To 31 Mar. 2008, Project Closed
        単結晶シリコン;MEMS;疲労試験;酸化;腐食疲労;高温試験;二酸化シリコン;機械特性
      • Cognitive sensing system where machines perform machine learning
        Grant-in-Aid for Challenging Research (Pioneering)
        Medium-sized Section 20:Mechanical dynamics, robotics, and related fields
        Kyoto University
        土屋 智由
        From 30 Jun. 2022, To 31 Mar. 2025, Granted
        リザバーコンピューティング;MEMS;非線形振動子;機械学習;センサ
      • 理想ナノすきまにおける境界/流体潤滑場での原理的摩擦力学特性の取得
        Grant-in-Aid for Challenging Research (Exploratory)
        Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
        Kyoto University
        平山 朋子
        From 30 Jun. 2022, To 31 Mar. 2024, Granted
        トライボロジー;潤滑;ナノすきま

      External funds: others

      • デジタル社会に貢献する立体構造のニオブ酸リチウム圧電素子を搭載した高精度MEMS振動ジャイロ開発 (2021年度分)
        経済産業省, 中小企業経営支援等対策費補助金
        From 01 Apr. 2021, To 31 Mar. 2022
        分担
      • 垂直検出櫛形電極を用いた静電容量型3軸加速度センサ
        JSTシーズ育成試験
        From 01 Jun. 2006, To 31 Jan. 2007
        土屋智由
      • 低温熱電子発電のためのシリコンナノギャップ電気伝導特性測定評価補助事業 (平成28年度分)
        自転車等機械工業振興事業
        From 01 Apr. 2016, To 31 Mar. 2017
        土屋 智由
      • ニオブ酸リチウム単結晶ディスク振動型ジャイロスコープ
        JST A-STEP 機能検証フェーズ試験研究タイプ
        From 01 Sep. 2018, To 31 Aug. 2019
        土屋智由
      • 単結晶ニオブ酸リチウム軸対称型振動ジャイロスコープ
        JST A-STEP 機能検証フェーズ 実証研究タイプ
        From 18 Nov. 2019, To 31 Mar. 2021
        土屋智由
      • 円環型振動子を用いたセンサ一体型MEMSリザバーコンピューティング
        立石科学技術振興財団 研究助成(A)
        From 31 Mar. 2021, To 01 Apr. 2022
        土屋智由
      list
        Last Updated :2022/11/22

        Education

        Teaching subject(s)

        • From 01 Apr. 2022, To 31 Mar. 2023
          Advanced Mechanical Engineering
          K013, Fall, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Engineering Internship M
          G049, Fall, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Mechanical and System Engineering Laboratory 1
          5056, Spring, Faculty of Engineering, 1
        • From 01 Apr. 2022, To 31 Mar. 2023
          Introduction to the Design and Implementation of Micro-Systems
          V202, Fall, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Engineering Ethics and Management of Technology
          G057, Spring, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Engineering Internship DS
          W021, Fall, Graduate School of Engineering, 4
        • From 01 Apr. 2022, To 31 Mar. 2023
          Internship
          5124, Fall, Faculty of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Engineering Internship DL
          V020, Fall, Graduate School of Engineering, 6
        • From 01 Apr. 2022, To 31 Mar. 2023
          Mechanical and System Engineering Laboratory 1
          5056, Fall, Faculty of Engineering, 1
        • From 01 Apr. 2022, To 31 Mar. 2023
          Micro Electro Mechanical System Creation
          V201, Fall, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Design of Complex Mechanical Systems
          X411, Fall, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Engineering Internship DS
          V019, Fall, Graduate School of Engineering, 4
        • From 01 Apr. 2022, To 31 Mar. 2023
          Engineering Internship DL
          W023, Fall, Graduate School of Engineering, 6
        • From 01 Apr. 2022, To 31 Mar. 2023
          Applied Numerical Methods
          G001, Spring, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Scientific Measurement
          5009, Spring, Faculty of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Fabrication and analysis of micromaterials
          5170, Fall, Faculty of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Engineering Internship M
          W019, Fall, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Microfabrication
          5144, Spring, Faculty of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Microfabrication
          G204, Spring, Graduate School of Engineering, 2
        • From Apr. 2011, To Mar. 2012
          計測学(機エネ原:学番奇数)
          Spring, 工学部
        • From Apr. 2011, To Mar. 2012
          計測学(機エネ原:学番偶数)
          Spring, 工学部
        • From Apr. 2011, To Mar. 2012
          機械システム学演習(機)
          Fall, 工学部
        • From Apr. 2011, To Mar. 2012
          マイクロ加工学(機エネ)
          Spring, 工学部
        • From Apr. 2011, To Mar. 2012
          マイクロシステム工学
          Fall, 工学研究科
        • From Apr. 2011, To Mar. 2012
          微小電気機械システム創製学
          Fall, 工学研究科
        • From Apr. 2011, To Mar. 2012
          マイクロプロセス・材料工学
          Spring, 工学研究科
        • From Apr. 2011, To Mar. 2012
          機械設計演習1(機)
          Spring, 工学部
        • From Apr. 2012, To Mar. 2013
          Microfabrication
          Spring, 工学部
        • From Apr. 2012, To Mar. 2013
          Microsystem Engineering
          Fall, 工学研究科
        • From Apr. 2012, To Mar. 2013
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2012, To Mar. 2013
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2012, To Mar. 2013
          Microprocess and Micromaterial Engineering
          Spring, 工学研究科
        • From Apr. 2012, To Mar. 2013
          Exercise on Mechanical and System Engineering
          Fall, 工学部
        • From Apr. 2012, To Mar. 2013
          Exercise of Machine Design 1
          Spring, 工学部
        • From Apr. 2012, To Mar. 2013
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2013, To Mar. 2014
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2013, To Mar. 2014
          Exercise on Mechanical and System Engineering
          Fall, 工学部
        • From Apr. 2013, To Mar. 2014
          Microfabrication
          Spring, 工学部
        • From Apr. 2013, To Mar. 2014
          Applied Numerical Methods
          Spring, 工学研究科
        • From Apr. 2013, To Mar. 2014
          Complex Mechanical Systems
          Fall, 工学研究科
        • From Apr. 2013, To Mar. 2014
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2013, To Mar. 2014
          Microprocess and Micromaterial Engineering
          Spring, 工学研究科
        • From Apr. 2013, To Mar. 2014
          Microsystem Engineering
          Fall, 工学研究科
        • From Apr. 2013, To Mar. 2014
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2013, To Mar. 2014
          Micro/Nano Scale Material Engineering
          Spring, 工学研究科
        • From Apr. 2014, To Mar. 2015
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2014, To Mar. 2015
          Mechanical and System Engineering Laboratory 1
          Spring, 工学部
        • From Apr. 2014, To Mar. 2015
          Mechanical and System Engineering Laboratory 1
          Fall, 工学部
        • From Apr. 2014, To Mar. 2015
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2014, To Mar. 2015
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2014, To Mar. 2015
          Mechanical and System Engineering Laboratory 3
          Spring, 工学部
        • From Apr. 2014, To Mar. 2015
          Mechanical and System Engineering Laboratory 3
          Fall, 工学部
        • From Apr. 2014, To Mar. 2015
          Microfabrication
          Spring, 工学部
        • From Apr. 2014, To Mar. 2015
          Fabrication and analysis of micromaterials
          Year-long, 工学部
        • From Apr. 2014, To Mar. 2015
          Applied Numerical Methods
          Spring, 工学研究科
        • From Apr. 2014, To Mar. 2015
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2014, To Mar. 2015
          Microprocess and Micromaterial Engineering
          Spring, 工学研究科
        • From Apr. 2014, To Mar. 2015
          Microsystem Engineering
          Fall, 工学研究科
        • From Apr. 2014, To Mar. 2015
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2014, To Mar. 2015
          Design of Complex Mechanical Systems
          Fall, 工学研究科
        • From Apr. 2014, To Mar. 2015
          Micro/Nano Scale Material Engineering
          Spring, 工学研究科
        • From Apr. 2015, To Mar. 2016
          Microfabrication
          Spring, 工学部
        • From Apr. 2015, To Mar. 2016
          Microsystem Engineering
          Fall, 工学研究科
        • From Apr. 2015, To Mar. 2016
          Introduction to the Design and Implementation of Micro-Systems
          Fall, 工学研究科
        • From Apr. 2015, To Mar. 2016
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2015, To Mar. 2016
          Applied Numerical Methods
          Spring, 工学研究科
        • From Apr. 2015, To Mar. 2016
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2015, To Mar. 2016
          Fabrication and analysis of micromaterials
          Year-long, 工学部
        • From Apr. 2015, To Mar. 2016
          Micro/Nano Scale Material Engineering
          Spring, 工学研究科
        • From Apr. 2015, To Mar. 2016
          Microprocess and Micromaterial Engineering
          Spring, 工学研究科
        • From Apr. 2015, To Mar. 2016
          Mechanical and System Engineering Laboratory 1
          Spring, 工学部
        • From Apr. 2015, To Mar. 2016
          Mechanical and System Engineering Laboratory 1
          Fall, 工学部
        • From Apr. 2015, To Mar. 2016
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2015, To Mar. 2016
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2015, To Mar. 2016
          Mechanical and System Engineering Laboratory 3
          Spring, 工学部
        • From Apr. 2015, To Mar. 2016
          Mechanical and System Engineering Laboratory 3
          Fall, 工学部
        • From Apr. 2015, To Mar. 2016
          Design of Complex Mechanical Systems
          Fall, 工学研究科
        • From Apr. 2015, To Mar. 2016
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2016, To Mar. 2017
          Microfabrication
          Spring, 工学部
        • From Apr. 2016, To Mar. 2017
          Microsystem Engineering
          Fall, 工学研究科
        • From Apr. 2016, To Mar. 2017
          Introduction to the Design and Implementation of Micro-Systems
          Fall, 工学研究科
        • From Apr. 2016, To Mar. 2017
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2016, To Mar. 2017
          Applied Numerical Methods
          Spring, 工学研究科
        • From Apr. 2016, To Mar. 2017
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2016, To Mar. 2017
          Fabrication and analysis of micromaterials
          Year-long, 工学部
        • From Apr. 2016, To Mar. 2017
          Micro/Nano Scale Material Engineering
          Spring, 工学研究科
        • From Apr. 2016, To Mar. 2017
          Microprocess and Micromaterial Engineering
          Spring, 工学研究科
        • From Apr. 2016, To Mar. 2017
          Mechanical and System Engineering Laboratory 1
          Spring, 工学部
        • From Apr. 2016, To Mar. 2017
          Mechanical and System Engineering Laboratory 1
          Fall, 工学部
        • From Apr. 2016, To Mar. 2017
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2016, To Mar. 2017
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2016, To Mar. 2017
          Mechanical and System Engineering Laboratory 3
          Spring, 工学部
        • From Apr. 2016, To Mar. 2017
          Mechanical and System Engineering Laboratory 3
          Fall, 工学部
        • From Apr. 2016, To Mar. 2017
          Design of Complex Mechanical Systems
          Fall, 工学研究科
        • From Apr. 2016, To Mar. 2017
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2017, To Mar. 2018
          Microfabrication
          Spring, 工学部
        • From Apr. 2017, To Mar. 2018
          Microsystem Engineering
          Fall, 工学研究科
        • From Apr. 2017, To Mar. 2018
          Introduction to the Design and Implementation of Micro-Systems
          Fall, 工学研究科
        • From Apr. 2017, To Mar. 2018
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2017, To Mar. 2018
          Applied Numerical Methods
          Spring, 工学研究科
        • From Apr. 2017, To Mar. 2018
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2017, To Mar. 2018
          Fabrication and analysis of micromaterials
          Fall, 工学部
        • From Apr. 2017, To Mar. 2018
          Micro/Nano Scale Material Engineering
          Spring, 工学研究科
        • From Apr. 2017, To Mar. 2018
          Microprocess and Micromaterial Engineering
          Spring, 工学研究科
        • From Apr. 2017, To Mar. 2018
          Mechanical and System Engineering Laboratory 1
          Spring, 工学部
        • From Apr. 2017, To Mar. 2018
          Mechanical and System Engineering Laboratory 1
          Fall, 工学部
        • From Apr. 2017, To Mar. 2018
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2017, To Mar. 2018
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2017, To Mar. 2018
          Mechanical and System Engineering Laboratory 3
          Spring, 工学部
        • From Apr. 2017, To Mar. 2018
          Mechanical and System Engineering Laboratory 3
          Fall, 工学部
        • From Apr. 2017, To Mar. 2018
          Design of Complex Mechanical Systems
          Fall, 工学研究科
        • From Apr. 2017, To Mar. 2018
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2018, To Mar. 2019
          Microfabrication
          Spring, 工学部
        • From Apr. 2018, To Mar. 2019
          Microsystem Engineering
          Fall, 工学研究科
        • From Apr. 2018, To Mar. 2019
          Introduction to the Design and Implementation of Micro-Systems
          Fall, 工学研究科
        • From Apr. 2018, To Mar. 2019
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2018, To Mar. 2019
          Applied Numerical Methods
          Spring, 工学研究科
        • From Apr. 2018, To Mar. 2019
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2018, To Mar. 2019
          Fabrication and analysis of micromaterials
          Fall, 工学部
        • From Apr. 2018, To Mar. 2019
          Micro/Nano Scale Material Engineering
          Spring, 工学研究科
        • From Apr. 2018, To Mar. 2019
          Microprocess and Micromaterial Engineering
          Spring, 工学研究科
        • From Apr. 2018, To Mar. 2019
          Mechanical and System Engineering Laboratory 1
          Spring, 工学部
        • From Apr. 2018, To Mar. 2019
          Mechanical and System Engineering Laboratory 1
          Fall, 工学部
        • From Apr. 2018, To Mar. 2019
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2018, To Mar. 2019
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2018, To Mar. 2019
          Mechanical and System Engineering Laboratory 3
          Spring, 工学部
        • From Apr. 2018, To Mar. 2019
          Mechanical and System Engineering Laboratory 3
          Fall, 工学部
        • From Apr. 2018, To Mar. 2019
          Introduction to Engineering Science A
          Fall, 工学部
        • From Apr. 2018, To Mar. 2019
          Design of Complex Mechanical Systems
          Fall, 工学研究科
        • From Apr. 2018, To Mar. 2019
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2019, To Mar. 2020
          Microfabrication
          Spring, 工学部
        • From Apr. 2019, To Mar. 2020
          Microsystem Engineering
          Fall, 工学研究科
        • From Apr. 2019, To Mar. 2020
          Introduction to the Design and Implementation of Micro-Systems
          Fall, 工学研究科
        • From Apr. 2019, To Mar. 2020
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2019, To Mar. 2020
          Applied Numerical Methods
          Spring, 工学研究科
        • From Apr. 2019, To Mar. 2020
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2019, To Mar. 2020
          Fabrication and analysis of micromaterials
          Fall, 工学部
        • From Apr. 2019, To Mar. 2020
          Microprocess and Micromaterial Engineering
          Spring, 工学研究科
        • From Apr. 2019, To Mar. 2020
          Mechanical and System Engineering Laboratory 1
          Spring, 工学部
        • From Apr. 2019, To Mar. 2020
          Mechanical and System Engineering Laboratory 1
          Fall, 工学部
        • From Apr. 2019, To Mar. 2020
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2019, To Mar. 2020
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2019, To Mar. 2020
          Mechanical and System Engineering Laboratory 3
          Spring, 工学部
        • From Apr. 2019, To Mar. 2020
          Mechanical and System Engineering Laboratory 3
          Fall, 工学部
        • From Apr. 2019, To Mar. 2020
          Introduction to Engineering Science A
          Spring, 工学部
        • From Apr. 2019, To Mar. 2020
          Design of Complex Mechanical Systems
          Fall, 工学研究科
        • From Apr. 2019, To Mar. 2020
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2020, To Mar. 2021
          Microfabrication
          Spring, 工学研究科
        • From Apr. 2020, To Mar. 2021
          Microfabrication
          Spring, 工学部
        • From Apr. 2020, To Mar. 2021
          Introduction to the Design and Implementation of Micro-Systems
          Fall, 工学研究科
        • From Apr. 2020, To Mar. 2021
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2020, To Mar. 2021
          Applied Numerical Methods
          Spring, 工学研究科
        • From Apr. 2020, To Mar. 2021
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2020, To Mar. 2021
          Fabrication and analysis of micromaterials
          Fall, 工学部
        • From Apr. 2020, To Mar. 2021
          Mechanical and System Engineering Laboratory 1
          Spring, 工学部
        • From Apr. 2020, To Mar. 2021
          Mechanical and System Engineering Laboratory 1
          Fall, 工学部
        • From Apr. 2020, To Mar. 2021
          Design of Complex Mechanical Systems
          Fall, 工学研究科
        • From Apr. 2020, To Mar. 2021
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2020, To Mar. 2021
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2021, To Mar. 2022
          Engineering Internship DL
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Engineering Internship DL
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Engineering Internship DS
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Engineering Internship DS
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Microfabrication
          Spring, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Engineering Internship M
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Engineering Internship M
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Seminar on Micro Engineering A
          Spring, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Seminar on Micro Engineering B
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Microfabrication
          Spring, 工学部
        • From Apr. 2021, To Mar. 2022
          Basic Seminar on Micro Engineering A
          Spring, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Basic Seminar on Micro Engineering B
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Introduction to the Design and Implementation of Micro-Systems
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Micro Electro Mechanical System Creation
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Applied Numerical Methods
          Spring, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Engineering Ethics and Management of Technology
          Spring, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Fabrication and analysis of micromaterials
          Fall, 工学部
        • From Apr. 2021, To Mar. 2022
          Internship
          Fall, 工学部
        • From Apr. 2021, To Mar. 2022
          Experiments on Micro Engineering, Adv. I
          Year-long, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Experiments on Micro Engineering, Adv. II
          Year-long, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Advanced Exercise in Micro Engineering A
          Spring, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Advanced Exercise in Micro Engineering B
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Advanced Exercise in Micro Engineering C
          Spring, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Advanced Exercise in Micro Engineering D
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Advanced Exercise in Micro Engineering E
          Spring, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Advanced Exercise in Micro Engineering F
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Master's Thesis
          Year-long, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Design of Complex Mechanical Systems
          Fall, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Scientific Measurement
          Spring, 工学部
        • From Apr. 2021, To Mar. 2022
          Scientific Measurement
          Spring, 工学部

        Part-time lecturer

        • From 01 Apr. 2018, To 30 Sep. 2018
          公立大学法人広島市立大学
        list
          Last Updated :2022/11/22

          Administration

          School management (title, position)

          • From 01 Apr. 2020, To 31 Mar. 2022
            設備整備・共用促進委員会 委員

          Faculty management (title, position)

          • From 01 Apr. 2017, To 31 Mar. 2019
            工学研究科・工学部広報委員会 委員
          • From 01 Apr. 2021, To 31 Mar. 2022
            マイクロエンジニアリング専攻長
          list
            Last Updated :2022/11/22

            Academic, Social Contribution

            Committee Memberships

            • 論文委員会(幹事),論文編修委員会(委員), 電気学会

            Academic Contribution

            • Transducers2023国際会議
              Planning, management, etc.
              一般社団法人電気学会, From 01 Jul. 2022, To 31 Mar. 2024
            • マイクロナノ工学部門
              Planning, management, etc.
              一般社団法人日本機械学会, From 01 Apr. 2022, To 31 Mar. 2023
            • 関西支部第98期商議員
              Planning, management, etc.
              一般社団法人日本機械学会, From 01 Mar. 2022, To 28 Feb. 2023
            • 第35回マイクロプロセス・ナノテクノロジー国際会議(MNC2022)
              Planning, management, etc.
              From 21 Feb. 2022, To 30 Dec. 2022

            Social Contribution

            • -
              Other
              -, From 01 Apr. 2020, To 31 Mar. 2022
            • -
              Other
              -, From 01 Apr. 2020, To 31 Mar. 2022
            • -
              Other
              -, From 01 Apr. 2020, To 31 Mar. 2022
            • -
              Other
              -, From 01 Jul. 2014, To 31 Mar. 2016
            • -
              Other
              -, From 01 Jul. 2014, To 31 Mar. 2016
            • -
              Other
              -, From 01 Aug. 2014, To 27 Feb. 2015
            • -
              Other
              -, From 20 Aug. 2013, To 31 Mar. 2014
            • -
              Other
              -, From 17 Jun. 2013, To 31 Mar. 2014
            • -
              Other
              -, From 10 Jul. 2012, To 31 Mar. 2014
            • -
              Other
              -, From 19 Jun. 2012, To 31 Mar. 2013
            • -
              Other
              -, From 01 Apr. 2012, To 31 Mar. 2013
            • -
              Other
              -, From 05 Dec. 2011, To 31 Mar. 2013
            • -
              Other
              -, From 05 Dec. 2011, To 31 Mar. 2013
            • -
              Other
              -, From 01 Dec. 2011, To 30 Nov. 2012
            • -
              Other
              -, From 10 May 2012, To 30 Sep. 2012
            • -
              Other
              -, From 08 Aug. 2011, To 31 Mar. 2012
            • -
              Other
              -, From 25 Jun. 2010, To 31 Mar. 2012

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