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Urabe, Keiichiro

Graduate School of Engineering, Division of Aeronautics and Astronautics Assistant Professor

Urabe, Keiichiro
list
    Last Updated :2022/12/06

    Basic Information

    Faculty

    • 工学部

    Research History

    • From 2018, To Present
      Kyoto University, Department of Aeronautics and Astronautics, Assisant Professor
    • From 2015, To 2018
      Air Liquide Laboratories, Researcher
    • From 2012, To 2014
      Japan Society for the Promotion of Science, Research Fellow (PD)
    • From 2012, To 2014
      The University of Tokyo, Department of Advanced Materials Science, Research Fellow
    • From 2009, To 2012
      Kyoto Univ. GCOE program, Photonics and Electronics Science and Engineering, Research Assistant
    • From 2009, To 2012
      Japan Society for the Promotion of Science, Research Fellow (DC1)

    Academic Resume (Graduate Schools)

    • Kyoto University, Graduate School of Engineering, Department of Electronic Science and Engineering, Master Course
    • Kyoto University, Graduate School of Engineering, Department of Electronic Science and Engineering, Ph.D. Course

    Academic Resume (Undergraduate School/Majors)

    • Kyoto University, Faculty of Engineering, Undergraduate School of Electric and Electronic Engineering

    High School

    • High School

      佐賀県立 佐賀西高等学校

    Academic Degree

    • 2009
      Master of Engineering, Kyoto University
    • 2012
      Doctor of Engineering, Kyoto University

    Professional Memberships

    • From 2021, To Present
      The Japan Society of Plasma Science and Nuclear Fusion Research
    • From 2020, To Present
      The Japan Society of Vacuum and Surface Science
    • From 2018, To Present
      The Japan Society for Aeronautical and Space Sciences
    • From 2012, To Present
      Division of Plasma Electronics, The Japan Society of Applied Physics
    • From 2007, To Present
      The Japan Society of Applied Physics

    Language of Instruction

    • Japanese
    • English

    ID,URL

    Website(s) (URL(s))

    researchmap URL

    list
      Last Updated :2022/12/06

      Research

      Research Topics, Overview of the research

      • Research Topics

        Experimental studies on plasmas, materials, and harsh environments
      • Overview of the research

        Diagnostics of "plasma parameters" in and on the surface of plasmas are critical technologies to control the plasmas in their engineering applications. Our laboratory targets to develop new research fields in the plasma diagnostics mainly based on optical spectroscopy.

      Research Areas

      • Energy, Basic plasma science, Plasma Diagnostics
      • Nanotechnology/Materials, Thin-film surfaces and interfaces
      • Energy, Basic plasma science, Reactive Plasma
      • Energy, Applied plasma science, Plasma Processing
      • Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Chemical reaction and process system engineering
      • Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Electric/electronic material engineering
      • Aerospace, marine, and maritime Engineering, Aerospace engineering

      Research Interests

      • Space Electric Propulsion
      • Etching
      • Thin Film Deposition
      • Plasma Processing
      • Cryoplasma
      • Supercritical Fluid plasma
      • Atmospheric Pressure Plasma
      • Plasma Science
      • Plasma Diagnostics
      • Plasma Application
      • Plasma
      • Laser Spectroscopy
      • Microplasma

      Papers

      • Predicting the effects of plasma-induced damage on p–n junction leakage and its application in the characterization of defect distribution
        Yoshihiro Sato; Satoshi Shibata; Kazuko Nishimura; Masayuki Yamasaki; Masashi Murakami; Keiichiro Urabe; Koji Eriguchi
        JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, Nov. 2022, Peer-reviewed
      • Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas
        Seiya Kito; Keiichiro Urabe; Koji Eriguchi
        JAPANESE JOURNAL OF APPLIED PHYSICS, Sep. 2022, Peer-reviewed, Corresponding author
      • Characterization of Plasma Process-Induced Low-Density Defect Creation by Lateral Junction Leakage
        Yoshihiro Sato; Satoshi Shibata; Takayoshi Yamada; Kazuko Nishimura; Masayuki Yamasaki; Masashi Murakami; Keiichiro Urabe; Koji Eriguchi
        IEEE JOURNAL OF THE ELECTEON DEVICES SOCIETY, May 2022, Peer-reviewed, Invited
      • Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique
        T. Matsuda; T. Hamano; Y. Asamoto; M. Noma; M. Yamashita; S. Hasegawa; K. Urabe; K. Eriguchi
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jul. 2022, Peer-reviewed
      • Quantitative evaluation of plasma-damaged SiN/Si structures using bias-dependent admittance analysis
        Tomohiro Kuyama; Keiichiro Urabe; Koji Eriguchi
        JOURNAL OF APPLIED PHYSICS, Apr. 2022, Peer-reviewed
      • Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method
        Takashi Hamano; Takayuki Matsuda; Yuya Asamoto; Masao Noma; Shigehiko Hasegawa; Michiru Yamashita; Keiichiro Urabe; Koji Eriguchi
        APPLIED PHYSICS LETTERS, Jan. 2022, Peer-reviewed
      • Characterization of dynamic behaviors of defects in Si substrates created by H2 plasma using conductance method
        Tomohiro Kuyama; Keiichiro Urabe; Masanaga Fukasawa; Tetsuya Tatsumi; Koji Eriguchi
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2020, Peer-reviewed
      • Electron number density measurements in nanosecond repetitively pulsed discharges in water vapor at atmospheric pressure
        Florent P. Sainct; Keiichiro Urabe; Erwan Pannier; Deanna A. Lacoste; Christophe O. Laux
        PLASMA SOURCES SCIENCE AND TECHNOLOGY, Mar. 2020, Peer-reviewed
      • Recent progress on dispersion interferometers for nuclear fusion and low-temperature plasmas
        T. Akiyama; M. A. Zeeland; T. N. Carlstrom; R. L. Boivin; K. J. Brunner; J. Knauer; R. Yasuhara; K. Tanaka; H.-Q. Liu; Y. Zhou; N. Oyama; A. Sirinelli; K. Urabe; N. Shirai
        JOURNAL OF INSTRUMENTATION, Jan. 2020, Peer-reviewed
      • Evaluation of residual defects created by plasma exposure of Si substrates using vertical and lateral pn junctions
        Yoshihiro Sato; Satoshi Shibata; Keiichiro Urabe; Koji Eriguchi
        JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, Dec. 2019, Peer-reviewed
      • Investigation of spatial and energy profiles of plasma process-induced latent defects in Si substrate using capacitance-voltage characteristics
        Takashi Hamano; Keiichiro Urabe; Koji Eriguchi
        JOURNAL OF PHYSICS D-APPLIED PHYSICS, Aug. 2019, Peer-reviewed
      • Characterization of surface modification mechanisms for boron nitride films under plasma exposure
        Tomoya Higuchi; Masao Noma; Michiru Yamashita; Keiichiro Urabe; Shigehiko Hasegawa; Koji Eriguchi
        SURFACE AND COATINGS TECHNOLOGY, Aug. 2019, Peer-reviewed
      • Improvement of the plasma-induced defect generation model in Si substrates and the optimization design framework
        Koji Eriguchi; Takashi Hamano; Keiichiro Urabe
        PLASMA PROCESS AND POLYMERS, Jun. 2019, Peer-reviewed
      • Characterization of the distribution of defects introduced by plasma exposure in Si substrate
        Yoshihiro Sato; Satoshi Shibata; Akira Uedono; Keiichiro Urabe; Koji Eriguchi
        JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Dec. 2018, Peer-reviewed
      • Dynamics of cavitation bubbles formed by pulsed-laser ablation plasmas near the critical point of CO2
        Hitoshi Muneoka; Shohei Himeno; Keiichiro Urabe; Sven Stauss; Motoyoshi Baba; Tohru Suemoto; Kazuo Terashima
        JOURNAL OF PHYSICS D-APPLIED PHYSICS, Oct. 2018, Peer-reviewed
      • Design of compact dispersion interferometer with a high efficiency nonlinear crystal and a low power CO2 laser
        T. Akiyama; S. Yoshimura; K. Tomita; N. Shirai; T. Murakami; K. Urabe
        JOURNAL OF INSTRUMENTATION, Dec. 2017, Peer-reviewed
      • Laser diagnostics on atmospheric pressure discharge plasmas, including cryoplasmas, in environments around room and cryogenic temperature
        Noritaka Sakakibara; Hitoshi Muneoka; Keiichiro Urabe; Ryoma Yasui; Osamu Sakai; Kazuo Terashima
        JOURNAL OF PHYSICS D-APPLIED PHYSICS, Apr. 2017, Peer-reviewed
      • Diagnostics of atmospheric-pressure pulsed-dc discharge with metal and liquid anodes by multiple laser-aided methods
        Keiichiro Urabe; Naoki Shirai; Kentaro Tomita; Tsuyoshi Akiyama; Tomoyuki Murakami
        PLASMA SOURCES SCIENCE & TECHNOLOGY, Aug. 2016, Peer-reviewed, Lead author
      • Electron density change of atmospheric-pressure plasmas in helium flow depending on the oxygen/nitrogen ratio of the surrounding atmosphere
        Kentaro Tomita; Keiichiro Urabe; Naoki Shirai; Yuta Sato; Safwat Hassaballa; Nima Bolouki; Munehiro Yoneda; Takahiro Shimizu; Kiichiro Uchino
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2016, Peer-reviewed
      • Microdischarge-Induced Decomposition of Ammonia and Reduction of Silver Ions for Formation of Two-Dimensional Network Structure
        Osamu Sakai; Yu Hiraoka; Naoya Kihara; Ella Blanquet; Keiichiro Urabe; Masanobu Tanaka
        PLASMA CHEMISTRY AND PLASMA PROCESSING, Jan. 2016, Peer-reviewed
      • Generation of dusty plasmas in supercritical carbon dioxide using surface dielectric barrier discharges
        Yasuhito Matsubayashi; Keiichiro Urabe; Sven Stauss; Kazuo Terashima
        JOURNAL OF PHYSICS D-APPLIED PHYSICS, Nov. 2015, Peer-reviewed
      • Laser absorption spectroscopy diagnostics of helium metastable atoms generated in dielectric barrier discharge cryoplasmas
        Keiichiro Urabe; Hitoshi Muneoka; Sven Stauss; Osamu Sakai; Kazuo Terashima
        JAPANESE JOURNAL OF APPLIED PHYSICS, Oct. 2015, Peer-reviewed, Lead author
      • Atmospheric pressure synthesis of diamondoids by plasmas generated inside a microfluidic reactor
        Chikako Ishii; Sven Stauss; Koichi Kuribara; Keiichiro Urabe; Takehiko Sasaki; Kazuo Terashima
        DIAMOND AND RELATED MATERIALS, Oct. 2015, Peer-reviewed
      • Development of dispersion interferometer for magnetic confinement plasmas and high-pressure plasmas
        T. Akiyama; R. Yasuhara; K. Kawahata; K. Nakayama; S. Okajima; K. Urabe; K. Terashima; N. Shirai
        JOURNAL OF INSTRUMENTATION, Sep. 2015, Peer-reviewed
      • Review of electric discharge microplasmas generated in highly fluctuating fluids: Characteristics and application to nanomaterials synthesis
        Sven Stauss; Hitoshi Muneoka; Keiichiro Urabe; Kazuo Terashima
        PHYSICS OF PLASMAS, May 2015, Peer-reviewed
      • Micrometer-scale electrical breakdown in high-density fluids with large density fluctuations: Numerical model and experimental assessment
        Hitoshi Muneoka; Keiichiro Urabe; Sven Stauss; Kazuo Terashima
        PHYSICAL REVIEW E, Apr. 2015, Peer-reviewed
      • Experimental and numerical investigation of time evolution of discharge current and optical emission in helium-nitrogen cryoplasmas
        Hitoshi Muneoka; Keiichiro Urabe; Jai Hyuk Choi; Sven Stauss; Kazuo Terashima
        PLASMA SOURCES SCIENCE & TECHNOLOGY, Dec. 2014, Peer-reviewed
      • Pure air-plasma bullets propagating inside microcapillaries and in ambient air
        Deanna A. Lacoste; Anne Bourdon; Koichi Kuribara; Keiichiro Urabe; Sven Stauss; Kazuo Terashima
        PLASMA SOURCES SCIENCE & TECHNOLOGY, Dec. 2014, Peer-reviewed
      • Microscopic heterodyne interferometry for determination of electron density in high-pressure microplasma
        Keiichiro Urabe; Hitoshi Muneoka; Sven Stauss; Kazuo Terashima
        PLASMA SOURCES SCIENCE & TECHNOLOGY, Dec. 2014, Peer-reviewed, Lead author
      • Propagation of a Dielectric Barrier Discharge in a Multichannel Mixing Chip Microreactor
        Sven Stauss; Chikako Ishii; Koichi Kuribara; Keiichiro Urabe; Kazuo Terashima
        IEEE TRANSACTIONS ON PLASMA SCIENCE, Oct. 2014, Peer-reviewed
      • Anomalous Behavior of Cavitation Bubbles Observed in Pulsed Laser Ablation of Ni in Liquid CO2 near the Critical Point
        Shohei Himeno; Toru Kato; Keiichiro Urabe; Sven Stauss; Satoshi Kato; Hitoshi Muneoka; Motoyoshi Baba; Tohru Suemoto; Kazuo Terashima
        IEEE TRANSACTIONS ON PLASMA SCIENCE, Oct. 2014, Peer-reviewed
      • Application of phase-modulated dispersion interferometry to electron-density diagnostics of high-pressure plasma
        Keiichiro Urabe; Tsuyoshi Akiyama; Kazuo Terashima
        JOURNAL OF PHYSICS D-APPLIED PHYSICS, Jul. 2014, Peer-reviewed, Lead author
      • Diamondoid synthesis in atmospheric pressure adamantane-argon-methane-hydrogen mixtures using a continuous flow plasma microreactor
        Sven Stauss; Chikako Ishii; David Z. Pai; Keiichiro Urabe; Kazuo Terashima
        PLASMA SOURCES SCIENCE & TECHNOLOGY, Jun. 2014, Peer-reviewed
      • Effect of light irradiation on Townsend breakdown in helium at 5.2K
        Deanna A. Lacoste; Hitoshi Muneoka; Thibault F. Guiberti; David Z. Pai; Keiichiro Urabe; Sven Stauss; Kazuo Terashima
        PLASMA SOURCES SCIENCE & TECHNOLOGY, Feb. 2014, Peer-reviewed
      • Development of Near-Infrared Laser Heterodyne Interferometry for Diagnostics of Electron and Gas Number Densities in Microplasmas
        Keiichiro Urabe; Hitoshi Muneoka; Sven Stauss; Kazuo Terashima
        APPLIED PHYSICS EXPRESS, Dec. 2013, Peer-reviewed, Lead author
      • Dynamics of pulsed laser ablation in high-density carbon dioxide including supercritical fluid state
        Keiichiro Urabe; Toru Kato; Sven Stauss; Shohei Himeno; Satoshi Kato; Hitoshi Muneoka; Motoyoshi Baba; Tohru Suemoto; Kazuo Terashima
        JOURNAL OF APPLIED PHYSICS, Oct. 2013, Peer-reviewed, Lead author
      • Multiheterodyne interference spectroscopy using a probing optical frequency comb and a reference single-frequency laser
        Keiichiro Urabe; Sakai Osamu
        PHYSICAL REVIEW A, Aug. 2013, Peer-reviewed, Lead author
      • Breakdown characteristics of electrical discharges in high-density helium near the critical point
        Hitoshi Muneoka; Keiichiro Urabe; Sven Stauss; Kazuo Terashima
        Applied Physics Express, Aug. 2013, Peer-reviewed
      • Functional composites of plasmas and metamaterials: Flexible waveguides, and variable attenuators with controllable phase shift
        Osamu Sakai; Jun Maeda; Takuya Shimomura; Keiichiro Urabe
        PHYSICS OF PLASMAS, Jul. 2013, Peer-reviewed
      • Hydrazine generation for the reduction process using small-scale plasmas in an argon/ammonia mixed gas flow
        Keiichiro Urabe; Yu Hiraoka; Osamu Sakai
        PLASMA SOURCES SCIENCE & TECHNOLOGY, Jun. 2013, Peer-reviewed, Lead author
      • Pulsed laser ablation plasmas generated in CO2 under high-pressure conditions up to supercritical fluid
        Toru Kato; Sven Stauss; Satoshi Kato; Keiichiro Urabe; Motoyoshi Baba; Tohru Suemoto; Kazuo Terashima
        APPLIED PHYSICS LETTERS, Nov. 2012, Peer-reviewed
      • Absorption spectroscopy using interference between optical frequency comb and single-wavelength laser
        Keiichiro Urabe; Osamu Sakai
        APPLIED PHYSICS LETTERS, Jul. 2012, Peer-reviewed, Lead author
      • Temporally and spectrally resolved observation of a crossed-flow DBD plasma jet using pure helium and argon/acetone mixed gases
        Keiichiro Urabe; Brian L. Sands; Biswa N. Ganguly; Osamu Sakai
        PLASMA SOURCES SCIENCE & TECHNOLOGY, Jun. 2012, Peer-reviewed, Lead author
      • Discharge-Mode Transition in Jet-Type Dielectric Barrier Discharge Using Argon/Acetone Gas Flow Ignited by Small Helium Plasma Jet
        Keiichiro Urabe; Keitaro Yamada; Osamu Sakai
        JAPANESE JOURNAL OF APPLIED PHYSICS, Nov. 2011, Peer-reviewed, Lead author
      • Temporally Resolved Imaging of Jet-Type Dielectric Barrier Discharge Using He and Ar/Acetone Crossed Gas Flows
        Keiichiro Urabe; Brian L. Sands; Osamu Sakai; Biswa N. Ganguly
        IEEE TRANSACTIONS ON PLASMA SCIENCE, Nov. 2011, Peer-reviewed, Lead author
      • Combined spectroscopic methods for electron-density diagnostics inside atmospheric-pressure glow discharge using He/N2 gas mixture
        Keiichiro Urabe; Osamu Sakai; Kunihide Tachibana
        JOURNAL OF PHYSICS D-APPLIED PHYSICS, Mar. 2011, Peer-reviewed, Lead author
      • Enhancement of visible He2 emission by infrared laser excitation of He metastable atoms in atmospheric-pressure plasma jet
        Keiichiro Urabe; Hideki Motomura; Osamu Sakai; Kunihide Tachibana
        JOURNAL OF PHYSICS D-APPLIED PHYSICS, Feb. 2011, Peer-reviewed, Lead author
      • Interaction between Dielectric Barrier Discharge and Positive Streamer in Helium Plasma Jet at Atmospheric Pressure
        Keiichiro Urabe; Yosuke Ito; Osamu Sakai; Kunihide Tachibana
        JAPANESE JOURNAL OF APPLIED PHYSICS, Oct. 2010, Peer-reviewed, Lead author
      • Effect of Series Capacitance and Accumulated Charge on a Substrate in a Deposition Process with an Atmospheric-Pressure Plasma Jet
        Yosuke Ito; Yutaka Fukui; Keiichiro Urabe; Osamu Sakai; Kunihide Tachibana
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2010, Peer-reviewed
      • Investigation of discharge mechanisms in helium plasma jet at atmospheric pressure by laser spectroscopic measurements
        Keiichiro Urabe; Tadasuke Morita; Kunihide Tachibana; Biswa N. Ganguly
        JOURNAL OF PHYSICS D-APPLIED PHYSICS, Mar. 2010, Peer-reviewed, Lead author
      • Measurement of electron density in atmospheric pressure small-scale plasmas using CO2-laser heterodyne interferometry
        Joon-Young Choi; Nobuhiko Takano; Keiichiro Urabe; Kunihide Tachibana
        PLASMA SOURCES SCIENCE & TECHNOLOGY, Aug. 2009, Peer-reviewed
      • Behavior of N2+ ions in he microplasma jet at atmospheric pressure measured by laser induced fluorescence spectroscopy
        Keiichiro Urabe; Yosuke Ito; Kunihide Tachibana; Biswa N. Ganguly
        APPLIED PHYSICS EXPRESS, Jun. 2008, Peer-reviewed, Lead author
      • High speed deposition of SiO2 films with plasma jet based on capillary dielectric barrier discharge at atmospheric pressure
        Yosuke Ito; Keiichiro Urabe; Nobuhiko Takano; Kunihide Tachibana
        APPLIED PHYSICS EXPRESS, Jun. 2008, Peer-reviewed

      Presentations

      • In-situ diagnostics of dielectric-film properties in plasmas using impedance spectroscopy
        Keiichiro Urabe; Junki Morozumi; Tomohiro Kuyama; Koji Eriguchi
        32nd Annual Meeting of MRS-Japan 2022, 05 Dec. 2022, The Material Research Society of Japan
      • Quantification of molecular impurity ratio in high-pressure helium dielectric barrier discharge by laser absorption spectroscopy
        Keiichiro Urabe; Minami Toyoda; Yasunori Matsuoka; Koji Eriguchi
        75th Annual Gaseous Electronics Conference / 11th International Conference on Reactive Plasmas, 05 Oct. 2022
      • Experimental study on impurity species in high-pressure helium plasmas
        Keiichiro Urabe
        37th Kyushu-Yamaguchi Plasma Workshop, 07 Nov. 2021, Committee of Kyushu-Yamaguchi Plasma Workshop, Invited
      • Characterization and control of boron nitride film deposition by a reactive plasma-assisted coating
        Keiichiro Urabe; Takayuki Matsuda; Takashi Hamano; Yuya Asamoto; Masao Noma; Michiru Yamashita; Shigehiko Hasegawa; Koji Eriguchi
        5th Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2021), 28 Sep. 2021, Division of Plasma Physics, Association of Asia Pacific Physical Societies, Invited
      • Evaluation methodology for assessment of dielectric degradation and breakdown dynamics using time-dependent impedance spectroscopy (TDIS)
        Tomohiro KUYAMA; Keiichiro URABE; Koji Eriguchi
        2021 IEEE Internatinoal Reliability Physics Symposium (IRPS-2021), 23 Mar. 2021, IEEE EDS and Reliability Society
      • Collaborative Studies on Microplasmas: Opportunities and Potentials
        Keiichiro URABE
        68th Japan Society of Applied Physics, Spring Meeting, 16 Mar. 2021, Japan Society of Applied Physics, Invited
      • Characterization Scheme for Plasma-Induced Defect Creation due to Stochastic Lateral Straggling in Si Substrates for Ultra-low Leakage Devices
        Y. Sato; T. Yamada; K. Nishimura; M. Yamasaki; M. Murakami; K. Urabe; K. Eriguchi
        66th IEEE International Electron Devices Meeting (IEDM 2020), 14 Dec. 2020, IEEE Electron Devices Society
      • Influence of Gas-Refractive-Index Dispersion on Measurement of Electron Density Using Dispersion Interferometry
        Keiichiro URABE
        The 29th International Toki Conference on Plasma and Fusion Research, 30 Oct. 2020, National Institute for Fusion Science, Invited
      • Current status of plasma electron density diagnostics by dispersion interferometer
        Keiichiro URABE
        164th Workshop ~Measurement of gas/liquid radicals and ions in plasma processing~, 04 Sep. 2020, Plasma Science for Materials, JSPS 153 Committee, Invited
      • Mechanical properties and surface sputtering of boron nitride films prepared by a reactive plasma assisted coating method
        K. Urabe; T. Sumihira; M. Noma; M. Yamashita; S. Hasegawa; K. Eriguchi
        56th Kansai-Chubu Autumn Meeting, 30 Nov. 2019, Kansai and Chubu branch, The Japan Society for Aeronautical and Space Sciences
      • Diagnostics and monitoring of plasmas
        Keiichiro URABE
        13th Plasma Electronics Incubation Hall, 09 Sep. 2019, The Japan Society of Applied Physics, Division of Plasma Electronics, Invited
      • Aerospace Application and Spectroscopic Diagnostics of Atmospheric-Pressure Plasmas
        Keiichiro URABE
        472nd Seminar of Aerospace Engineering, 12 Jul. 2019, The Japan Society of Aeronautical and Space Sciences, Kansai Branch, Invited
      • Spectroscopic study of atmospheric pressure plasmas focusing on phase interface and gas temperature
        Keiichiro Urabe
        Sendai Plasma Forum, 22 Jan. 2019, Research Institute of Electrical Communication, Tohoku University, Invited
      • Time evolution diagnostics of plasma-liquid (-solid) interaction and their application perspectives
        Keiichiro Urabe
        29th Meeting on new research area of plasma electronics, 26 Nov. 2018, Plasma Electronics Division, Japan Society of Applied Physics, Invited
      • Fundamental, challenge, and collaborative study on laser interferometry plasma diagnostics
        Keiichiro Urabe
        Frontiers in Plasma Science 2018, 31 Aug. 2018, National Institute of Fusion Science, Invited
      • Current and future outlook of laser interferometer for high-pressure plasma density diagnostics
        Keiichiro Urabe
        Workshop on Plasma and Atomic Physics in RUB-Japan Science Days 2018, 04 Jul. 2018, Ruhr University Bochum, Invited
      • Laser interferometry plasma diagnostics: Recent challenges and contributions to plasma technology
        Keiichiro Urabe
        23rd International Symposium on Plasma Chemistry, 03 Aug. 2017, International Plasma Chemistry Society, Invited
      • Electron-density diagnostics of non-equilibrium atmospheric-pressure plasmas
        Keiichiro Urabe
        Symposium on "Cutting-edge plasma diagnostics for deeper understanding and control of atmospheric and multi-phase plasmas" in the 77th Automun Meeting of the Japan Society of Applied Physics, 14 Sep. 2016, The Japan Society of Applied Physics, Invited
      • Laser Diagnostics of Microplasmas: Multidisciplinary Collaboration Paving a Way of Innovation
        Keiichiro Urabe
        Gordon Research Conference on Plasma Processing Science, 24 Jul. 2016, Invited
      • Laser diagnostics of microplasmas on metal and liquid electrodes
        Keiichiro Urabe
        8th International Workshop on Microplasmas, 13 May 2015, Invited
      • Plasma diagnostics using multi-heterodyne interference of optical frequency comb
        Keiichiro Urabe
        16th International Symposium on Laser Aided Plasma Diagnostics, 25 Sep. 2013, Invited
      • Introduction to Spectroscopic Diagnostics and Applications of Microplasmas
        Keiichiro Urabe
        EGR891 PhD Seminar Series - Fall 2009, 09 Oct. 2009, Wright State University, Invited

      Misc.

      • プラズマエレクトロニクス賞を受賞して
        佐藤 好弘; 柴田 聡; 占部 継一郎; 江利口 浩二
        応用物理学会プラズマエレクトロニクス分科会会報, Jun. 2021, Invited
      • Plasma etching process for advanced CMOS and memory device fabrication
        Koji Eriguchi; Keiichiro Urabe
        Oyo Butsuri, Dec. 2018, Invited
      • High-speed and precise laser interferometry developed for plasma electron-density diagnostics
        Keiichiro URABE
        Readout, HORIBA Technical Report, Oct. 2018, Invited
      • レーザー干渉計を用いた高気圧非平衡プラズマ診断
        占部 継一郎
        応用物理学会プラズマエレクトロニクス分科会 会報, Jun. 2014, Invited

      Books and Other Publications

      • Applications of Laser Ablation - Thin Film Deposition, Nanomaterial Synthesis and Surface Modification
        Stauss Sven; Urabe Keiichiro; Muneoka Hitoshi; Terashima Kazuo, Contributor, Pulsed Laser Ablation in High-Pressure Gases, Pressurized Liquids and Supercritical Fluids: Generation, Fundamental Characteristics and Applications
        IntechOpen Ltd, Dec. 2016, Not refereed
      • CO2 Laser - Optimisation and Application
        Keiichiro Urabe; Kunihide Tachibana, Contributor, Heterodyne Interferometer for Measurement of Electron Density in High-Pressure Plasmas
        IntechOpen Ltd, Mar. 2012, Not refereed

      Awards

      • 10 Mar. 2021
        Plasma Electronics Division, The Japan Society of Applied Physics, 19th Plasma Electronics Award
      • 17 Oct. 2018
        HORIBA, Ltd., 2018 Horiba Award
      • 06 Mar. 2014
        ISPlasma 2014 / IC-PLANTS 2014, Best Presentation Award (Oral in Plasma Science)
      • 16 Jan. 2014
        The Materials Research Society of Japan, Award for Encouragement of Research in Materials Science
      • 23 Sep. 2013
        16th International Symposium on Laser-Aided Plasma Diagnostics, Prize for the Best Combination of Pre-Poster Talk and Poster Presentation
      • 28 Sep. 2012
        The IUMRS-ICEM2012 Awarding Committee, IUMRS-ICEM2012 Young Scientist Awards: Silver Award
      • 23 Mar. 2010
        Grobal COE Program on Photonic and Electronic Science and Engineering at Kyoto University, Outstanding Presentation Award at Report Meeting of Grant for Ph.D. Students
      • 27 Mar. 2008
        The Japan Society of Applid Physics, Young Scientist Oral Presentation Award at the 2007 Autumn Meeting

      External funds: Kakenhi

      • Absolute-density measurement and precision magnetometry using quantum-state control of plasma excited species
        Grant-in-Aid for Challenging Research (Exploratory)
        Medium-sized Section 14:Plasma science and related fields
        Kyoto University
        Keiichiro Urabe
        From 28 Jun. 2019, To 31 Mar. 2021, Project Closed
        光ポンピング;プラズマ;磁気強度計測;励起粒子密度計測
      • Development of Laser-Induced Fluorescence Spectroscopy for the Measurement of Dynamic Bahaviors of Ion Flow from Plasmas
        Grant-in-Aid for Scientific Research (B)
        Basic Section 14030:Applied plasma science-related
        Kyoto University
        占部 継一郎
        From 01 Apr. 2019, To 31 Mar. 2023, Granted
        プラズマ;レーザー誘起蛍光法;イオン流れ計測;プラズマプロセス;電気推進器;イオン;レーザー分光;時空間速度分布
      • Visualization of flow dynamics of gas and excited species generated by small thermal non-equilibrium plasmas
        Grant-in-Aid for Research Activity Start-up
        0202:Condensed matter physics, plasma science, nuclear engineering, earth resources engineering, energy engineering, and related fields
        Kyoto University
        占部 継一郎
        From 24 Aug. 2018, To 31 Mar. 2020, Project Closed
        プラズマ;分光診断;分光計測;流れの可視化
      • 量子カスケードレーザ干渉イメージングによる高気圧プラズマ密度の高速3次元計測
        Grant-in-Aid for Challenging Exploratory Research
        The University of Tokyo
        占部 継一郎
        From 01 Apr. 2014, To 31 Mar. 2015, Discontinued
        プラズマ;プラズマ診断;量子カスケードレーザー;レーザー干渉計;電子密度

      External funds: others

      • 光ポンピング法によるプラズマ励起粒子時空間分布の3次元可視化
        カシオ科学振興財団, 第39回研究助成
        From 01 Dec. 2021, To 30 Nov. 2022
        占部 継一郎
      • ガス屈折率分散を活用した高調波干渉計のゼロ点アクティブ安定化
        核融合科学研究所 一般共同研究
        From 01 Apr. 2020, To 31 Mar. 2022
        占部 継一郎
      • ガス屈折率分散実測による高調波干渉計プラズマ電子密度診断の高精度化
        核融合科学研究所 一般共同研究
        From 01 Apr. 2019, To 31 Mar. 2020
        占部 継一郎
      • プラズマ高度制御とアニール処理による立方晶窒化ホウ素薄膜作製
        池谷科学技術振興財団 単年度助成
        From 01 Apr. 2019, To 31 Mar. 2020
        占部 継一郎
      list
        Last Updated :2022/12/06

        Education

        Teaching subject(s)

        • From 01 Apr. 2022, To 31 Mar. 2023
          Microfabrication
          G204, Spring, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Engineering Laboratory in Aeronautics and Astronautics 2
          5067, Fall, Faculty of Engineering, 1
        • From Apr. 2019, To Mar. 2020
          Microprocess and Micromaterial Engineering
          Spring, 工学研究科
        • From Apr. 2019, To Mar. 2020
          Engineering Laboratory in Aeronautics and Astronautics 2
          Fall, 工学部
        • From Apr. 2020, To Mar. 2021
          Microfabrication
          Spring, 工学研究科
        • From Apr. 2020, To Mar. 2021
          Engineering Laboratory in Aeronautics and Astronautics 2
          Fall, 工学部
        • From Apr. 2021, To Mar. 2022
          Microfabrication
          Spring, 工学研究科
        • From Apr. 2021, To Mar. 2022
          Engineering Laboratory in Aeronautics and Astronautics 2
          Fall, 工学部

        Student achievements: Awards

        • 令和4年度 吉田研究奨励賞
          濱野 誉, 京都大学大学院 工学研究科, Jul. 2022
        • DPS2019 Young Researcher Award
          濱野 誉, International Symposium on Dry Process, Nov. 2021
        • DPS2019 Young Researcher Award
          久山 智弘, International Symposium on Dry Process, Nov. 2021
        • 第50回(2021年春季)講演奨励賞
          久山 智弘, 応用物理学会, Sep. 2021
        • IEEE IRPS Best Studend Paper Award
          久山 智弘, IEEE, Mar. 2021
        • IEEE EDS Kansai Chapter of the Year Award
          佐藤 好弘, IEEE EDS Kansai Chapter, 28 Sep. 2021
        • 関西奨励賞
          濱野 誉, 応用物理学会 関西支部, 22 Mar. 2021
        • 第19回プラズマエレクトロニクス賞
          佐藤 好弘, 応用物理学会 プラズマエレクトロニクス分科会, 10 Mar. 2021
        • シリコンテクノロジー分科会研究奨励賞
          濱野 誉, 応用物理学会 シリコンテクノロジー分科会, 17 Mar. 2021
        • 応用物理学会関西支部 2020年度合同講演会 ポスター賞
          濱野 誉, 応用物理学会 関西支部, 17 Mar. 2021
        • IEEE EDS Kansai Chapter MFSK Award
          濱野 誉, IEEE EDS Kansai Chapter, 27 Nov. 2020
        list
          Last Updated :2022/12/06

          Administration

          Faculty management (title, position)

          • From 01 Apr. 2019, To 31 Mar. 2023
            宇治キャンパス公開 実行委員会 委員
          list
            Last Updated :2022/12/06

            Academic, Social Contribution

            Committee Memberships

            • From 2022, To Present
              Local Organizing Committee, The 25th International Symposium on Plasma Chemistry (ISPC25)
            • From 2022, To 2022
              プログラム委員, 日本表面真空学会 2022年学術講演会(IVC併催)
            • From 2021, To Present
              編集委員(2022年度 APP副主査), プラズマ・核融合学会
            • From 2020, To Present
              庶務幹事, 日本表面真空学会 関西支部
            • From 2021, To 2021
              プログラム委員, 日本表面真空学会 2021年学術講演会
            • From 2021, To 2021
              Exective Committee, 42nd International Symposium on Dry Process
            • From 2021, To 2021
              Online Arrangement, 20th International Workshop on Junction Technology
            • From 2020, To 2021
              Program Committee, ISPlasma2021/IC-PLANTS2021
            • From 2019, To 2021
              幹事, 応用物理学会 プラズマエレクトロニクス分科会
            • From 2019, To 2021
              幹事, 日本航空宇宙学会 関西支部
            • From 2019, To 2019
              Local Arrangement, 19th International Workshop on Junction Technology
            • From 2018, To 2019
              Program Comittee, ISPlasma2019/IC-PLANTS2019

            Social Contribution

            • Novel plasma technologies and optical plasma diagnostics
              Lecturer
              The Institution of Professional Engineers, Janualy meeting, From 11 Jan. 2019
            • Spectroscopic diagnostics of excited species generated in atmospheric pressure plasmas
              Lecturer
              Kyoto University, Kyoto Univ. Industrial Day 2018, From 11 Sep. 2018

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