Basic Information

Faculty

• Faculty of Engineering

Research History

• From 2024, To Present

  Kyoto University, Graduate School of Engineering, Department of Aeronautics and Astronautics, Associate Professor
• From 2018, To 2024

  Kyoto University, Graduate School of Engineering, Department of Aeronautics and Astronautics, Assisant Professor
• From 2015, To 2018

  Air Liquide Laboratories, Researcher
• From 2012, To 2014

  Japan Society for the Promotion of Science, Research Fellow (PD)
• From 2012, To 2014

  The University of Tokyo, Department of Advanced Materials Science, Research Fellow
• From 2009, To 2012

  Kyoto Univ. GCOE program, Photonics and Electronics Science and Engineering, Research Assistant
• From 2009, To 2012

  Japan Society for the Promotion of Science, Research Fellow (DC1)

Academic Resume (Graduate Schools)

• Kyoto University, Graduate School of Engineering, Department of Electronic Science and Engineering, Master Course
• Kyoto University, Graduate School of Engineering, Department of Electronic Science and Engineering, Ph.D. Course

Academic Resume (Undergraduate School/Majors)

• Kyoto University, Faculty of Engineering, Undergraduate School of Electric and Electronic Engineering

High School

• High School

  Saga Prefectural Saga Nishi High School

Academic Degree

• 2009

  Master of Engineering, Kyoto University
• 2012

  Doctor of Engineering, Kyoto University

Professional Memberships

• From 2024, To Present

  Silicon Technology Division, The Japan Society of Applied Physics
• From 2021, To Present

  The Japan Society of Plasma Science and Nuclear Fusion Research
• From 2020, To Present

  The Japan Society of Vacuum and Surface Science
• From 2018, To Present

  The Japan Society for Aeronautical and Space Sciences
• From 2012, To Present

  Division of Plasma Electronics, The Japan Society of Applied Physics
• From 2007, To Present

  The Japan Society of Applied Physics

Language of Instruction

• Japanese
• English

ID,URL

• ORCID ID

  0000-0001-9743-3184

• J-Global ID

  201401028945853328

• Researcher ID

  H-6501-2018

• External link

  http://www.propulsion.kuaero.kyoto-u.ac.jp/w/index.php?title=Top&setlang=en

Website(s) (URL(s))

• https://www.aa.t.kyoto-u.ac.jp/ja
• http://www.propulsion.kuaero.kyoto-u.ac.jp/

researchmap URL

• https://researchmap.jp/kei.urabe

Research

Research Topics, Overview of the research

• Research Topics

  Experimental studies on plasmas, materials, and harsh environments

• Overview of the research

  Diagnostics of "plasma parameters" in and on the surface of plasmas are critical technologies to control the plasmas in their engineering applications. Our laboratory targets to develop new research fields in the plasma technology based on optical and electrical plasma diagnostics.

Research Areas

• Energy, Basic plasma science, Plasma Diagnostics
• Nanotechnology/Materials, Thin-film surfaces and interfaces
• Energy, Basic plasma science, Reactive Plasma
• Energy, Applied plasma science, Plasma Processing
• Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Chemical reaction and process system engineering
• Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Electric/electronic material engineering
• Aerospace, marine, and maritime Engineering, Aerospace engineering

Research Interests

• Space Electric Propulsion
• Etching
• Thin Film Deposition
• Plasma Processing
• Cryoplasma
• Supercritical Fluid plasma
• Atmospheric Pressure Plasma
• Plasma Science
• Plasma Diagnostics
• Plasma Application
• Plasma
• Laser Spectroscopy
• Microplasma

Papers

• Study on Ion Flux From Magnetically Confined Low-Pressure Arc Discharge With a Thermionic Cathode to Substrate for High-Throughput Film Deposition Processes

  Yuya Asamoto; Keiichiro Urabe; Takayuki Matsuda; Takashi Hamano; Masao Noma; Michiru Yamashita; Shigehiko Hasegawa; Koji Eriguchi

  IEEE TRANSACTIONS ON PLASMA SCIENCE, Jun. 2024, Peer-reviewed, Corresponding author

  
• Optical and electrical evaluation methods of plasma-induced damage in InP substrates

  Takahiro Goya; Keiichiro Urabe; Koji Eriguchi

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2024, Peer-reviewed

  
• Time-resolved laser-induced fluorescence spectroscopy using CW diode laser for diagnostics of argon-ion velocity distribution near AC-biased electrode

  Ryosuke Takahashi; Seiya Kito; Koji Eriguchi; Keiichiro Urabe

  REVIEW OF SCIENTIFIC INSTRUMENTS, May 2024, Peer-reviewed, Last author, Corresponding author

  
• Investigation of small-fraction molecular impurities in high-pressure helium plasmas using optical plasma diagnostic methods

  Keiichiro Urabe; Minami Toyoda; Yoshinori Matsuoka; Koji Eriguchi

  PLASMA SOURCES SCIENCE AND TECHNOLOGY, Feb. 2024, Peer-reviewed, Lead author, Corresponding author

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• In situ electrical monitoring of SiO2/Si structures in low-temperature plasma using impedance spectroscopy

  Junki Morozumi; Takahiro Goya; Tomohiro Kuyama; Koji Eriguchi; Keiichiro Urabe

  JAPANESE JOURNAL OF APPLIED PHYSICS, May 2023, Peer-reviewed, Last author

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• Predicting the effects of plasma-induced damage on p–n junction leakage and its application in the characterization of defect distribution

  Yoshihiro Sato; Satoshi Shibata; Kazuko Nishimura; Masayuki Yamasaki; Masashi Murakami; Keiichiro Urabe; Koji Eriguchi

  JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, Nov. 2022, Peer-reviewed

  
• Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas

  Seiya Kito; Keiichiro Urabe; Koji Eriguchi

  JAPANESE JOURNAL OF APPLIED PHYSICS, Sep. 2022, Peer-reviewed, Corresponding author

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• Characterization of Plasma Process-Induced Low-Density Defect Creation by Lateral Junction Leakage

  Yoshihiro Sato; Satoshi Shibata; Takayoshi Yamada; Kazuko Nishimura; Masayuki Yamasaki; Masashi Murakami; Keiichiro Urabe; Koji Eriguchi

  IEEE JOURNAL OF THE ELECTEON DEVICES SOCIETY, May 2022, Peer-reviewed, Invited

  
• Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique

  T. Matsuda; T. Hamano; Y. Asamoto; M. Noma; M. Yamashita; S. Hasegawa; K. Urabe; K. Eriguchi

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jul. 2022, Peer-reviewed

  
• Quantitative evaluation of plasma-damaged SiN/Si structures using bias-dependent admittance analysis

  Tomohiro Kuyama; Keiichiro Urabe; Koji Eriguchi

  JOURNAL OF APPLIED PHYSICS, Apr. 2022, Peer-reviewed

  
• Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method

  Takashi Hamano; Takayuki Matsuda; Yuya Asamoto; Masao Noma; Shigehiko Hasegawa; Michiru Yamashita; Keiichiro Urabe; Koji Eriguchi

  APPLIED PHYSICS LETTERS, Jan. 2022, Peer-reviewed

  
• Characterization of dynamic behaviors of defects in Si substrates created by H2 plasma using conductance method

  Tomohiro Kuyama; Keiichiro Urabe; Masanaga Fukasawa; Tetsuya Tatsumi; Koji Eriguchi

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2020, Peer-reviewed

  
• Electron number density measurements in nanosecond repetitively pulsed discharges in water vapor at atmospheric pressure

  Florent P. Sainct; Keiichiro Urabe; Erwan Pannier; Deanna A. Lacoste; Christophe O. Laux

  PLASMA SOURCES SCIENCE AND TECHNOLOGY, Mar. 2020, Peer-reviewed

  
• Recent progress on dispersion interferometers for nuclear fusion and low-temperature plasmas

  T. Akiyama; M. A. Zeeland; T. N. Carlstrom; R. L. Boivin; K. J. Brunner; J. Knauer; R. Yasuhara; K. Tanaka; H.-Q. Liu; Y. Zhou; N. Oyama; A. Sirinelli; K. Urabe; N. Shirai

  JOURNAL OF INSTRUMENTATION, Jan. 2020, Peer-reviewed

  
• Evaluation of residual defects created by plasma exposure of Si substrates using vertical and lateral pn junctions

  Yoshihiro Sato; Satoshi Shibata; Keiichiro Urabe; Koji Eriguchi

  JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, Dec. 2019, Peer-reviewed

  
• Investigation of spatial and energy profiles of plasma process-induced latent defects in Si substrate using capacitance-voltage characteristics

  Takashi Hamano; Keiichiro Urabe; Koji Eriguchi

  JOURNAL OF PHYSICS D-APPLIED PHYSICS, Aug. 2019, Peer-reviewed

  
• Characterization of surface modification mechanisms for boron nitride films under plasma exposure

  Tomoya Higuchi; Masao Noma; Michiru Yamashita; Keiichiro Urabe; Shigehiko Hasegawa; Koji Eriguchi

  SURFACE AND COATINGS TECHNOLOGY, Aug. 2019, Peer-reviewed

  
• Improvement of the plasma-induced defect generation model in Si substrates and the optimization design framework

  Koji Eriguchi; Takashi Hamano; Keiichiro Urabe

  PLASMA PROCESS AND POLYMERS, Jun. 2019, Peer-reviewed

  
• Characterization of the distribution of defects introduced by plasma exposure in Si substrate

  Yoshihiro Sato; Satoshi Shibata; Akira Uedono; Keiichiro Urabe; Koji Eriguchi

  JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Dec. 2018, Peer-reviewed

  
• Dynamics of cavitation bubbles formed by pulsed-laser ablation plasmas near the critical point of CO2

  Hitoshi Muneoka; Shohei Himeno; Keiichiro Urabe; Sven Stauss; Motoyoshi Baba; Tohru Suemoto; Kazuo Terashima

  JOURNAL OF PHYSICS D-APPLIED PHYSICS, Oct. 2018, Peer-reviewed

  
• Design of compact dispersion interferometer with a high efficiency nonlinear crystal and a low power CO2 laser

  T. Akiyama; S. Yoshimura; K. Tomita; N. Shirai; T. Murakami; K. Urabe

  JOURNAL OF INSTRUMENTATION, Dec. 2017, Peer-reviewed

  
• Laser diagnostics on atmospheric pressure discharge plasmas, including cryoplasmas, in environments around room and cryogenic temperature

  Noritaka Sakakibara; Hitoshi Muneoka; Keiichiro Urabe; Ryoma Yasui; Osamu Sakai; Kazuo Terashima

  JOURNAL OF PHYSICS D-APPLIED PHYSICS, Apr. 2017, Peer-reviewed

  
• Diagnostics of atmospheric-pressure pulsed-dc discharge with metal and liquid anodes by multiple laser-aided methods

  Keiichiro Urabe; Naoki Shirai; Kentaro Tomita; Tsuyoshi Akiyama; Tomoyuki Murakami

  PLASMA SOURCES SCIENCE & TECHNOLOGY, Aug. 2016, Peer-reviewed, Lead author

  
• Electron density change of atmospheric-pressure plasmas in helium flow depending on the oxygen/nitrogen ratio of the surrounding atmosphere

  Kentaro Tomita; Keiichiro Urabe; Naoki Shirai; Yuta Sato; Safwat Hassaballa; Nima Bolouki; Munehiro Yoneda; Takahiro Shimizu; Kiichiro Uchino

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2016, Peer-reviewed

  
• Microdischarge-Induced Decomposition of Ammonia and Reduction of Silver Ions for Formation of Two-Dimensional Network Structure

  Osamu Sakai; Yu Hiraoka; Naoya Kihara; Ella Blanquet; Keiichiro Urabe; Masanobu Tanaka

  PLASMA CHEMISTRY AND PLASMA PROCESSING, Jan. 2016, Peer-reviewed

  
• Generation of dusty plasmas in supercritical carbon dioxide using surface dielectric barrier discharges

  Yasuhito Matsubayashi; Keiichiro Urabe; Sven Stauss; Kazuo Terashima

  JOURNAL OF PHYSICS D-APPLIED PHYSICS, Nov. 2015, Peer-reviewed

  
• Laser absorption spectroscopy diagnostics of helium metastable atoms generated in dielectric barrier discharge cryoplasmas

  Keiichiro Urabe; Hitoshi Muneoka; Sven Stauss; Osamu Sakai; Kazuo Terashima

  JAPANESE JOURNAL OF APPLIED PHYSICS, Oct. 2015, Peer-reviewed, Lead author

  
• Atmospheric pressure synthesis of diamondoids by plasmas generated inside a microfluidic reactor

  Chikako Ishii; Sven Stauss; Koichi Kuribara; Keiichiro Urabe; Takehiko Sasaki; Kazuo Terashima

  DIAMOND AND RELATED MATERIALS, Oct. 2015, Peer-reviewed

  
• Development of dispersion interferometer for magnetic confinement plasmas and high-pressure plasmas

  T. Akiyama; R. Yasuhara; K. Kawahata; K. Nakayama; S. Okajima; K. Urabe; K. Terashima; N. Shirai

  JOURNAL OF INSTRUMENTATION, Sep. 2015, Peer-reviewed

  
• Review of electric discharge microplasmas generated in highly fluctuating fluids: Characteristics and application to nanomaterials synthesis

  Sven Stauss; Hitoshi Muneoka; Keiichiro Urabe; Kazuo Terashima

  PHYSICS OF PLASMAS, May 2015, Peer-reviewed

  
• Micrometer-scale electrical breakdown in high-density fluids with large density fluctuations: Numerical model and experimental assessment

  Hitoshi Muneoka; Keiichiro Urabe; Sven Stauss; Kazuo Terashima

  PHYSICAL REVIEW E, Apr. 2015, Peer-reviewed

  
• Experimental and numerical investigation of time evolution of discharge current and optical emission in helium-nitrogen cryoplasmas

  Hitoshi Muneoka; Keiichiro Urabe; Jai Hyuk Choi; Sven Stauss; Kazuo Terashima

  PLASMA SOURCES SCIENCE & TECHNOLOGY, Dec. 2014, Peer-reviewed

  
• Pure air-plasma bullets propagating inside microcapillaries and in ambient air

  Deanna A. Lacoste; Anne Bourdon; Koichi Kuribara; Keiichiro Urabe; Sven Stauss; Kazuo Terashima

  PLASMA SOURCES SCIENCE & TECHNOLOGY, Dec. 2014, Peer-reviewed

  
• Microscopic heterodyne interferometry for determination of electron density in high-pressure microplasma

  Keiichiro Urabe; Hitoshi Muneoka; Sven Stauss; Kazuo Terashima

  PLASMA SOURCES SCIENCE & TECHNOLOGY, Dec. 2014, Peer-reviewed, Lead author

  
• Propagation of a Dielectric Barrier Discharge in a Multichannel Mixing Chip Microreactor

  Sven Stauss; Chikako Ishii; Koichi Kuribara; Keiichiro Urabe; Kazuo Terashima

  IEEE TRANSACTIONS ON PLASMA SCIENCE, Oct. 2014, Peer-reviewed

  
• Anomalous Behavior of Cavitation Bubbles Observed in Pulsed Laser Ablation of Ni in Liquid CO2 near the Critical Point

  Shohei Himeno; Toru Kato; Keiichiro Urabe; Sven Stauss; Satoshi Kato; Hitoshi Muneoka; Motoyoshi Baba; Tohru Suemoto; Kazuo Terashima

  IEEE TRANSACTIONS ON PLASMA SCIENCE, Oct. 2014, Peer-reviewed

  
• Application of phase-modulated dispersion interferometry to electron-density diagnostics of high-pressure plasma

  Keiichiro Urabe; Tsuyoshi Akiyama; Kazuo Terashima

  JOURNAL OF PHYSICS D-APPLIED PHYSICS, Jul. 2014, Peer-reviewed, Lead author

  
• Diamondoid synthesis in atmospheric pressure adamantane-argon-methane-hydrogen mixtures using a continuous flow plasma microreactor

  Sven Stauss; Chikako Ishii; David Z. Pai; Keiichiro Urabe; Kazuo Terashima

  PLASMA SOURCES SCIENCE & TECHNOLOGY, Jun. 2014, Peer-reviewed

  
• Effect of light irradiation on Townsend breakdown in helium at 5.2K

  Deanna A. Lacoste; Hitoshi Muneoka; Thibault F. Guiberti; David Z. Pai; Keiichiro Urabe; Sven Stauss; Kazuo Terashima

  PLASMA SOURCES SCIENCE & TECHNOLOGY, Feb. 2014, Peer-reviewed

  
• Development of Near-Infrared Laser Heterodyne Interferometry for Diagnostics of Electron and Gas Number Densities in Microplasmas

  Keiichiro Urabe; Hitoshi Muneoka; Sven Stauss; Kazuo Terashima

  APPLIED PHYSICS EXPRESS, Dec. 2013, Peer-reviewed, Lead author

  
• Dynamics of pulsed laser ablation in high-density carbon dioxide including supercritical fluid state

  Keiichiro Urabe; Toru Kato; Sven Stauss; Shohei Himeno; Satoshi Kato; Hitoshi Muneoka; Motoyoshi Baba; Tohru Suemoto; Kazuo Terashima

  JOURNAL OF APPLIED PHYSICS, Oct. 2013, Peer-reviewed, Lead author

  
• Multiheterodyne interference spectroscopy using a probing optical frequency comb and a reference single-frequency laser

  Keiichiro Urabe; Sakai Osamu

  PHYSICAL REVIEW A, Aug. 2013, Peer-reviewed, Lead author

  
• Breakdown characteristics of electrical discharges in high-density helium near the critical point

  Hitoshi Muneoka; Keiichiro Urabe; Sven Stauss; Kazuo Terashima

  Applied Physics Express, Aug. 2013, Peer-reviewed

  
• Functional composites of plasmas and metamaterials: Flexible waveguides, and variable attenuators with controllable phase shift

  Osamu Sakai; Jun Maeda; Takuya Shimomura; Keiichiro Urabe

  PHYSICS OF PLASMAS, Jul. 2013, Peer-reviewed

  
• Hydrazine generation for the reduction process using small-scale plasmas in an argon/ammonia mixed gas flow

  Keiichiro Urabe; Yu Hiraoka; Osamu Sakai

  PLASMA SOURCES SCIENCE & TECHNOLOGY, Jun. 2013, Peer-reviewed, Lead author

  
• Pulsed laser ablation plasmas generated in CO2 under high-pressure conditions up to supercritical fluid

  Toru Kato; Sven Stauss; Satoshi Kato; Keiichiro Urabe; Motoyoshi Baba; Tohru Suemoto; Kazuo Terashima

  APPLIED PHYSICS LETTERS, Nov. 2012, Peer-reviewed

  
• Absorption spectroscopy using interference between optical frequency comb and single-wavelength laser

  Keiichiro Urabe; Osamu Sakai

  APPLIED PHYSICS LETTERS, Jul. 2012, Peer-reviewed, Lead author

  
• Temporally and spectrally resolved observation of a crossed-flow DBD plasma jet using pure helium and argon/acetone mixed gases

  Keiichiro Urabe; Brian L. Sands; Biswa N. Ganguly; Osamu Sakai

  PLASMA SOURCES SCIENCE & TECHNOLOGY, Jun. 2012, Peer-reviewed, Lead author

  
• Discharge-Mode Transition in Jet-Type Dielectric Barrier Discharge Using Argon/Acetone Gas Flow Ignited by Small Helium Plasma Jet

  Keiichiro Urabe; Keitaro Yamada; Osamu Sakai

  JAPANESE JOURNAL OF APPLIED PHYSICS, Nov. 2011, Peer-reviewed, Lead author

  
• Temporally Resolved Imaging of Jet-Type Dielectric Barrier Discharge Using He and Ar/Acetone Crossed Gas Flows

  Keiichiro Urabe; Brian L. Sands; Osamu Sakai; Biswa N. Ganguly

  IEEE TRANSACTIONS ON PLASMA SCIENCE, Nov. 2011, Peer-reviewed, Lead author

  
• Combined spectroscopic methods for electron-density diagnostics inside atmospheric-pressure glow discharge using He/N2 gas mixture

  Keiichiro Urabe; Osamu Sakai; Kunihide Tachibana

  JOURNAL OF PHYSICS D-APPLIED PHYSICS, Mar. 2011, Peer-reviewed, Lead author

  
• Enhancement of visible He2 emission by infrared laser excitation of He metastable atoms in atmospheric-pressure plasma jet

  Keiichiro Urabe; Hideki Motomura; Osamu Sakai; Kunihide Tachibana

  JOURNAL OF PHYSICS D-APPLIED PHYSICS, Feb. 2011, Peer-reviewed, Lead author

  
• Interaction between Dielectric Barrier Discharge and Positive Streamer in Helium Plasma Jet at Atmospheric Pressure

  Keiichiro Urabe; Yosuke Ito; Osamu Sakai; Kunihide Tachibana

  JAPANESE JOURNAL OF APPLIED PHYSICS, Oct. 2010, Peer-reviewed, Lead author

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• Effect of Series Capacitance and Accumulated Charge on a Substrate in a Deposition Process with an Atmospheric-Pressure Plasma Jet

  Yosuke Ito; Yutaka Fukui; Keiichiro Urabe; Osamu Sakai; Kunihide Tachibana

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2010, Peer-reviewed

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• Investigation of discharge mechanisms in helium plasma jet at atmospheric pressure by laser spectroscopic measurements

  Keiichiro Urabe; Tadasuke Morita; Kunihide Tachibana; Biswa N. Ganguly

  JOURNAL OF PHYSICS D-APPLIED PHYSICS, Mar. 2010, Peer-reviewed, Lead author

  
• Measurement of electron density in atmospheric pressure small-scale plasmas using CO2-laser heterodyne interferometry

  Joon-Young Choi; Nobuhiko Takano; Keiichiro Urabe; Kunihide Tachibana

  PLASMA SOURCES SCIENCE & TECHNOLOGY, Aug. 2009, Peer-reviewed

  
• Behavior of N2+ ions in he microplasma jet at atmospheric pressure measured by laser induced fluorescence spectroscopy

  Keiichiro Urabe; Yosuke Ito; Kunihide Tachibana; Biswa N. Ganguly

  APPLIED PHYSICS EXPRESS, Jun. 2008, Peer-reviewed, Lead author

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• High speed deposition of SiO2 films with plasma jet based on capillary dielectric barrier discharge at atmospheric pressure

  Yosuke Ito; Keiichiro Urabe; Nobuhiko Takano; Kunihide Tachibana

  APPLIED PHYSICS EXPRESS, Jun. 2008, Peer-reviewed

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Presentations

• Diagnostics of Plasma Parameters and Surface Impedance by Measuring AC Probe Current at Harmonic Frequencies

  J. Morozumi; K. Eriguchi; K. Urabe

  AVS 70th International Symposium & Exhibition, 07 Nov. 2024, AVS: Science and Technology of Materials, Interfaces, and Processing

  
• Application of Impedance Spectroscopy to Analysis of Plasma-Surface Interaction

  Keiichiro Urabe

  Pacific Rim Meeting on Electrochemical and Solid State Science (PRiME 2024), 08 Oct. 2024, The Electrochemical Society, The Electrochemical Society of Japan, The Korean Electrochemical Society, Invited

  
• Influence of Air-Impurity Concentration on High-Pressure Helium Plasma Generated in a Closed Glass Cell

  Koichi Kishimoto; Minami Toyoda; Koji Eriguchi; Keiichiro Urabe

  The 85th JSAP Autumn Meeting, 20 Sep. 2024, The Japan Society of Applied Physics

  
• Measurement of Water Molecule Density in Low-Pressure H2O Plasma by Infrared Laser Absorption Spectroscopy

  Y. Odo; Y. Kihara; Q. Wang; M. Hada; T. Moriyama; Y. Sakaguchi; J. Morozumi; M. Sasahara; K. Urabe

  The 85th JSAP Autumn Meeting, 20 Sep. 2024, The Japan Society of Applied Physics

  
• Pulsed control and measurement of liquid injection using high-speed piezo valve

  Y. Kihira; Y. Nakaya; T. Moriyama; K. Urabe

  The 85th JSAP Autumn Meeting, 19 Sep. 2024, The Japan Society of Applied Physics

  
• Diagnostics of meta-surface modification by reactive plasma using in-situ impedance spectroscopy

  J. Morozumi, K. Eriguchi, K. Urabe

  The 85th JSAP Autumn Meeting, 18 Sep. 2024, The Japan Society of Applied Physics

  
• Study on surface erosion of ion engine utilizing micro- and nano-meter scale structures

  Keiichiro Urabe

  2024 First Conference, 31 May 2024, Kansai Chapter, The Japan Society of Applied Physics, Invited

  
• Diagnostics of Electron Sheath on a Metal Plate in a Low-Pressure Plasma Using Laser-Induced Fluorescence Spectroscopy

  Yuki Noda; Ryosuke Takahashi; Koji Eriguchi; Keiichiro Urabe

  The 71st JSAP Spring Meeting, 22 Mar. 2024, The Japan Society of Applied Physics

  
• Diagnostics of Ion Shearth on an AC-Biased Metal Plate Using Time-Resolved Laser-Induced Fluorescence Spectroscopy (II)

  Ryosuke Takahashi; Seiya Kito; Koji Eriguchi; Keiichiro Urabe

  The 71st JSAP Spring Meeting, 22 Mar. 2024, The Japan Society of Applied Physics, Invited

  
• Study of molecular-impurity decomposition in high-pressure helium dielectric barrier discharge generated in a closed glass cell

  Minami Toyoda; Koichi Kishimoto; Koji Eriguchi; Keiichiro Urabe

  The 41st Symposium on Plasma Processing, 23 Jan. 2024, Plasma Electronisc Division, The Japan Society of Applied Physics

  
• 準安定励起ヘリウム原⼦を⽤いた光ポンピング磁気センサの磁場感受性についての検討

  日髙颯哉; 豊田みなみ; 占部継一郎; 伊藤陽介

  マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム 合同研究会, 21 Dec. 2023, 電気学会

  
• Degradation of dielectric film by low-temperature plasma exposure investigated using in-situ impedance spectroscopy method

  Keiichiro Urabe; Junki Morozumi; Koji Eriguchi

  3rd Materials Research Meeting (MRM2023) / 24th International Union of Materials Research Societies-International Conference in Asia (IUMRS-ICA2023), 15 Dec. 2023, Materials Research Society of Japan (MRS-J)

  
• Development of harmonic spectroscopy method to analyze electric circuit including non-linear resistance and its application to measure plasma and surface parameters

  Junki Morozumi; Koji Eriguchi; Keiichiro Urabe

  The 84th JSAP Autumn Meeting, 23 Sep. 2023, The Japan Society of Applied Physics

  
• Diagnostics of Ion Sheath on an AC-Biased Metal Plate Using Time-Resolved Laser-Induced Fluorescence Spectroscopy

  Ryosuke Takahashi; Seiya Kito; Koji Eriguchi; Keiichiro Urabe

  The 84th JSAP Autumn Meeting, 23 Sep. 2023, The Japan Society of Applied Physics

  
• Measurement of the density of helium metastable atoms and investigation of magnetic field susceptibility in helium-4 optically pumped magnetometers

  Soya Hidaka; Minami Toyoda; Keiichiro Urabe; Yosuke Ito

  The 84th JSAP Autumn Meeting, 22 Sep. 2023, The Japan Society of Applied Physics

  
• Investigation of Molecular-Impurity Decomposition in High-Pressure Low-Temperature Plasmas Using Laser Absorption Spectroscopy

  Keiichiro Urabe; Minami Toyoda; Yoshinori Matsuoka; Koji Eriguchi

  20th International Symposium on Lase-Aided Plasma Diagnostics, 12 Sep. 2023

  
• Time-resolved laser-induced fluorescence spectroscopy with a continuous-wave diode laser for the investigation of ion sheath dynamics

  Ryosuke Takahashi; Seiya Kito; Koji Eriguchi; Keiichiro Urabe

  20th International Symposium on Lase-Aided Plasma Diagnostics, 12 Sep. 2023

  
• Monitoring of plasma parameters in afterglow of surface-wave argon plasma by a floating harmonic probe method

  Michiru Sasahara; Junki Morozumi; Koji Eriguchi; Keiichiro Urabe

  25th International Symposium on Plasma Chemistry, 22 May 2023, International Plasma Chemistry Society

  
• Behaviors of optical emission from a dielectric barrier discharge in a He gas flow with small-fraction H2O impurity

  Minami Toyoda; Yoshinori Matsuoka; Koji Eriguchi; Keiichiro Urabe

  25th International Symposium on Plasma Chemistry, 22 May 2023, International Plasma Chemistry Society

  
• In-situ electrical monitoring of SiO2/Si structures in low-temperature plasma

  Junki Morozumi; Takahiro Goya; Koji Eriguchi; Keiichiro Urabe

  2022 International Symposium on Dry Process, 25 Nov. 2022

  
• Production of metastable-state argon ions in an electron cyclotron resonance plasma investigated by laser-induced fluorescence spectroscopy

  Ryosuke Takahashi; Seiya Kito; Koji Eriguchi; Keiichiro Urabe

  75th Annual Gaseous Electronics Conference / 11th International Conference on Reactive Plasmas, 05 Oct. 2022, American Physical Society / Japan Society of Applied Physics

  
• Study on density and lifetime of helium metastable atoms for helium-4 optically pumped magnetometers

  Soya Hidaka; Yosuke Ito; Keiichiro Urabe

  83rd JSAP Automn Metting, 22 Sep. 2022, Japan Society of Applied Physics

  
• Monitoring of Material Surface Modification in Plasmas Using a Floating Harmonic Probe Method

  Junki Morozumi; Koji Eriguchi; Keiichiro Urabe

  83rd JSAP Automn Metting, 20 Sep. 2022, Japan Society of Applied Physics

  
• Behaviors of metastable-state argon ion density in an electron cyclotron resonance plasma source measured by laser-induced fluorescence spectroscopy

  Seiya Kito; Koji Eriguchi; Keiichiro Urabe

  2021 International Symposium on Dry Process, 19 Nov. 2021

  
• Monitoring of Probe Surface in Plasmas Using Impedance Spectroscopy

  Junki Morozumi; Tomohiro Kuyama; Seiya Kito; Keiichiro Urabe; Koji Eriguchi

  82nd JSAP Automn Metting, 10 Sep. 2021, Japan Society of Applied Physics

  
• Influence of Stray Capacitance and Probe Potential on Plasma Parameter Measurement by Floating Harmonic Probe

  Seiya Kito; MIkio Sato; Koji Eriguchi; Keiichiro Urabe

  38th Symposium on Plasma Processing / 33rd Symposium on Plasma Science for Materials, 28 Jan. 2021

  
• In-situ diagnostics of dielectric-film properties in plasmas using impedance spectroscopy

  Keiichiro Urabe; Junki Morozumi; Tomohiro Kuyama; Koji Eriguchi

  32nd Annual Meeting of MRS-Japan 2022, 05 Dec. 2022, The Material Research Society of Japan

  
• Quantification of molecular impurity ratio in high-pressure helium dielectric barrier discharge by laser absorption spectroscopy

  Keiichiro Urabe; Minami Toyoda; Yasunori Matsuoka; Koji Eriguchi

  75th Annual Gaseous Electronics Conference / 11th International Conference on Reactive Plasmas, 05 Oct. 2022, American Physical Society / Japan Society of Applied Physics

  
• Experimental study on impurity species in high-pressure helium plasmas

  Keiichiro Urabe

  37th Kyushu-Yamaguchi Plasma Workshop, 07 Nov. 2021, Committee of Kyushu-Yamaguchi Plasma Workshop, Invited

  
• Characterization and control of boron nitride film deposition by a reactive plasma-assisted coating

  Keiichiro Urabe; Takayuki Matsuda; Takashi Hamano; Yuya Asamoto; Masao Noma; Michiru Yamashita; Shigehiko Hasegawa; Koji Eriguchi

  5th Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2021), 28 Sep. 2021, Division of Plasma Physics, Association of Asia Pacific Physical Societies, Invited

  
• Evaluation methodology for assessment of dielectric degradation and breakdown dynamics using time-dependent impedance spectroscopy (TDIS)

  Tomohiro KUYAMA; Keiichiro URABE; Koji Eriguchi

  2021 IEEE Internatinoal Reliability Physics Symposium (IRPS-2021), 23 Mar. 2021, IEEE EDS and Reliability Society

  
• Collaborative Studies on Microplasmas: Opportunities and Potentials

  Keiichiro URABE

  68th Japan Society of Applied Physics, Spring Meeting, 16 Mar. 2021, Japan Society of Applied Physics, Invited

  
• Characterization Scheme for Plasma-Induced Defect Creation due to Stochastic Lateral Straggling in Si Substrates for Ultra-low Leakage Devices

  Y. Sato; T. Yamada; K. Nishimura; M. Yamasaki; M. Murakami; K. Urabe; K. Eriguchi

  66th IEEE International Electron Devices Meeting (IEDM 2020), 14 Dec. 2020, IEEE Electron Devices Society

  
• Influence of Gas-Refractive-Index Dispersion on Measurement of Electron Density Using Dispersion Interferometry

  Keiichiro URABE

  The 29th International Toki Conference on Plasma and Fusion Research, 30 Oct. 2020, National Institute for Fusion Science, Invited

  
• Current status of plasma electron density diagnostics by dispersion interferometer

  Keiichiro URABE

  164th Workshop ~Measurement of gas/liquid radicals and ions in plasma processing~, 04 Sep. 2020, Plasma Science for Materials, JSPS 153 Committee, Invited

  
• Mechanical properties and surface sputtering of boron nitride films prepared by a reactive plasma assisted coating method

  K. Urabe; T. Sumihira; M. Noma; M. Yamashita; S. Hasegawa; K. Eriguchi

  56th Kansai-Chubu Autumn Meeting, 30 Nov. 2019, Kansai and Chubu branch, The Japan Society for Aeronautical and Space Sciences

  
• Diagnostics and monitoring of plasmas

  Keiichiro URABE

  13th Plasma Electronics Incubation Hall, 09 Sep. 2019, The Japan Society of Applied Physics, Division of Plasma Electronics, Invited

  
• Aerospace Application and Spectroscopic Diagnostics of Atmospheric-Pressure Plasmas

  Keiichiro URABE

  472nd Seminar of Aerospace Engineering, 12 Jul. 2019, The Japan Society of Aeronautical and Space Sciences, Kansai Branch, Invited

  
• Spectroscopic study of atmospheric pressure plasmas focusing on phase interface and gas temperature

  Keiichiro Urabe

  Sendai Plasma Forum, 22 Jan. 2019, Research Institute of Electrical Communication, Tohoku University, Invited

  
• Time evolution diagnostics of plasma-liquid (-solid) interaction and their application perspectives

  Keiichiro Urabe

  29th Meeting on new research area of plasma electronics, 26 Nov. 2018, Plasma Electronics Division, Japan Society of Applied Physics, Invited

  
• Fundamental, challenge, and collaborative study on laser interferometry plasma diagnostics

  Keiichiro Urabe

  Frontiers in Plasma Science 2018, 31 Aug. 2018, National Institute of Fusion Science, Invited

  
• Current and future outlook of laser interferometer for high-pressure plasma density diagnostics

  Keiichiro Urabe

  Workshop on Plasma and Atomic Physics in RUB-Japan Science Days 2018, 04 Jul. 2018, Ruhr University Bochum, Invited

  
• Laser interferometry plasma diagnostics: Recent challenges and contributions to plasma technology

  Keiichiro Urabe

  23rd International Symposium on Plasma Chemistry, 03 Aug. 2017, International Plasma Chemistry Society, Invited

  
• Electron-density diagnostics of non-equilibrium atmospheric-pressure plasmas

  Keiichiro Urabe

  Symposium on "Cutting-edge plasma diagnostics for deeper understanding and control of atmospheric and multi-phase plasmas" in the 77th Automun Meeting of the Japan Society of Applied Physics, 14 Sep. 2016, The Japan Society of Applied Physics, Invited

  
• Laser Diagnostics of Microplasmas: Multidisciplinary Collaboration Paving a Way of Innovation

  Keiichiro Urabe

  Gordon Research Conference on Plasma Processing Science, 24 Jul. 2016, Invited

  
• Laser diagnostics of microplasmas on metal and liquid electrodes

  Keiichiro Urabe

  8th International Workshop on Microplasmas, 13 May 2015, Invited

  
• Plasma diagnostics using multi-heterodyne interference of optical frequency comb

  Keiichiro Urabe

  16th International Symposium on Laser Aided Plasma Diagnostics, 25 Sep. 2013, Invited

  
• Introduction to Spectroscopic Diagnostics and Applications of Microplasmas

  Keiichiro Urabe

  EGR891 PhD Seminar Series - Fall 2009, 09 Oct. 2009, Wright State University, Invited

  

Misc.

• 交流電圧を印加した金属板上に形成されるイオンシースの時間分解レーザー誘起蛍光計測

  占部 継一郎; 高橋 良輔

  応用物理学会プラズマエレクトロニクス分科会 会報, Jun. 2024, Invited, Lead author, Corresponding author

  
• プラズマエレクトロニクス賞を受賞して

  佐藤 好弘; 柴田 聡; 占部 継一郎; 江利口 浩二

  応用物理学会プラズマエレクトロニクス分科会 会報, Jun. 2021, Invited

  
• Plasma etching process for advanced CMOS and memory device fabrication

  Koji Eriguchi; Keiichiro Urabe

  Oyo Butsuri, Dec. 2018, Invited

  
• High-speed and precise laser interferometry developed for plasma electron-density diagnostics

  Keiichiro URABE

  Readout, HORIBA Technical Report, Oct. 2018, Invited

  
• レーザー干渉計を用いた高気圧非平衡プラズマ診断

  占部 継一郎

  応用物理学会プラズマエレクトロニクス分科会 会報, Jun. 2014, Invited

  

Books and Other Publications

• Applications of Laser Ablation - Thin Film Deposition, Nanomaterial Synthesis and Surface Modification

  Stauss Sven; Urabe Keiichiro; Muneoka Hitoshi; Terashima Kazuo, Contributor, Pulsed Laser Ablation in High-Pressure Gases, Pressurized Liquids and Supercritical Fluids: Generation, Fundamental Characteristics and Applications

  IntechOpen Ltd, Dec. 2016, Not refereed

  Find Kyoto University's collection of books :

  
• CO2 Laser - Optimisation and Application

  Keiichiro Urabe; Kunihide Tachibana, Contributor, Heterodyne Interferometer for Measurement of Electron Density in High-Pressure Plasmas

  IntechOpen Ltd, Mar. 2012, Not refereed

  Find Kyoto University's collection of books :

  

Industrial Property Rights

• US 11075084 B2, US 2017/0365481 A1, 15/692,247, Chemistries for etching multi-stacked layers

  
• 特許 第6896522号, 特開2019-9335, 特願2017-125070, Etching method and plasma etching material

  
• 特許 第6875152号, 特開2018-145275, 特願2017-40708, Method and material for pore filling inside porous films

  
• 特許 第6666601号, 特開2019-24319, 特願2017-97569, Method to etch porous film

  
• 特許 第6441994号, 特開2018-195678, 特願2017-97569, Method to etch porous film

  

Awards

• 10 Mar. 2021

  Plasma Electronics Division, The Japan Society of Applied Physics, 19th Plasma Electronics Award
• 17 Oct. 2018

  HORIBA, Ltd., 2018 Horiba Award
• 06 Mar. 2014

  ISPlasma 2014 / IC-PLANTS 2014, Best Presentation Award (Oral in Plasma Science)
• 16 Jan. 2014

  The Materials Research Society of Japan, Award for Encouragement of Research in Materials Science
• 23 Sep. 2013

  16th International Symposium on Laser-Aided Plasma Diagnostics, Prize for the Best Combination of Pre-Poster Talk and Poster Presentation
• 28 Sep. 2012

  The IUMRS-ICEM2012 Awarding Committee, IUMRS-ICEM2012 Young Scientist Awards: Silver Award
• 23 Mar. 2010

  Grobal COE Program on Photonic and Electronic Science and Engineering at Kyoto University, Outstanding Presentation Award at Report Meeting of Grant for Ph.D. Students
• 27 Mar. 2008

  The Japan Society of Applid Physics, Young Scientist Oral Presentation Award at the 2007 Autumn Meeting

External funds: Kakenhi

• Diagnostics of plasma-material interaction by harmonic spectroscopy method

  Grant-in-Aid for Scientific Research (B)

  Basic Section 14030:Applied plasma science-related

  Kyoto University

  占部 継一郎

  From 01 Apr. 2024, To 31 Mar. 2028, Granted

  プラズマ;プラズマ・材料相互作用;プラズマ診断;表面改質;高調波分光法

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-24K00620/
• Super-selective and local supply of short-lived reactive species by advanced plasma control

  Grant-in-Aid for Transformative Research Areas (A)

  Transformative Research Areas, Section (II)

  Tohoku University

  金子 俊郎

  From 01 Apr. 2024, To 31 Mar. 2029, Granted

  高反応性活性種合成;種子表面への活性種高選択・局所供給;マルチスケール時間電界制御;ミクロ反応場制御;ガス不純物高度制御

  https://kaken.nii.ac.jp/grant/KAKENHI-PLANNED-24H02247/
• Absolute-density measurement and precision magnetometry using quantum-state control of plasma excited species

  Grant-in-Aid for Challenging Research (Exploratory)

  Medium-sized Section 14:Plasma science and related fields

  Kyoto University

  Keiichiro Urabe

  From 28 Jun. 2019, To 31 Mar. 2021, Project Closed

  光ポンピング;プラズマ;磁気強度計測;励起粒子密度計測

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-19K21864/
• Development of Laser-Induced Fluorescence Spectroscopy for the Measurement of Dynamic Bahaviors of Ion Flow from Plasmas

  Grant-in-Aid for Scientific Research (B)

  Basic Section 14030:Applied plasma science-related

  Kyoto University

  Keiichiro Urabe

  From 01 Apr. 2019, To 31 Mar. 2023, Project Closed

  プラズマ;イオン;レーザー分光;時空間速度分布;イオンシース;レーザー誘起蛍光法;プラズマプロセス;電気推進器;イオン流れ計測

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-19H01886/
• Visualization of flow dynamics of gas and excited species generated by small thermal non-equilibrium plasmas

  Grant-in-Aid for Research Activity Start-up

  0202:Condensed matter physics, plasma science, nuclear engineering, earth resources engineering, energy engineering, and related fields

  Kyoto University

  占部 継一郎

  From 24 Aug. 2018, To 31 Mar. 2020, Project Closed

  プラズマ;分光診断;分光計測;流れの可視化

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18H05849/
• 量子カスケードレーザ干渉イメージングによる高気圧プラズマ密度の高速3次元計測

  Grant-in-Aid for Challenging Exploratory Research

  The University of Tokyo

  占部 継一郎

  From 01 Apr. 2014, To 31 Mar. 2015, Discontinued

  プラズマ;プラズマ診断;量子カスケードレーザー;レーザー干渉計;電子密度

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-26610189/
• Super-selective and local supply of short-lived reactive species by advanced plasma control

  Grant-in-Aid for Transformative Research Areas (A)

  Transformative Research Areas, Section (II)

  Tohoku University

  金子 俊郎

  From 01 Apr. 2024, To 31 Mar. 2029, Granted

  高反応性活性種合成;種子表面への活性種高選択・局所供給;マルチスケール時間電界制御;ミクロ反応場制御;ガス不純物高度制御

  https://kaken.nii.ac.jp/grant/KAKENHI-PLANNED-24H02247/

External funds: others

• 真空極限環境下にあるマテリアル表⾯のマルチ⾼調波インピーダンス分光計測

  公益財団法人 京都大学教育研究振興財団, 研究活動推進助成

  From 30 Jun. 2023, To 31 Mar. 2023

  占部 継一郎
• 光ポンピング法によるプラズマ励起粒子時空間分布の3次元可視化

  カシオ科学振興財団, 第39回研究助成

  From 01 Dec. 2021, To 30 Nov. 2022

  占部 継一郎
• ガス屈折率分散を活用した高調波干渉計のゼロ点アクティブ安定化

  核融合科学研究所 一般共同研究

  From 01 Apr. 2020, To 31 Mar. 2022

  占部 継一郎
• ガス屈折率分散実測による高調波干渉計プラズマ電子密度診断の高精度化

  核融合科学研究所 一般共同研究

  From 01 Apr. 2019, To 31 Mar. 2020

  占部 継一郎
• プラズマ高度制御とアニール処理による立方晶窒化ホウ素薄膜作製

  池谷科学技術振興財団 単年度助成

  From 01 Apr. 2019, To 31 Mar. 2020

  占部 継一郎

Education

Teaching subject(s)

• From 01 Apr. 2024, To 31 Mar. 2025

  Propulsion Engineering, Adv.

  G405, Fall, Graduate School of Engineering, 2
• From 01 Apr. 2024, To 31 Mar. 2025

  Seminar on Engineering Science of Ionized Gases

  V401, Fall, Graduate School of Engineering, 2
• From 01 Apr. 2024, To 31 Mar. 2025

  Fundamentals of Aeroapace Propulsion

  5048, Fall, Faculty of Engineering, 2
• From 01 Apr. 2024, To 31 Mar. 2025

  Engineering Laboratory in Aeronautics and Astronautics 2

  5067, Fall, Faculty of Engineering, 1
• From 01 Apr. 2024, To 31 Mar. 2025

  Microfabrication

  G204, Spring, Graduate School of Engineering, 2
• From 01 Apr. 2024, To 31 Mar. 2025

  Advanced Course of Electromagnetism

  N233, Spring, Institute for Liberal Arts and Sciences, 2
• From 01 Apr. 2023, To 31 Mar. 2024

  Engineering Laboratory in Aeronautics and Astronautics 2

  5067, Fall, Faculty of Engineering, 1
• From 01 Apr. 2023, To 31 Mar. 2024

  Microfabrication

  G204, Spring, Graduate School of Engineering, 2
• From 01 Apr. 2022, To 31 Mar. 2023

  Engineering Laboratory in Aeronautics and Astronautics 2

  5067, Fall, Faculty of Engineering, 1
• From 01 Apr. 2022, To 31 Mar. 2023

  Microfabrication

  G204, Spring, Graduate School of Engineering, 2
• From Apr. 2021, To Mar. 2022

  Engineering Laboratory in Aeronautics and Astronautics 2

  Fall, 工学部
• From Apr. 2021, To Mar. 2022

  Microfabrication

  Spring, 工学研究科
• From Apr. 2020, To Mar. 2021

  Engineering Laboratory in Aeronautics and Astronautics 2

  Fall, 工学部
• From Apr. 2020, To Mar. 2021

  Microfabrication

  Spring, 工学研究科
• From Apr. 2019, To Mar. 2020

  Engineering Laboratory in Aeronautics and Astronautics 2

  Fall, 工学部
• From Apr. 2019, To Mar. 2020

  Microprocess and Micromaterial Engineering

  Spring, 工学研究科

Student achievements: Awards

• 第55回（2023年秋季）応用物理学会講演奨励賞

  高橋 良輔, 応用物理学会, 22 Mar. 2024
• 令和4年度 吉田研究奨励賞

  濱野 誉, 京都大学大学院 工学研究科, Jul. 2022
• DPS2019 Young Researcher Award

  濱野 誉, International Symposium on Dry Process, Nov. 2021
• DPS2019 Young Researcher Award

  久山 智弘, International Symposium on Dry Process, Nov. 2021
• 第50回（2021年春季）講演奨励賞

  久山 智弘, 応用物理学会, Sep. 2021
• IEEE IRPS Best Studend Paper Award

  久山 智弘, IEEE, Mar. 2021
• IEEE EDS Kansai Chapter of the Year Award

  佐藤 好弘, IEEE EDS Kansai Chapter, 28 Sep. 2021
• 関西奨励賞

  濱野 誉, 応用物理学会 関西支部, 22 Mar. 2021
• 第19回プラズマエレクトロニクス賞

  佐藤 好弘, 応用物理学会 プラズマエレクトロニクス分科会, 10 Mar. 2021
• シリコンテクノロジー分科会研究奨励賞

  濱野 誉, 応用物理学会 シリコンテクノロジー分科会, 17 Mar. 2021
• 応用物理学会関西支部 2020年度合同講演会 ポスター賞

  濱野 誉, 応用物理学会 関西支部, 17 Mar. 2021
• IEEE EDS Kansai Chapter MFSK Award

  濱野 誉, IEEE EDS Kansai Chapter, 27 Nov. 2020

Administration

Faculty management (title, position)

• From 01 Apr. 2019, To 31 Mar. 2023

  宇治キャンパス公開　実行委員会　委員

Academic, Social Contribution

Committee Memberships

• From 2024, To Present

  幹事（ナノ・マイクロファブリケーション研究委員会）, 応用物理学会 シリコンテクノロジー分科会
• From 2023

  Local Arrangement, 21st International Workshop on Junction Technology
• From 2023, To Present

  Investigating R&D Committee： Diagnostics of discharge, plasma, and pulse power, The Institute of Electrical Engineers of Japan
• From 2022, To 2024

  Chair of Plasma Wakate (Young Resarchers) Champter, Japan Society of Applied Physics
• From 2023

  Local Organizing Committee, The 25th International Symposium on Plasma Chemistry (ISPC25)
• From 2022

  プログラム委員, 日本表面真空学会 2022年学術講演会（IVC併催）
• From 2021, To 2023

  編集委員（2022年度 APP副主査）, プラズマ・核融合学会
• From 2020, To 2024

  庶務幹事, 日本表面真空学会 関西支部
• From 2021

  プログラム委員, 日本表面真空学会 2021年学術講演会
• From 2021

  Exective Committee, 42nd International Symposium on Dry Process
• From 2021

  Online Arrangement, 20th International Workshop on Junction Technology
• From 2021

  Program Committee, ISPlasma2021/IC-PLANTS2021
• From 2019, To 2021

  幹事, 応用物理学会 プラズマエレクトロニクス分科会
• From 2019, To 2021

  幹事, 日本航空宇宙学会 関西支部
• From 2019

  Local Arrangement, 19th International Workshop on Junction Technology
• From 2019

  Program Comittee, ISPlasma2019/IC-PLANTS2019

Social Contribution

• 電気的・光学的プラズマ計測技術の基礎と応用

  Lecturer

  応用物理学会 プラズマエレクトロニクス分科会, 第35回プラズマエレクトロニクス講習会, From 29 Nov. 2024

  
• Novel plasma technologies and optical plasma diagnostics

  Lecturer

  The Institution of Professional Engineers, Janualy meeting, From 11 Jan. 2019

  
• Spectroscopic diagnostics of excited species generated in atmospheric pressure plasmas

  Lecturer

  Kyoto University, Kyoto Univ. Industrial Day 2018, From 11 Sep. 2018