Basic Information

Faculty

• Faculty of Engineering

Professional Memberships

• From Feb. 1995, To Present

  Japan Society of Applied Physics

Academic Degree

• 修士（工学）(京都大学)
• 博士（工学）(京都大学)

Academic Resume (Graduate Schools)

• 京都大学, 大学院工学研究科博士後期課程電子物性工学専攻, 修了
• 京都大学, 大学院工学研究科修士課程電子物性工学専攻, 修了

Academic Resume (Undergraduate School/Majors)

• 京都大学, 工学部電子工学科, 卒業

High School

• High School

  六甲高等学校

Research History

• From May 2007, To Present

  京都大学 大学院, 工学研究科 原子核工学専攻 兼 附属情報センター, 講師
• From Jun. 2005, To Apr. 2007

  Kyoto University, Quantum Science and Engineering Center, Graduate School of Engineering, 産学官連携助手
• From Apr. 2003, To May 2005

  財団法人大阪科学技術センター, 技術・情報振興部, 研究員
• From 2000, To 2003

  Kyoto University, Graduate School of Engineering

Profile

• Profile

  My research interests are development of novel surface modification process and surface analysis technology using quantum beam and study of polyatomic collision effects by cluster ion impact. I am also working as a staff of center for information technology of graduate school of engineering, which is commissioned for the management and administration of IT infrastructure of graduate school of engineering.

Language of Instruction

• English

ID,URL

• ORCID ID

  0000-0002-0834-1657

• J-Global ID

  200901020479110114

• External link

  https://www.ne.t.kyoto-u.ac.jp/en/research/introduction/q_beam?set_language=en

researchmap URL

• https://researchmap.jp/Toshio_Seki

Research

Research Topics, Overview of the research

• Research Topics

  Development of process technology using multifunctional composite cluster beams and development of surface and interface analysis technology using MeV heavy ions

• Overview of the research

  Development of Novel technologies for micro/nano device fabrication and functional material creation and material processing technology, and organic material surface and interface evaluation technology for bioimaging and organic device evaluation using quantum beams such as heavy ions with MeV energy and multifunctional composite clusters composed of reactive gases, metal materials, vapor deposition support gases, and liquid materials.

Research Interests

• SIMS
• クラスター
• 量子ビーム科学
• ナノ構造材料
• ノズル
• nano-processing
• cluster ion beam

Research Areas

• Energy, Quantum beam science
• Nanotechnology/Materials, Material fabrication and microstructure control
• Nanotechnology/Materials, Applied physics - general
• Nanotechnology/Materials, Thin-film surfaces and interfaces
• Nanotechnology/Materials, Nanostructure chemistry

Papers

• Etching reaction of magnetic materials by CO cluster injection (2)

  Karahashi Kazuhiro; Seki Toshio; Matsuo Jiro; Hamaguchi Satashi

  JSAP Annual Meetings Extended Abstracts, 26 Feb. 2015

  
• Etching reaction of magnetic materials by CO cluster injection

  Karahashi Kazuhiro; Seki Toshio; Matsuo Jiro; Hamaguchi Satoshi

  JSAP Annual Meetings Extended Abstracts, 01 Sep. 2014

  
• Generation and evaluation of CO clusters for cluster beams

  karahashi kazuhiro; seki toshio; matsuo jiro; hamaguchi satoshi

  JSAP Annual Meetings Extended Abstracts, 03 Mar. 2014

  
• High aspect (>20) etching with reactive gas cluster injection

  Toshio Seki; Hiroki Yamamoto; Kunihiko Koike; Takaaki Aoki; Jiro Matsuo

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jul. 2022, Peer-reviewed

  
• Phonon transport probed at carbon nanotube yarn/sheet boundaries by ultrafast structural dynamics

  Masaki Hada; Kotaro Makino; Hirotaka Inoue; Taisuke Hasegawa; Hideki Masuda; Hiroo Suzuki; Keiichi Shirasu; Tomohiro Nakagawa; Toshio Seki; Jiro Matsuo; Takeshi Nishikawa; Yoshifumi Yamashita; Shin-ya Koshihara; Vlad Stolojan; S. Ravi P. Silva; Jun-ichi Fujita; Yasuhiko Hayashi; Satoshi Maeda; Muneaki Hase

  CARBON, Dec. 2020, Peer-reviewed

  
• MeV-SIMS measurement of lithium-containing electrolyte

  Toshio Seki; Tomoya Nonomura; Takaaki Aoki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Sep. 2020, Peer-reviewed

  
• Secondary ion mass spectrometry measurements under ambient and humid conditions using MeV ions

  Toshio Seki; Kenta Ishii; Takaaki Aoki; Jiro Matsuo

  JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, May 2020, Peer-reviewed

  
• Optimized Alkali-Metal Cationization in Secondary Ion Mass Spectrometry of Polyethylene Glycol Oligomers with up to m/z 10000: Dependence on Cation Species and Concentration

  Hubert Gnaser; Rika Oki; Takaaki Aoki; Toshio Seki; Jiro Matsuo

  ANALYTICAL CHEMISTRY, Jan. 2020, Peer-reviewed

  
• Selective Reduction Mechanism of Graphene Oxide Driven by the Photon Mode versus the Thermal Mode.

  Masaki Hada; Kiyoshi Miyata; Satoshi Ohmura; Yusuke Arashida; Kohei Ichiyanagi; Ikufumi Katayama; Takayuki Suzuki; Wang Chen; Shota Mizote; Takayoshi Sawa; Takayoshi Yokoya; Toshio Seki; Jiro Matsuo; Tomoharu Tokunaga; Chihiro Itoh; Kenji Tsuruta; Ryo Fukaya; Shunsuke Nozawa; Shin-Ichi Adachi; Jun Takeda; Ken Onda; Shin-Ya Koshihara; Yasuhiko Hayashi; Yuta Nishina

  ACS nano, 24 Sep. 2019, Peer-reviewed

  
• Gas cooling secondary ions emitted by gas cluster ion beam at the travelling wave ion guide of a Q-ToF-SIMS system

  P. Thopan; T. Seki; L. D. Yu; U. Tippawan; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jul. 2019, Peer-reviewed

  
• Cluster ion beam bombardment and Q-ToF-SIMS analysis of large biomolecules

  P. Thopan; T. Seki; L. D. Yu; U. Tippawan; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jun. 2019, Peer-reviewed

  
• Cationization and fragmentation of molecular ions sputtered from polyethylene glycol under gas cluster bombardment: An analysis by MS and MS/MS

  Prutchayawoot Thopan; Hubert Gnaser; Rika Oki; Takaaki Aoki; Toshio Seki; Jiro Matsuo

  International Journal of Mass Spectrometry, 01 Jul. 2018, Peer-reviewed

  
• Recent Progress of SIMS Technique : from Novel Primary Beams to Advanced Mass Spectrometers

  MATSUO Jiro; SEKI Toshio; AOKI Takaaki

  Vacuum and Surface Science, 2018

  
• Angled etching of Si by ClF3-Ar gas cluster injection

  Toshio Seki; Hiroki Yamamoto; Takahiro Kozawa; Tadashi Shojo; Kunihiko Koike; Takaaki Aoki; Jiro Matsuo

  Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed

  
• Fabrication of a Si lever structure made by double-angled etching with reactive gas cluster injection

  T. Seki; H. Yamamoto; T. Kozawa; K. Koike; T. Aoki; J. Matsuo

  APPLIED PHYSICS LETTERS, May 2017, Peer-reviewed

  
• Development of Low-vacuum SIMS instruments with large cluster Ion beam

  K. Suzuki; M. Kusakari; M. Fujii; T. Seki; T. Aoki; J. Matsuo

  SURFACE AND INTERFACE ANALYSIS, Nov. 2016, Peer-reviewed

  
• Molecular dynamics simulations study of nano particle migration by cluster impact

  Takaaki Aoki; Toshio Seki; Jiro Matsuo

  SURFACE & COATINGS TECHNOLOGY, Nov. 2016, Peer-reviewed

  
• Reactive etching by ClF3-Ar neutral cluster beam with scanning

  Toshio Seki; Yu Yoshino; Takehiko Senoo; Kunihiko Koike; Takaaki Aoki; Jiro Matsuo

  JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2016, Peer-reviewed

  
• Solvent-free silver-nanoparticle surface-assisted laser desorption/ionization imaging mass spectrometry of the Irganox 1010 coated on polystyrene

  Takaya Satoh; Hironobu Niimi; Naoki Kikuchi; Makiko Fujii; Toshio Seki; Jiro Matsuo

  INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, Jun. 2016, Peer-reviewed

  
• Reactive etching by ClF

  Seki Toshio; Yoshino Yu; Senoo Takehiko; Koike Kunihiko; Aoki Takaaki; Matsuo Jiro

  Jpn. J. Appl. Phys., 09 May 2016

  
• Development of ambient SIMS using mega-electron-volt-energy ion probe

  Masakazu Kusakari; Makiko Fujii; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 01 May 2016, Peer-reviewed

  
• Secondary ion emission from leucine and isoleucine under argon gas-cluster ion bombardment

  Hubert Gnaser; Masakazu Kusakari; Makiko Fujii; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 01 May 2016, Peer-reviewed

  
• Secondary ion emission from leucine and isoleucine under argon gas-cluster ion bombardment

  Hubert Gnaser; Masakazu Kusakari; Makiko Fujii; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, May 2016, Peer-reviewed

  
• Development of ambient SIMS using mega-electron-volt-energy ion probe

  Masakazu Kusakari; Makiko Fujii; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, May 2016, Peer-reviewed

  
• Ambient analysis of liquid materials with Wet-SIMS

  Toshio Seki; Masakazu Kusakari; Makiko Fujii; Takaaki Aoki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Mar. 2016, Peer-reviewed

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• Yields and images of secondary ions from organic materials by different primary Bi ions in time-of-flight secondary ion mass spectrometry

  Rie Shishido; Makiko Fujii; Toshio Seki; Takaaki Aoki; Jiro Matsuo; Shigeru Suzuki

  RAPID COMMUNICATIONS IN MASS SPECTROMETRY, Feb. 2016, Peer-reviewed

  
• Recent Progress in Cluster Beam Technique

  MATSUO Jiro; FUJII Makiko; SEKI Toshio; AOKI Takaaki

  Journal of the Japan Society for Precision Engineering, Jan. 2016

  
• Observation of Liquid Water with Ambient SIMS

  Kusakari M.; Fujii M.; Seki T.; Aoki T.; Matsuo J.

  Transactions of the Materials Research Society of Japan, 2016

  
• Recent developments of cluster ion beam-from nano-fabrication to analysis of bio-materials

  Jiro Matsuo; Makiko Fujii; Toshio Seki; Takaaki Aoki

  Journal of the Vacuum Society of Japan, 2016

  
• Development of ambient SIMS using mega-electron-volt-energy ion probe

  Masakazu Kusakari; Makiko Fujii; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2016, Peer-reviewed

  
• High-aspect-ratio patterning by ClF3-Ar neutral cluster etching

  Hiroki Yamamoto; Toshio Seki; Jiro Matsuo; Kunihiko Koike; Takahiro Kozawa

  MICROELECTRONIC ENGINEERING, Jun. 2015, Peer-reviewed

  
• Molecular cluster emission in sputtering of amino acids by argon gas-cluster ions

  Masakazu Kusakari; Hubert Gnaser; Makiko Fujii; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, May 2015, Peer-reviewed

  
• Progress and applications of cluster ion beam technology

  I. Yamada; J. Matsuo; N. Toyoda; T. Aoki; T. Seki

  CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE, Feb. 2015, Peer-reviewed

  
• Mass analysis by Ar-GCIB-dynamic SIMS for organic materials

  Masato Suzuki; Masashi Nojima; Makiko Fujii; Toshio Seki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Feb. 2015, Peer-reviewed

  
• Mass analysis by Ar-GCIB-dynamic SIMS for organic materials

  Masato Suzuki; Masashi Nojima; Makiko Fujii; Toshio Seki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Feb. 2015, Peer-reviewed

  
• Recent Progress and Future Prospect of Cluster SIMS for Biological Applications

  FUJII MAKIKO; SEKI TOSHIO; AOKI TAKAAKI; MATSUO JIRO

  Abstract of annual meeting of the Surface Science of Japan, Jan. 2015, Peer-reviewed

  
• Imaging Mass of Bio-molecules with cluster SIMS

  Matsuo Jiro; Suzuki Kanji; Kusakari Masakazu; Fujii Makiko; Aoki Takaaki; Seki Toshio

  Abstract of annual meeting of the Surface Science of Japan, Jan. 2015, Peer-reviewed

  
• Mass analysis by Ar-GCIB-dynamic SIMS for organic materials

  Masato Suzuki; Masashi Nojima; Makiko Fujii; Toshio Seki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Dec. 2014, Peer-reviewed

  
• Quantitative analysis of lipids with argon gas cluster ion beam secondary ion mass spectrometry

  Makiko Fujii; Shunichirou Nakagawa; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Dec. 2014, Peer-reviewed

  
• Analysis of liquid materials in low vacuum with Wet-SIMS

  Toshio Seki; Makiko Fujii; Masakazu Kusakari; Shunichiro Nakagawa; Takaaki Aoki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Dec. 2014, Peer-reviewed

  
• Development of organic SIMS system with Ar-GCIB and IMS-4f

  Masashi Nojima; Masato Suzuki; Makiko Fujii; Toshio Seki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Nov. 2014, Peer-reviewed

  
• Lipid compounds analysis with MeV-SIMS apparatus for biological applications

  Makiko Fujii; Masakazu Kusakari; Kazuhiro Matsuda; Naoki Man; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Nov. 2014, Peer-reviewed

  
• Development of Au-GCIB dynamic SIMS and cluster size filtering system

  M. Nojima; M. Suzuki; T. Adachi; S. Hotta; M. Fujii; T. Seki; J. Matsuo

  Microscopy and Microanalysis, 01 Aug. 2014, Peer-reviewed

  
• Biomaterial imaging with MeV-energy heavy ion beams

  Toshio Seki; Yoshinobu Wakamatsu; Shunichiro Nakagawa; Takaaki Aoki; Akihiko Ishihara; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Aug. 2014, Peer-reviewed

  
• Cold ablation driven by localized forces in alkali halides

  Masaki Hada; Dongfang Zhang; Kostyantyn Pichugin; Julian Hirscht; Micha A. Kochman; Stuart A. Hayes; Stephanie Manz; Regis Y. N. Gengler; Derek A. Wann; Toshio Seki; Gustavo Moriena; Carole A. Morrison; Jiro Matsuo; German Sciaini; R. J. Dwayne Miller

  NATURE COMMUNICATIONS, May 2014, Peer-reviewed

  
• Novel SIMS system with focused massive cluster ion source for mass imaging spectrometry with high lateral resolution

  Jiro Matsuo; Souta Torii; Kazuki Yamauchi; Keisuke Wakamoto; Masakazu Kusakari; Shunichiro Nakagawa; Makiko Fujii; Takaaki Aoki; Toshio Seki

  APPLIED PHYSICS EXPRESS, May 2014, Peer-reviewed

  
• Study on the detection limits of a new argon gas cluster ion beam secondary ion mass spectrometry apparatus using lipid compound samples

  Makiko Fujii; Shunichirou Nakagawa; Kazuhiro Matsuda; Naoki Man; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  RAPID COMMUNICATIONS IN MASS SPECTROMETRY, Apr. 2014, Peer-reviewed

  
• Prolific cluster emission in sputtering of phenylalanine by argon-cluster ion bombardment

  Hubert Gnaser; Makiko Fujii; Shunichirou Nakagawa; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, Mar. 2014, Peer-reviewed

  
• クラスターSIMS法による脂質分子の高感度検出とイメージングへの応用

  藤井 麻樹子; 宍戸 理恵; 鳥居 聡太; 中川 駿一郎; 瀬木 利夫; 青木 学聡; 鈴木 茂; 松尾 二郎

  表面科学, Jan. 2014

  
• Low Vacuum SIMS Measurements of Higher Alcohols with MeV-energy Heavy Ion Beam

  Kusakari Masakazu; Fujii Makiko; Seki Toshio; Aoki Takaaki; Matsuo Jiro

  Trans. Mat. Res. Soc. Japan, 2014

  
• An electrostatic quadrupole doublet focusing system for MeV heavy ions in MeV-SIMS

  T. Seki; S. Shitomoto; S. Nakagawa; T. Aoki; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Nov. 2013, Peer-reviewed

  
• Molecular dynamics simulation study of damage formation and sputtering with huge fluorine cluster impact on silicon

  Takaaki Aoki; Toshio Seki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, May 2013, Peer-reviewed

  
• Development of gas cluster ion beam irradiation system with an orthogonal acceleration TOF instrument

  K. Ichiki; J. Tamura; T. Seki; T. Aoki; J. Matsuo

  SURFACE AND INTERFACE ANALYSIS, Jan. 2013, Peer-reviewed

  
• Ion-induced damage evaluation with Ar cluster ion beams

  Yasuyuki Yamamoto; Kazuya Ichiki; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Jan. 2013, Peer-reviewed

  
• Peptide dissociation patterns in secondary ion mass spectrometry under large argon cluster ion bombardment

  Hubert Gnaser; Makiko Fujii; Shunichirou Nakagawa; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Rapid Communications in Mass Spectrometry, 2013, Peer-reviewed

  
• Ultrafine particle removal using gas cluster ion beam technology

  Kazuya Dobashi; Kensuke Inai; Misako Saito; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  IEEE Transactions on Semiconductor Manufacturing, 2013, Peer-reviewed

  
• Removal of Ion implanted Poly vinyl phenol using Wet Ozone

  Yousuke Goto; Yukihiro Angata; Masashi Yamamoto; Toshio Seki; Jiro Matsumoto; Hideo Horibe

  JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2013, Peer-reviewed

  
• Molecular dynamics study of crater formation by core-shell structured cluster impact

  Takaaki Aoki; Toshio Seki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jul. 2012, Peer-reviewed

  
• Depth profiling analysis of damaged arginine films with Ar cluster ion beams

  J. Matsuo; K. Ichiki; Y. Yamamoto; T. Seki; T. Aoki

  SURFACE AND INTERFACE ANALYSIS, Jun. 2012, Peer-reviewed

  
• Etching of metallic materials with Cl-2 gas cluster ion beam

  T. Seki; T. Aoki; J. Matsuo

  SURFACE & COATINGS TECHNOLOGY, Nov. 2011, Peer-reviewed

  
• Low-damage milling of an amino acid thin film with cluster ion beam

  Masaki Hada; Sachi Ibuki; Yusaku Hontani; Yasuyuki Yamamoto; Kazuya Ichiki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  JOURNAL OF APPLIED PHYSICS, Nov. 2011, Peer-reviewed

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• Highly sensitive molecular detection with swift heavy ions

  Yoshinobu Wakamatsu; Hideaki Yamada; Satoshi Ninomiya; Brian N. Jones; Toshio Seki; Takaaki Aoki; Roger Webb; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Oct. 2011, Peer-reviewed

  
• The effects of cluster size on sputtering and surface smoothing of PMMA with gas cluster ion beams

  Kazuya Ichiki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Transactions of the Materials Research Society of Japan, Sep. 2011, Peer-reviewed

  
• Molecular dynamics simulations of large fluorine cluster impact on silicon with supersonic velocity

  Takaaki Aoki; Toshio Seki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jul. 2011, Peer-reviewed

  
• Using ellipsometry for the evaluation of surface damage and sputtering yield in organic films with irradiation of argon cluster ion beams

  Masaki Hada; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Jan. 2011, Peer-reviewed

  
• The effect of incident energy on molecular depth profiling of polymers with large Ar cluster ion beams

  Satoshi Ninomiya; Kazuya Ichiki; Hideaki Yamada; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Jan. 2011, Peer-reviewed

  
• MeV-energy probe SIMS imaging of major components in washed and fractured animal cells

  H. Yamada; Y. Nakata; S. Ninomiya; T. Seki; T. Aoki; J. Tamura; J. Matsuo

  SURFACE AND INTERFACE ANALYSIS, Jan. 2011, Peer-reviewed

  
• Analysis of organic semiconductor multilayers with Ar cluster secondary ion mass spectrometry

  Satoshi Ninomiya; Kazuya Ichiki; Hideaki Yamada; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  SURFACE AND INTERFACE ANALYSIS, Jan. 2011, Peer-reviewed

  
• Surface morphology of PMMA surfaces bombarded with size-selected gas cluster ion beams

  K. Ichiki; S. Ninomiya; Y. Nakata; H. Yamada; T. Seki; T. Aoki; J. Matsuo

  SURFACE AND INTERFACE ANALYSIS, Jan. 2011, Peer-reviewed

  
• Simultaneous Sterilization With Surface Modification Of Plastic Bottle By Plasma-Based Ion Implantation

  N. Sakudo; N. Ikenaga; F. Ikeda; Y. Nakayama; Y. Kishi; Z. Yajima; Jiro Matsuo; Masataka Kase; Takaaki Aoki; Toshio Seki

  2011

  
• Evaluation of damage depth on arginine films with molecular depth profiling by Ar cluster ion beam

  Yamamoto Yasuyuki; Ichiki Kazuya; Seki Toshio; Aoki Takaaki; Matsuo Jiro

  Trans. Mat. Res. Soc. Japan, 2011

  
• Sputtering Properties of Si by Size-Selected Ar Gas Cluster Ion Beam

  K Ichiki; S Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Transactions of the Materials Research Society of Japan, Dec. 2010, Peer-reviewed

  
• Processing Techniques of Biomaterials: Using Gas Cluster Ion Beam for Imaging Mass Spectrometry

  H Yamada; K Ichiki; Y Nakata; S Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Transactions of the Materials Research Society of Japan, Dec. 2010, Peer-reviewed

  
• SIMS Depth Profiling of Organic Materials with Ar Cluster Ion Beam

  Satoshi Ninomiya; Kazuya Ichiki; Hideaki Yamada; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Transactions of the Materials Research Society of Japan, Dec. 2010, Peer-reviewed

  
• Nano Processing with Gas Cluster Ion Beams

  MATSUO Jiro; KITAGAWA Teruyuki; SEKI Toshio; AOKI Takaaki

  Journal of Japanese Society of Tribologists, 15 Nov. 2010

  
• SIMS with highly excited primary beams for molecular depth profiling and imaging of organic and biological materials

  Jiro Matsuo; Satoshi Ninomiya; Hideaki Yamada; Kazuya Ichiki; Yoshinobu Wakamatsu; Masaki Hada; Toshio Seki; Takaaki Aoki

  SURFACE AND INTERFACE ANALYSIS, Oct. 2010, Peer-reviewed

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• MeV-energy probe SIMS imaging of major components in animal cells etched using large gas cluster ions

  Hideaki Yamada; Kazuya Ichiki; Yoshihiko Nakata; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jun. 2010, Peer-reviewed

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• Molecular dynamics simulations for gas cluster ion beam processes

  Takaaki Aoki; Toshio Seki; Jiro Matsuo

  VACUUM, Mar. 2010, Peer-reviewed

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• Evaluation of Damage Layer in an Organic Film with Irradiation of Energetic Ion Beams

  Masaki Hada; Sachi Ibuki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, Peer-reviewed

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• Anisotropic Etching Using Reactive Cluster Beams

  Kunihiko Koike; Yu Yoshino; Takehiko Senoo; Toshio Seki; Satoshi Ninomiya; Takaaki Aoki; Jiro Matsuo

  APPLIED PHYSICS EXPRESS, 2010, Peer-reviewed

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• Nano Processing with Gas Cluster Ion Beams

  Jiro Matsuo; Teruyuki Kitagawa; Toshio Seki; Takaaki Aoki

  JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 2010

  
• Molecular depth profiling of multilayer structures of organic semiconductor materials by secondary ion mass spectrometry with large argon cluster ion beams

  Satoshi Ninomiya; Kazuya Ichiki; Hideaki Yamada; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  RAPID COMMUNICATIONS IN MASS SPECTROMETRY, Oct. 2009, Peer-reviewed

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• Study of density effect of large gas cluster impact by molecular dynamics simulations

  Takaaki Aoki; Toshio Seki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Sep. 2009, Peer-reviewed

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• The emission process of secondary ions from solids bombarded with large gas cluster ions

  Satoshi Ninomiya; Kazuya Ichiki; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Aug. 2009, Peer-reviewed

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• Precise and fast secondary ion mass spectrometry depth profiling of polymer materials with large Ar cluster ion beams

  Satoshi Ninomiya; Kazuya Ichiki; Hideaki Yamada; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  RAPID COMMUNICATIONS IN MASS SPECTROMETRY, Jun. 2009, Peer-reviewed

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• Imaging mass spectrometry with nuclear microprobes for biological applications

  Y. Nakata; H. Yamada; Y. Honda; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jun. 2009, Peer-reviewed

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• Nano-processing with gas cluster ion beams

  Toshio Seki

  SURFACE & COATINGS TECHNOLOGY, Jun. 2009, Peer-reviewed

  
• Study of crater formation and sputtering process with large gas cluster impact by molecular dynamics simulations

  Takaaki Aoki; Toshio Seki; Satoshi Ninomiya; Kazuya Ichiki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, May 2009, Peer-reviewed

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• High-speed processing with Cl-2 cluster ion beam

  T. Seki; T. Aoki; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, May 2009, Peer-reviewed

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• Low Damage Etching of Polymer Materials for Depth Profile Analysis Using Large Ar Cluster Ion Beam

  Satoshi Ninomiya; Kazuya Ichiki; Hideaki Yamada; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Journal of Surface Analysis, Feb. 2009, Peer-reviewed

  
• A Processing Technique for Cell Surfaces Using Gas Cluster Ions for Imaging Mass Spectrometry

  Hideaki Yamada; Kazuya Ichiki; Yoshihiko Nakata; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Journal of the Mass Spectrometry Society of Japan, Jan. 2009, Peer-reviewed

  
• Matrix-free high-resolution imaging mass spectrometry with high-energy ion projectiles

  Yoshihiko Nakata; Yoshiro Honda; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  JOURNAL OF MASS SPECTROMETRY, Jan. 2009, Peer-reviewed

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• Stress measurement of carbon cluster implanted layers with in-plane diffraction technique

  Jiro Matsuo; Kazuya Ichiki; Masaki Hada; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Tsutomu Nagayama; Masayasu Tanjyo

  Extended Abstracts of the 9th International Workshop on Junction Technology, IWJT 2009, 2009, Peer-reviewed

  
• Sputtering Yield Measurements with Size-selected Gas Cluster Ion Beams

  Kazuya Ichiki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  MRS Symposium Proceedings, 2009, Peer-reviewed

  
• What size of cluster is most appropriate for SIMS?

  Jiro Matsuo; Satoshi Ninomiya; Yoshihiko Nakata; Yoshiro Honda; Kazuya Ichiki; Toshio Seki; Takaaki Aoki

  APPLIED SURFACE SCIENCE, Dec. 2008, Peer-reviewed

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• High-Speed Nano-Processing with Cluster Ion Beams

  Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Transactions of the MRS-J, Dec. 2008, Peer-reviewed

  
• Low Damage Etching and SIMS Depth Profiling with Large Ar Cluster Ions

  Satoshi Ninomiya; Jiro Matsuo; Kazuya Ichiki; Hideaki Yamada; Yoshihiko Nakata; Yoshiro Honda; Toshio Seki; Takaaki Aoki

  Transactions of the MRS-J, Dec. 2008, Peer-reviewed

  
• SIMS Analysis of Biological Mixtures with Fast Heavy Ion Irradiation

  Yoshiro Honda; Yoshihiko Nakata; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Transactions of the MRS-J, Dec. 2008, Peer-reviewed

  
• MD simulation study of the sputtering process by high-energy gas cluster impact

  Takaaki Aoki; Toshio Seki; Satoshi Ninomiya; Jiro Matsuo

  APPLIED SURFACE SCIENCE, Dec. 2008, Peer-reviewed

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• Secondary ion emission from Si bombarded with large Ar cluster ions under UHV conditions

  Satoshi Ninomiya; Kazuya Ichiki; Yoshihiko Nakata; Yoshiro Honda; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  APPLIED SURFACE SCIENCE, Dec. 2008, Peer-reviewed

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• High sputtering yields of organic compounds by large gas cluster ions

  K. Ichiki; S. Ninomiya; Y. Nakata; Y. Honda; T. Seki; T. Aoki; J. Matsuo

  APPLIED SURFACE SCIENCE, Dec. 2008, Peer-reviewed

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• Yield enhancement of molecular ions with MeV ion-induced electronic excitation

  Y. Nakata; Y. Honda; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  APPLIED SURFACE SCIENCE, Dec. 2008, Peer-reviewed

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• A fragment-free ionization technique for organic mass spectrometry with large Ar cluster ions

  Satoshi Ninomiya; Yoshihiko Nakata; Yoshiro Honda; Kazuya Ichiki; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  APPLIED SURFACE SCIENCE, Dec. 2008, Peer-reviewed

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• Carbon nanotubes from a divided catalyst: the carbon transmission method

  Takeshi Hikata; Kazuhiko Hayashi; Tomoyuki Mizukoshi; Yoshiaki Sakurai; Itsuo Ishigami; Takaaki Aoki; Toshio Seki; Jiro Matsuo

  APPLIED PHYSICS EXPRESS, Mar. 2008, Peer-reviewed

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• Low damage smoothing of magnetic materials using off-nonnal gas cluster ion beam irradiation

  S. Kakuta; S. Sasaki; K. Furusawa; T. Seki; T. Aoki; J. Matsuo

  SURFACE & COATINGS TECHNOLOGY, Aug. 2007, Peer-reviewed

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• Surface processing with high-energy gas cluster ion beams

  Toshio Seki; Jiro Matsuo

  SURFACE & COATINGS TECHNOLOGY, Aug. 2007

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• Molecular dynamics study of monomer and dimer emission processes with high energy gas cluster ion impact

  Takaaki Aoki; Toshio Seki; Satoshi Ninomiya; Jiro Matsuo

  SURFACE & COATINGS TECHNOLOGY, Aug. 2007, Peer-reviewed

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• Energy distribution of high-energy cluster ion beams

  T. Seki; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Aug. 2007

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• Effect of oblique irradiation of gas cluster ion beam on surface properties of gold mirrors

  A. Suzuki; E. Bourelle; A. Sato; T. Seki; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Apr. 2007

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• High-speed processing with high-energy SF6 cluster ion beam

  T. Seki; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Apr. 2007

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• Size effect in cluster collision on solid surfaces

  Jiro Matsuo; Satoshi Ninomiya; Yoshihiko Nakata; Kazuya Ichiki; Takaaki Aoki; Toshio Seki

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Apr. 2007, Peer-reviewed

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• Low damage smoothing of magnetic material films using a gas cluster ion beam

  S. Kakuta; S. Sasaki; T. Hirano; K. Ueda; T. Seki; S. Ninomiya; M. Hada; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Apr. 2007

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• Low-damage surface smoothing of laser crystallized polycrystalline silicon using gas cluster ion beam

  H. Tokioka; H. Yamarin; T. Fujino; M. Inoue; T. Seki; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Apr. 2007

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• The effect of incident cluster ion energy and size on secondary ion yields emitted from Si

  Satoshi Ninomiya; Kazuya Ichiki; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Mar. 2007, Peer-reviewed

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• Measurements of secondary ions emitted from organic compounds bombarded with large gas cluster ions

  Satoshi Ninomiya; Yoshihiko Nakata; Kazuya Ichiki; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Mar. 2007, Peer-reviewed

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• Surface oxidation of Si assisted by irradiation with large gas cluster ion beam in an oxygen atmosphere

  K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Mar. 2007, Peer-reviewed

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• The effect of incident cluster ion size on secondary ion yields produced from Si

  Satoshi Ninomiya; Kazuya Ichiki; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN, VOL 32, NO 4, 2007, Peer-reviewed

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• Secondary ion measurements for oxygen cluster ion SIMS

  Satoshi Ninomiya; Takaaki Aoki; Toshio Seki; Jiro Matsuo

  APPLIED SURFACE SCIENCE, Jul. 2006, Peer-reviewed

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• High-intensity Si cluster ion emission from a silicon target bombarded with large Ar cluster ions

  Satoshi Ninomiya; Takaaki Aoki; Toshio Seki; Jiro Matsuo

  APPLIED SURFACE SCIENCE, Jul. 2006, Peer-reviewed

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• Surface cleaning and modification of Si(100) substrates by ethanol and water cluster ion beams

  GH Takaoka; H Noguchi; K Nakayama; T Seki; M Kawashita

  REVIEW OF SCIENTIFIC INSTRUMENTS, Mar. 2006

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• Cluster size dependence of sputtering yield by cluster ion beam irradiation

  T Seki; T Murase; J Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jan. 2006, Peer-reviewed

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• ITO surface smoothing with argon cluster ion beam

  C Heck; T Seki; T Oosawa; M Chikamatsu; N Tanigaki; T Hiraga; J Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jan. 2006, Peer-reviewed

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• High-speed nano-processing with cluster ion beams

  T. Seki; J. Matsuo

  ION IMPLANTATION TECHNOLOGY, 2006, Peer-reviewed

  
• Energy distributions of high current cluster ion beams

  T Seki; J Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Dec. 2005, Peer-reviewed

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• Sidewall polishing with a gas cluster ion beam for photonic device applications

  E Bourelle; A Suzuki; A Sato; T Seki; J Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Dec. 2005, Peer-reviewed

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• Development of 1 mA cluster ion beam source

  T Seki; J Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Aug. 2005, Peer-reviewed

  
• Size and energy distribution of gas cluster ion beam measured by energy resolved time of flight mass spectroscopy

  S Kakuta; T Seki; S Sasaki; K Furusawa; T Aoki; J Matsuo

  SURFACE & COATINGS TECHNOLOGY, Jun. 2005, Peer-reviewed

  
• Organic electroluminescent device on ITO smoothed with Ar cluster ion beam

  Claire Heck; Takeru Oosawa; Masayuki Chikamatsu; Nobu Tanigaki; Toshio Seki; Jiro Matsuo

  Nonlinear Optics Quantum Optics, 2005, Peer-reviewed

  
• Development of the large current cluster ion beam technology

  Toshio Seki; Jiro Matsuo

  Novel Materials Processing by Advanced Electromagnetic Energy Sources, 2005, Peer-reviewed

  
• Glancing angle fluorescence XAFS study on metal oxide thin films obtained by oxygen gas cluster ion beam assisted deposition techniques

  H. Kageyama; T. Asanuma; T. Takeuchi; K. Kadono; J. Matsuo; T. Seki; T. Kitagawa; N. Toyoda; Y. Shimizugawa; T. Uruga

  Physica Scripta T, 2005, Peer-reviewed

  
• Glancing angle fluorescence XAFS study on metal oxide thin films obtained by oxygen gas cluster ion beam assisted deposition techniques

  H. Kageyama; T. Asanuma; T. Takeuchi; K. Kadono; J. Matsuo; T. Seki; T. Kitagawa; N. Toyoda; Y. Shimizugawa; T. Uruga

  PHYSICA SCRIPTA, 2005, Peer-reviewed

  
• Polishing of sidewall surfaces using a gas cluster ion beam

  E Bourelle; A Suzuki; A Sato; T Seki; J Matsuo

  JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, Oct. 2004, Peer-reviewed

  
• A new secondary ion mass spectrometry (SIMS) system with high-intensity cluster ion source

  J Matsuo; C Okubo; T Seki; T Aoki; N Toyoda; Yamada, I

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jun. 2004, Peer-reviewed

  
• Surface smoothing with large current cluster ion beam

  T Seki; J Matsuo

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Feb. 2004, Peer-reviewed

  
• Non-Linear Effects in Cluster Impacts and Its Application to Nano-Fabrication

  MATSUO Jiro; SEKI Toshio; AOKI Takaaki

  Journal of High Temperature Society., 20 Sep. 2003

  
• Production of liquid cluster ions for surface treatment

  GH Takaoka; H Noguchi; T Yamamoto; T Seki

  JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, Aug. 2003, Peer-reviewed

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• Modeling of surface smoothing process by cluster ion beam irradiation

  A Nakai; T Aoki; T Seki; J Matsuo; GH Takaoka; Yamada, I

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, May 2003, Peer-reviewed

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• Atomistic study of cluster collision on solid surfaces

  J Matsuo; T Seki; T Aoki; Yamada, I

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, May 2003, Peer-reviewed

  
• Generation of the large current cluster ion beam

  T Seki; J Matsuo; GH Takaoka; Yamada, I

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, May 2003, Peer-reviewed

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• Titanium-dioxide film formation using gas cluster ion beam assisted deposition technique

  O Nakatsu; J Matsuo; K Omoto; T Seki; G Takaoka; Yamada, I

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, May 2003

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• Scanning tunneling microscope observations of Ge deposition on Si(111)-7x7 surfaces irradiated by Xe ions

  GH Takaoka; T Seki; K Tsumura; J Matsuo

  THIN SOLID FILMS, Feb. 2002

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• Interaction of SF6 cluster ion beams with Si surface

  GH Takaoka; S Nakamura; T Seki; J Matsuo

  JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, Dec. 2001

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• Nano-processing with gas cluster ion beams

  Yamada, I; J Matsuo; Z Insepov; T Aoki; T Seki; N Toyoda

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Apr. 2000, Peer-reviewed

  
• STM observation of surface vacancies created by ion impact

  T Seki; T Aoki; J Matsuo; Yamada, I

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Apr. 2000, Peer-reviewed

  
• UHV-STM study on ion-assisted deposition

  T Seki; J Matsuo; Yamada, I

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Mar. 2000, Peer-reviewed

  
• Cluster size dependence of the impact process on a carbon substrate

  T Aoki; T Seki; J Matsuo; Z Insepov; Yamada, I

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jun. 1999, Peer-reviewed

  
• Energy dependence of a single trace created by C-60 ion impact

  T Seki; T Aoki; M Tanomura; J Matsuo; Yamada, I

  MATERIALS CHEMISTRY AND PHYSICS, Jul. 1998, Peer-reviewed

  
• Cluster ion bombardment on atomically flat Au(111) solid surfaces

  D Takeuchi; T Seki; T Aoki; J Matsuo; Yamada, I

  MATERIALS CHEMISTRY AND PHYSICS, Jul. 1998, Peer-reviewed

  
• Molecular dynamics simulation of a carbon cluster ion impacting on a carbon surface

  T Aoki; T Seki; J Matsuo; Z Insepov; Yamada, I

  MATERIALS CHEMISTRY AND PHYSICS, Jul. 1998, Peer-reviewed

  
• STM observation of HOPG surfaces irradiated with Ar cluster ions

  T Seki; T Kaneko; D Takeuchi; T Aoki; J Matsuo; Z Insepov; Yamada, I

  NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Jan. 1997, Peer-reviewed

  

Misc.

• 反応性ガスクラスターインジェクションを用いた斜め2方向エッチングによる3D構造の作成

  瀬木利夫; 山本洋揮; 古澤孝弘; 荘所正; 小池国彦; 青木学聡; 松尾二郎

  応用物理学会春季学術講演会講演予稿集(CD-ROM), 2018

  
• ClF₃中性クラスター斜め2方向照射によるレバー構造の作成

  瀬木利夫; 荘所正; 小池国彦; 山本洋揮; 古澤孝弘; 青木学聡; 松尾二郎

  応用物理学会春季学術講演会講演予稿集(CD-ROM), 2017

  
• ClF₃中性クラスタービームによる斜めピラー構造の作成

  瀬木利夫; 荘所正; 小池国彦; 山本洋揮; 古澤孝弘; 青木学聡; 松尾二郎

  応用物理学会秋季学術講演会講演予稿集(CD-ROM), 2016

  
• ClF₃中性クラスタービームによる斜めエッチング

  瀬木利夫; 山本洋揮; 古澤孝弘; 吉野裕; 妹尾武彦; 小池国彦; 青木学聡; 松尾二郎

  応用物理学会秋季学術講演会講演予稿集(CD-ROM), 2015

  
• 3D molecular imaging of organic multilayer film by Ar gas cluster ion beam SIMS

  Wakamoto K.; Seki T.; Aoki T.; Matsuo J.

  Annual report of Quantum Science and Engineering Center, Apr. 2014

  
• Lipid Compounds Analysis with MeV-SIMS Apparatus

  Fujii M.; Kusakari M.; Seki T.; Aoki T.; Matsuo J.

  Annual report of Quantum Science and Engineering Center, Apr. 2014

  
• Depth analysis of DSPC by SIMS, using gas cluster ion beam

  Nakagawa S.; Seki T.; Aoki T.; Matsuo J.

  Annual report of Quantum Science and Engineering Center, Apr. 2013

  
• X-ray Diffraction Measurements for a Diarylethene Single Crystal for Time-resolved Femtosecond X-ray Diffraction

  Hontani Yusaku; Hada Masaki; Seki Toshio; Aoki Takaaki; Matsuo Jiro

  Annual report of Quantum Science and Engineering Center, Apr. 2013

  
• Development of Atmospheric Pressure MeV-SIMS and Solid-Liquid Interface Analysis

  瀬木 利夫

  Journal of surface analysis, 2020, Peer-reviewed

  
• Analysis of Organic Materials with SIMS Using New Probe Ions

  瀬木 利夫; 青木 学聡; 松尾 二郎

  電気学会研究会資料. OQD = The papers of technical meeting on optical and quantum devices, IEE Japan, 28 Mar. 2018

  
• Development of ambient SIMS using MeV-energy ion probe

  Kusakari M.; Fujii M.; Seki T.; Aoki T.; Matsuo J.

  Annual report of Quantum Science and Engineering Center, Apr. 2016

  
• Development of Low-Vacuum SIMS Instruments with Large Cluster Ion Beam

  Suzuki K.; Kusakari M.; Seki T.; Aoki T.; Matsuo J.

  Annual report of Quantum Science and Engineering Center, Apr. 2016

  
• Study on imaging analysis of organic materials with Bi cluster TOF-SIMS

  Shishido Rie; Fujii Makiko; Seki Toshio; Aoki Takaaki; Matsuo Jiro; Suzuki Shigeru

  Abstract of annual meeting of the Surface Science of Japan, 2015

  
• High sensitive detection and molecular imaging of lipid molecules with cluster SIMS

  Matsuo Jiro; Nakagawa Shunichiro; Torii Souta; Fujii Makiko; Seki Toshio; Aoki Takaaki

  Abstract of annual meeting of the Surface Science of Japan, 2013

  
• Cluster SIMS analysis of lipid thin films

  松尾 二郎; 中川 駿一郎; 志戸本 祥; 鳥居 聡太; 瀬木 利夫; 青木 学聡

  Abstract of annual meeting of the Surface Science of Japan, 2012

  
• Bio-SIMS with Novel Primary Ion Beams toward Molecular-Imaging

  Matsuo Jiro; Ichiki Kazuya; Seki Toshio; Aoki Takaaki

  Abstract of annual meeting of the Surface Science of Japan, 2011

  
• Sputtering yield measurements with size-selected gas cluster ion beams

  Kazuya Ichiki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  MRS Proceedings, Jan. 2011, Peer-reviewed

  
• Characteristics of organic depth profiling using large cluster ion beams

  Satoshi Ninomiya; Kazuya Ichiki; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Extended Abstracts of 10th Workshop on Cluster Ion Beam Technology, Jun. 2010

  
• Surface smoothing with energetic cluster ion beams

  MATSUO Jiro; SEKI Toshio; NINOMIYA Satoshi; AOKI Takaaki

  Journal of the Japan Society for Abrasive Technology, 01 May 2010

  
• 18^th International Conference on Ion Implantation Technology

  J. Matsuo; M. Kase; T. Aoki; T. Seki

  AIP Conference Proceedings, 2010, Peer-reviewed

  
• Lipid Imaging of Rat Brain Tissue with Swift Heavy Ions

  Wakamatsu Yoshinobu; Yamada Hideaki; Ninomiya Satoshi; Seki Toshio; Aoki Takaaki; Ishihara Akihiko; Matsuo Jiro

  Abstract of annual meeting of the Surface Science of Japan, 2010

  
• Instrumental development of imaging mass spectrometry with ToF-SIMS using Ar cluster

  yamamoto yasuyuki; ichiki kazuya; ninomiya satoshi; seki toshio; aoki takaaki; matsuo jirou

  Abstract of annual meeting of the Surface Science of Japan, 2010

  
• SIMS for biological Applications

  Matsuo Jiro; Ichiki Kazuya; Yamamoto Yasuyuki; Wakamatsu Yoshinobu; Aoki Takaaki; Seki Toshio

  Abstract of annual meeting of the Surface Science of Japan, 2010

  
• Recent Progress in Cluster Ion Beam Technology

  MATSUO Jiro; SEKI Toshio; AOKI Takaaki

  Hyomen Kagaku, 2010

  
• High Speed Si Etching with ClF3 Cluster Injection

  T. Seki; Y. Yoshino; T. Senoo; K. Koike; S. Ninomiya; T. Aoki; J. Matsuo

  ION IMPLANTATION TECHNOLOGY 2010, 2010, Peer-reviewed

  
• Evaluation of Surface Damage of Organic Films due to Irradiation with Energetic Ion Beams

  Masaki Hada; Yusaku Hontani; Sachi Ibuki; Kazuya Ichiki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  ION IMPLANTATION TECHNOLOGY 2010, 2010, Peer-reviewed

  
• Evaluation of surface damage on organic materials irradiated with Ar cluster ion beam

  Y. Yamamoto; K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  ION IMPLANTATION TECHNOLOGY 2010, 2010, Peer-reviewed

  
• Energy effects on the sputtering yield of Si bombarded with gas cluster ion beams

  K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  ION IMPLANTATION TECHNOLOGY 2010, 2010, Peer-reviewed

  
• Biomolecular Emission by Swift Heavy Ion Bombardment

  Yoshinobu Wakamatsu; Hideaki Yamada; Satoshi Ninomiya; Brian N. Jones; Toshio Seki; Takaaki Aoki; Roger Webb; Jiro Matsuo

  ION IMPLANTATION TECHNOLOGY 2010, 2010, Peer-reviewed

  
• MD simulation of small boron cluster implantation

  Takaaki Aoki; Toshio Seki; Jiro Matsuo

  IWJT-2010: Extended Abstracts - 2010 International Workshop on Junction Technology, 2010, Peer-reviewed

  
• SIMS depth profiling of organic films with Ar cluster ion beams

  Satoshi Ninomiya; Kazuya Ichiki; Yoshihiko Nakata; Hideaki Yamada; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Extended Abstracts of 9th Workshop on Cluster Ion Beam Technology, 2009

  
• Developing SIMS at low vacuum using fast heavy ions

  Wakamatsu Yoshinobu; Yamada Hideaki; Nakata Yoshihiko; Ninomiya Satoshi; Seki Toshio; Aoki Takaaki; Matsuo Jiro

  Abstract of annual meeting of the Surface Science of Japan, 2009

  
• Imaging Mass Spectrometry with Swift Heavy Ions

  NAKATA Yoshihiko; YAMADA Hideaki; HONDA Yoshiro; NINOMIYA Satoshi; SEKI Toshio; AOKI Takaaki; MATSUO Jiro

  Journal of the Mass Spectrometry Society of Japan, 01 Aug. 2008

  
• 24aRB-2 A New Approach to High Resolution Imaging Mass Spectrometry

  Nakata Y.; Honda Y.; Ninomiya S.; Seki T.; Aoki T.; Matsuo J.

  Meeting Abstracts of the Physical Society of Japan, 2008

  
• 23aRB-2 The effect of incident velocity of large Ar cluster ions on secondary ion emission for Si

  Ninomiya S.; Ichiki K.; Nakata Y.; Seki T.; Aoki T.; Matsuo J.

  Meeting Abstracts of the Physical Society of Japan, 2008

  
• Recent Progress in Cluster Ion Beam:-Toward Nano-Processing and Advanced Material Analysis

  Matsuo Jiro; Ninomiya Satoshi; Aoki Takaaki; Seki Toshio

  Journal of Surface Analysis, 2008

  
• Study of density effect of large gas cluster impact by molecular dynamics simulations

  青木 学聡; Seki Toshio; Matsuo Jiro

  Annual report of Ion Beam Engineering Laboratory, University of Hyogo, 2008

  
• High-speed processing with Cl2 cluster ion beam

  瀬木 利夫; Aoki Takaaki; Matsuo Jiro

  Annual report of Ion Beam Engineering Laboratory, University of Hyogo, 2008

  
• Computer modeling of cluster ion impacts

  Takaaki Aoki; Toshio Seki; Jiro Matsuo

  EXTENDED ABSTRACTS 2008 INTERNATIONAL WORKSHOP ON JUNCTION TECHNOLOGY, 2008, Peer-reviewed

  
• Investigation of Damage with Cluster Ion Beam Irradiation Using HR-RBS

  Toshio Seki; Takaaki Aoki; Jiro Matsu

  ION IMPLANTATION TECHNOLOGY 2008, 2008, Peer-reviewed

  
• Ionization and low damage etching of soft materials with slow Ar cluster ions

  Satoshi Ninomiya; Kazuya Ichiki; Yoshihiko Nakata; Yoshiro Honda; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Extended Abstracts of 8th Workshop on Cluster Ion Beam Technology, 2007

  
• 19aXJ-4 Measurements of secondary ion yields under size-selected cluster ion irradiation

  Ninomiya S.; Ichiki K.; Nakata Y.; Seki T.; Aoki T.; Matsuo J.

  Meeting Abstracts of the Physical Society of Japan, 2007

  
• MD study of damage structures with poly-atomic boron cluster implantation

  Takaaki Aoki; Toshio Seki; Jiro Matsuo

  Extended Abstracts of the 7th International Workshop on Junction Technology, IWJT 2007, 2007, Peer-reviewed

  
• Cluster ion implantation - Prospects and challenges

  Jiro Matsuo; Takaaki Aoki; Toshio Seki

  Extended Abstracts of the 7th International Workshop on Junction Technology, IWJT 2007, 2007, Peer-reviewed

  
• Surface oxidation of Si assisted by irradiation with large gas cluster ion beam in an oxygen atmosphere

  Kazuya Ichiki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Extended Abstracts of 7th Workshop on Cluster Ion Beam and Advanced Quantum Beam Process Technology, 2006

  
• The effect of incident cluster ion size on secondary ion yields emitted from Si

  Satoshi Ninomiya; Kazuya Ichiki; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  Extended Abstracts of 7th Workshop on Cluster Ion Beam and Advanced Quantum Beam Process Technology, 2006

  
• 28aTA-6 Incident cluster ion dependence of ionization probability on sputtering

  Ninomiya S.; Aoki T.; Seki T.; Nakata Y.; Ichiki K.; Matsuo J.

  Meeting Abstracts of the Physical Society of Japan, 2006

  
• 26pWD-7 Measurements of secondary ions produced by size-selected cluster ions

  Ninomiya S.; Ichiki K.; Nakata Y.; Seki T.; Aoki T.; Matsuo J.

  Meeting Abstracts of the Physical Society of Japan, 2006

  
• Incident size dependence of secondary ion yields emitted from biomolecules under Ar cluster ion bombardment

  Ninomiya Satoshi; Ichiki Kazuya; Nakata Yoshihiko; Seki Toshio; Aoki Takaaki; Matsuo Jiro

  Abstract of annual meeting of the Surface Science of Japan, 2006

  
• Incident cluster size dependence of secondary ion yields

  Ichiki Kazuya; Ninomiya Satoshi; Seki Toshio; Aoki Takaaki; Matsuo Jiro

  Abstract of annual meeting of the Surface Science of Japan, 2006

  
• Large Cluster Ions as Projectiles for SIMS-Opportunities and Challenges

  Jiro Matsuo; Takaaki Aoki; Toshio Seki

  Proceedings of 18th Annual Workshop on SIMS, May 2005, Peer-reviewed

  
• 19pYR-5 Secondary ion emission from semiconductors under large gas cluster Ion bombardment

  Ninomiya S.; Aoki T.; Seki T.; Matsuo J.

  Meeting Abstracts of the Physical Society of Japan, 2005

  
• Gas cluster ion beam source for secondary ion emission measurements

  L. K. Ono; T. Aoki; T. Seki; J. Matsuo; A. Itoh

  Novel Materials Processing by Advanced Electromagnetic Energy Sources, 2005

  
• Low damage smoothing of magnetic materials using oblique irradiation of gas cluster ion beam

  S Kakuta; S Sasaki; K Furusawa; T Seki; T Aoki; J Matsuo

  Surface Engineering 2004 - Fundamentals and Applications, 2005, Peer-reviewed

  
• High-speed processing with reactive cluster ion beams

  T Seki; J Matsuo

  Surface Engineering 2004 - Fundamentals and Applications, 2005, Peer-reviewed

  
• Fast Neutral Ar Penetration during Gas Cluster Ion Beam Irradiation into Magnetic Thin Films

  Shigeru Kakuta; Toshio Seki; Shinji Sasaki; Kenji Furusawa; Takaaki Aoki; Jiro Matsuo

  MRS Proceedings, 2004, Peer-reviewed

  
• High-speed processing with cluster ion beams

  T Seki; J Matsuo

  RADIATION EFFECTS AND ION-BEAM PROCESSING OF MATERIALS, 2004, Peer-reviewed

  
• Fast neutral Ar penetration during gas cluster ion beam irradiation into magnetic thin films

  S Kakuta; T Seki; S Sasaki; K Furusawa; T Aoki; J Matsuo

  RADIATION EFFECTS AND ION-BEAM PROCESSING OF MATERIALS, 2004, Peer-reviewed

  
• XAFS study of thin films fabricated with cluster ion assisted deposition technique

  Jiro Matsuo; Teruyuki Kitagawa; Yutaka Shimizugawa; Hiroyuki Kageyama; Kazuhiro Kanda; Toshio Seki; Takaaki Aoki; Shinji Matsui

  Trans. Mat. Res. Soc. Jpn., Dec. 2003, Peer-reviewed

  
• Threshold energy for generating damage with cluster ion irradiation

  T Seki; T Aoki; A Nakai; J Matsuo; GH Takaoka

  MORPHOLOGICAL AND COMPOSITIONAL EVOLUTION OF THIN FILMS, 2003, Peer-reviewed

  
• High current cluster ion beam source

  T Seki; J Matsuo; GH Takaoka

  APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, 2003, Peer-reviewed

  
• Study of cluster-size effect on damage formation

  T Aoki; T Seki; A Nakai; J Matsuo; G Takaoka

  APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, 2003, Peer-reviewed

  
• Threshold energy for generating damage with cluster ion irradiation

  T Seki; T Aoki; A Nakai; J Matsuo; GH Takaoka

  MORPHOLOGICAL AND COMPOSITIONAL EVOLUTION OF THIN FILMS, 2003, Peer-reviewed

  
• Cluster Size Effect on Surface Modification Process using Cluster Ion Beam

  Takaaki Aoki; Toshio Seki; Atsuko Nakai; Jiro Matsuo; Gikan H. Takaoka

  Trans. Mat. Res. Soc. Jpn., Jan. 2003, Peer-reviewed

  
• 液体多原子イオンビームの生成と表面照射効果

  高岡 義寛; 瀬木 利夫; 山本 智晃

  21世紀連合シンポジウム-科学技術と人間-論文集, 23 Nov. 2002

  
• Development of the large current cluster ion beam technology

  Toshio Seki; Jiro Matsuo; Gikan H. Takaoka

  Proceedings of the International Conference on Ion Implantation Technology, 2002, Peer-reviewed

  
• Chemical Reaction of Cluster Ion Beam with Surfaces

  高岡 義寛; 瀬木 利夫; 松尾 二郎

  Proceedings of the 12th Symposium on Beam Engineering of Advanced Material Syntheses, Nov. 2001, Peer-reviewed

  
• Ar Cluster Ion Bombardment Effects on Semiconductor Surfaces

  Toshio Seki; Takaaki Tsumura; Takaaki Aoki; Jiro Matsuo; Gikan H. Takaoka; Isao Yamada

  Mat. Res. Soc. Symp. Proceedings, 2001, Peer-reviewed

  
• STM observation of a Si surface irradiated with a single Ar cluster ion

  T Seki; GH Takaoka

  APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, 2001, Peer-reviewed

  
• Improvement and Applications of Gas Cluster Ion Beam

  KINPARA Hiromichi; SEKI Toshio; MATSUO Jiro; TAKAOKA Gikan

  Technical report of IEICE. SDM, 14 Dec. 2000

  
• Effects of ion irradiation on Ge film formed on Si(111)

  瀬木 利夫; 津村 一道; 松尾 二郎; 高岡 義寛

  Proceedings of the 11th Symposium on Beam Engineering of Advanced Material Syntheses, Nov. 2000

  
• STM observations of the annealing process of the damage caused by ion impact

  Toshio Seki; Jiro Matsuo; Isao Yamada

  Proceedings of the International Conference on Ion Implantation Technology, 1999, Peer-reviewed

  
• Novel analysis techniques using cluster ion beams

  J Matsuo; N Toyoda; M Saito; T Aoki; T Seki; Yamada, I

  APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, PTS 1 AND 2, 1999, Peer-reviewed

  
• VT-STM observation of Si surfaces damaged by ion impact

  SEKI Toshio; MATSUO Jiro; YAMADA Isao

  Technical report of IEICE. SDM, 10 Dec. 1998

  
• Damage formation and enhanced diffusion by decaborane ion implantation

  KUSABA T.; SEKI T.; AOKI T.; MATSUO J.; KASE M.; GOTO K.; SUGII T.; YAMADA I.

  Technical report of IEICE. SDM, 10 Dec. 1998

  
• Molecular dynamics simulation of fullerene cluster ion impact

  T Aoki; T Seki; M Tanomura; J Matsuo; Z Insepov; Yamada, I

  ATOMISTIC MECHANISMS IN BEAM SYNTHESIS AND IRRADIATION OF MATERIALS, 1998, Peer-reviewed

  
• Size dependence of bombardment characteristics produced by cluster ion beams

  T Seki; M Tanomura; T Aoki; J Matsuo; Yamada, I

  ATOMISTIC MECHANISMS IN BEAM SYNTHESIS AND IRRADIATION OF MATERIALS, 1998, Peer-reviewed

  
• Size dependence of bombardment characteristics produced by cluster ion beams

  T Seki; M Tanomura; T Aoki; J Matsuo; Yamada, I

  ATOMISTIC MECHANISMS IN BEAM SYNTHESIS AND IRRADIATION OF MATERIALS, 1998, Peer-reviewed

  
• クラスタ-衝突における非線形効果 (原子核とマイクロクラスタ-の類似性と異質性)

  瀬木 利夫; 田能村 昌宏; 松尾 二郎; 山田 公

  物性研究, May 1997

  
• クラスターイオンの非線形効果(原子核とマイクロララスターの類似性と異質性,研究会報告)

  瀬木 利夫; 田能村 昌宏; 松尾 二郎; 山田 公

  素粒子論研究, 1997

  

Presentations

• Ambient Secondary Ion Mass Analysis with MeV-energy Heavy Ion

  T.Seki; K. Ishii; M. Kusakari; T. Aoki; J. Matsuo

  11th International Symposium on Atomic Level Characterizations for New Materials and Devices ’17 (ALC`17), 04 Dec. 2017, Invited

  
• Fabrication of 3D structure by double-angled etching with reactive gas cluster injection

  T. Seki; H. Yamamoto; T. Kozawa; T. Shojo; K. Koike; T. Aoki; J. Matsuo

  The 39th International Symposium on Dry Process(DPS2017), 16 Nov. 2017

  
• Characterization of Bio-Molecules with GCIBSIMS equipped with MS/MS Spectrometer

  Jiro Matsuo; T. Seki; T. Aoki

  AVS 64th International Symposium & Exhibition 2017 (AVS64), 29 Oct. 2017

  
• Organic Material Analysis with a SIMS System with Q-TOF MS/MS Technique

  J. Matsuo; L. Houssiau; H. Gnaser; T. Seki; T. Aoki

  The 8th International Symposium on Surface Science (ISSS-8), 22 Oct. 2017

  
• Ambient SIMS using MeV-Energy Heavy Ion

  T.Seki; K. Ishii; M. Kusakari; T. Aoki; J. Matsuo

  The 23rd International Conference on Ion Beam Analysis (IBA-2017), 09 Oct. 2017

  
• Observation of Adsorption and Desorption of Water Molecules with Ambient SIMS

  J.Matsuo; T.Seki; T.Aoki

  21st International Conference on Secondary Ion Mass Spectrometry (SIMS21), 10 Sep. 2017

  
• SIMS Measurement in Ambient and Humid Condition

  K. Ishii; T. Seki; T. Aoki; J. Matsuo

  The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017), 28 Aug. 2017

  
• Angled Etching by ClF3?Ar Gas Cluster Injection

  T. Seki; H. Yamamoto; T. Kozawa; T. Shojo; K. Koike; T. Aoki; J. Matsuo

  The 15th International Conference on Advanced Materials (IUMRS-ICAM 2017), 28 Aug. 2017

  
• Observation of Adsorption and Desorption of Water Molecules in the Ambient with Swift Heavy Ions

  Jiro Matsuo; M. Kusakari; T. Seki; T. Aoki

  Symposium on Surface and Nano Science 2017 (SNNS2017), 01 Jan. 2017

  
• Study of Large Cluster Impact for Surface Modification Process

  T. Aoki; T. Seki; J. Matsuo

  Conference of 2016 MRS Fall Meeting (Symposium PM1), 29 Nov. 2016

  
• High Aspect Ratio Patterning by Using ClF3-Ar Neutral Cluster Etching

  H. Yamamoto; T. Seki; J. Matsuo; K. Koike; T. Kozawa

  The 38th International Symposium on Dry Process(DPS2016), 22 Nov. 2016

  
• Oblique pattern etching with ClF3-Ar neutral cluster beam

  T. Seki; H. Yamamoto; T. Kozawa; T. Shojo; K. Koike; T. Aoki; J. Matsuo

  The 38th International Symposium on Dry Process(DPS2016), 21 Nov. 2016

  
• Oblique pattern etching with ClF3-Ar neutral cluster beam

  T. Seki; H. Yamamoto; T. Kozawa; T. Shojo; K. Koike; T. Aoki; J. Matsuo

  9th International Meeting on Recent Developments in the Study of Radiation Effects in Matter REM 9, 26 Oct. 2016

  
• Cluster Ion Beams for Organic Semiconductors and Biological Materials

  J. Matsuo; K. Suzuki; M. Kusakari; T. Seki; T. Aoki

  21th International Conference on Ion Implantation Technology IIT2016, 26 Sep. 2016

  
• Ambient analysis using a MeV ion probe: measurement of liquid and solid states of benzoic acid

  M.Kusakari; M.Fujii; T.Seki; T.Aoki; J.Matsuo

  15th International Conference on Nuclear Microprobe Technology and Applications ICNMTA 2016, 01 Aug. 2016

  
• A new approach of interface analysis: measurement of benzoic acid in solution using ambient SIMS

  M. Kusakari; M. Fujii; T. Seki; T. Aoki; J. Matsuo

  The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-18), 22 Jul. 2016

  
• Development of New Cluster-SIMS Instrument Combined with Tandem Mass

  K. Suzuki; M. Kusakari; T. Seki; T. Aoki; J. Matsuo

  The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-18), 22 Jul. 2016

  
• Chemical Structurer Determination with MS/MS SIMS for Biological Molecules

  J. Matsuo; K. Suzuki; M. Kusakari; T. Seki; T. Aoki

  The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS-18), 21 Jul. 2016

  
• Chemical analysis under ambient conditions using swift heavy ion beams

  J.Matsuo; M.Kusakari; M.Fujii; T.Seki; T.Aoki

  12th European Conference on Acceleratorsin Applied Research and Technology, 07 Jul. 2016

  
• Reactive etching with ClF3-Ar neutral cluster beam

  T. Seki; Y. Yoshino; T. Senoo; K. Koike; T. Aoki; J. Matsuo

  The 37th International Symposium on Dry Process(DPS2015), 05 Nov. 2015

  
• Solid-Liquid Interface Analysis with MeV-Energy Heavy Ion Beams

  T.Seki; M. Kusakari; M. Fujii; T. Aoki; J. Matsuo

  ALC'15 10th International Symposium on Atomic Level Characterizations for New Materials and Devices '15, 28 Oct. 2015

  
• Evaluation on organic analysis with a novel SIMS apparatus using model standard sam ples

  M.Fujii; T. Seki; T. Aoki; J. Matsuo

  ALC'15 10th International Symposium on Atomic Level Characterizations for New Materials and Devices '15, 27 Oct. 2015

  
• Development of Low-Pressure SIMS Instruments with Large Cluster Ion Beam

  K.Suzuki; M. Kusakari; M. Fujii; T. Seki; T. Aoki; J. Matsuo

  ALC'15 10th International Symposium on Atomic Level Characterizations for New Materials and Devices '15, 27 Oct. 2015

  
• Comparative Study of Dual and Single Beam Analysis Techniques for Biological Materials

  A.Karen; M. Fujii; T. Seki; T. Aoki; J. Matsuo

  SIMS XX 20th International Conference on Secondary Ion Mass Spectrometry, 17 Sep. 2015

  
• Influences of Yield and Damage Cross-Section on Imaging Analysis of Organic Molecules by Bi cluster TOF-SIMS

  R. Shishido; M. Fujii; T. Seki; T. Aoki; J. Matsuo; S. Suzuki

  SIMS XX 20th International Conference on Secondary Ion Mass Spectrometry, 17 Sep. 2015

  
• Current Prospects of Organic Analysis with Ar-GCIB SIMS from Synthetic Polymers and Organic Devices toward BiologicalMaterials

  M. Fujii; T. Seki; T. Aoki; J. Matsuo

  SIMS XX 20th International Conference on Secondary Ion Mass Spectrometry, 14 Sep. 2015

  
• Molecular Cluster Emission in Sputtering of Amino Acids by Argon Gas-cluster Ions

  Hubert Gnaser; M. Kusakari; M. Fujii; T. Seki; T. Aoki; J. Matsuo

  SIMS XX 20th International Conference on Secondary Ion Mass Spectrometry, 14 Sep. 2015

  
• Development of Ambient SIMS using MeV-energy ion probe

  M. Kusakari; M. Fujii; T. Seki; T. Aokia; J. Matsuo

  SIMS XX 20th International Conference on Secondary Ion Mass Spectrometry, 14 Sep. 2015

  
• Imaging mass spectrometry with MeV-energy heavy ion beams

  T. Seki; T. Aoki; A. Ishihara; J. Matsuo

  XXII INTERNATIONAL CONFERENCE ON ION - SURFACE INTERACTIONS (ISI-2015), 21 Aug. 2015, Invited

  
• Recent Progress and Future Prospects of Cluster SIMS for Biological Applications

  M. Fujii; T. Seki; T. Aoki; J. Matsuo

  SISS-17 Satellite workshop, 29 Jun. 2015

  
• Comparative Study of Cluster SIMS and Other Techniques for Highly Accurate Organic Analysis

  M. Fujii; R. Shishido; T. Satoh; T. Seki; T. Aoki; S. Suzuki; J. Matsuo

  SISS-17, 25 Jun. 2015

  
• The Effect of Yield and Damage Cross-Section on Imaging Analysis of OrganicMaterials by Different Primary Bi Ions in TOF-SIMS

  R. Shishido; M. Fujii; T. Seki; T. Aoki; J. Matsuo; S. Suzuki

  SISS-17, 25 Jun. 2015

  
• A New Ambient Analysis using MeV-SIMS for Liquid-Solid Interface

  M. Kusakari; M. Fujii; T. Seki; T. Aoki; J. Matsuo

  SISS-17, 25 Jun. 2015

  
• Development of SIMS instruments with Focused Cluster Ion Beam Toward New Applications

  K. Suzuki; M. Kusakari; M. Fujii; T. Seki; T. Aoki; J. Matsuo

  SISS-17, 25 Jun. 2015

  
• Ambient Analysis of Liquid Materials with Wet-SIMS

  T.Seki; M.Kusakari; M.Fujii; T.Aoki; JMatsuo

  22nd International Conference on Ion Beam Analysis (IBA 2015), 14 Jun. 2015

  
• The laser desorption/ionization imaging mass spectrometry for synthetic polymer analysis assisted by metal nano-particles

  T.Satoh; H,.Niimi; M. Fujii; T. Seki; J.Matsuo; M.Ubukata; R.DiPasquale

  ASMS, 03 Jun. 2015

  
• Etching reactions of magnetic materials by CO cluster beams

  K. Karahashi; T. Seki; J. Matsuo; S. Hamaguchi

  The 36th International Symposium on Dry Process (DPS2014), 27 Nov. 2014

  
• Imaging mass spectrometry for the organic thin film using laser desorption ionization

  T. Satoh; M. Shima; H. Niimi; Y. Nakajima; M. Fujii; T. Seki; J. Matsuo

  The 7th International Symposium on Surface Science (ISSS-7), 04 Nov. 2014

  
• Recent Progress in Cluster Beam -- from Semiconductor to Soft Materials

  J. Matsuo; T. Seki; T. Aoki; M. Fujii

  The 19th International Conference on Ion Beam Modification of Materials (IBMM 2014), 17 Sep. 2014

  
• Imaging mass spectrometry and depth profiling for organic thin films using laser desorption ionization

  T. Satoh; M. Shima; H. Niimi; Y. Nakajima; M. Fujii; T. Seki; J. Matsuo

  18th International Microscopy Congress (IMC2014), 10 Sep. 2014

  
• Highly Accurate Biological Analysis using Ar-GCIB SIMS with Chemical Assist Ionization

  M. Fujii; S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  The 15th IUMRS-International Conference in Asia (IUMRS-ICA 2014), 25 Aug. 2014

  
• Molecular Dynamics Simulation of Gas Cluster Impact on Coner-shaped Target

  T. Aoki; T. Seki; J. Matsuo

  The 15th IUMRS-International Conference in Asia (IUMRS-ICA 2014), 25 Aug. 2014

  
• MeV-SIMS with swift heavy ions at low pressure

  J. Matsuo; M. Kusakari; M. Fujii; T. Seki; T. Aoki

  14th International Conference on Nuclear Microprobe Technology and Applications, 08 Jul. 2014, Invited

  
• High Resolution Imaging Mass with Focused Ar Cluster Beam

  J. Matsuo; S. Torii; K. Yamauchi; K. Wakamoto; M. Kusakari; S. Nakagawa; M. Fujii; T. Aoki; T. Seki

  The 16th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS16), 20 Jun. 2014

  
• Organic Materials Analysis Using Different Primary Bi Ions in TOF-SIMS

  R. Shishido; M. Fujii; T. Seki; T. Aoki; J. Matsuo; S. Suzuki

  The 16th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS16), 19 Jun. 2014

  
• Highly Sensitive Lipid Analysis and Imaging Mass Spectrometry with Cluster SIMS Apparatus

  M. Fujii; R. Shishido; S. Torii; S. Nakagawa; T. Seki; T. Aoki; S. Suzuki; J. Matsuo

  The 16th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS16), 19 Jun. 2014

  
• Possibilities and Limitations of Biological Analysis with novel Ar-GCIB SIMS Apparatus

  M. Fujii; S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  The 16th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions (SISS16), 19 Jun. 2014

  
• Imaging mass spectrometry and depth profiling for the organic thin film using laser desorption ionization

  T. Satoh; M. Shima; H. Niimi; Y. Nakajima; M. Fujii; T. Seki; J. Matsuo; R. DiPasquale

  62nd ASMS Conference on Mass Spectrometry and Allied Topics, 16 Jun. 2014

  
• Possibilities and Limitations of MeV-SIMS for Biological Applications

  M. Fujii; M. Kusakari; T. Seki; T. Aoki; J. Matsuo

  The Conference on Application of Accelerators in Research and Industry (CAARI2014), 26 May 2014, Invited

  
• Lipid Compounds Analysis with Argon Gas Cluster Ion Beam Irradiation

  M. Fujii; S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  The Conference on Application of Accelerators in Research and Industry (CAARI2014), 26 May 2014

  
• Computer simulation of cluster impact on soft- and hard- material interface

  T. Aoki; T. Seki; J. Matsuo

  23rd Annual Meeting of MRS-J, 09 Dec. 2013

  
• Lipid Compounds Analysis with Swift Heavy Ion Beam for Biological Applications

  M. Fujii; M. Kusakari; T. Seki; T. Aoki; J. Matsuo

  23rd Annual Meeting of MRS-J, 09 Dec. 2013

  
• Low Vacuum SIMS Measurements of Higher Alcohols with MeV-energy Heavy Ion Beam

  M. Kusakari; M. Fujii; T. Seki; T. Aoki; J. Matsuo

  23rd Annual Meeting of MRS-J, 09 Dec. 2013

  
• Si Etching with ClF3 Neutral Cluster Beam from Multi-nozzle

  T. Seki; Y. Yoshino; T. Senoo; K. Koike; T. Aoki; J. Matsuo

  23rd Annual Meeting of MRS-J, 09 Dec. 2013

  
• Mass Analysis by Ar-GCIB-Dynamic SIMS for Organic Materials

  M. Suzuki; M. Nojima; M. Fujii; T. Seki; J. Matsuo

  9th International Symposium on Atomic Level Characterizations for New Materials and Devices ’13, 02 Dec. 2013

  
• Quantitative Analysis of Lipids with Ar Cluster Ion Beam

  M. Fujii; S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  9th International Symposium on Atomic Level Characterizations for New Materials and Devices ’13, 02 Dec. 2013

  
• Ambient Analysis with Wet-SIMS

  T. Seki; M. Fujii; S. Nakagawa; T. Aoki; J. Matsuo

  9th International Symposium on Atomic Level Characterizations for New Materials and Devices ’13, 02 Dec. 2013

  
• Analysis of Liquid Materials with Wet-SIMS

  T. Seki; M. Fujii; M. Kusakari; S. Nakagawa; T. Aoki; J. Matsuo

  Workshop on Strategic Japanese-Croatian Cooperative Program on Material Science, 13 Nov. 2013

  
• Possibilities and Limitations of Ar GCIB SIMS for Biological Applications

  M. Fujii; S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  19th International Conference on Secondary Ion Mass Spectrometry, 03 Oct. 2013

  
• Liquid Sample Measurements using Wet SIMS Apparatus with Swift Heavy Ion Beam

  M. Fujii; M. Kusakari; T. Seki; T. Aoki; J. Matsuo

  19th International Conference on Secondary Ion Mass Spectrometry, 03 Oct. 2013

  
• Development of organic depth profiling system with Ar-GCIB and IMS-4f

  M. Nojima; M. Suzuki; M. Fujii; T. Seki; J. Matsuo

  19th International Conference on Secondary Ion Mass Spectrometry, 01 Oct. 2013

  
• Generation of Ar cluster ion beam for high spatial resolution SIMS

  S. Torii; T. Seki; T. Aoki; J. Matsuo

  19th International Conference on Secondary Ion Mass Spectrometry, 01 Oct. 2013

  
• Secondary Ion Mass Spectrometry with Methanol Gas Cluster Ion Beam Irradiation

  S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  19th International Conference on Secondary Ion Mass Spectrometry, 01 Oct. 2013

  
• Depth analysis of DSPC by SIMS using gas cluster ion beam

  S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  19th International Conference on Secondary Ion Mass Spectrometry, 01 Oct. 2013

  
• Sputtered Ion Emission from Peptides and Amino Acids under Large Argon Cluster Ion Bombardment

  H. Gnaser; M. Fujii; S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  19th International Conference on Secondary Ion Mass Spectrometry, 01 Oct. 2013

  
• Chemical Reaction on the Specimen Surface by Cluster Ion Beam Irradiation

  M. Fujii; T. Seki; T. Aoki; J. Matsuo

  2013 JSAP-MRS Joint Symposia, 19 Sep. 2013

  
• Bio-imaging with MeV-energy Heavy Ion Beams

  T. Seki; S. Shitomoto; S. Nakagawa; T. Aoki; J. Matsuo

  21st International Conference on Ion Beam Analysis, 23 Jun. 2013, Invited

  
• Development of MeV-SIMS Imaging System with Electrostatic Quadrupole Lens

  T. Seki; S. Shitomoto; S. Nakagawa; T. Aoki; J. Matsuo

  15th Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions, 25 Apr. 2013

  
• An Electrostatic Quadrupole Lens for Focusing Swift Heavy Ions in MeV-SIMS

  T. Seki; S. Shitomoto; S. Nakagawa; T. Aoki; J. Matsuo

  25th International Conference on Atomic Collisions in Solids, 23 Oct. 2012

  
• Ultrafast Molecule Dymanics of Photochromic Reaction in Diarylethene

  Y. Hontani; M. Hada; T. Aoki; T. Seki; J. Matsuo

  IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012), 23 Sep. 2012

  
• Photoinduced Ultrafast Phase Transition in VO2 Crystal: Atomic Motion of Vanadium

  J. Matsuo; M. Hada; Y. Hontani; T. Seki; T. Aoki

  IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012), 23 Sep. 2012

  
• Etching of Si by Methanol Gas Cluster Ion Beam Irradiation

  S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012), 23 Sep. 2012

  
• Development of Electrostatic Quadrupole Lens for MeV-SIMS Imaging

  S. Shitomoto; T. Seki; T. Aoki; J. Matsuo

  IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012), 23 Sep. 2012

  
• High-speed Processing with ClF3 Cluster Injection

  T. Seki; Y. Yoshino; T. Senoo; K. Koike; T. Aoki; J. Matsuo

  IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012), 23 Sep. 2012

  
• Development of Electrostatic Quadrupole Lens for MeV-SIMS Imaging

  S. Shitomoto; T. Seki; T. Aoki; J. Matsuo

  19th International Mass Spectrometry Conference, 15 Sep. 2012

  
• Secondary Ion Emission with Methanol Gas Cluster Ion Beam Irradiation

  S. Nakagawa; T. Seki; T. Aoki; J. Matsuo

  19th International Mass Spectrometry Conference, 15 Sep. 2012

  
• Molecular Imaging of Cells and Tissues with Continuous Cluster Ion Beams

  J. Matsuo; T. Aoki; T. Seki

  19th International Mass Spectrometry Conference, 15 Sep. 2012

  
• Bio-imaging with Swift Heavy Ion Beams

  T. Seki; S. Shitomoto; S. Nakagawa; T. Aoki; J. Matsuo

  19th International Mass Spectrometry Conference, 15 Sep. 2012

  
• Molecular Imaging with Focused Cluster Ion Beams

  J. Matsuo; S. Nakagawa; M. Py; T. Aoki; T. Seki

  22th International Conference on the Application of Accelerators in Research & Industry, 05 Aug. 2012, Invited

  
• Development of MeV-SIMS imaging system with Electrostatic Quadrupole Lens

  T. Seki; S. Shitomoto; S. Nakagawa; T. Aoki; J. Matsuo

  22th International Conference on the Application of Accelerators in Research & Industry, 05 Aug. 2012, Invited

  
• An Electrostatic Quadrupole Lens for Focusing Swift Heavy Ions in MeV-SIMS

  T. Seki; S. Shitomoto; S. Nakagawa; T. Aoki; J. Matsuo

  13th International Conference On Nuclear Microprobe Technology & Applications (ICNMTA2012), 26 Jul. 2012

  
• MeV-SIMS with Swift Heavy Ion Beams toward Molecular

  J. Matsuo; S. Shitomoto; S. Nakagawa; T. Aoki; T. Seki

  13th International Conference On Nuclear Microprobe Technology & Applications (ICNMTA2012), 24 Jul. 2012

  
• Evaluation of sputtering and damage with huge cluster impact using molecular dynamics simulations

  T. Aoki; T. Seki; J. Matsuo

  Computer Simulations of Radiation Effects in Solids (COSIRES2012), 26 Jun. 2012

  
• Large-scale MD Simulation of Huge Cluster Impact for Surface Process and Analysis

  T. Aoki; T. Seki; J. Matsuo

  The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University (SISS-14), 01 Jun. 2012, Invited

  
• An Electrostatic Quadrupole Lens for Focusing Swift Heavy Ions in MeV-SIMS

  T. Seki; S. Shitomoto; S. Nakagawa; T. Aoki; J. Matsuo

  The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University (SISS-14), 01 Jun. 2012

  
• Boron concentration measurement in cultivated cells with Nano-SIMS

  M. Py; M. Takeuchi; T. Seki; T. Aoki; J. Matsuo

  The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University (SISS-14), 31 May 2012

  
• Mass Imaging with Cluster Ion Beams

  J. Matsuo; S. Nakagawa; M. Py. K. Ichiki; T. Aoki; T. Seki

  The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University (SISS-14), 31 May 2012

  
• A Novel Imaging Technique for Cells and Tissue by Energetic Particle Bombardment

  J. Matsuo; K. Ichiki; T. Aoki; T. Seki

  2012 MRS Spring Meeting, 11 Apr. 2012

  
• Real-time Observation of Photo-induced Phase Transition of Diarylethene

  Y. Hontani; M. Hada; T. Seki; T. Aoki; J. Matsuo

  2012 MRS Spring Meeting, 10 Apr. 2012

  
• Time-resolved Observation of the Photoinduced Phase Transition of Diarylethene

  Y. Hontani; M. Hada; T. Seki; T. Aoki; J. Matsuo

  Banff Meeting on Structural Dynamics Ultrafast Dynamics with Xrays and Electrons, 19 Feb. 2012

  
• Large-Scale Molecular Dynamics Simulation of Huge Fluorine Cluster Impact on Silicon

  T. Aoki; T. Seki; J. Matsuo

  21th MRS-J Symposium（International Session）, 20 Dec. 2011

  
• Development of Electrostatic Quadrupole Lens for Focusing of Swift Heavy Ion

  S. Shitomoto; Y. Wakamatsu; T. Seki; T. Aoki; J. Matsuo

  21th MRS-J Symposium（International Session）, 20 Dec. 2011

  
• Cluster Beam Generation of Low Vapor Pressure Materials

  T. Seki; Y. Yoshino; T. Senoo; K. Koike; T. Aoki; J. Matsuo

  21th MRS-J Symposium（International Session）, 20 Dec. 2011

  
• Depth Profiling Technique and Molecular Imaging with Cluster SIMS -from Organic Thin Films and Single Cells -

  J. Matsuo; K. Ichiki; S. Nakagawa; T. Seki; T. Aoki

  21th MRS-J Symposium（International Session）, 19 Dec. 2011

  
• The Effect of Size Variation in Sputtering with Size-Selected Cluster Ion Beams

  T. Seki; K. Ichiki; J. Tamura; T. Aoki; J. Matsuo

  11th Workshop on Cluster Ion Beam Technology, 05 Dec. 2011

  
• Characteristics of Si Etching Using ClF3-Ar Cluster Beam

  Y. Yoshino; T. Seki; T. Senoo; K. Koike; G. Inoue; T. Aoki; J. Matsuo

  11th Workshop on Cluster Ion Beam Technology, 05 Dec. 2011

  
• Molecular dynamics simulations of large fluorine cluster impact on silicon with supersonic velocity

  T. Aoki; T. Seki; J. Matsuo

  11th Workshop on Cluster Ion Beam Technology, 05 Dec. 2011

  
• Molecular Imaging of Cells and Tissues with Novel Ion Beams

  J. Matsuo; K. Ichiki; T. Yamanobe; Y. Yamamoto; T. Aoki; T. Seki

  AVS 58th International Symposium, 02 Nov. 2011

  
• The effect of size variation in sputtering with size-selected cluster ion beams

  J. Matsuo; K. Ichiki; T. Seki; T. Aoki

  18th International Conference on Secondary Ion Mass Spectrometry (SIMS XVIII), 23 Sep. 2011

  
• A focused Ar cluster ion beam for molecular imaging

  J. Matsuo; K. Ichiki; T. Yamanbe; Y. Yamamoto; T. Seki; T. Aoki

  18th International Conference on Secondary Ion Mass Spectrometry (SIMS XVIII), 23 Sep. 2011

  
• Ion-induced damage evaluation with Ar cluster ion beams

  Y. Yamamoto; K. Ichiki; T. Seki; T. Aoki; J. Matsuo

  18th International Conference on Secondary Ion Mass Spectrometry (SIMS XVIII), 22 Sep. 2011

  
• Cell and tissue imaging with novel ion beams

  J. Matsuo; Y. Wakamatsu; K. Ichiki; T. Yamanobe; Y. Yamamoto; B. Jones; R. Webb; T. Seki; Takaaki Aoki

  18th International Conference on Secondary Ion Mass Spectrometry (SIMS XVIII), 19 Sep. 2011

  
• Secondary ion emission from biomaterials with swift heavy ions: toward a novel application for bio-imaging

  J. Matsuo; Y. Wakamatsu; T. Seki; T. Aoki

  16th International Conference on Radiation Effects in Insulators (REI2011), 17 Aug. 2011

  
• Secondary Molecular Ion Emission with Swift Heavy Ions:A Novel Imaging Technique for Biological Applications

  J. Matsuo; Y. Wakamatsu; T. Aoki; T. Seki

  E-MRS 2011 Spring Meeting, 11 May 2011

  
• Molecular dynamics study of species and structure effect on large cluster impact

  T. Aoki; T. Seki; J. Matsuo

  E-MRS 2011 Spring Meeting, 09 May 2011

  
• Si Processing with Energetic Neutral Cluster Beam

  T. Seki; Y. Yoshino; T. Senoo; K. Koike; T. Aoki; J. Matsuo

  E-MRS 2011 Spring Meeting, 09 May 2011

  
• The effects of cluster size and energy on sputtering with gas cluster ion beams

  K. Ichiki; T. Seki; T. Aoki; J. Matsuo

  E-MRS 2011 Spring Meeting, 09 May 2011

  
• Bio-imaging technique with swift heavy ions -from single cells to tissues-

  J. Matsuo; Y. Wakamatsu; T. Aoki; T. Seki

  20th International Conference on Ion Beam Analysis, 15 Apr. 2011

  
• Damage free sputtering with size-controlled cluster ion beam for material analysis

  J. Matsuo; K. Ichiki; Y. Yamamoto; T. Seki; T. Aoki

  20th International Conference on Ion Beam Analysis, 13 Apr. 2011

  
• The effects of cluster size on sputtering and surface smoothing with gas cluster ion beams

  K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  20th MRS-J Symposium（International Session）, 22 Dec. 2010

  
• MD Simulation of Huge Fluorine Cluster Impact on Silicon

  T. Aoki; T. Seki; J. Matsuo

  20th MRS-J Symposium（International Session）, 22 Dec. 2010

  
• Evaluation of Damage Depth on Organic Materials Surfaces with Molecular Depth Profiling by Ar Cluster

  Y. Yamamoto; K. Ichiki; T. Seki; T. Aoki; J. Matsuo

  20th MRS-J Symposium（International Session）, 22 Dec. 2010

  
• High-speed Si etching with ClF3 neutral cluster beam

  T. Seki; Y. Yoshino; T. Senoo; K. Koike; T. Aoki; J. Matsuo

  20th MRS-J Symposium（International Session）, 22 Dec. 2010

  
• Molecular Imaging of Cells and Tissues by Wet-SIMS" Using Swift Heavy Ion Beams

  J. Matsuo; Y. Wakamatsu; T. Seki; T. Aoki

  20th MRS-J Symposium（International Session）, 21 Dec. 2010

  
• A Novel Molecular Imaging Technique for Biological Material Analysis

  J. Matsuo; H. Yamada; Y. Wakamatsu; T. Aoki; T. Seki

  AVS 57th International Symposium, 20 Oct. 2010

  
• The effects of cluster size and energy on surface smoothing with gas cluster ion beams

  K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Ion Beam Modification of Materials (IBMM2010), 23 Aug. 2010

  
• Molecular Imaging of Biological Samples with Swift Heavy Ion Microprobe

  J. Matsuo; H. Yamada; Y. Wakamatsu; S. Ninomiya; T. Seki; T. Aoki

  12th International Conference on Nuclear Microprobe Technology and Applications (ICNMTA 2010), 27 Jul. 2010, Invited

  
• Biomuolecular Analysis with Nuclear Microprobe under Near-ambient Conditions

  Y. Wakamatsu; H. Yamada; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  12th International Conference on Nuclear Microprobe Technology and Applications (ICNMTA 2010), 27 Jul. 2010

  
• MD Simulation of Huge Reactive Gas Cluster Impact with Supersonic Velocity

  T. Aoki; T. Seki; J. Matsuo

  10th International Conference on Computer Simulations of Radiation Effects in Solids, 18 Jul. 2010

  
• Characteristics of organic depth profiling using large cluster ion beams

  S. Ninomiya; K. Ichiki; T. Seki; T. Aoki; J. Matsuo

  10th Workshop on Cluster Ion Beam Technology, 14 Jun. 2010

  
• MD simulation of small boron cluster implantation

  T. Aoki; T. Seki; J. Matsuo

  10th Workshop on Cluster Ion Beam Technology, 14 Jun. 2010

  
• The effects of incident cluster size and energy on Si sputtering yield

  K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  10th Workshop on Cluster Ion Beam Technology, 14 Jun. 2010

  
• Etching Characteristics with Ar-Cl2 Gas Mixed Cluster Ion Beam

  T. Seki; T. Aoki; J. Matsuo

  10th Workshop on Cluster Ion Beam Technology, 14 Jun. 2010

  
• Damage and sputtering with cluster impact by MD simulations

  T. Aoki; T. Seki; J. Matsuo

  The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University (SISS-12), 11 Jun. 2010

  
• Availability of gas cluster SIMS to biomolecular analysis

  S. Ninomiya; K. Ichiki; T. Seki; T. Aoki; J. Mastuo

  The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University (SISS-12), 11 Jun. 2010

  
• Secondary ion mass spectrometry depth profiling of organic materials with large gas cluster ion beams

  S. Ninomiya; K. Ichiki; T. Seki; T. Aoki; J. Matsuo

  18th International Conference on Ion Implantation Technology, 09 Jun. 2010

  
• Development of high-intensity Ar cluster ion beam equipment

  T. Yamanobe; Y. Yamamoto; K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  18th International Conference on Ion Implantation Technology, 08 Jun. 2010

  
• Evaluation of damage layer in an organic film with irradiation of energetic ion beams

  M. Hada; S. Ibuki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  18th International Conference on Ion Implantation Technology, 08 Jun. 2010

  
• High Speed Si Etching with ClF3 Cluster Injection

  Y. Yoshino; T. Seki; T. Senoo; K. Koike; S. Ninomiya; T. Aoki; J. Matsuo

  18th International Conference on Ion Implantation Technology, 08 Jun. 2010

  
• Size and energy dependence of the sputtering yield of Si bombarded with gas cluster ion beams

  K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  18th International Conference on Ion Implantation Technology, 07 Jun. 2010

  
• Damage evaluation of organic materials irradiated with Ar cluster ion beam

  Y. Yamamoto; K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  18th International Conference on Ion Implantation Technology, 07 Jun. 2010

  
• SIMS with Fast Heavy Ions for Biomolecule Analysis

  Y. Wakamatsu; H. Yamada; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  18th International Conference on Ion Implantation Technology, 07 Jun. 2010

  
• Wet SIMS with Swift Heavy Ions for Biological Material Analysis

  J. Matsuo; Y. Wakamatsu; H. Yamada; S. Ninomiya; T. Seki; T. Aoki

  22nd Annual Workshop on SIMS, 21 May 2010

  
• Measurement of Cluster Size Dependence of Sputtering Yield Using Size-Selected Ar Cluster Ion Beams

  J. Matsuo; K. Ichiki; S. Ninomiya; T. Seki; T. Aoki

  22nd Annual Workshop on SIMS, 20 May 2010

  
• Depth profile characteristics of organic materials with large Ar cluster ion beams

  S. Ninomiya; K. Ichiki; T. Seki; T. Aoki; J. Matsuo

  22nd Annual Workshop on SIMS, 19 May 2010

  
• MD simulation of small boron cluster implantation

  T. Aoki; T. Seki; J. Matsuo

  10th International Workshop on Junction Technology, 10 May 2010

  
• Investigation of Irradiation Damage with Large Gas Cluster Ion Beam using by HR-RBS

  T. Seki; J. Matsuo

  ALC’09, 10 Dec. 2009

  
• Molecular depth profiling of biological materials with large Ar cluster ion beams

  S. Ninomiya; K. Ichiki; H. Yamada; Y. Nakata; T. Seki; T. Aoki; J. Matsuo

  19th MRS-J Symposium, 09 Dec. 2009

  
• Development of high-intensity Ar Cluster ion beam source

  T. Yamanobe; Y. Yamamoto; K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  19th MRS-J Symposium, 08 Dec. 2009

  
• Soft Excitation and Processing of Polymer Materials with Cluster Ion Beams

  T. Seki; Y. Yamamoto; K. Ichiki; S. Ninomiya; J. Matsuo

  International Symposium on the Physics of Excitation-assisted Nano-processes(ISPEN2009), 20 Nov. 2009

  
• Secondary ion mass spectrometry depth profiling of organic films with large Ar cluster ion beams

  S. Ninomiya; K. Ichiki; H. Yamada; T. Seki; T. Aoki; J. Matsuo

  5th Inaternational Workshop on High-Resolution Depth Profiling, 18 Nov. 2009

  
• Investigation of cluster ion irradiation damage with HR-RBS”

  T. Seki; T. Aoki; J. Matsuo

  5th Inaternational Workshop on High-Resolution Depth Profiling, 17 Nov. 2009

  
• Surface Damage Evaluation of Organic Materials Irradiated with Ar Cluster Ions

  J. Matsuo; S. Ninomiya; K. Ichiki; H. Yamada; M. Hada; T. Aoki; T. Seki

  AVS 56th International Symposium, 12 Nov. 2009

  
• Molecular depth profiling of polymers with large Ar cluster ion beams

  S. Ninomiya; K. Ichiki; H. Yamada; Y. Nakata; T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Secondary Ion Mass Spectrometry, 18 Sep. 2009

  
• Sputtering and morphology of solid surfaces bombarded with size-selected gas cluster ion beams

  K. Ichiki; S. Ninomiya; Y. Nakata; H. Yamada; T. Seki; T. Aoki; J. Matsuo

  16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB2009), 16 Sep. 2009

  
• Etching of Metallic Materials with Cl2 Gas Cluster Ion Beam

  T. Seki; T. Aoki; J. Matsuo

  16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB2009), 16 Sep. 2009

  
• Damage evaluation of polymer materials irradiated with Ar cluster ion beams

  Y. Yamamoto; K. Ichiki; S. Ninomiya; T. Seki; J. Matsuo

  16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB2009), 16 Sep. 2009

  
• Analysis of organic semiconductor multilayers with Ar cluster SIMS

  S. Ninomiya; K. Ichiki; H. Yamada; Y. Nakata; T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Secondary Ion Mass Spectrometry, 15 Sep. 2009

  
• Damage evaluation of organic samples under large Ar cluster ion bombardment

  S. Ninomiya; K. Ichiki; H. Yamada; Y. Nakata; T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Secondary Ion Mass Spectrometry, 14 Sep. 2009

  
• Evaluation of optical properties in organic films with irradiation of cluster ion beams

  M. Hada; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Secondary Ion Mass Spectrometry, 14 Sep. 2009

  
• Size effects of sputtering yields with large cluster ion beams

  K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Secondary Ion Mass Spectrometry, 14 Sep. 2009

  
• Matrix-assisted Molecular Emission under MeV Ion Bombardment

  Y. Nakata; H. Yamada; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Secondary Ion Mass Spectrometry, 14 Sep. 2009

  
• Wet-SIMS with Swift Heavy Ions for Biological Applications

  Y. Nakata; H. Yamada; J. Tamura; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Secondary Ion Mass Spectrometry, 14 Sep. 2009

  
• MeV-Energy Probe SIMS Imaging of Pretreated Animal Cells

  H. Yamada; Y. Nakata; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Secondary Ion Mass Spectrometry, 14 Sep. 2009

  
• Study of atomic mixing and migration by low-energy ion irradiation using MEIS and MD simulation

  T. Aoki; T. Seki; J. Matsuo

  19th Ion Beam Analysis, 07 Sep. 2009

  
• MeV-Energy Probe SIMS Imaging of Major Components in Washed

  H. Yamada; Y. Nakata; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  Etched or Fractured Animal Cells, 07 Sep. 2009

  
• Material processing and evaluation with cluster ion beam

  J. Matsuo; H. Yamada; K. Ichiki; M. Hada; S. Ninomiya; T. Seki; T. Aoki

  10th International Symposium on Sputtering & Plasma Process, 08 Jul. 2009, Invited

  
• Stress Measurement of Carbon Cluster implanted layers with in-plane Diffraction Technique

  J. Matsuo; K. Ichiki; M. Hada; S. Ninomiya; T. Seki; T. Aoki; T. Nagayama; M. Tanjo

  9th International Workshop on Junction Technology, 12 Jun. 2009

  
• Molecular dynamics study of surface modification with large cluster ion impact

  T. Aoki; T. Seki; J. Matsuo

  2009 MRS spring meeting, 16 Apr. 2009

  
• Size-selected high density large gas cluster ion beam irradiation

  K. Ichiki; S. Ninomiya; M. Hada; T. Seki; T. Aoki; J. Matsuo

  2009 MRS spring meeting, 16 Apr. 2009

  
• Low Damage Etching of Polymer Materials for Depth Profile Analysis Using Large Ar Cluster Ion Beam

  S. Ninomiya; K. Ichiki; H. Yamada; Y. Nakata; T. Seki; T. Aoki; J. Matsuo

  The International workshop for Surface Analysis and Standardization '09, 18 Mar. 2009

  
• Study of density effect of large gas cluster impact by molecular dynamics simulations

  ? T. Aoki; T. Seki; J. Matsuo

  9th Workshop on Cluster Ion Beam Technology, 12 Mar. 2009

  
• High-speed processing with Cl2 cluster ion beam

  ?? T. Seki; T. Aoki; J. Matsu

  9th Workshop on Cluster Ion Beam Technology, 12 Mar. 2009

  
• SIMS depth profiling of organic films with Ar cluster ion beams

  ??; S. Ninomiya; K. Ichiki; Y. Nakata; H. Yamada; T. Seki; T. Aoki; J. Matsuo

  9th Workshop on Cluster Ion Beam Technology, 12 Mar. 2009

  
• Size-selected High Density Large Gas Cluster Ion Beam Irradiation

  ?? K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  The IUMRS International Conference in Asia, 11 Dec. 2008

  
• Etching Characteristics with Ar-Cl2 Gas Mixed Cluster Ion Beam

  ?? T. Seki; T. Aoki; J. Matsuo

  The IUMRS International Conference in Asia, 11 Dec. 2008

  
• Ion beam processing and characterization for organic and biological materials

  ?? J. Matsuo; S. Ninomiya; H. Yamada; K. Ichiki; Y. Nakata; T. Seki; T. Aoki

  The IUMRS International Conference in Asia, 10 Dec. 2008

  
• SIMS Depth Profiling of Organic Materials with Ar Cluster Ion Beam

  ??; S. Ninomiya; K. Ichiki; H. Yamada; Y. Nakata; T. Seki; T. Aoki; J. Matsuo

  The IUMRS International Conference in Asia, 10 Dec. 2008

  
• A Processing Technique of Cell Surface Using Cluster Ion Beam for Imaging Mass Spectrometry

  ??; H. Yamada; K. Ichiki; Y. Nakata; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  The IUMRS International Conference in Asia, 10 Dec. 2008

  
• Computer Simulations of Glancing-Angle Large Gas Cluster Impact

  ? T. Aoki; T. Seki; J. Matsuo

  The IUMRS International Conference in Asia, 10 Dec. 2008

  
• Molecular Depth Profiling for Soft Materials by using Size-Selected Large Cluster Ions

  ?? J. Matsuo; S. Ninomiya; H. Yamada; K. Ichiki; Y. Nakata; T. Aoki; T. Seki

  AVS 55th International Symposium, 22 Oct. 2008

  
• Study of density effect of large gas cluster impact

  ? T. Aoki; T. Seki; J. Matsuo

  9th International Conference on Computer Simulation of Radiation Effects in Solids, 13 Oct. 2008

  
• Study of crater formation process with cluster ion impact

  ? T. Aoki; T. Seki; S. Ninomiya; K. Ichiki; J. Matsuo

  16th International Conference on Ion Beam Modification of Materials, 03 Sep. 2008

  
• High-speed processing with Cl2 cluster ion beam

  ?? T. Seki; T. Aoki; J. Matsuo

  16th International Conference on Ion Beam Modification of Materials, 03 Sep. 2008

  
• The emission process of secondary ions from solids with large gas cluster ions

  ??; S. Ninomiya; K. Ichiki; T. Seki; T. Aoki; J. Matsuo

  23rd International Conference on Atomic Collisions in Solids, 17 Aug. 2008

  
• Imaging Mass Spectrometry with Nuclear Microprobes for Biologic Applications

  ??; Y. Nakata; H. Yamada; Y. Honda; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  11th International Conference on Nuclear Microprobe Technology and Applications, 22 Jul. 2008

  
• MD Study of Damage Accumulation Process With Poly-atomic Cluster Implantation

  ? T. Aoki; T. Seki; J. Matsuo

  17th International Conference on Ion Implantation Technology, 12 Jun. 2008

  
• Investigation of Damage with Cluster Ion Beam Irradiation

  ?? T. Seki; T. Aoki; J. Matsuo

  17th International Conference on Ion Implantation Technology, 12 Jun. 2008

  
• Computer modeling of cluster ion implantation prosess

  ? T. Aoki; T. Seki; J. Matsuo

  8th International Workshop on Junction Technology, 16 May 2008, Invited

  
• High-rate and low-damage etching of organic materials with large gas cluster ions

  ??; S. Ninomiya; K. Ichiki; P. Matthieu; T. Seki; T. Aoki; J. Matsuo

  21st Annual Workshop on SIMS, 15 May 2008

  
• High-Speed Nano-Processing with Cluster Ion Beams

  ?? T. Seki; T. Aoki; J. Matsuo

  MRS-J 2007 Symposium, 09 Dec. 2007

  
• Low damage etching and SIMS depth profiling with large Ar cluster ions

  ??; S. Ninomiya; J. Matsuo; K. Ichiki; H. Yamada; Y. Nakata; Y. Honda; T. Seki; T. Aoki

  MRS-J 2007 Symposium, 09 Dec. 2007

  
• SIMS Analysis of Biological Mixtures with Fast Heavy Ion Irradiation

  ??; Y. Honda; Y. Nakata; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  MRS-J 2007 Symposium, 07 Dec. 2007

  
• High-Speed Nano-Processing with Reactive Cluster Ion Beam”

  ?? T. Seki; T. Aoki; J. Matsuo

  8th Workshop on Cluster Ion Beam Technology, 09 Nov. 2007

  
• Ionization and low damage etching of soft materials with slow Ar cluster ions

  ??; S. Ninomiya; K. Ichiki; Y. Nakata; Y. Honda; T. Seki; T. Aoki; J. Matsuo

  8th Workshop on Cluster Ion Beam Technology, 09 Nov. 2007

  
• The effect of incident velocity on secondary cluster ion emission from Si bombarded with large Ar cluster ions

  ??; S. Ninomiya; K. Ichiki; Y. Nakata; Y. Honda; T. Seki; J. Matsuo

  The 16th International Conference on Secondary Ion Mass Spectrometry, 01 Nov. 2007

  
• High sputtering yields of organic compounds by large gas cluster ions

  ?? K. Ichiki; S. Ninomiya; Y. Nakata; Y. Honda; T. Seki; T. Aoki; J. Matsuo

  The 16th International Conference on Secondary Ion Mass Spectrometry, 01 Nov. 2007

  
• Nonlinear effects of secondary ion yields emitted from Si by Ar cluster ion beam irradiation

  ?? K. Ichiki; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  The 16th International Conference on Secondary Ion Mass Spectrometry, 01 Nov. 2007

  
• Challenges and prospects for cluster SIMS

  ?? J. Matsuo; S. Ninomiya; Y. Nakata; K. Ichiki; Y. Honda; T. Seki; T. Aoki

  The 16th International Conference on Secondary Ion Mass Spectrometry, 30 Oct. 2007, Invited

  
• MD simulation study of the sputtering process by high-energy gas cluster impact

  ? T. Aoki; T. Seki; S. Ninomiya; J. Matsuo

  The 16th International Conference on Secondary Ion Mass Spectrometry, 29 Oct. 2007

  
• A Fragment-free ionization technique for organic mass spectrometry with large Ar cluster ions

  ??; S. Ninomiya; Y. Nakata; Y. Honda; K. Ichiki; T. Seki; T. Aoki; J. Matsuo

  The 16th International Conference on Secondary Ion Mass Spectrometry, 29 Oct. 2007

  
• Yield Enhancement of Molecular Ions with MeV-Ion Induced Electronic Excitation

  ??; Y. Nakata; Y. Honda; S. Ninomiya; T. Seki; T. Aoki; J. Matsuo

  The 16th International Conference on Secondary Ion Mass Spectrometry, 29 Oct. 2007

  
• Fragment-Free Mass Spectrometry for Bio-molecular Surfaces with Size Selected Cluster SIMS

  ?? J. Matsuo; S. Ninomiya; K. Ichiki; Y. Nakata; T. Aoki; T. Seki

  AVS 54th International Symposium & Exhibition, 16 Oct. 2007

  
• Nano-processing with gas cluster ion beams

  ?? T. Seki

  15th International Conference on Surface Modification of Materials by Ion Beams, 30 Sep. 2007, Invited

  
• Cluster Ion Implantation ?Prospects and Challenges-

  ?? J. Matsuo; T. Aoki; T. Seki

  7th International Workshop on Junction Technology, 08 Jun. 2007, Invited

  
• MD Study of Damage Structure with Poly-atomic Boron Cluster Implantation

  ?? J. Matsuo; S. Ninomiya; K. Ichiki; Y. Nakata; T. Aoki; T. Seki

  7th International Workshop on Junction Technology, 08 Jun. 2007

  
• Cluster size effect on secondary ion emission

  ?? J. Matsuo; S. Ninomiya; K. Ichiki; Y. Nakata; T. Aoki; T. Seki

  IUVSTA Workshop, 23 Apr. 2007, Invited

  
• The effect of incident velocity on secondary ion emission from Si and Arginine with large Ar cluster ions

  ??; S. Ninomiya; Y. Nakata; K. Ichiki; Y. Honda; T. Seki; T. Aoki; J. Matsuo

  IUVSTA Workshop, 23 Apr. 2007

  
• The Effect of Incident Cluster Ion Size on Secondary Ion Yields Produced from Si

  ??; S. Ninomiya; K. Ichiki; Y. Nakata; T. Seki; T. Aoki; J. Matsuo

  MRS-J 2006 Symposium, 09 Dec. 2006

  
• Surface oxidation of Si assisted by irradiation with large gas cluster ion beam in an oxygen atmosphere

  ?? Kazuya Ichiki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  7th Workshop on Advanced Quantum Beam and Cluster Ion Beam Process Technology, 06 Nov. 2006

  
• The effect of incident cluster ion size on secondary ion yields emitted from Si

  ??; Satoshi Ninomiya; Kazuya Ichiki; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  7th Workshop on Advanced Quantum Beam and Cluster Ion Beam Process Technology, 06 Nov. 2006

  
• Surface Processing with High-Energy Reactive Gas Cluster Ion Beams

  ? Toshio Seki; Jiro Matsuo

  7th Workshop on Advanced Quantum Beam and Cluster Ion Beam Process Technology, 06 Nov. 2006

  
• Unique characteristics of oblique irradiation of gas cluster ion beam

  ?? A. Suzuki; E. Bourelle; A. Sato; T. Seki; J. Matsuo

  15th International Conference on Ion Beam Modification of Materials, 18 Sep. 2006

  
• High-speed processing with high-energy SF6 cluster ion beam

  ? Toshio Seki; Jiro Matsuo

  15th International Conference on Ion Beam Modification of Materials, 18 Sep. 2006

  
• Energy Distribution of High-Energy Cluster Ion Beams

  ? Toshio Seki; Jiro Matsuo

  19th International Conference on the Application of Accelerators in Research & Industry, 20 Aug. 2006

  
• Surface oxidation of Si assisted by irradiation with large gas cluster ion beam in an oxygen atmosphere

  ?? Kazuya Ichiki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  22th International Conference on Atomic Collisions in Solids, 21 Jul. 2006

  
• Measurements of secondary ion emitted from organic compounds bombarded with large gas cluster ions

  ??; Satoshi Ninomiya; Yoshihiko Nakata; Kazuya Ichiki; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  22th International Conference on Atomic Collisions in Solids, 21 Jul. 2006

  
• The effect of incident cluster ion energy and size on secondary ion yields emitted from Si

  ??; Satoshi Ninomiya; Kazuya Ichiki; Yoshihiko Nakata; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  22th International Conference on Atomic Collisions in Solids, 21 Jul. 2006

  
• Novel SIMS with unique ion beams

  ?? Jiro Matsuo; Satoshi Ninomiya; Yoshihiko Nakata; Kazuya Ichiki; Toshio Seki; Takaaki Aoki

  9th International Symposium on SIMS and Related Techniques based on Ion-Solid Interactions, 20 Jul. 2006

  
• Size Effects on Cluster Ion Beam Process

  ?? Jiro Matsuo; Satoshi Ninomiya; Kazuya Ichiki; Toshio Seki; Takaaki Aoki

  16th International Conference on Ion Implantation Technology, 11 Jun. 2006

  
• High-Speed and Precise Nano-Processing with Cluster Ion Beams

  ? Toshio Seki; Jiro Matsuo

  16th International Conference on Ion Implantation Technology, 11 Jun. 2006

  
• Biomaterial Analysis with Large Ar Cluster Ions

  ?? Jiro Matsuo; Satoshi Ninomiya; Yoshihiko Nakata; Takaaki Aoki; Toshio Seki

  19th Annual Workshop on SIMS, 16 May 2006

  
• Cluster dependence of Secondary Ion Emission

  ?? Jiro Matsuo; Satoshi Ninomiya; Kazuya Ichiki; Takaaki Aoki; Toshio Seki

  19th Annual Workshop on SIMS, 16 May 2006

  
• Surface Processing with High-Energy Gas Cluster Ion Beams

  ? Toshio Seki; Jiro Matsuo

  6th Workshop on Advanced Quantum Beam and Cluster Ion Beam Process Technology, 26 Sep. 2005

  
• Secondary ion measurements for oxygen cluster ion SIMS

  ??; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  The 15th International Conference on Secondary Ion Mass Spectrometry, 12 Sep. 2005

  
• High-intensity Si cluster ion emission from a silicon target bombarded with large Ar cluster ions

  ??; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

  The 15th International Conference on Secondary Ion Mass Spectrometry, 12 Sep. 2005

  
• Surface Processing with High-Energy Gas Cluster Ion Beams

  ? Toshio Seki; Jiro Matsuo

  14th International Conference on Surface Modification of Materials by Ion Beams, 04 Sep. 2005

  
• Low Damage Smoothing of Magnetic Materials using Off-normal Gas Cluster Ion Beam Irradiation

  ?? S. Kakuta; S. Sasaki; K. Furusawa; T. Seki; T. Aoki; J. Matsuo

  14th International Conference on Surface Modification of Materials by Ion Beams, 04 Sep. 2005

  
• Study of Sputtering Process with Large Gas Cluster Ion Impact

  Takaaki Aoki; Toshio Seki; Satoshi Ninomiya; Jiro Matsuo

  14th International Conference on Surface Modification of Materials by Ion Beams, 04 Sep. 2005

  
• New process technique for photonic crystals using gas cluster ion beam

  ? E.Bourelle; A.Suzuki; A.Sato; T.Seki; J.Matsuo

  PECS-VI: International Symposium on Photonic and Electromagnetic Crystal Structures, 19 Jun. 2005

  
• High-speed Processing with Reactive Cluster Ion Beams

  ? Toshio Seki; Jiro Matsuo

  2004 MRS Fall Meeting, 29 Nov. 2004

  
• Development of 1mA Cluster Ion Beam source

  ? Toshio Seki; Jiro Matsuo

  15th International Conference on Ion Implantation Technology, 24 Oct. 2004

  
• Energy Distributions of Highe Current Cluster Ion Beams

  ? Toshio Seki; Jiro Matsuo

  18th International Conference on the Application of Accelerators in Research & Industry, 10 Oct. 2004

  
• Cluster Size Depencence of Sputtering Yield by Cluster Ion Beam Irradiation

  ?; Toshio Seki

  5th Workshop on Cluster Ion Beam and Advanced Quantum Beam Process Technology, 30 Sep. 2004

  
• ITO Surface Smoothing with Argon Cluster Ion Beam

  ? Claire Heck; Toshio Seki; Nobu Tanigaki; T. Hiraga; Jiro Matsuo

  14th International Conference on Ion Beam Modification of Materials, 05 Sep. 2004

  
• Cluster Size Depencence of Sputtering Yield by Cluster Ion Beam Irradiation

  ? Toshio Seki; Takeshi Murase; Jiro Matsuo

  14th International Conference on Ion Beam Modification of Materials, 05 Sep. 2004

  
• Development of the Large Current Cluster Ion Beam Technology

  ? Toshio Seki; Jiro Matsuo

  International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources, 19 Mar. 2004

  
• High-speed Machining with Cluster Ion Beams

  ? Toshio Seki; Jiro Matsuo

  2003 MRS Fall Meeting, 01 Dec. 2003

  
• Highly Accurate Machining of Silicon through Thin Film Masks with High Etching Selectivity using Gas Cluster Ion Beam

  Emmanuel Bourelle; Atsuko Suzuki; Akinobu Sato; Toshio Seki; Jiro Matsuo

  4th Workshop on Cluster Ion Beam Process Technology, 10 Sep. 2003

  
• Development of the Large Current Cluster Ion Beam Technology

  ? Toshio Seki; Jiro Matsuo

  4th Workshop on Cluster Ion Beam Process Technology, 10 Sep. 2003

  
• Surface Smoothing with Large Current Cluster Ion Beam

  ? Toshio Seki; Jiro Matsuo; Gikan Takaoka

  European Materials Research Society Spring Meeting, 10 Jun. 2003

  
• Threshold Energy for Generating Damage with Cluster Ion Irradiation

  ? Toshio Seki; Takaaki Aoki; Atsuko Nakai; Jiro Matsuo; Gikan H. Takaoka

  2002 MRS Fall Meeting, 02 Dec. 2002

  
• High Current Cluster Ion Beam Source

  ? Toshio Seki; Jiro Matsuo; Gikan H. Takaoka

  17th International Conference on the Application of Accelerators in Research and Industry, 12 Nov. 2002

  
• Molecular Dynamics Simulation of Damage Formation by Large Cluster Ion Impact

  Takaaki Aoki; Toshio Seki; Jiro Matsuo; Gikan Takaoka

  17th International Conference on the Application of Accelerators in Research and Industry, 12 Nov. 2002

  
• Development of The Large Current Cluster Ion Beam Technology

  ? Toshio Seki; Jiro Matsuo; Gikan H. Takaoka

  14th International Conference on Ion Implantation Technology, 22 Sep. 2002

  
• Development of the Large Current Cluster Ion Beam Technology

  ? Toshio Seki; Jiro Matsuo; Gikan H. Takaoka

  3rd Workshop on Cluster Ion Beam Process Technology, 10 Sep. 2002

  
• Titanium-Dioxide Film Formation Using Gas Cluster Ion Beam Assisted Deposition Technique

  ??; Keisuke Omoto; Osamu Nakatsu; Jiro Matsuo; Toshio Seki; Gikan H. Takaoka; Isao Yamada

  3rd Workshop on Cluster Ion Beam Process Technology, 10 Sep. 2002

  
• Si Smoothing Model with Cluster Ion Beam and Its Application

  ??; Atsuko Nakai; Takaaki Aoki; Toshio Seki; Jiro Matsuo; Gikan Takaoka

  3rd Workshop on Cluster Ion Beam Process Technology, 10 Sep. 2002

  
• Study of Cluster-size Effect on Damage Formation

  Takaaki Aoki; Toshio Seki; Atsuko Nakai; Jiro Matsuo; Gikan Takaoka

  3rd Workshop on Cluster Ion Beam Process Technology, 10 Sep. 2002

  
• Surface smoothing of CVD-diamond wafer by mechanical scanned cluster ion beam

  ?? Ryuichi Matsuki; Akio Nishiyama; Toshio Seki; Jiro Matsuo; Isao Yamada

  13th international conference on ion beam modification of materials, 02 Sep. 2002

  
• Modeling of surface smoothing process by cluster ion beam irradiation

  ??; Atsuko Nakai; Takaaki Aoki; Toshio Seki; Jiro Matsuo; Gikan H.Takaoka; Isao Yamada

  13th international conference on ion beam modification of materials, 02 Sep. 2002

  
• Titanium-dioxide film formation using gas cluster ion beam assisted deposition technique

  Osamu Nakatsu; Keisuke Omoto; Toshio Seki; Jiro Matsuo; Gikan H. Takaoka; Isao Yamada

  13th international conference on ion beam modification of materials, 02 Sep. 2002

  
• Fundamental aspect of cluster ion collision and its application to industrial processing

  ?? Jiro Matsuo; Takaaki Aoki; Toshio Seki; Noriaki Toyoda; Isao Yamada

  13th international conference on ion beam modification of materials, 02 Sep. 2002

  
• Generation of the Large Current Cluster Ion Beam

  ? Toshio Seki; Jiro Matsuo; Gikan H. Takaoka; Isao Yamada

  13th International Conference on Ion Beam Modification of Materials, 01 Sep. 2002

  
• Development of the large current cluster ion beam technology

  ?; Toshio Seki

  Workshop on Cluster Ion Beam Process Technology, 15 Oct. 2001

  
• Ar Cluster Ion Bombardment Effects on Semiconductor Surfaces

  ? Toshio Seki; Kazumichi TSUMURA; Takaaki Aoki; Jiro MATSUO; Gikan TAKAOKA; Isao YAMADA

  Conference of 2000 MRS Fall Meeting (Symposium O), Dec. 2000

  
• STM study of nucleation processes during ion assisted MBE growth of Ge on Si surfaces

  ?? Jiro Matsuo; Toshio Seki; Gikan H. Takaoka; Isao Yamada

  Materials Research Society 2000 Fall Meeting, 27 Nov. 2000

  
• STM Observation of Si Surfaces Irradiated with Ar Cluster Ion

  ?; Toshio Seki

  The 16th International Conference on the Application of Accelerators in Reserach and Industry (CAARI 2000), Nov. 2000

  
• Surface collision of cluster ions and its applications to material processing

  Jiro Matsuo; Takaaki Aoki; Toshio Seki; Gikan Takaoka

  Workshop on Cluster Ion Beam Process Technology, 12 Oct. 2000

  
• STM Observation of Surface Vacancies Created by Ion Impact

  ? Toshio Seki; Takaaki Aoki; Jiro Matsuo; Isao Yamada

  The 18th International Conference on Atomic Collisions in Solids (ICACS-18), Aug. 1999

  
• UHV-STM Study on Ion Assisted Deposition

  ???; Toshio Seki; Jiro Matsuo; Isao Yamada

  The 14th International Conference on Ion Beam Analysis / 6th European Conference on “Accelerators in Applied Research and Technology (IBA-14/ECAART-6), Jun. 1999

  
• Size Dependence on Non-linear Characteristics of Cluster Ion Impact by MD Simulations

  ???; Takaaki Aoki; Toshio Seki; Jiro Matsuo; Zinetulla Insepov; Isao Yamada

  4th International Conference on Computer Simulation of Radiation Effects in Solids, Sep. 1998

  
• STM Observation of the Annealing Process of the Damage by Ion Impact

  ???; Toshio Seki; Jiro Matsuo; Isao Yamada

  XIIth International Conference on Ion Implantation Technology (IIT'98), Jun. 1998

  
• Non-Linear Processes in Cluster Ion Bombardment on Solid Surfaces

  ????; Daisuke Takeuchi; Toshio Seki; Takaaki Aoki; Jiro Matsuo; Isao Yamada

  The 4th IUMRS International Conference in Asia (Symp. H:'Materials Synthesis and Modification by Ion and/or Laser Beam'), 16 Sep. 1997

  
• Molecular Dynamics Simulation of A Carbon Cluster Ion Impacting on A Carbon Surface

  ???; Takaaki Aoki; Toshio Seki; Jiro Matsuo; Zinetulla Insepov; Isao Yamada

  The 4th IUMRS International Conference in Asia (Symp. H:'Materials Synthesis and Modification by Ion and/or Laser Beam'), 16 Sep. 1997

  
• STM Observation of Surfaces Irradiated with Carbon Cluster Ions

  ???; Toshio Seki; Takaaki Aoki; Masahiro Tanomura; Jiro Matsuo; Isao Yamada

  The 4th IUMRS International Conference in Asia (Symp. H:'Materials Synthesis and Modification by Ion and/or Laser Beam'), 16 Sep. 1997

  
• Molecular Dynamics Simulation of Surface Modification Process by Cluster Ion Impact

  ???; Takaaki Aoki; Toshio Seki; Masahiro Tanomura; Jiro Matsuo; Zinetulla Insepov; Isao Yamada

  Conference of 1997 MRS Fall Meeting (Symposium KK), Sep. 1997

  
• Size Dependence of Bombardment Characteristics Produced by Cluster Ion Beams

  ???; Toshio Seki; Masahiro Tanomura; Takaaki Aoki; Jiro Matsuo; Isao Yamada

  Conference of 1997 MRS Fall Meeting (Symposium KK), Sep. 1997

  
• STM Observation of Surfaces Irradiated with Ar Cluster Ions

  ???; Toshio Seki; Tsuyoshi Kaneko; Daisuke Takeuchi; Takaaki Aoki; Jiro Matsuo; Gikan H. Takaoka; Isao Yamada

  The Joint International Symposium of the '96 MRS-J Conference (Symp. N:'Materials Synthesis and Modification by Ion and/or Laser Beam') and the 3rd Ion Enginnering Conference, May 1996

  

Books and Other Publications

• New practical vacuum technology

  最新実用真空技術総覧編集委員会, Contributor, 第3編 薄膜 第8章 イオンビームエッチング 第1～2節

  エヌ・ティー・エス, Feb. 2019

  Find Kyoto University's collection of books :

  
• クラスターイオンビーム基礎と応用

  瀬木 利夫, Contributor, 2章全体および3章の一部

  日刊工業新聞社, 2006, Not refereed

  

Industrial Property Rights

• 特許第5575648号, 特願2010-525664, クラスタ噴射式加工方法

  小池 国彦; 妹尾 武彦; 吉野 裕; 東 周平; 松尾 二郎; 瀬木 利夫; 二宮 啓

  
• 特開2014-049530, 特願2012-189770, クラスタによる加工方法

  吉野 裕; 小池 国彦; 妹尾 武彦; 松尾 二郎; 瀬木 利夫

  
• 特開2013-175681, 特願2012-040647, 基板洗浄方法、基板洗浄装置及び真空処理装置

  松尾 二郎; 瀬木 利夫; 青木 学聡; 土橋 和也; 井内 健介; 斉藤 美佐子

  
• 特開2013-046001, 特願2011-184470, クラスタによる加工方法

  小池 国彦; 妹尾 武彦; 吉野 裕; 松尾 二郎; 瀬木 利夫

  
• 特開2012-124512, 特願2012-020898, ガスクラスターイオンビームによる固体表面の平坦化方法および固体表面平坦化装置

  佐藤 明伸; 鈴木 晃子; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫

  
• 特開2012-104858, 特願2012-020899, ガスクラスターイオンビームによる固体表面の加工方法

  鈴木 晃子; 佐藤 明伸; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫

  
• 特開2012-104859, 特願2012-020900, ガスクラスターイオンビームによる固体表面の平坦化方法

  鈴木 晃子; 佐藤 明伸; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫

  
• 特許第4654635号, 特開2005-100971, 特願2004-243092, クラスターイオン照射装置及びそれを用いた磁気ヘッドの製造方法

  大野 茂; 佐々木 新治; 古澤 賢司; 松尾 二郎; 瀬木 利夫

  
• 特許第4636862号, 特開2006-156065, 特願2004-343294, ガスクラスターイオンビーム照射装置

  大野 茂; 佐々木 新治; 古澤 賢司; 松尾 二郎; 青木 学聡; 瀬木 利夫

  
• 特許第4515931号, 特開2006-216600, 特願2005-025215, 薄膜半導体の製造方法およびその製造方法により製造された薄膜トランジスタ

  井上 満夫; 宮川 修; 坂本 孝雄; 小川 哲也; 松尾 二郎; 瀬木 利夫

  
• WO2010-021265, JP2009064131, クラスタ噴射式加工方法、半導体素子、微小電気機械素子、及び、光学部品

  小池 国彦; 妹尾 武彦; 吉野 裕; 東 周平; 松尾 二郎; 瀬木 利夫; 二宮 啓

  
• WO2008-054014, JP2007071460, ガスクラスターイオンビームによる固体表面の平坦化方法および固体表面平坦化装置

  鈴木 晃子; 佐藤 明伸; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫

  
• WO2008-053879, JP2007071102, ガスクラスターイオンビームによる固体表面の平坦化方法および固体表面平坦化装置

  佐藤 明伸; 鈴木 晃子; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫

  
• WO2008-054013, JP2007071459, ガスクラスターイオンビームによる固体表面の加工方法

  鈴木 晃子; 佐藤 明伸; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫

  
• 特許第4113478号, 特開2005-062664, 特願2003-295054, 2次元フォトニック結晶光デバイスの製造方法

  佐藤 明伸; 鈴木 晃子; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫; 青木 学聡

  
• 特許第3994111号, 特願2005-514263, 固体表面の平坦化方法及びその装置

  佐藤 明伸; 鈴木 晃子; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫; 青木 学聡

  
• WO2006-123739, JP2006309932, 固体表面の平坦化方法及びその装置

  佐藤 明伸; 鈴木 晃子; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫

  
• 特許第3816484号, 特開2005-175369, 特願2003-416438, ドライエッチング方法

  鈴木 晃子; 佐藤 明伸; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫; 青木 学聡

  
• 特開2005-175369, 特願2003-416438, ドライエッチング方法及びその方法を用いて作製されたフォトニック結晶素子

  鈴木 晃子; 佐藤 明伸; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫; 青木 学聡

  
• WO2005-031838, JP2004014275, 固体表面の平坦化方法及びその装置

  佐藤 明伸; 鈴木 晃子; ブーレル エマニュエル; 松尾 二郎; 瀬木 利夫; 青木 学聡

  
• 特願特願 2008-210140, クラスター照射式加工方法

  小池国彦; 妹尾武彦; 吉野裕; 東周平; 岩谷; 松尾二郎; 瀬木利夫; 二宮啓; 京都大

  
• 特開特開2005-175369, ドライエッチング方法及びその方法を用いて作成されたフォトニック結晶素子

  佐藤明伸; 鈴木晃子; ブーレルエマニュエル(日本航空電子工業株式会社; 松尾二郎; 瀬木利夫; 青木学聡

  
• 特開国際公開 WO2005/031838, 固体表面の平坦化方法およびその装置

  佐藤明伸; 鈴木晃子; ブーレルエマニュエル; 航空電子工業株式会社; 松尾二郎; 瀬木利夫; 青木学聡

  
• 特開特開2005-62664, 2次元フォトニック結晶光デバイスおよびその製造方法

  佐藤明伸; 鈴木晃子; ブーレルエマニュエル(日本航空電子工業株式会社; 松尾二郎; 瀬木利夫; 青木学聡

  

Awards

• 2016

  The 38th International Symposium on Dry Process (DPS2016), Best Presentation Award
• 1998

  XIIth International Conference on Ion Implantation Technology (IIT'98), Best Student Award of Ion Implantation Conference

External funds: Kakenhi

• Ambient SIMS Technique for Liquid-Solid Interface Analysis

  Grant-in-Aid for Scientific Research (A)

  Kyoto University

  Jiro MATSUO

  From 01 Apr. 2017, To 31 Mar. 2021, Project Closed

  固液;2次イオン;高速重イオン;クラスター;大気圧SIMS法;SIMS;イオン;表面分析;固液界面;二次イオン;大気圧分析;質量分析

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17H01058/
• Development of surface process technology with high speed and no damage by huge composite cluster

  Grant-in-Aid for Scientific Research (B)

  Kyoto University

  Toshio Seki

  From 01 Apr. 2015, To 31 Mar. 2018, Project Closed

  クラスター;イオンビーム;中性ビーム;反応性エッチング;ナノプロセス;表面処理;複合ビーム

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-15H04157/
• Development of analytical technique for organic materials with massive cluster ion beams

  Grant-in-Aid for Scientific Research (A)

  Kyoto University

  Jiro MATSUO

  From 01 Apr. 2011, To 31 Mar. 2014, Project Closed

  SIMS;クラスターイオン;分析;バイオ;高分子;クラスター;イオン;二次イオン

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23246012/
• Development of Nano-scale structure design and process technology by advanced composite cluster beam

  Grant-in-Aid for Young Scientists (B)

  Kyoto University

  Toshio SEKI

  From 01 Apr. 2010, To 31 Mar. 2013, Project Closed

  クラスター;量子ビーム科学;ナノプロセス;複合ビーム;中性ビーム

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22760557/
• Generation of nano-scale structure controlled composite cluster beam

  Grant-in-Aid for Young Scientists (A)

  Kyoto University

  Toshio SEKI

  From 01 Apr. 2006, To 31 Mar. 2009, Project Closed

  クラスター;微粒子;量子ビーム科学;ナノ構造材料;アルゴン;ノズル;金属材料被覆;金属材料被服

  https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18681014/

External funds: others

• 次世代量子ビーム利用ナノ加工技術

  経済産業省ナノテクプログラム

  From 2002, To 2006

  山田公
• 時間・空間スケーラビリティーを備えた統合原子シミュレーションの研究

  JST原子力システム研究開発事業

  From 2006, To 2008

  青木学聡
• ソフトナノマテリアル３Ｄ分子イメージング法の開発

  JST戦略的創造研究推進事業ＣＲＥＳＴ

  From 2007, To 2012

  松尾二郎
• 反応性超音速ナノ粒子ビームによる高精度異方性エッチング技術の研究

  科学技術振興機構　企業研究者活用型基礎研究推進事業

  From Dec. 2009, To Nov. 2010

  吉野裕
• 高速重イオンマイクロビームによる先進的分子イメージング法の研究

  JST 戦略的国際科学技術協力推進事業（日本－クロアチア研究交流課題）

  From Sep. 2010, To Mar. 2014

  松尾二郎
• 非イオン化クラスタービーム技術を利用したSi深堀エッチング技術の実用化開発

  JST研究成果最適展開支援プログラムA-STEP ハイリスク挑戦タイプ

  From 2011, To 2013

  小池国彦
• クラスターイオンを用いる固液界面評価技術の開発

  JST研究成果展開事業（先端計測分析技術・機器開発プログラム）

  From 01 Dec. 2014, To 31 Mar. 2018

  松尾　二郎

Education

Teaching subject(s)

• From 01 Apr. 2024, To 31 Mar. 2025

  Introduction to Solid State Physics

  5148, Fall, Faculty of Engineering, 2
• From 01 Apr. 2023, To 31 Mar. 2024

  Introduction to Solid State Physics

  5148, Fall, Faculty of Engineering, 2
• From 01 Apr. 2022, To 31 Mar. 2023

  Introduction to Solid State Physics

  5148, Fall, Faculty of Engineering, 2
• 量子物性基礎論
• From Apr. 2011, To Mar. 2012

  量子物性基礎論（原）

  Fall, 工学部
• From Apr. 2012, To Mar. 2013

  Introduction to Solid State Physics

  Fall, 工学部
• From Apr. 2013, To Mar. 2014

  Introduction to Solid State Physics

  Fall, 工学部
• From Apr. 2014, To Mar. 2015

  Introduction to Solid State Physics

  Fall, 工学部
• From Apr. 2015, To Mar. 2016

  Introduction to Solid State Physics

  Fall, 工学部
• From Apr. 2016, To Mar. 2017

  Introduction to Solid State Physics

  Fall, 工学部
• From Apr. 2017, To Mar. 2018

  Introduction to Solid State Physics

  Fall, 工学部
• From Apr. 2018, To Mar. 2019

  Introduction to Solid State Physics

  Fall, 工学部
• From Apr. 2019, To Mar. 2020

  Introduction to Solid State Physics

  Fall, 工学部
• From Apr. 2020, To Mar. 2021

  Introduction to Solid State Physics

  Fall, 工学部
• From Apr. 2021, To Mar. 2022

  Introduction to Solid State Physics

  Fall, 工学部

Administration

School management (title, position)

• From 12 Aug. 2021

  次期教育コン検討WG　メンバー
• From 01 Oct. 2021, To 30 Sep. 2022

  教員DB基盤仕様検討ＷＧ メンバー
• From 01 May 2007, To 31 Mar. 2011

  教育用コンピュータシステム運用委員会委員
• From 01 May 2007, To 31 Mar. 2011

  汎用コンピュータシステム運用委員会委員
• From 01 Apr. 2011, To 31 Mar. 2017

  ＫＵＩＮＳ利用負担金検討委員会 委員
• From 01 Apr. 2016, To 31 Mar. 2022

  教育システム運用委員会 委員
• From 01 Apr. 2016, To 31 Mar. 2022

  基盤システム運用委員会 委員
• From 01 Oct. 2020, To 30 Sep. 2021

  教員DB基盤仕様検討ＷＧ メンバー

Faculty management (title, position)

• From 01 Sep. 2016

  工学研究科・工学部情報セキュリティ幹事会　情報セキュリティ副技術責任者
• From 01 Apr. 2017

  工学研究科・工学部情報通信システム委員会　委員
• From 01 May 2007

  工学研究科附属情報センター運営委員会　委員

Academic, Social Contribution

Committee Memberships

• From Apr. 2025, To Mar. 2027

  組織委員長, SISS国際会議組織委員会
• From Apr. 2024, To Mar. 2026

  論文賞委員会委員, 公益社団法人応用物理学会
• From Apr. 2024, To Mar. 2025

  科学技術専門家ネットワーク・専門調査員, 文部科学省 科学技術・学術政策研究所
• From Sep. 2023, To Mar. 2026

  表面化学分析技術国際標準化委員会委員, 一般社団法人表面化学分析技術国際標準化委員会(JSCA)
• From Nov. 2023, To Sep. 2024

  JIS原案作成委員会委員, 一般社団法人表面化学分析技術国際標準化委員会(JSCA)
• From Apr. 2020, To Mar. 2025

  委員, SISS国際会議実行委員会
• From Apr. 2020, To Mar. 2025

  学術講演会プログラム編集委員, 応用物理学会
• From Oct. 2020, To Sep. 2024

  実行委員, IBA&PIXE 2023合同国際会議
• From Feb. 2023, To Dec. 2025

  プログラム委員, ドライプロセス国際シンポジウム組織委員会
• From Feb. 2022, To Oct. 2023

  Program Committee, The 1４ｔｈ International Symposium on Atomic Level Characterizarions for New Materials and Devices （ALC’22)
• From Oct. 2020, To Sep. 2023

  プログラム委員, REI-21国際会議
• From Oct. 2022, To Mar. 2023

  第70回春季学術講演会シンポジウム「イオンビーム分析の最新動向」 代表世話人, 応用物理学会
• From Apr. 2020, To Mar. 2022

  -, Japan Society of Applied Physics
• From Oct. 2018, To Mar. 2020

  実行委員, SIMS-22国際会議
• From Mar. 2017, To Dec. 2019

  実行委員, 23rd International Workshop on Inelastic Ion-Surface Collisions (IISC-23)
• From May 2018, To Dec. 2018

  第１９回「イオンビームによる表面・界面解析」特別研究会 実行委員長, 応用物理学会・薄膜表面物理分科会
• From 2000, To 2011

  事務局, クラスターイオンビームテクノロジーワークショップ
• From Jul. 2009, To Dec. 2010

  secretariat & conference proceeding editor, 18th International Conference on Ion Implantation Technology(IIT2010)

Academic Contribution

• -

  Panel moderator

  -, From 08 Sep. 2020, To 08 Sep. 2020

  
• 真空技術基礎講習会 実習指導講師

  Other

  日本真空協会関西支部, From 2013, To 2019

  
• -

  Panel moderator

  -, From 20 Mar. 2018, To 20 Mar. 2018

  
• -

  Panel moderator

  -, From 06 Sep. 2017, To 06 Sep. 2017

  
• -

  Other

  -, From 01 Apr. 2014, To 31 Mar. 2016

  
• -

  Panel moderator

  -, From 14 Sep. 2015, To 14 Sep. 2015

  
• -

  Panel moderator

  -, From 18 Sep. 2014, To 18 Sep. 2014

  
• -

  Panel moderator

  -, From 13 Sep. 2012, To 13 Sep. 2012

  
• -

  Panel moderator

  -, From 17 Mar. 2012, To 17 Mar. 2012

  
• -

  Panel moderator

  -, From 01 Sep. 2011, To 01 Sep. 2011

  
• -

  Panel moderator

  -, From 25 Mar. 2011, To 25 Mar. 2011

  
• 真空技術基礎講習会 実習指導講師

  Other

  日本真空協会関西支部, From 2011, To 2011

  
• -

  Panel moderator

  -, From 15 Sep. 2010, To 15 Sep. 2010

  
• -

  Panel moderator

  -, From 09 Mar. 2010, To 09 Mar. 2010

  
• -

  Panel moderator

  -, From 08 Sep. 2009, To 08 Sep. 2009

  
• 真空技術基礎講習会 実習指導講師

  Other

  日本真空協会関西支部, From 2008, To 2009

  

Social Contribution

• -

  Other

  -, From 15 Aug. 2019, To 30 Sep. 2019

  
• -

  Other

  -, From 28 Feb. 2019, To 28 Feb. 2019

  
• -

  Other

  -, From 28 Mar. 2018, To 28 Mar. 2018

  
• -

  Other

  -, From 17 Feb. 2017, To 17 Feb. 2017

  
• -

  Other

  -, From 03 Feb. 2017, To 03 Feb. 2017