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Hirai, Yoshikazu

Graduate School of Engineering Senior Lecturer/ Junior Associate Professor

Hirai, Yoshikazu
list
    Last Updated :2022/09/30

    Basic Information

    Faculty

    • 工学部

    Professional Memberships

    • THE SOCIETY FOR CHEMISTRY AND MICRO-NANO SYSTEMS
    • THE JAPAN INSTITUTE OF ELECTRONICS PACKAGING
    • THE MATERIALS RESEARCH SOCIETY
    • IEEE
    • THE JAPAN SOCIETY OF MECHANICAL ENGINEERS
    • THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN
    • 応用物理学会

    Academic Degree

    • 修士(工学)(立命館大学)
    • 博士(工学)(京都大学)

    Academic Resume (Graduate Schools)

    • 立命館大学, 大学院理工学研究科物質理工学専攻博士前期課程, 修了
    • 京都大学, 大学院工学研究科博士後期課程機械工学専攻, 修了

    Research History

    • From Sep. 2021, To Present
      Kyoto University, Graduate School of Engineering Department of Mechanical Engineering and Science, 講師
    • From May 2013, To Aug. 2021
      Kyoto University, Graduate School of Engineering Department of Micro Engineering, 助教
    • From Aug. 2014, To Mar. 2017
      Kyoto University, 物質-細胞統合システム拠点, 連携助教
    • From Apr. 2010, To Apr. 2013
      Kyoto University, 学際融合教育研究推進センター, 特定助教
    • From Apr. 2009, To Mar. 2010
      Kyoto University, 先端医工学研究ユニット, 特定助教
    • From Apr. 2007, To Mar. 2009
      Kyoto University, Graduate School of Engineering, 博士研究員
    • From Apr. 2022, To Present
      Kyoto University, 高等研究院 物質-細胞統合システム拠点, 連携講師
    • From Sep. 2021, To Present
      京都大学 大学院工学研究科, 附属工学基盤教育研究センター, 講師

    ID,URL

    Website(s) (URL(s))

    researchmap URL

    list
      Last Updated :2022/09/30

      Research

      Research Topics, Overview of the research

      • Research Topics

        小さな新機能デバイス:未知のしくみを最先端のナノマイクロデバイス技術と理論で科学する
      • Overview of the research

        My current research interests include (1) Fabrication and Packaging for Generic MEMS/NEMS, (2) Optical lithography for 3-Dimensional microstructuring, (3) Atomic MEMS device (e.g., CSAC: Chip Scale Atomic Clock, CSAM: Chip Scale Atomic Magnetometer), (4) Microfluidics, and (5) Bio-Microsystems for in vitro measurement (e.g., Organ/Body on a Chip).

      Research Interests

      • 1分子科学
      • ナノマイクロ生体システム
      • ナノマイクロバイオシステム
      • ナノマイクロセンサ
      • MEMS/NEMS
      • ナノマイクロ加工

      Research Areas

      • Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Measurement engineering
      • Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Applied biofunctional and bioprocess engineering
      • Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Design engineering
      • Nanotechnology/Materials, Nanobioscience
      • Nanotechnology/Materials, Nano/micro-systems

      Papers

      • Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon
        Yuanlin Xia; Makoto Suzuki; Peidong Xue; Yoshikazu Hirai; Toshiyuki Tsuchiya
        International Journal of Fatigue, Sep. 2022
      • Effect of alternating a-C:H multilayer full coating on fracture behavior of single-crystal silicon-based microstructure in tensile and toughness tests
        Yuanlin Xia; Yoshikazu Hirai; Toshiyuki Tsuchiya
        Materials Science and Engineering: A, Oct. 2021
      • Gut-liver-axis microphysiological system for studying cellular fluidic shear stress and inter-tissue interaction
        Jiandong Yang; Yoshikazu Hirai; Satoshi Imamura; Toshiyuki Tsuchiya; Osamu Tabata; Ken-ichiro Kamei
        02 Feb. 2022
      • Microfabricated alkali metal vapor cells filled with an on-chip dispensing component
        Shun Kiyose; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
        Japanese Journal of Applied Physics, 01 Jun. 2021, Peer-reviewed
      • Design strategy of electrode patterns based on finite element analysis in microfluidic device for Trans‐Epithelial Electrical Resistance (TEER) measurement
        Takashi Miyazaki; Yoshikazu Hirai; Ken‐ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
        Electronics and Communications in Japan, Jun. 2021, Peer-reviewed
      • 経上皮電気抵抗測定の高精度化に向けたOrgan-on-a-Chipの設計法
        宮崎 貴史; 平井 義和; 亀井 謙一郎; 土屋 智由; 田畑 修
        電気学会論文誌E(センサ・マイクロマシン部門誌), 2021, Peer-reviewed
      • Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded a-C:H film
        Yuanlin Xia; Yoshikazu Hirai; Toshiyuki Tsuchiya
        SURFACE & COATINGS TECHNOLOGY, Jan. 2021, Peer-reviewed
      • Design Strategy of Electrode Patterns Based on Finite Element Analysis in Microfluidic Device for Trans-Epithelial Electrical Resistance (TEER) Measurement
        Takashi Miyazaki; Yoshikazu Hirai; Ken-ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 01 Oct. 2020, Peer-reviewed
      • Recapitulation of Human Embryonic Heartbeat to Promote Differentiation of Hepatic Endoderm to Hepatoblasts
        Koki Yoshimoto; Nicolas Minier; Jiandong Yang; Satoshi Imamura; Kaylene Stocking; Janmesh Patel; Shiho Terada; Yoshikazu Hirai; Ken-ichiro Kamei
        Frontiers in Bioengineering and Biotechnology, 08 Sep. 2020, Peer-reviewed
      • Surface-enhanced Raman spectroscopy with gold nanoparticle dimers created by sacrificial DNA origami technique
        Naoki Yamashita; Seongsu Park; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        MICRO & NANO LETTERS, May 2020, Peer-reviewed
      • Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids
        Jiaxu Wu; Yoshikazu Hirai; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
        ELECTRONICS AND COMMUNICATIONS IN JAPAN, Oct. 2019, Peer-reviewed
      • Novel Microfluidic Device Integrated with a Fluidic-Capacitor to Mimic Heart Beating for Generation of Functional Liver Organoids
        Wu Jiaxu; Hirai Yoshikazu; Kamei Ken-ichiro; Tsuchiya Toshiyuki; Tabata Osamu
        IEEJ Transactions on Sensors and Micromachines, Jul. 2019, Peer-reviewed
      • Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope
        Yunyi Shu; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2019, Peer-reviewed
      • AFMリソグラフィで作製したナノ領域へのDNAオリガミの特異的固定
        山下 直輝; 朴 晟洙; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修
        電気学会論文誌E(センサ・マイクロマシン部門誌), May 2019, Peer-reviewed
      • Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film
        Wenlei Zhang; Kazutaka Obitani; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        SENSORS AND ACTUATORS A-PHYSICAL, Feb. 2019, Peer-reviewed
      • 顕微ラマン分光を用いた単結晶シリコンへき開ナノギャップ間の温度差測定
        霜降 真希; 平井 義和; 土屋 智由; 田畑 修
        実験力学, Jan. 2019, Peer-reviewed
      • 単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測
        土屋 智由; 鈴木 淳也; 片岡 達哉; 平井 義和; 菅野 公二; 田畑 修
        実験力学, Jan. 2019, Peer-reviewed
      • A microfluidic device to investigate the effect of shear stress on metastasis
        UEDA Keita; HAGIHARA Takeshi; HIRAI Yoshikazu; KONDO Jumpei; INOUE Masahiro; TSUCHIYA Toshiyuki; KAMEI Ken-ichiro; TABATA Osamu
        The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019
      • Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges
        Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        SENSORS AND MATERIALS, Sep. 2018, Peer-reviewed
      • Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array
        Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), 01 Jul. 2018, Peer-reviewed
      • Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film
        Wenlei Zhang; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Applied Surface Science, 15 Jun. 2018, Peer-reviewed
      • Tensile strength of Silicon Nanowires batch-fabricated into electrostatic MEMS testing device
        Toshiyuki Tsuchiya; Tetsuya Hemmi; Jun-Ya Suzuki; Yoshikazu Hirai; Osamu Tabata
        Applied Sciences (Switzerland), 28 May 2018, Peer-reviewed
      • A heuristic approach for actuator layout designs in deformable mirror devices based on current value optimization
        Yuto Yamaki; Yuki Sato; Kazuhiro Izui; Takayuki Yamada; Shinji Nishiwaki; Yoshikazu Hirai; Osamu Tabata
        Structural and Multidisciplinary Optimization, 23 Mar. 2018, Peer-reviewed
      • High-Yield Bridged Assembly of ssDNA-Modified SWCNT Using Dielectrophoresis
        Yusuke Shiomi; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
        International Journal of Automation Technology, 05 Jan. 2018, Peer-reviewed
      • Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs
        Zhipeng Ma; Yunfei Huang; Seongsu Park; Kentaro Kawai; Do-Nyun Kim; Yoshikazu Hirai; Toshiyuki Tsuchiya; Hirofumi Yamada; Osamu Tabata
        Small, 04 Jan. 2018, Peer-reviewed
      • Mathematical modeling and analysis of MEMS deformable mirror actuated by electrostatic piston array
        Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2018, Peer-reviewed
      • Revealing the influential factor on dimerizing of triangular DNA origami by linker
        Tatsuya Inagaki; Seongsu Park; Naoki Yamashita; Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2018, Peer-reviewed
      • Fabrication of ionic liquid-based pressure sensor with high sensitivity utilizing three-dimensional lithography and its characterization
        TSUJI Yusuke; HIRAI Yoshikazu; KAMEI Ken-ichiro; TSUCHIYA Toshiyuki; TABATA Osamu
        The Proceedings of the Symposium on Micro-Nano Science and Technology, 2018
      • Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique
        Naoki Yamashita; Zhipeng Ma; Seongsu Park; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        MICRO & NANO LETTERS, Nov. 2017, Peer-reviewed
      • Cutting Edge of MEMS Research and Development in 2017
        Yoshikazu HIRAI
        Journal of The Surface Finishing Society of Japan, 01 Jul. 2017, Peer-reviewed
      • Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design
        Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed
      • Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap
        Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed
      • Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method
        Wenlei Zhang; Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed
      • Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro
        Ken-ichiro Kamei; Yoshiki Kato; Yoshikazu Hirai; Shinji Ito; Junko Satoh; Atsuko Oka; Toshiyuki Tsuchiya; Yong Chen; Osamu Tabata
        RSC ADVANCES, 2017, Peer-reviewed
      • 抗がん剤の副作用を再現する生体外ヒトモデル Body on a Chi
        亀井 謙一郎; 平井 義和; 加藤 義基; 土屋 智由; 田畑 修
        バイオエンジニアリング講演会講演論文集, 2017
      • Sensitivity characterization of pressure sensor using ionic liquid by finite element analysis
        TSUJI Yusuke; NAKANO Yu; HIRAI Yoshikazu; KAMEI Ken-ichiro; TSUCHIYA Toshiyuki; TABATA Osamu
        The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017
      • Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet
        Kazuhiro Ban; Yoshikazu Hirai; Kazuya Tsujimoto; Akira Terao; Natsuhiko Mizutani; Tetsuo Kobayashi; Osamu Tabata
        JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Nov. 2016, Peer-reviewed
      • Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures
        Zhipeng Ma; Seongsu Park; Naoki Yamashita; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, Jun. 2016, Peer-reviewed
      • Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers
        Zhipeng Ma; Seongsu Park; Naoki Yamashita; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2016, Peer-reviewed
      • 培養細胞を用いたスクリーニング系の構築、毒性評価 抗がん剤副作用を再現する生体外モデルBody on a Chipの開発
        亀井 謙一郎; 平井 義和; 加藤 義基; 土屋 智由; 田畑 修
        組織培養研究, Mar. 2016
      • Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper
        Toshiyuki Tsuchiya; Yusuke Kogita; Akira Taniyama; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Feb. 2016, Peer-reviewed
      • Development of a Body-on-a-Chip Using 3-D Microstructuring Technique
        Yoshiki Kato; Yoshikazu Hirai; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2016, Peer-reviewed
      • Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers
        Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        MICRO & NANO LETTERS, Dec. 2015, Peer-reviewed
      • Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography
        Xiaoxu Ma; Yoshiki Kato; Floris van Kempen; Yoshikazu Hirai; Toshiyuki Tsuchiya; Fred van Keulen; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Dec. 2015, Peer-reviewed
      • Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy
        Zhipeng Ma; Young-Joo Kim; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Do-Nyun Kim; Osamu Tabata
        Micro & Nano Letters, Oct. 2015, Peer-reviewed
      • ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis
        Yoshikazu Hirai; Daisuke Takagi; Satoshi Anai; Yoshitomo Chihara; Toshiyuki Tsuchiya; Kiyohide Fujimoto; Yoshihiko Hirao; Osamu Tabata
        SENSORS AND ACTUATORS B-CHEMICAL, Jul. 2015, Peer-reviewed
      • High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure
        Akio Uesugi; Takahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2015, Peer-reviewed
      • Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers
        Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Mar. 2014, Peer-reviewed
      • On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet
        K. Tsujimoto; K. Ban; Y. Hirai; K. Sugano; T. Tsuchiya; N. Mizutani; O. Tabata
        Journal of Micromechanics and Microengineering, Nov. 2013, Peer-reviewed
      • Molecular Level Study of Negative Thick-Film Resist in MEMS by Employing a Coarse-Grained Molecular Dynamics Simulation
        HIRAI Yoshikazu; YAGYU Hiromasa; MAKINO Yoshihide; UESUGI Akio; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        The Journal of the Institute of Electrical Engineers of Japan, Aug. 2013, Peer-reviewed
      • Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
        Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Electronics and Communications in Japan, May 2013, Peer-reviewed
      • Phenotypic and Transcriptional Modulation of Human Pluripotent Stem Cells Induced by Nano/Microfabrication Materials
        Ken-Ichiro Kamei; Yoshikazu Hirai; Momoko Yoshioka; Yoshihide Makino; Qinghua Yuan; Minako Nakajima; Yong Chen; Osamu Tabata
        Advanced Healthcare Materials, Feb. 2013, Peer-reviewed
      • (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響
        上杉 晃生; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会論文集A編, Jan. 2013, Peer-reviewed
      • Body on a chip: Re-creation of a living system in vitro
        Ken-Ichiro Kamei; Yoshikazu Hirai; Osamu Tabata
        IEEE Nanotechnology Magazine, 2013, Peer-reviewed
      • Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
        Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        POLYMER, Sep. 2012, Peer-reviewed
      • Mechanical and electrical clamping of DEP assembled SWCNT using electroless gold deposition
        Tatsuya Kataoka; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed
      • Tensile test on (110) <110> thin film single crystal silicon with different processing conditions
        Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed
      • Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
        Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        IEEJ Transactions on Sensors and Micromachines, 2011, Peer-reviewed
      • Embedded Microstructure Fabrication Using Developer-Permeability of Semi-Cross-Linked Negative Resist
        Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Oct. 2010, Peer-reviewed
      • Component Modeling of 2DOF Comb Transducer for Equivalent Circuit Using Built-in Displacement Detection
        TOKUSAKI Hiroyuki; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        The Journal of the Institute of Electrical Engineers of Japan, Sep. 2010, Peer-reviewed
      • A three-dimensional microstructuring technique exploiting the positive photoresist property
        Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Jun. 2010, Peer-reviewed
      • Moving mask UV lithography for three-dimensional structuring
        Yoshikazu Hirai; Yoshiteru Inamoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Feb. 2007, Peer-reviewed
      • Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography
        Y Hirai; S Hafizovic; N Matsuzuka; JG Korvink; O Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Feb. 2006, Peer-reviewed
      • A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D2XRL)
        Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata
        Journal of Micromechanics and Microengineering, 01 Nov. 2005, Peer-reviewed
      • Process Simulation System for 3D X-Ray Lithography and Development
        平井 義和; Hafizovic Sadik; Jan G. Korvink; 田畑 修
        電気学会論文誌E(センサ・マイクロマシン部門誌), Sep. 2003, Peer-reviewed

      Misc.

      • 光ポンピング原子磁気センサによる微小磁気計測 I-磁気光学回転角の基礎的検討-
        柏井茂達; 田上周路; 市原直; 石川潔; 石川潔; 杉岡秀行; 水谷夏彦; 平井義和; 田畑修; 小林哲生
        応用物理学関係連合講演会講演予稿集, 2008
      • 2201 Process Parameters Determination with Numerical Approach on Double Exposure Deep X-ray Lithography
        Hirai Yoshikazu; Matsuzuka Naoki; Tabata Osamu
        Conference on Information, Intelligence and Precision Equipment : IIP, 21 Mar. 2005
      • Molecular Detection by Surface-Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimers Formed by Sacrificial DNA Origami Technique
        山下直輝; PARK Seongsu; 川合健太郎; 平井義和; 土屋智由; 田畑修
        センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 2019
      • 心臓拍動を模倣した圧力刺激印加による肝オルガノイド成熟化を目指すマイクロ流体デバイス
        三浦大知; 平井義和; 亀井謙一郎; 土屋智由
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2021
      • OS1418-467 Dynamic stress measurement of single crystal silicon microstructures using micro Raman spectroscopy
        TSUCHIYA Toshiyuki; KOGITA Yusuke; HIRAI Yoshikazu; TABATA Osamu
        M&M材料力学カンファレンス, 21 Nov. 2015
      • 731 Sensitivity matrix measurement of MEMS three-axis accelerometer using single-axis shaker
        TSUCHIYA Toshiyuki; NAKANO Atsushi; HIRAI Yoshikazu; TABATA Osamu; UMEDA Akira
        Dynamics and Design Conference : D & D, 25 Aug. 2015
      • 29pm1-F-2 Integration of Silicon Nanowire to SOI-MEMS and Diameter Control Using Thermal Oxidation
        HEMMI Tetsuya; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        マイクロ・ナノ工学シンポジウム, 21 Oct. 2015
      • 29pm3-PN-49 Tensile Fracture Behaviors of (110) Silicon Microstructures at High Temperature
        UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        マイクロ・ナノ工学シンポジウム, 21 Oct. 2015
      • J2210406 Time-resolved micro-Raman stress measurement using electrostatic MEMS optical chopper
        TSUCHIYA Toshiyuki; KOGITA Yusuke; HIRAI Yoshikazu; TABATA Osamu
        Mechanical Engineering Congress, Japan, 13 Sep. 2015
      • J2210404 Tensile-Mode Fatigue Testing of Silicon Micro Structure with Integrated Strain Gauge
        UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        Mechanical Engineering Congress, Japan, 13 Sep. 2015
      • Sacrificial DNA Origami Technique and its Application to Gold Nanoparticle Dimers with Nanogap
        山下 直輝; 朴 晟洙; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017
      • Rapid molecular sensing based on on-chip size-separation process of DNA origami
        Park Seongsu; Ma Zhipeng; Yamashita Naoki; Hirai Yoshikazu; Tsuchiya Toshiyuki; Tabata Osamu
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017
      • Development of Low X-ray Scattering Chamber for Recording Single-Molecule Conformational Changes of Proteins with the Diffracted X-ray Tracking Method
        清水 啓史; 田渕 友樹; 田原 樹生; 岩本 真幸; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017
      • Development of Cs Vapor Cell Microfabricated with Porous Alumina Dispenser for Chip-Scale Atomic Clock
        寺島 健太; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 02 Oct. 2016
      • A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY
        松井 祐樹; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015
      • Development of a Body-on-a-Chip Using 3D Microstructuring Techniques
        加藤 義基; 平井 義和; 亀井 謙一郎; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015
      • Analysis of TEER measurement error depending on electrode patterns using finite element analysis
        宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        電気学会全国大会講演論文集(CD-ROM), 2020
      • 非アルコール性脂肪性肝疾患を再現する肝臓-小腸・オン・チップ
        亀井謙一郎; 楊建東; 飯田慶; 寺田志穂; 土屋智由; 田畑修; 平井義和
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2020
      • Design of microelectrode array for transepithelial electrical resistance measurement based on electric current density analysis
        宮崎貴史; 平井義和; 亀井謙一郎; 田畑修; 田畑修; 土屋智由
        マイクロエレクトロニクスシンポジウム論文集, 2020
      • Improved Sensitivity of Ionic Liquid-Based Pressure Sensor Embedded in PDMS Microfluidic Devices
        辻 勇亮; 平井 義和; 亀井 謙一郎; 土屋 智由; 田畑 修
        マイクロエレクトロニクスシンポジウム論文集, 12 Sep. 2019
      • Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion
        Ikkei Yamauchi; Tomoki Tabuchi; Yoshikazu Hirai; Masayuki Iwamoto; Toshiyuki Tsuchiya; Hirofumi Shimizu; Osamu Tabata
        2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 01 Jun. 2019
      • Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation
        Masaki Shimofuri; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 01 Jun. 2019
      • 有限要素解析を用いた経上皮電気抵抗測定マイクロ流体デバイス内電極形状の設計
        宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        電気学会全国大会講演論文集(CD-ROM), 2019
      • PDMS製マイクロ流体デバイスへ実装可能な高感度イオン液体型圧力センサ
        辻勇亮; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        マイクロエレクトロニクスシンポジウム論文集, 2019
      • A microfluidic device to investigate the effect of shear stress on metastasis
        植田啓太; 萩原健; 平井義和; 近藤純平; 井上正宏; 土屋智由; 亀井謙一郎; 田畑修
        日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2019
      • Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells
        Yoshikazu Hirai; Katsuo Nokamura; Yuichi Kimoto; Toshiyuki Tsuchiya; Osamu Tabata
        IFCS 2018 - IEEE International Frequency Control Symposium, 31 Dec. 2018
      • Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon
        Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018, 01 Nov. 2018
      • Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
        Yunyi Shu; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 11 May 2018
      • Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography
        Yoshikazu Hirai; Yusuke Tsuji; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 24 Apr. 2018
      • Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array
        Akiko Uno; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 24 Apr. 2018
      • Fabrication of microfluidic device with integrated Ag/AgCl electrode for trans-epithelial electrical resistance measurement
        宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        電気学会研究会資料, 2018
      • 3次元リソグラフィを応用したイオン液体型高感度圧力センサの作製と特性評価
        辻勇亮; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2018
      • Microfabrication of Cs-filled MEMS cell using sequential plasma activated bonding
        Kenta Terashima; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings, 27 Oct. 2017
      • Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique
        Naoki Yamashita; Zhipeng Ma; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata; Kentaro Kawai
        2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, 25 Aug. 2017
      • MEMS based fabrication of conformal electrode pairs for thermotunneling cooling
        Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai, 31 Jul. 2017
      • Thermomechanical noise of arrayed capacitive accelerometers with 300-NM-gap sensing electrodes
        Toshiyuki Tsuchiya; Yuki Matsui; Yoshikazu Hirai; Osamu Tabata
        TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 26 Jul. 2017
      • Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks
        Yoshikazu Hirai; Kenta Terashima; Katsuo Nakamura; Toshiyuki Tsuchiya; Osamu Tabata
        TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 26 Jul. 2017
      • Revealing the Influential Factor on Dimerizing of Triangular DNA Origami by Linker
        稲垣 達也; 朴 晟洙; 山下 直輝; 馬 志鵬; 川合 健太郎; 平井 義和; 土屋 智由; 田畑 修
        電気学会研究会資料. MSS, 29 Jun. 2017
      • Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design
        Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        Japanese Journal of Applied Physics, 01 Jun. 2017
      • 可変形状ミラーデバイスにおけるアクチュエータ配置最適化のためのヒューリスティクスの提案
        八巻侑外; 佐藤勇気; 泉井一浩; 山田崇恭; 西脇眞二; 平井義和; 田畑修
        2017年度精密工学会春季大会,精密工学会,2017年3月13日 - 15日,神奈川,設計の方法論(製品,サービス,PSS), Mar. 2017
      • TENSILE PROPERITIES OF SINGLE-CRYSTAL-SILICON FULLY COATED WITH SUBMICROMETER-THICK PECVD DLC
        Wenlei Zhang; Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017
      • 国際会議報告:EUROSENSORS 2016
        平井 義和
        電学論E, 2017
      • 心筋細胞外電位測定のためのPDMS埋め込み型電極アレイ
        大牧達矢; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        電気学会全国大会講演論文集(CD-ROM), 2017
      • 心筋細胞外電位計測を目指したPDMS埋め込み型電極アレイの作製プロセス
        大牧達也; 平井義和; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2017
      • 微小圧力計測を目的としたPDMS製イオン液体型圧力センサ
        辻勇亮; 中野優; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2017
      • 有限要素解析を用いたイオン液体型圧力センサの感度特性評価
        辻勇亮; 中野優; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
        日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2017
      • 抗がん剤の副作用を再現する生体外ヒトモデルBody on a Chip
        亀井謙一郎; 平井義和; 加藤義基; 土屋智由; 田畑修
        バイオエンジニアリング講演会講演論文集(CD-ROM), 2017
      • Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper
        Toshiyuki Tsuchiya; Yusuke Kogita; Akira Taniyama; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
        JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Feb. 2016
      • Photoresist Micro-Chamber for the Diffracted X-ray Tracking Method Recording Single-Molecule Conformational Changes
        Kio Tahara; Yoshikazu Hirai; Hirohumi Shimizu; Toshiyuki Tsuchiya; Osamu Tabata
        PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016, 2016
      • MEMS Deformable Mirror Actuated By Electrostatic Piston Array
        Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2016
      • Simulation study of SU-8 structures realized by single-step projection photolithography
        K. Nakamura; Y. Hirai; T. Tsuchiya; O. Tabata; F. Larramendy; O. Paul
        2016 IEEE SENSORS, 2016
      • 研究室だより:京都大学大学院 田畑・土屋(ナノ・マイクロシステム工学)研究室
        平井 義和
        電学論E, 2016
      • 抗がん剤副作用を再現する生体外モデルBody on a Chipの開発
        亀井謙一郎; 平井義和; 平井義和; 加藤義基; 土屋智由; 田畑修
        組織培養研究, 2016
      • Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device
        Toshiyuki Tsuchiya; Tetsuya Hemmi; Jun-ya Suzuki; Yoshikazu Hirai; Osamu Tabata
        21ST EUROPEAN CONFERENCE ON FRACTURE, (ECF21), 2016
      • Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 degrees C of (110) Single Crystal Silicon Microstructures
        Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        21ST EUROPEAN CONFERENCE ON FRACTURE, (ECF21), 2016
      • MEMS3軸加速度センサのマトリックス感度並列計測
        土屋智由; 中野篤; 平井義和; 田畑修; 梅田章
        第62回応用物理学会春季学術講演会, Mar. 2015
      • DNAオリガミ架橋構造のシリコン基板への選択的形成
        朴晟洙; 馬志鵬; 平井義和; 土屋智由; 田畑修; 森裕都
        平成27年電気学会全国大会, Mar. 2015
      • Optimization methods for 3D lithography process utilizing DMD-based maskless grayscale photolithography system
        Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris van Kempen; Fred van Keulen; Toshiyuki Tsuchiya; Osamu Tabata
        OPTICAL MICROLITHOGRAPHY XXVIII, 2015
      • Alkali Metal Source Tablet for Vapor Cells of Atomic Magnetometers
        Kazuhiro Ban; Akira Terao; Natsuhiko Mizutani; Kazuya Tsujimoto; Yoshikazu Hirai; Tetsuo Kobayashi; Osamu Tabata
        2015 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & THE EUROPEAN FREQUENCY AND TIME FORUM (FCS), 2015
      • SIZE EFFECT ON BRITTLE-DUCTILE TRANSITION TEMPERATURE OF SILICON BY MEANS OF TENSILE TESTING
        A. Uesugi; Y. Hirai; T. Tsuchiya; O. Tabata
        2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015
      • FET PROPERTIES OF SINGLE-WALLED CARBON NANOTUBES INDIVIDUALLY ASSEMBLED UTILIZING SINGLE STRAND DNA
        Kosuke Hokazono; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015
      • Direct characterization of radial modulus of DNA nanotube by AFM nanoindentation
        Zhipeng Ma; Young-Joo Kim; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Do-Nyum Kim; Osamu Tabata
        2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2015
      • Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography
        X. Ma; Y. Kato; F. Kempen; Y. Hirai; T. Tsuchiya; F. Keulen; O. Tabata
        EUROSENSORS 2015, 2015
      • A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY UTILIZING SIZE EFFECT
        Y. Matsui; Y. Hirai; T. Tsuchiya; O. Tabata
        2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015
      • MICROFLUIDIC DEVICE TO INTERCONNECT MULTIPLE ORGANS VIA FLUIDIC CIRCULATION: TOWARDS BODY-ON-A-CHIP
        Y. Kato; Y. Hirai; K. Kamei; T. Tsuchiya; O. Tabata
        2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015
      • SELECTIVE ASSEMBLY OF DNA NANOSTRUCTURE BRIDGING ONTO A TRENCHED SILICON SUBSTRATE
        Y. Mori; Z. Ma; S. Park; Y. Hirai; T. Tsuchiya; O. Tabata
        2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015
      • 抗がん剤副作用を生体外で再現するBody on a Chipの開発
        亀井謙一郎; 平井義和; 平井義和; 加藤義基; 土屋智由; 田畑修
        化学とマイクロ・ナノシステム学会研究会講演要旨集, 2015
      • 灌流システムを搭載した副作用検査デバイス 〜ヒトES/iPS由来のBody on a chipを目指して〜
        加藤義基; 平井 義和; 亀井謙一郎; 土屋智由; 田畑修
        細胞アッセイ技術の現状と将来, Jan. 2015
      • The diffracted X-ray tracking method for recording the single-molecule conformational changes of the KcsA potassium channel in a sub-millisecond time resolution
        H. Shimizu; M. Iwamoto; Y. Oota; Yoshikazu Hirai; Osamu Tabata; S. Oiki
        The 45th Natl Inst Physiol Sci (NIPS) International Symposium, Nov. 2014
      • X線1分子動態計測法で用いる低ノイズ観測チャンバの開発
        平井義和; 田畑修; 清水啓史
        化学とマイクロ・ナノシステム学会第30回研究会, 化学とマイクロ・ナノシステム学会, Oct. 2014
      • An Optimization Tool for 3D Lithography Utilizing DMD-based Maskless Exposure System
        Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris van Kempen; Fred van Keulen; Toshiyuki Tsuchiya; Osamu Tabata
        第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014
      • 単結晶シリコンマイクロ構造体の引張応力下における脆性延性遷移
        上杉晃生; 平井義和; 土屋智由; 田畑修
        第6回「マイクロ・ナノ工学シンポジウム」, Oct. 2014
      • 一本鎖DNAにより孤立アセンブルした単層カーボンナノチューブの電気特性
        外薗洸佑; 鈴木淳也; 平井義和; 土屋智由; 田畑修
        第6回「集積化 MEMS シンポジウム」, Oct. 2014
      • Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature
        A. Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        The 27th International Microprocesses and Nanotechnology Conference, Fukuoka, Japan (4-7 October, 2014), Oct. 2014
      • Revealing the radial elastic modulus of multi-layered DNA origami by AFM nanoindentation
        Zhipeng Ma; Seongsu Park; Yuto Mori; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        第58回日本学術会議材料工学連合講演会, 日本学術会議材料工学委員会,他関連34学協会, Oct. 2014
      • J2240303 High-Temperature Tensile Testing of Single Crystal Silicon Micro Structure in Vacuum Using Concentrated Infrared Light Heating
        UESUGI Akio; YASUTOMI Takahiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        Mechanical Engineering Congress, Japan, 07 Sep. 2014
      • 多段ICP-RIEプロセスにより一括作製したシリコンナノワイヤのMEMS引張試験
        土屋智由; 鈴木淳也; 平井義和; 田畑修
        日本機械学会2014年度年次大会,, Sep. 2014
      • 時間分解顕微ラマン分光のための両側静電駆動MEMS光チョッパ
        小北雄亮; 谷山彰; 平井義和; 土屋智由; 田畑修
        日本機械学会2014年度年次大会, Sep. 2014
      • 赤外集光加熱を用いた単結晶シリコンマイクロ構造体の真空中高温引張試験
        上杉晃生; 安富貴浩; 平井義和; 土屋智由; 田畑修
        日本機械学会2014年度年次大会, Sep. 2014
      • MEMS3軸加速度センサの並列校正手法の検討
        土屋智由; 中野篤; 平井義和; 田畑修
        Dynamics and Design Conference 2014(D&D2014), 日本機械学会, Aug. 2014
      • エキシマレーザ照射による単結晶シリコンマイクロ構造の表面改質おび引張強度向上
        土屋智由; Mohamed E. Mitwally; 平井義和; 田畑修; Sherif Sedky
        日本機械学会M&M2014材料力学カンファレンス,, Jul. 2014
      • An optimization approach for 3D photolithography utilizing DMD maskless exposure system
        Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris Kempen; Fred Keulen; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Jun. 2014
      • Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C
        Akio Uesugi; Takahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Jun. 2014
      • 5-アミノレブリン酸による蛍光検出を使った膀胱癌細胞分別マイクロ流体システム
        平井義和; 高木大介; 穴井智; 千原良友; 土屋智由; 藤本清秀; 平尾佳彦; 田畑修
        平成26年度電気学会センサ・マイクロマシン部門総合研究会(バイオ・マイクロシステム研究会), 電気学会, May 2014
      • 蛍光検知とマイクロ流路を用いた光力学尿細胞診
        高木大介; 平井義和; 穴井智; 千原良友; 土屋智由; 藤本清秀; 平尾佳彦; 田畑修
        第23回泌尿器科分子・細胞研究会, 泌尿器科分子・細胞研究会, Mar. 2014
      • Photoresist-Based Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
        Yoshikazu Hirai; Daisuke Takagi; Satoshi Anai; Yoshitomo Chihara; Toshiyuki Tsuchiya; Kiyohide Fujimoto; Yoshihiko Hirao; Osamu Tabata
        28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014
      • DOUBLE-SIDE-DRIVE ELECTROSTATIC OPTICAL CHOPPER FOR TIME-RESOLVED RAMAN SPECTROSCOPY
        Yusuke Kogita; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
        2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014
      • LARGE-DISPLACEMENT ELECTROSTATIC DEFORMABLE MIRROR USING MOVABLE BOTTOM ELECTRODES
        Toshiyuki Tsuchiya; Vijay Kumar Singh; Yoshikazu Hirai; Osamu Tabata
        2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014
      • Tensile Testing with Concentrated Infrared Light Heating in Vacuum for Single Crystal Silicon Mechanical Characterization at High Temperature
        上杉 晃生; 平井 義和; 土屋 智由; 田畑 修
        日本実験力学会講演論文集, Jan. 2014
      • 蛍光検出とマイクロ流路を用いた尿中癌細胞分別システム
        高木大介; 平井義和; 穴井智; 千原良友; 藤本清秀; 土屋智由; 平尾佳彦; 田畑修
        化学とマイクロ・ナノシステム学会第28回研究会, 化学とマイクロ・ナノシステム学会, Dec. 2013
      • 粗視化モデルを用いたMEMS化学増幅型ネガレジストの分子構造依存性解析
        成瀬圭介; 柳生裕聖; 平井義和; 土屋智由; 田畑修
        第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, Nov. 2013
      • 微細構造体を用いたアルカリ金属の生成反応
        藩和宏; 辻本和也; 平井義和; 水谷夏彦; 田畑修
        化学工学会第45回秋季大会, 化学工学会, Sep. 2013
      • (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性
        上杉晃生; 平井義和; 菅野公二; 土屋智由; 田畑修
        日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013
      • 多段ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工
        鈴木淳也; 平井義和; 菅野公二; 土屋智由; 田畑修
        日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013
      • ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル
        外薗洸佑; 鈴木淳也; 平井義和; 菅野公二; 土屋智由; 田畑修
        日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013
      • 3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価
        中野篤; 平井義和; 菅野公二; 土屋智由; 田畑修
        Dynamics and Design Conference 2013(D&D2013), 日本機械学会, Aug. 2013
      • Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations
        Akio Uesugi; Yoshikazu Hirai; Koji Sugan; Toshiyuki Tsuchiya; Osamu Tabata
        ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), Jul. 2013
      • Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography
        Y. Kato; Yoshikazu Hirai; F. van Kempen; F. van Keulen; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology, Apr. 2013
      • 節付きBoschプロセスによるシリコン3層構造の作製
        北村彰男; 平井義和; 菅野公二; 土屋智由; 田畑修
        平成25年電気学会全国大会, Mar. 2013
      • グレースケールDMD露光用3次元微細加工プロセスシミュレータ
        加藤義基; 平井義和; Floris van Kempen; Fred van Keulen; 菅野公二; 土屋智由; 田畑修
        平成25年電気学会全国大会, Mar. 2013
      • Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
        Daisuke Takagi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata; Satoshi Anai; Yoshitomo Chihara; Kiyohide Fujimoto; Yoshihiko Hirao
        2013 IEEE 7TH INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (NANOMED), 2013
      • Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table
        Atsushi Nakano; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Akira Umeda
        Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2013, Peer-reviewed
      • DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY
        T. Akishiba; N. Tamura; T. Ichii; Y. Hirai; K. Sugano; T. Tsuchiya; H. Sugimura; O. Tabata
        26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 2013, Peer-reviewed
      • Automatic process design for 3D thick-film grayscale photolithography
        F. C.M. Van Kempen; Y. Hirai; F. Van Keulen; O. Tabata
        2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013
      • SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection
        K. Sugano; H. Katayama; Y. Hirai; T. Tsuchiya; O. Tabata
        2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013
      • Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon
        A. Uesugi; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013
      • A MEMS Optical Chopper for Dynamic Stress Measurement of Single Crystalline Silicon Resonator Using Time-Resolved Micro Raman Spectroscopy
        小北 雄亮; 谷山 彰; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Jan. 2013
      • New fabrication method and evaluation of alkali-metal vapor cells for atomic magnetometer
        辻本 和也; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Jan. 2013
      • Angular rate sensitivity of SOI capacitive three-axis accelerometer
        中野 篤; 平井 義和; 土屋 智由; 田畑 修
        「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], Jan. 2013
      • Dynamic response of pull-in type MEMS optical chopper for time-resolved micro-Raman spectroscopy
        谷山 彰; 小北 雄亮; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        日本実験力学会講演論文集, Jan. 2013, Peer-reviewed
      • AS-2-9 Atomic MEMSのための新規なアルカリ金属蒸気セル作製手法(AS-2.超小型量子発振器・センサ,シンポジウムセッション)
        辻本 和也; 平井 義和; 菅野 公二; 土屋 智由; 藩 和宏; 水谷 夏彦; 田畑 修
        電子情報通信学会ソサイエティ大会講演論文集, Jan. 2013
      • Material Characterizations of Negative Photoresist for Bio-MEMS Applications
        Yoshikazu Hirai
        The 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012), Oct. 2012, Invited
      • 粗視化分子動力学シミュレーションによる架橋度制御ネガレジストの分子透過係数解析
        柳生 裕聖; 平井 義和; 牧野 圭秀; 菅野 公二; 土屋 智由; 田畑 修
        第29回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2012
      • 単層カーボンナノチューブの MEMS 引張試験における顕微ラマン分光を用いたひずみ測定
        鈴木 淳也; 片岡 達哉; 平井 義和; 菅野 公二; 土屋智由; 田畑 修
        第4回「マイクロ・ナノ工学シンポジウム」, Oct. 2012
      • 702 Evaluation of Effects of Rotational Motion on Vibration Table in Sensitivity Matrix Calibration of 3-axis Accelerometer
        NAKANO Atsushi; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu; UMEDA Akira
        Dynamics & Design Conference, 18 Sep. 2012
      • Automated optimization of gray-scale masks for 3D micro-structuring
        F. van Kempen; Yoshikazu Hirai; F. van Keulen; Osamu Tabata
        The 6th European Congress on Computional Methods in Applied Sciences and Engineering (ECCOMAS 2012), Sep. 2012
      • Optimization techniques for gray-scale photolithography
        F. van Kempen; Yoshikazu Hirai; F. van Keulen; Osamu Tabata
        The 9th ASMO UK / ISSMO conference on Engineering Design Optimization Product and Process Improvement, Jul. 2012
      • Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist
        Daimon Matsui; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), Jul. 2012
      • Fabrication of nanogap electrodes by gold nanorod growth on substrate
        NISHINO So; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu; TAKENAKA Yoshiko
        電気学会マイクロマシン・センサシステム研究会資料, 11 Jun. 2012
      • Analysis of aggregation reaction for silver nanoparticle dimers toward highly sensitive SERS
        KATAYAMA Hiroshi; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会マイクロマシン・センサシステム研究会資料, 11 Jun. 2012
      • Evaluation of negative photoresists on phenotypes of human induced pluripotent stem cells (hiPSCs)
        K. Kamei; Yoshikazu Hirai; Y. Makino; L. Liu; Q. Yuan; M. Yoshioka; Y. Chen; Osamu Tabata
        The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012
      • Temperature dependency of DNA origami self-assembly rate
        C. Huang; T. Akishiba; N. Tamura; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012
      • Fabrication of nanogap electrodes by gold nanorod growth on substrate
        S. Nishino; Y. Takenaka; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012
      • Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics
        H. Yagyu; Yoshikazu Hirai; A. Uesugi; Y. Makino; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012
      • Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer
        T. Kataoka; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012
      • 自己変位検出型静電櫛歯等価回路モデルを用いたMEMS振動ジャイロ解析
        徳崎裕幸; 平井義和; 菅野公二; 田畑 修; 土屋智由
        応用物理学会 第59回 応用物理学関係連合講演会, Mar. 2012
      • HIGH-SPEED PULSED MIXING WITH HIGH-FREQUENCY SWITCHING OF PUMPING FROM THREE MICROPUMPS
        Koji Sugano; Akihiro Nakata; Hideaki Yoshimune; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2, 2012, Peer-reviewed
      • Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation
        Hiromasa Yagyu; Yoshikazu Hirai; Yoshihide Makino; Koji Sugano; Tsuchiya Toshiyuki; Osamu Tabata
        26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, Peer-reviewed
      • Phenotypic modulation of pluripotent stem cells (PSCs) induced by microfabrication materials
        Ken Ichiro Kamei; Yoshikazu Hirai; Yoshihide Makino; Momoko Yoshioka; Li Liu; Minako Nakajima; Qinghua Yuan; Yong Chen; Osamu Tabata
        Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012, 01 Jan. 2012
      • ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR
        A. Kitamura; Y. Hirai; K. Sugano; O. Tabata; T. Tsuchiya
        2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012, Peer-reviewed
      • Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application
        Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Materials Research Society Symposium Proceedings, 2012, Peer-reviewed
      • Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS
        Toshiyuki Tsuchiya; Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
        IFIP Advances in Information and Communication Technology, 2012
      • Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist
        Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        Proceedings of International Workshop on Micro/Nano-Engineering, Dec. 2011
      • 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術
        平井義和; 辻本和也; 菅野公二; 土屋智由; 田畑修
        電気学会電子回路研究会資料, 21 Nov. 2011
      • Evaluation of Negative Photoresists for Culturing Mouse and Human Pluripotent Stem Cells
        KAMEI KEN-ICHIRO; HIRAI YOSHIKAZU; MAKINO YOSHIHIDE; LIU LI; YUAN QINGHUA; CHEN YONG; TABATA OSAMU
        センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 26 Sep. 2011
      • フォトレジスト基板のマウス・ヒト多能性幹細胞に与える影響の評価
        亀井謙一郎; 平井義和; 牧野圭秀; Li Liu; Qinghua Yuan; Yong Chen; 田畑修
        第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011
      • 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング
        片岡達也; 平井義和; 菅野公二; 土屋智由; 田畑修
        第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011
      • MEMS厚膜ネガレジストの粗視化分子動力学モデル
        平井義和; 柳生裕聖; 上杉晃生; 牧野圭秀; 菅野公二; 土屋智由; 田畑修
        第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011
      • ナノギャップ電極の作製に向けた金ナノロッドの基板上成長
        西野聡; 菅野公二; 武仲能子; 田畑修; 土屋智由; 平井義和
        日本化学会第63回コロイドおよび界面化学討論会, Sep. 2011
      • エポキシ系ネガレジスト機械的特性の架橋度依存性
        上杉晃生; 牧野圭秀; 柳生裕聖; 平井義和; 菅野公二; 土屋智由; 田畑修
        日本機械学会2011年度年次大会, Sep. 2011
      • ガラスフリットリフローによる犠牲マイクロ流路気密封止技術の確立と小型原子磁気センサ実装への応用
        辻本和也; 平井義和; 菅野公二; 土屋智由; 田畑修
        関西ワークショップ2011, エレクトロニクス実装学会,, Jul. 2011
      • ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル
        菅野公二; 平岡亮二; 平井義和; 土屋智由; 田畑修
        電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011
      • 高速脈動混合マイクロ流体デバイスを用いた金ナノ粒子の合成
        菅野公二; 吉宗秀晃; 中田哲博; 平井義和; 土屋智由; 田畑修
        電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011
      • Equivalent Circuit Analysis of Nonlinearity Response in Electrostatic Comb Resonator
        KITAMURA Akio; HIRAI Yoshikazu; SUGANO Kouji; TSUCHIYA Toshiyuki; TABATA Osamu
        電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011
      • 電気等価回路を用いた静電櫛歯型MEMS振動子の非線形応答解析
        北村 彰男; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        平成23年度電気学会マイクロマシン・センサシステム部門総合研究会, Jun. 2011
      • Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane
        平井 義和; 上杉 晃生; 牧野 圭秀; 柳生 裕聖; 菅野 公二; 土屋 智由; 田畑 修
        The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011),, pp. 62-63, Jun. 2011, Peer-reviewed
      • 高速脈動混合マイクロ流体デバイスを用いた均一粒子径金ナノ粒子の合成
        吉宗 秀晃; 中田 哲博; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        平成23年電気学会全国大会, Mar. 2011
      • Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique
        K.Tsujimoto; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        International workshop on micro/nano-engineering, 2011, Peer-reviewed
      • LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY
        A. Taniyama; Y. Hirai; K. Sugano; O. Tabata; T. Ikehara; T. Tsuchiya
        2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed
      • SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER
        K. Tsujimoto; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed
      • Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics
        Y. Hirai; A. Uesugi; Y. Makino; H. Yagyu; K. Sugano; T. Tsuchiya; O. Tabata
        2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed
      • High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis
        K. Sugano; H. Yoshimune; A. Nakata; Y. Hirai; T. Tsuchiya; O. Tabata
        2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed
      • High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels
        Koji Sugano; Hideaki Yoshimune; Akihiro Nakata; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
        NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed
      • Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection
        Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed
      • Epoxy-based permeable membrane fabrication for 3D microfluidic device
        Yoshikazu Hirai; Yusuke Nakai; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed
      • mESC and hiPSC Proliferation on Negative Photoresists for Microfluidics
        Yoshikazu Hirai; Ken-ichiro Kamei; Yoshihide Makino; Li Liu; Qinghua Yuan; Yong Chen; Osamu Tabata
        EUROSENSORS XXV, 2011
      • Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS
        Toshiyuki Tsuchiya; Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
        2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 2011, Peer-reviewed
      • 国際会議報告:IEEE-NEMS2011 報告
        平井 義和
        IEEJ Transactions on Sensors and Micromachines, 2011
      • DNA Mediated self-assembly of micro-scale components and sites
        Ryo Sato; Tomoki Tanemura; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 01 Dec. 2010, Peer-reviewed
      • MNM-3A-4 Crystallographic anisotropy analysis in fracture of micro-sized (110) single crystal silicon using Weibull statistics
        Wakita Taku; Hirai Yoshikazu; Sugano Koji; Tabata Osamu; Ikehara Tsuyoshi; Tsuchiya Toshiyuki
        日本機械学会マイクロ・ナノ工学シンポジウム講演論文集, 12 Oct. 2010
      • MNM-P11-3 Performance analysis of vibrating gyroscope using equivalent circuit of electrostatic comb transducer with built-in displacement detection
        TOKUSAKI Hiroyuki; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        マイクロ・ナノ工学シンポジウム, 12 Oct. 2010
      • チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術
        辻本 和也; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        第27回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2010
      • T0302-1-1 Crystal anisotropy on fracture behavior of (110) single-crystal silicon on tensile testing
        Wakita Taku; Hirai Yoshikazu; Sugano Koji; Tabata Osamu; Tsuchiya Toshiyuki; Ikehara Tsuyoshi
        The proceedings of the JSME annual meeting, 04 Sep. 2010
      • T0302-2-2 Local stress analysis of single-crystalline resonator using micro Raman spectroscopy
        TANIYAMA Akira; HIRAI Yoshikazu; SUGANO Koji; TABATA Osamu; IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki
        The proceedings of the JSME annual meeting, 04 Sep. 2010
      • 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析
        谷山 彰; 平井 義和; 菅野 公二; 田畑 修; 池原 毅; 土屋 智由
        日本機械学会2010年度年次大会, Sep. 2010
      • Crystal anisotropy on strength of single crystal silicon measured by tensile testing
        Taku,Wakita; Yoshikazu,Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tsuyoshi,Ikehara
        The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 44, Jul. 2010, Peer-reviewed
      • Component modelling of 2DOF comb transducer for equivalent circuit using built-in displacement detection
        Hiroyuki,Tokusaki; Yoshikazu,Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
        The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 160, Jul. 2010, Peer-reviewed
      • Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell
        Kazuya,Tsujimoto; Yoshikazu,Hirai; 菅野 公二; Tsuchiya, Toshiyuki; Tabata, Osamu
        The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 211, Jul. 2010, Peer-reviewed
      • 3方向からの交互脈動送液による高速2液混合
        菅野公二; 中田哲博; 平井義和; 土屋智由; 田畑修
        電気学会マイクロマシン・センサシステム研究会資料, 17 Jun. 2010
      • Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices Using Developer Permeability of Negative Thick-Film Resists
        Y. Hirai; Y. Nakai; K. Sugano; T. Tsuchiya; O. Tabata
        EUROSENSORS XXIV CONFERENCE, 2010
      • DNA-grafted-polymer mediated self-assembly of micro components
        Guillermo Lopez; Tomoki Tanemura; Ryo Sato; Takahiro Saeki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Masahiro Fujita; Mizuo Maeda
        2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 2010, Peer-reviewed
      • Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication(2009)
        Yoshikazu Hirai
        The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Oct. 2009, Invited
      • 厚膜ネガレジストの埋め込み型流路作製のためのフォトリソグラフィ条件の決定手法
        平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 533-538, Oct. 2009, Peer-reviewed
      • Exposure and Development Simulation for Deep X-Ray LIGA
        Jan G. Korvink; Sadik Hafizovic; Yoshikazu Hirai; Pascal Meyer
        LIGA and its Applications, 05 Aug. 2009
      • 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ
        菅野公二; 内田雄喜; 平井義和; 土屋智由; 田畑修
        電気学会マイクロマシン・センサシステム研究会資料, 23 Jul. 2009
      • 平成21年度電気学会センサ・マイクロマシン部門総合研究会
        菅野公二; 内田雄喜; 平井 義和; 土屋 智由; 田畑 修
        平成21年度電気学会センサ・マイクロマシン部門総合研究会, Jul. 2009
      • MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity
        Yoshikazu Hirai; Hideaki Yoshimune; Kazuya Tsujimoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
        The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 2009, Peer-reviewed
      • Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication
        Yoshikazu Hirai
        The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Tainan,Taiwan, 2009, Peer-reviewed
      • Automated Optimization of Light Dose Distribution for Moving-Mask Lithography
        Fred van Keulen; Yoshikazu Hirai; Osamu Tabata
        EUROSIME 2009: THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS, 2009, Peer-reviewed
      • Capacitive micromachined ultrasonic transducers with novel membrane design
        M. Sato; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009
      • Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist
        Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009, Peer-reviewed
      • Objective function and adjoint sensitivities for moving-mask lithography
        Fred Van Keulen; Fred Van Keulen; Yoshikazu Hirai; Osamu Tabata
        12th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference, MAO, 01 Dec. 2008, Peer-reviewed
      • Effective Fabrication Method for Monolithic 3-dimensional Embedded Microstructure using the Moving-mask UV Lithography Technique
        HIRAI Yoshikazu; INAMOTO Yoshiteru; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
        Proc Sens Symp Sens Micromachines Appl Syst, 22 Oct. 2008, Peer-reviewed
      • 3-dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property
        Yoshikazu, Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
        The 22nd international conference EUROSENSORS (EUROSENSORS XXII),, pp. 1559-1602, Sep. 2008, Peer-reviewed
      • Measurement of Biomagnetic Fields in Small Animals by use of an Optical Pumping Atomic Magnetomete
        Shuji Taue; Sunao Ichihara; Yasuyuki Sugihara; Kiyoshi Ishikawa; Hideyuki Sugioka; Natsuhiko Mizutani; Shujie Liu; Yoshikazu Hirai; Osamu Tabata; Tetsuo Kobayashi
        The 16th International Conference on Biomagnetism, Aug. 2008
      • ポジ型厚膜レジストの溶解速度の露光波長依存性と3次元加工への応用
        平井義和; 菅野公二; 土屋智由; 田畑修
        電気学会マイクロマシン・センサシステム研究会資料, 12 Jun. 2008, Peer-reviewed
      • レジスト現像特性の露光波長依存性を応用した厚膜レジストの3次元微細加工技術
        平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        電気学会全国大会,3, pp. 138-139, Mar. 2008, Peer-reviewed
      • 生体ファントムを用いた光ポンピング原子磁気センサによる微小磁場分布計測
        杉原 靖幸; 田上 周路; 市原 直; 石川 潔; 水谷 夏彦; 平井 義和; 田畑 修; 小林 哲生
        生体医工学シンポジウム2008, 2008
      • 光ポンピング原子磁気センサにおける磁気光学回転の基礎的検討
        柏井 茂達; 田上 周路; 石川 潔; 市原 直; 杉岡 秀行; 平井 義和; 田畑 修; 小林 哲生
        電気学会マグネティックス研究会, Oct. 2007
      • 移動マスクUV露光法によるポジ型厚幕レジストの3次元加工と形状シミュレーション技術
        平井 義和; 稲本 好輝; 菅野 公二; 土屋 智由; 田畑 修
        日本機械学会2007年度年次大会, Sep. 2007
      • Fast Marching Methodを適用した移動マスクUV露光用加工形状シミュレーション技術
        平井 義和; 稲本 好輝; 菅野 公二; 土屋 智由; 田畑 修
        電気学会総合研究会, Jul. 2007
      • Moving-mask UV lithography and embedded microchannels
        Yoshireru, Inamoto; Yoshikazu, Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
        The 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007),, pp. 31-32, Jun. 2007, Peer-reviewed
      • 移動マスクUV露光法による埋め込み型流路の作製
        稲本 好輝; 平井 義和; 菅野 公二; 土屋 智由; 田畑 修
        平成19年,電気学会全国大会, Mar. 2007
      • Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring
        Y. Hirai; Y. Inamoto; K. Sugano; T. Tsuchiya; O. Tabata
        TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed
      • 移動マスクUV露光法による厚膜レジストの三次元微細加工技術
        平井 義和; Inamoto; 菅野 公二; 土屋 智由; 田畑 修
        Proceedings of the 23rd Sensor Symposium, Oct. 2006
      • Prediction method of 3-D shape fabricated by double exposure technique in deep X-ray lithography ((DXRL)-X-2)
        N Matsuzuka; Y Hirai; O Tabata
        MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006
      • 微細噴孔ノズルによる微粒化過程の解析−移動X線マスク露光法による微細噴孔製作と噴霧観察−
        大久保 陽一郎; 井戸田 芳典; 河村清美; 田畑 修; 平井 義和
        日本液体微粒化学会第14回微粒化シンポジウム(微粒化の可能性への挑戦), Nov. 2005
      • Study on 3-D Microfabrication by Double Exposure Method in Deep X-ray Lithography (D2XRL)
        Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata
        PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, Oct. 2005
      • Analytical Method for Process Parameters Determination on Double Exposure Deep X-Ray Lithography
        Yoshikazu Hirai; Naoki Matsuzuka; Osamu Tabata
        High Aspect Micro Structure Technology, Jun. 2005
      • A New Experimental Technique for Process Parameters Determination on X-ray Lighography
        Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata
        High Aspect Micro Structure Technology, Jun. 2005
      • X線二重露光法における加工パラメータ決定手法の提案とその検証
        平井 義和; 松塚 直樹; 田畑 修
        機械学会情報知能部門会議, Mar. 2005
      • A novel fabrication process of 3-D microstructures by double exposure in standard deep x-ray lithography
        N Matsuzuka; Y Hirai; O Tabata
        MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, Peer-reviewed
      • 3-D Micro-machining Technique by Double Exposure in Normal Deep X-ray Lithography
        Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata
        第21回「センサ・マイクロマシンと応用システム」シンポジウム, 2004
      • 3D simulation system for moving mask deep X-ray lithography
        Y Hirai; N Matsuzuka; S Hafizovic; JG Korvink; O Tabata
        MHS2003: PROCEEDINGS OF 2003 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 2003
      • X3D: 3D X-ray lithography and development simulation for MEMS
        S Hafizovic; Y Hirai; O Tabata; JG Korvink
        BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003
      • Measurement of PMMA Dissolution Rate and System Calibration for Predictive 3-D Simulation of Moving Mask Deep X-Ray Lithography
        Yoshikazu Hirai; Osamu Tabata; Sadik Hafizovic; Jan. G. Korvink
        High Aspect Micro Structure Technology, Jan. 2003
      • 移動マスクX線リソグラフィーにおけるX3Dの有用性
        平井 義和; 松塚 直樹; 田畑 修; Sadik Hafizovic; Jan G. Korvink
        第20回「センサ・マイクロマシンと応用システム」シンポジウム, 2003
      • Effect of Development Process in Moving Mask Deep X-ray Lithography for 3D Microfabrication
        Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata; Sadik Hafizovic; Jan G. Korvink
        High Aspect Micro Structure Technology, 2003
      • X線応用3次元加工用シミュレーションシステムの開発
        平井 義和; Sadik Hafizovic; Jan G.Korvink; 田畑 修
        電気学会 マイクロマシン・センサシステム研究会, 2002

      Industrial Property Rights

      • 特開2020-146015, 特願2019-48928, マイクロ流体デバイス
        亀井謙一郎; 平井義和; 田畑修; 宮崎貴史
      • 特開2020-099211, 特願2018-238405, 細胞培養容器
        福江久美子; 亀井謙一郎; 平井義和; 田畑修
      • 特願2020-185571, 金属ガス封入セル及びその製造方法
        平井義和; 清瀬俊
      • 特開W02014/132651, 特願PCT/JP2014/001059, アルカリ金属セルの製造方法,アルカリ金属の製造方法,およびアルカリ金属セル
        田畑修; 藩和宏; 水谷夏彦; 平井義和; 辻本和也

      Awards

      • 11 Mar. 2021
        応用物理学会・集積化MEMS技術研究会, 優秀ポスター賞
      • 01 Feb. 2021
        日本機械学会マイクロ・ナノ工学部門, 優秀講演論文表彰
      • 06 Mar. 2020
        コニカミノルタ科学技術振興財団, 令和元年度コニカミノルタ画像科学奨励賞
      • 21 Nov. 2019
        The Institute of Electrical Engineers of Japan, 優秀技術論文賞
      • 01 Feb. 2019
        日本機械学会マイクロ・ナノ工学部門, 優秀講演論文表彰
      • 15 Jun. 2017
        新化学技術推進協会, 第6回新化学技術研究奨励賞
      • 02 Jun. 2017
        The Institute of Electrical Engineers of Japan, 第73回電気学術振興賞 論文賞
      • 17 Feb. 2017
        文部科学省「ナノテクノロジープラットフォーム」, 平成28年度秀でた利用6大成果賞
      • 04 Feb. 2017
        Journal of Micromechanics and Microengineering, Outstanding Reviewer Award in 2016
      • 26 Oct. 2016
        The Institute of Electrical Engineers of Japan, 最優秀技術論文賞
      • 01 Apr. 2016
        The Institute of Electrical Engineers of Japan, IEEJ Excellent Presentation Award
      • 30 Oct. 2015
        The Institute of Electrical Engineers of Japan, The Igarashi Award
      • 22 Mar. 2003
        The Japan Society of Mechanical Engineers, The Hatakeyama Award

      External funds: Kakenhi

      • Gut-Liver-on-a-Chip to investigate the progression mechanisms of non-alcoholic fatty liver diseases
        Grant-in-Aid for Scientific Research (B)
        Basic Section 27040:Biofunction and bioprocess engineering-related
        Kyoto University
        亀井 謙一郎
        From 01 Apr. 2021, To 31 Mar. 2024, Granted
        非アルコール性脂肪肝疾患;ヒト多能性幹細胞;オルガノイド;多組織チップ;組織チップ;マイクロ流体デバイス;センサ
      • 生体リズムを模倣する体内循環システム集積型「ボディ・オン・チップ」の開発
        Grant-in-Aid for Scientific Research (B)
        Basic Section 28050:Nano/micro-systems-related
        Kyoto University
        平井 義和
        From 01 Apr. 2019, To 31 Mar. 2022, Granted
        Body on a Chip;微細加工;マイクロ流体デバイス;設計工学;圧力センサ;組織チップ;グレースケールリソグラフィ
      • Japanese-German Joint Research on Real Time Monitoring Technology of Cellular Metabolism in Vitro Model Device
        Fund for the Promotion of Joint International Research (Fostering Joint International Research (B))
        Medium-sized Section 90:Biomedical engineering and related fields
        Kyoto University of Advanced Science;Kyoto University
        田畑 修
        From 09 Oct. 2018, To 31 Mar. 2022, Granted
        生体外モデルデバイス;細胞代謝;リアルタイムモニタリング;生体外モデル;メタボリックシンドローム;Analytic BoC;リアルタイム計測;磁気共鳴イメージング
      • Development of a method for simultaneous recordings of single channel dynamics and currents
        Grant-in-Aid for Scientific Research (B)
        Basic Section 48020:Physiology-related
        University of Fukui
        Hirofumi Shimizu
        From 01 Apr. 2018, To 31 Mar. 2021, Project Closed
        1分子計測;蛋白質;X線回折;X線回折
      • Advanced 3D tissue engineering with microfluidic technology
        Grant-in-Aid for Scientific Research (B)
        Kyoto University
        Ken-ichiro Kamei
        From 01 Apr. 2017, To 31 Mar. 2020, Project Closed
        多能性幹細胞;マイクロ流体デバイス;オルガノイド;肝臓;分化;組織工学;幹細胞;血管網
      • Develoepment of Microfabricated Vapor Cells Fabrication for High-Performance Chip Scale Atomic Devices
        Grant-in-Aid for Young Scientists (B)
        Kyoto University
        Yoshikazu HIRAI
        From 01 Apr. 2016, To 31 Mar. 2018, Project Closed
        ナノマイクロ加工;原子時計;原子磁気センサ;CPT共鳴;三次元微細加工;ガスセル;MEMS;アルカリ金属;計測工学;マイクロ・ナノデバイス;先端機能デバイス;応用光学・量子光工学
      • Body on a Chip as an in-vitro model of endangered animals
        Grant-in-Aid for Challenging Exploratory Research
        Kyoto University
        Ken-ichiro Kamei
        From 01 Apr. 2016, To 31 Mar. 2018, Project Closed
        Body on a Chip;iPS細胞;マイクロ流体デバイス;絶滅危惧種;動物保全;リプログラミング;分化;マイクロ・ナノデバイス;動物;細胞・組織;獣医学
      • Development of a method for simultaneous recordings of single channel dynamics and currents
        Grant-in-Aid for Scientific Research (B)
        University of Fukui
        Hirofumi Shimizu
        From 01 Apr. 2015, To 31 Mar. 2018, Project Closed
        1分子計測;蛋白質;X線回折;イオンチャネル;タンパク質;X線;1分子計測(SMD);マイクロ・ナノデバイス;X線
      • Development of the DXT method by Photolithography
        Grant-in-Aid for Challenging Exploratory Research
        University of Fukui
        Hirofumi SHIMIZU
        From 01 Apr. 2013, To 31 Mar. 2015, Project Closed
        Single molecule;Ion channel protein;dynamics;1分子計測;イオンチャネル;蛋白質;MEMS
      • Fabrication of epoxy-based molecular permeable membrane and analysis of membrane characteristics using coarse-grained molecular dynamics simulation
        Grant-in-Aid for Young Scientists (B)
        Kyoto University
        Yoshikazu HIRAI
        From 01 Apr. 2011, To 31 Mar. 2013, Project Closed
        リソグラフィ;粗視化分子動力学;分子透過膜;フォトレジスト;弾性率;マイクロ・ナノデバイス;高分子構造・物性;シミュレーション工学;マイクロマシン;先端機能デバイス;フィルタ
      • 蛋白質の立体構造にタイムスタンプを付し構造遷移過程の全容を解明する手法の確立
        Grant-in-Aid for Challenging Research (Pioneering)
        Medium-sized Section 48:Biomedical structure and function and related fields
        University of Fukui
        清水 啓史
        From 30 Jun. 2022, To 31 Mar. 2025, Granted
        1分子計測;蛋白質;X線回折;単粒子構造解析

      External funds: others

      • 田中貴金属記念財団・2020年度貴金属に関わる研究助成金
        平井義和
      • 生体外実験モデルの構築に向けた高精度イオン液体型圧力センサ
        荏原畠山記念文化財団・ 2019年度研究助成
        平井義和
      • Flow FISH sorterの開発と革新的がん早期診断への展開
        テルモ生命科学振興財団・2019年度 研究助成(医療機器研究)
        峰晴陽平
      • 3次元微細加工を応用した超小型原子時計用ガスセルのプロセス開発
        村田学術振興財団・平成30年度研究助成
        平井義和
      • 概日リズムをMEMS技術で模倣した革新的「ボディ・オン・チップ」の開発
        京都大学教育研究振興財団・平成30年度研究活動推進助成
        平井義和
      • シリコン3次元微細加工を応用した超高感度原子センサ素子の開発
        京都技術科学センター・平成30年度研究開発助成金
        平井義和
      • 生体適合性材料の成形加工を用いた高感度イオン液体型圧力センサの開発
        御器谷科学技術財団・平成29年度研究助成金
        平井義和
      • IoT社会の実現に向けた高精度チップスケール原子時計の作製技術に関する研究
        日本板硝子材料工学助成会・平成28年度研究助成
        平井義和
      • 「Body on a Chip」を用いた創薬スクリーニングの開発
        テルモ科学技術振興財団・平成24年度特定研究助成
        亀井謙一郎
      • 3次元リソグラフィ用プロセス最適化シミュレータの開発
        平成24年度第2回「研究成果最適展開支援プログラム(A-STEP)」 探索タイプ
        平井義和
      • 紫外線リソグラフィによるエポキシ樹脂系分子フィルタ作製技術の開発
        平成23年度第1回「研究成果最適展開支援プログラム(A-STEP)」 探索タイプ
        平井義和
      list
        Last Updated :2022/09/30

        Education

        Teaching subject(s)

        • From 01 Apr. 2022, To 31 Mar. 2023
          Mechanical and System Engineering Laboratory 2
          5057, Fall, Faculty of Engineering, 1
        • From 01 Apr. 2022, To 31 Mar. 2023
          Exercise in Practical Scientific English II
          i046, Fall, Graduate School of Engineering, 1
        • From 01 Apr. 2022, To 31 Mar. 2023
          Professional Scientific Presentation Exercises
          i041, Year-long, Graduate School of Engineering, 1
        • From 01 Apr. 2022, To 31 Mar. 2023
          Exercise on Project Management in Engineering
          i059, Fall, Graduate School of Engineering, 2
        • From 01 Apr. 2022, To 31 Mar. 2023
          Exercise in Practical Scientific English I
          i045, Spring, Graduate School of Engineering, 1
        • From 01 Apr. 2022, To 31 Mar. 2023
          Mechanical and System Engineering Laboratory 2
          5057, Spring, Faculty of Engineering, 1
        • From 01 Apr. 2022, To 31 Mar. 2023
          Global Leadership Seminar I (Study for methodology in a company)
          2403, Year-long, Faculty of Engineering, 1
        • From 01 Apr. 2022, To 31 Mar. 2023
          Project Management in Engineering
          i049, Spring, Graduate School of Engineering, 2
        • From Apr. 2014, To Mar. 2015
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2015, To Mar. 2016
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2016, To Mar. 2017
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2016, To Mar. 2017
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2017, To Mar. 2018
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2017, To Mar. 2018
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2018, To Mar. 2019
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2018, To Mar. 2019
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2019, To Mar. 2020
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2019, To Mar. 2020
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2020, To Mar. 2021
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2020, To Mar. 2021
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部
        • From Apr. 2021, To Mar. 2022
          Mechanical and System Engineering Laboratory 2
          Spring, 工学部
        • From Apr. 2021, To Mar. 2022
          Mechanical and System Engineering Laboratory 2
          Fall, 工学部

        Student achievements: Awards

        • 優秀論文発表賞
          宮崎貴史, 電気学会, 01 Apr. 2021
        • 奨励賞
          宮崎貴史, 電気学会E部門大会, 27 Oct. 2020
        • 研究奨励賞
          木元雄一, エレクトロニクス実装学会, 27 Jun. 2019
        • Outstanding Paper Award Finalists
          山内一慶, Transducers2019, 12 Sep. 2019
        • 優秀発表賞
          山内一慶, 化学とマイクロ・ナノシステム学会, 28 May 2019
        • 優秀論文発表賞
          Jiaxu Wu, 電気学会, 01 Apr. 2019
        • 奨励賞
          Jiaxu Wu, 電気学会E部門大会, 01 Nov. 2018
        • 奨励賞
          楊建東, 電気学会E部門大会, 11 Nov. 2021
        list
          Last Updated :2022/09/30

          Administration

          Faculty management (title, position)

          • From 01 Apr. 2021, To 31 Mar. 2023
            桂事業場環境安全衛生委員会 委員
          list
            Last Updated :2022/09/30

            Academic, Social Contribution

            Committee Memberships

            • From Jun. 2020, To May 2022
              -, -
            • From Mar. 2021, To Present
              Editorial Board Members, Sensors and Actuators Reports
            • From Mar. 2019, To Present
              Associate Editor, IEEE Transactions on Nanotechnology
            • From 2017, To 2019
              -, -
            • From Jun. 2016, To May 2018
              -, -
            • From 2014, To 2017
              -, -
            • From 2014, To 2017
              -, -
            • From 2014, To 2017
              -, -

            Academic Contribution

            • Journal of Bionic Engineering
              Peer review
              -
            • Lasers in Manufacturing and Materials Processing
              Peer review
              -
            • Materials & Design
              Peer review
              -
            • International Journal for Light and Electron Optics
              Peer review
              -
            • Transactions of the JSME (in Japanese)
              Peer review
              -
            • IEEJ Transactions on Sensors and Micromachines (in Japanese)
              Peer review
              -
            • Japanese Journal of Applied Physics
              Peer review
              -
            • Applied Physics Express
              Peer review
              -
            • Microsystem Technologies
              Peer review
              -
            • Analyst
              Peer review
              -
            • Optics Express
              Peer review
              -
            • Sensors and Actuators B: Chemical
              Peer review
              -
            • Sensors and Actuators A: Physical
              Peer review
              -
            • Journal of Micromechanics and Microengineering
              Peer review
              -
            • Journal of Microelectromechanical Systems
              Peer review
              IEEE
            • ACS Omega
              Peer review

            Social Contribution

            • 文部科学省 科学技術・学術政策研究所
              Investigator
              From 16 Jul. 2013, To Present

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