Hirai, Yoshikazu(Graduate School of Engineering) | Activity Database on Education and Research, Kyoto University

Hirai, Yoshikazu

Graduate School of Engineering Senior Lecturer/ Junior Associate Professor

Last Updated :2025/05/27

Basic Information

Faculty

Faculty of Engineering

Faculty of Engineering

Professional Memberships

From May 2023, To Present
量子生命科学会

THE SOCIETY FOR CHEMISTRY AND MICRO-NANO SYSTEMS

THE JAPAN INSTITUTE OF ELECTRONICS PACKAGING

THE MATERIALS RESEARCH SOCIETY

IEEE

THE JAPAN SOCIETY OF MECHANICAL ENGINEERS

THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN

応用物理学会

Academic Degree

修士（工学）(立命館大学)

博士（工学）(京都大学)

Academic Resume (Graduate Schools)

立命館大学, 大学院理工学研究科物質理工学専攻博士前期課程, 修了

京都大学, 大学院工学研究科博士後期課程機械工学専攻, 修了

Research History

From Sep. 2021, To Present
Kyoto University, Graduate School of Engineering Department of Mechanical Engineering and Science, 講師

From May 2013, To Aug. 2021
Kyoto University, Graduate School of Engineering Department of Micro Engineering, 助教

From Aug. 2014, To Mar. 2017
Kyoto University, 物質－細胞統合システム拠点, 連携助教

From Apr. 2010, To Apr. 2013
Kyoto University, 学際融合教育研究推進センター, 特定助教

From Apr. 2009, To Mar. 2010
Kyoto University, 先端医工学研究ユニット, 特定助教

From Apr. 2007, To Mar. 2009
Kyoto University, Graduate School of Engineering, 博士研究員

From Apr. 2022, To Mar. 2023
Kyoto University, 高等研究院物質－細胞統合システム拠点, 連携講師

From Sep. 2021, To Present
京都大学大学院工学研究科, 附属工学基盤教育研究センター, 講師

ID,URL

ORCID ID
0000-0003-0835-7314
J-Global ID
201401019137106834
Researcher ID
G-8730-2011
Researcher number
40452271
External link
https://mdde.me.kyoto-u.ac.jp

Website(s) (URL(s))

https://mdde.me.kyoto-u.ac.jp

researchmap URL

https://researchmap.jp/7000008799

Last Updated :2025/05/27

Research

Research Topics, Overview of the research

Research Topics
小さな新機能デバイス：未知のしくみを最先端のナノマイクロデバイス技術と理論で科学する
Overview of the research
My current research interests include (1) Fabrication and Packaging for Generic MEMS/NEMS, (2) Optical lithography for 3-Dimensional microstructuring, (3) Atomic MEMS device (e.g., CSAC: Chip Scale Atomic Clock, CSAM: Chip Scale Atomic Magnetometer), (4) Microfluidics, and (5) Bio-Microsystems for in vitro measurement (e.g., Organ/Body on a Chip).

Research Interests

１分子科学

ナノマイクロ生体システム

ナノマイクロバイオシステム

ナノマイクロセンサ

MEMS／NEMS

ナノマイクロ加工

Research Areas

Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Measurement engineering

Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Applied biofunctional and bioprocess engineering

Manufacturing technology (mechanical, electrical/electronic, chemical engineering), Design engineering

Nanotechnology/Materials, Nanobioscience

Nanotechnology/Materials, Nano/micro-systems

Papers

Microfluidics-guided fluorescent nanodiamond assembly method for highly sensitive thermometry
Keita Saikawa; Masaya Zetsu; Daiki Ueshima; Taiichi Shikama; Ken-ichiro Kamei; Osamu Tabata; Yoshikazu Hirai
Sensors and Actuators A: Physical, May 2025
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Casimir-Lifshitz Force Dominated Minimum Spacing of Single Crystal Silicon Cleavage Plane Nanogap
Shimofuri Masaki; Hirai Yoshikazu; Tsuchiya Toshiyuki
JSAP Annual Meetings Extended Abstracts, 26 Feb. 2021

Measurement of Field-Assisted Thermal Electron Tunneling between Single Crystal Silicon Cleavage Plane Nanogap
SHIMOFURI Masaki; YOSHIMURA Koki; BUN Kazuhiko; HIRAI Yoshikazu; BANERJEE Amit; TSUCHIYA Toshiyuki
The Proceedings of Mechanical Engineering Congress, Japan, 2021

Heat Transfer Measurement between Nanogap with Single Crystal Silicon (111) Cleavage Plane
Shimofuri Masaki; Hirai Yoshikazu; Tsuchiya Toshiyuki
JSAP Annual Meetings Extended Abstracts, 26 Aug. 2020

Device fabrication for measuring thermionic emission between vacuum nanogaps created by cleavage fracture of single crystal silicon
YOSHIMURA Koki; BUN Kazuhiko; SHIMOFURI Masaki; HIRAI Yoshikazu; TSUCHIYA Toshiyuki
The Proceedings of Mechanical Engineering Congress, Japan, 2020

Fabrication of nanogap by cleavage of single-crystal silicon in vacuum and measurement of field emission between its clean fracture surfaces
BUN Kazuhiko; SHIMOFURI Masaki; HIRAI Yoshikazu; TSUCHIYA Toshiyuki
The Proceedings of Mechanical Engineering Congress, Japan, 2020

Measurement of gap distance dependence on thermal transfer between nanogap created by single crystal silicon cleavage using MEMS electrostatic actuator
SHIMOFURI Masaki; HIRAI Yoshikazu; TSUCHIYA Toshiyuki
The Proceedings of Mechanical Engineering Congress, Japan, 2020

Measurement of Near-field Heat Radiative Transfer Between Nanogap With Single Crystal Silicon Cleavage Planes
Shimofuri Masaki; Hirai Yoshikazu; Tsuchiya Toshiyuki; Tabata Osamu
JSAP Annual Meetings Extended Abstracts, 04 Sep. 2019

Cleavage fracture fabricated nanogap device in SEM for gap control and current measurement
BUN Kazuhiko; SHIMOFURI Masaki; Banerjee Amit; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
The Proceedings of Mechanical Engineering Congress, Japan, 2019

Spacing-controlling MEMS device for evaluating heat transfer between nanogap
Shimofuri Masaki; Hirai Yoshikazu; Tsuchiya Toshiyuki; Tabata Osamu
The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019

Measurement of temperature difference between cleavage plane nanogap using microscopic Raman spectroscopy
SHIMOFURI Masaki; MORI Yasuaki; Banerjee Amit; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
The Proceedings of Mechanical Engineering Congress, Japan, 2018

Gravity and Film Stress Analysis for Mems Deformable Mirror with Electrostatic Piston Array
Toshiyuki Tsuchiya; Toshiki Ema; Yoshikazu Hirai; Christopher Welham; Hideyuki Maekoba
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, 20 Jun. 2021

Microfabrication of Alkali Vapor Cells with Lower the Outgassing and Temperature Utilizing Silicon 3D Structure
Katsuo Nakamura; Yuichi Kimoto; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 01 Jan. 2019

Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device
Masaki Shimofuri; Amit Banerjee; Jun Hirotani; Yoshikazu Hirai; Toshiyuki Tsuchiya
Journal of Microelectromechanical Systems, Feb. 2023, Peer-reviewed
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Microchannel Fabrication Using A Photo-Patternable Adhesive Material for Recording Conformational Changes of KcsA Channel with the Diffracted X-ray Tracking Method
Yoshikazu Hirai; Yasuaki Mori; Tomoki Tabuchi; Hirofumi Shimizu; Toshiyuki Tsuchiya; Osamu Tabata
Proceedings, Dec. 2018

Microfabrication of Embedding a Flexible Parylene-Based Microelectrode Array within Body-on-a-Chip
Yoshikazu Hirai
Proceedings, Aug. 2017
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Multilayered Microfluidic Device for Controllable Flow Perfusion of Gut-Liver on a Chip
Jiandong Yang; Satoshi Imamura; Yoshikazu Hirai; Ken Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, 20 Jun. 2021

Highly Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip
Takashi Miyazaki; Jiandong Yang; Satoshi Imamura; Yoshikazu Hirai; Ken Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 25 Jan. 2021

Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire
Tomoya Nakamura; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan. 2020
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Heart-liver on a chip integrated with a microelectrode array to monitor extracellular field potentials of cardiomyocytes
Dongxiao Zhang; Yoshikazu Hirai; Ken Ichiro Kamei; Osamu Tabata; Toshiyuki Tsuchiya
MicroTAS 2020 - 24th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 2020

Integrated gut-liver on a chip for modelling non-alcoholic fatty liver disease in vitro
Jiandong Yang; Yoshikazu Hirai; Ken Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2019, 2019

Fluidic-capacitor integrated microfluidic platform to mimic heart beating for generation of functional liver organoids
Jiaxu Wu; Yoshikazu Hirai; Ken Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018, 2018

Microfabrication of polydimethylsiloxane-parylene hybrid microelectrode array integrated into a multi-organ-on-a-chip
Dongxiao Zhang; Jiandong Yang; Yoshikazu Hirai; Ken-ichiro Kamei; Osamu Tabata; Toshiyuki Tsuchiya
Japanese Journal of Applied Physics, Jan. 2023, Peer-reviewed
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高精度な経上皮電気抵抗計測のためのトポロジー最適化による電極設計
合田晴紀; 石田尚之; 古田幸三; 泉井一浩; Fred van Keulen; 亀井謙一郎; 土屋智由; 田畑修; 平井義和
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], Nov. 2022

Integrated-gut-liver-on-a-chip platform as an in vitro human model of non-alcoholic fatty liver disease.
Jiandong Yang; Yoshikazu Hirai; Kei Iida; Shinji Ito; Marika Trumm; Shiho Terada; Risako Sakai; Toshiyuki Tsuchiya; Osamu Tabata; Ken-Ichiro Kamei
Communications biology, 23 Mar. 2023, Peer-reviewed
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Force measurement using integrated shear strain gauge in parallel tensile testing for single crystal silicon
YASUDA Kanji; UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
The Proceedings of Mechanical Engineering Congress, Japan, 2017

Effect of Deposition Voltage on Tensile Properties of Single Crystal Silicon Microstructure Fully Coated by Plasma CVD DLC Film
ZHANG Wenlei; UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
The Proceedings of Mechanical Engineering Congress, Japan, 2017

Parallel Tensile Testing Device with Integrated Shear Strain Gauge for Single Crystal Silicon Micro Structure
YASUDA Kanji; UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
The Proceedings of Mechanical Engineering Congress, Japan, 2016

Tensile testing of Si microstructures fully coated with submicrometer-thick DLC film deposited using PECVD
ZHANG Wenlei; UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
The Proceedings of Mechanical Engineering Congress, Japan, 2016

Effect of tensile orientation on slip and fracture of (110) silicon at high temperature
UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
The Proceedings of Mechanical Engineering Congress, Japan, 2016

Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon
Yuanlin Xia; Makoto Suzuki; Peidong Xue; Yoshikazu Hirai; Toshiyuki Tsuchiya
International Journal of Fatigue, Sep. 2022
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Effect of alternating a-C:H multilayer full coating on fracture behavior of single-crystal silicon-based microstructure in tensile and toughness tests
Yuanlin Xia; Yoshikazu Hirai; Toshiyuki Tsuchiya
Materials Science and Engineering: A, Oct. 2021

Gut-liver-axis microphysiological system for studying cellular fluidic shear stress and inter-tissue interaction
Jiandong Yang; Satoshi Imamura; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata; Ken-ichiro Kamei
Biomicrofluidics, Jul. 2022, Peer-reviewed

Microfabricated alkali metal vapor cells filled with an on-chip dispensing component
Shun Kiyose; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
Japanese Journal of Applied Physics, 01 Jun. 2021, Peer-reviewed

Design strategy of electrode patterns based on finite element analysis in microfluidic device for Trans‐Epithelial Electrical Resistance (TEER) measurement
Takashi Miyazaki; Yoshikazu Hirai; Ken‐ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
Electronics and Communications in Japan, Jun. 2021, Peer-reviewed

経上皮電気抵抗測定の高精度化に向けたOrgan-on-a-Chipの設計法
宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）, 2021, Peer-reviewed

Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded a-C:H film
Yuanlin Xia; Yoshikazu Hirai; Toshiyuki Tsuchiya
SURFACE & COATINGS TECHNOLOGY, Jan. 2021, Peer-reviewed
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Design Strategy of Electrode Patterns Based on Finite Element Analysis in Microfluidic Device for Trans-Epithelial Electrical Resistance (TEER) Measurement
Takashi Miyazaki; Yoshikazu Hirai; Ken-ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
IEEJ Transactions on Sensors and Micromachines, 01 Oct. 2020, Peer-reviewed

Recapitulation of Human Embryonic Heartbeat to Promote Differentiation of Hepatic Endoderm to Hepatoblasts
Koki Yoshimoto; Nicolas Minier; Jiandong Yang; Satoshi Imamura; Kaylene Stocking; Janmesh Patel; Shiho Terada; Yoshikazu Hirai; Ken-ichiro Kamei
Frontiers in Bioengineering and Biotechnology, 08 Sep. 2020, Peer-reviewed

Surface-enhanced Raman spectroscopy with gold nanoparticle dimers created by sacrificial DNA origami technique
Naoki Yamashita; Seongsu Park; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
MICRO & NANO LETTERS, May 2020, Peer-reviewed

Novel microfluidic device integrated with a fluidic-capacitor to mimic heart beating for generation of functional liver organoids
Wu, J.; Hirai, Y.; Kamei, K.-I.; Tsuchiya, T.; Tabata, O.
Electronics and Communications in Japan, Oct. 2019, Peer-reviewed

Novel Microfluidic Device Integrated with a Fluidic-Capacitor to Mimic Heart Beating for Generation of Functional Liver Organoids
Wu Jiaxu; Hirai Yoshikazu; Kamei Ken-ichiro; Tsuchiya Toshiyuki; Tabata Osamu
IEEJ Transactions on Sensors and Micromachines, Jul. 2019, Peer-reviewed

Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope
Shu, Y.; Hirai, Y.; Tsuchiya, T.; Tabata, O.
Japanese Journal of Applied Physics, Jun. 2019, Peer-reviewed

Specific Binding of DNA Origami on a Nanoscale Pattern Formed by AFM Lithography
山下直輝; Park Seongsu; Ma Zhipeng; Ma Zhipeng; 川合健太郎; 平井義和; 土屋智由; 田畑修; 田畑修
電気学会論文誌 E, May 2019, Peer-reviewed

Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film
Wenlei Zhang; Kazutaka Obitani; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
SENSORS AND ACTUATORS A-PHYSICAL, Feb. 2019, Peer-reviewed

顕微ラマン分光を用いた単結晶シリコンへき開ナノギャップ間の温度差測定
霜降真希; 平井義和; 土屋智由; 田畑修
実験力学, Jan. 2019, Peer-reviewed

単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測
土屋智由; 鈴木淳也; 片岡達哉; 平井義和; 菅野公二; 田畑修
実験力学, Jan. 2019, Peer-reviewed

A microfluidic device to investigate the effect of shear stress on metastasis
UEDA Keita; HAGIHARA Takeshi; HIRAI Yoshikazu; KONDO Jumpei; INOUE Masahiro; TSUCHIYA Toshiyuki; KAMEI Ken-ichiro; TABATA Osamu
The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019

Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges
Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
SENSORS AND MATERIALS, Sep. 2018, Peer-reviewed

Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array
Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi), 01 Jul. 2018, Peer-reviewed

Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film
Wenlei Zhang; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
Applied Surface Science, 15 Jun. 2018, Peer-reviewed

Tensile strength of Silicon Nanowires batch-fabricated into electrostatic MEMS testing device
Toshiyuki Tsuchiya; Tetsuya Hemmi; Jun-Ya Suzuki; Yoshikazu Hirai; Osamu Tabata
Applied Sciences (Switzerland), 28 May 2018, Peer-reviewed
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A heuristic approach for actuator layout designs in deformable mirror devices based on current value optimization
Yuto Yamaki; Yuki Sato; Kazuhiro Izui; Takayuki Yamada; Shinji Nishiwaki; Yoshikazu Hirai; Osamu Tabata
Structural and Multidisciplinary Optimization, 23 Mar. 2018, Peer-reviewed

High-yield bridged assembly of ssDNA-modified SWCNT using dielectrophoresis
Shiomi, Y.; Hirai, Y.; Tabata, O.; Tsuchiya, T.
International Journal of Automation Technology, 05 Jan. 2018, Peer-reviewed

Rhombic-Shaped Nanostructures and Mechanical Properties of 2D DNA Origami Constructed with Different Crossover/Nick Designs
Zhipeng Ma; Yunfei Huang; Seongsu Park; Kentaro Kawai; Do-Nyun Kim; Yoshikazu Hirai; Toshiyuki Tsuchiya; Hirofumi Yamada; Osamu Tabata
Small, 04 Jan. 2018, Peer-reviewed

Mathematical modeling and analysis of MEMS deformable mirror actuated by electrostatic piston array
Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
IEEJ Transactions on Sensors and Micromachines, 2018, Peer-reviewed

Revealing the influential factor on dimerizing of triangular DNA origami by linker
Tatsuya Inagaki; Seongsu Park; Naoki Yamashita; Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
IEEJ Transactions on Sensors and Micromachines, 2018, Peer-reviewed

Fabrication of ionic liquid-based pressure sensor with high sensitivity utilizing three-dimensional lithography and its characterization
TSUJI Yusuke; HIRAI Yoshikazu; KAMEI Ken-ichiro; TSUCHIYA Toshiyuki; TABATA Osamu
The Proceedings of the Symposium on Micro-Nano Science and Technology, 2018

Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique
Naoki Yamashita; Zhipeng Ma; Seongsu Park; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
MICRO & NANO LETTERS, Nov. 2017, Peer-reviewed

Cutting Edge of MEMS Research and Development in 2017
Yoshikazu HIRAI
Journal of The Surface Finishing Society of Japan, 01 Jul. 2017, Peer-reviewed

Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design
Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed

Measurement and potential barrier evolution analysis of cold field emission in fracture fabricated Si nanogap
Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed

Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method
Wenlei Zhang; Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
Japanese Journal of Applied Physics, 01 Jun. 2017, Peer-reviewed

Integrated heart/cancer on a chip to reproduce the side effects of anti-cancer drugs in vitro
Ken-ichiro Kamei; Yoshiki Kato; Yoshikazu Hirai; Shinji Ito; Junko Satoh; Atsuko Oka; Toshiyuki Tsuchiya; Yong Chen; Osamu Tabata
RSC ADVANCES, 2017, Peer-reviewed
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抗がん剤の副作用を再現する生体外ヒトモデル Body on a Chi
亀井謙一郎; 平井義和; 加藤義基; 土屋智由; 田畑修
バイオエンジニアリング講演会講演論文集, 2017

Sensitivity characterization of pressure sensor using ionic liquid by finite element analysis
TSUJI Yusuke; NAKANO Yu; HIRAI Yoshikazu; KAMEI Ken-ichiro; TSUCHIYA Toshiyuki; TABATA Osamu
The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017

Characterization of alkali-metal vapor cells fabricated with an alkali-metal source tablet
Kazuhiro Ban; Yoshikazu Hirai; Kazuya Tsujimoto; Akira Terao; Natsuhiko Mizutani; Tetsuo Kobayashi; Osamu Tabata
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, Nov. 2016, Peer-reviewed

Investigation of the Self-Assembly Process for Discrete and Polymerized Bivalve DNA Origami Structures
Zhipeng Ma; Seongsu Park; Naoki Yamashita; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, Jun. 2016, Peer-reviewed

Constructing higher order DNA origami arrays using DNA junctions of anti-parallel/parallel double crossovers
Zhipeng Ma; Seongsu Park; Naoki Yamashita; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2016, Peer-reviewed

培養細胞を用いたスクリーニング系の構築、毒性評価抗がん剤副作用を再現する生体外モデルBody on a Chipの開発
亀井謙一郎; 平井義和; 加藤義基; 土屋智由; 田畑修
組織培養研究, Mar. 2016

Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper
Toshiyuki Tsuchiya; Yusuke Kogita; Akira Taniyama; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Feb. 2016, Peer-reviewed

Development of a Body-on-a-Chip Using 3-D Microstructuring Technique
Yoshiki Kato; Yoshikazu Hirai; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
IEEJ Transactions on Sensors and Micromachines, 2016, Peer-reviewed

Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers
Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
MICRO & NANO LETTERS, Dec. 2015, Peer-reviewed
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Experimental Study of Numerical Optimization for 3-D Microstructuring Using DMD-Based Grayscale Lithography
Xiaoxu Ma; Yoshiki Kato; Floris van Kempen; Yoshikazu Hirai; Toshiyuki Tsuchiya; Fred van Keulen; Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Dec. 2015, Peer-reviewed

Direct measurement of transversely isotropic DNA nanotube by force-distance curve-based atomic force microscopy
Zhipeng Ma; Young-Joo Kim; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Do-Nyun Kim; Osamu Tabata
Micro & Nano Letters, Oct. 2015, Peer-reviewed
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ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis
Yoshikazu Hirai; Daisuke Takagi; Satoshi Anai; Yoshitomo Chihara; Toshiyuki Tsuchiya; Kiyohide Fujimoto; Yoshihiko Hirao; Osamu Tabata
SENSORS AND ACTUATORS B-CHEMICAL, Jul. 2015, Peer-reviewed

High-temperature tensile testing machine for investigation of brittle-ductile transition behavior of single crystal silicon microstructure
Akio Uesugi; Takahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
JAPANESE JOURNAL OF APPLIED PHYSICS, Jun. 2015, Peer-reviewed

Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers
Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, Mar. 2014, Peer-reviewed
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On-chip fabrication of alkali-metal vapor cells utilizing an alkali-metal source tablet
K. Tsujimoto; K. Ban; Y. Hirai; K. Sugano; T. Tsuchiya; N. Mizutani; O. Tabata
Journal of Micromechanics and Microengineering, Nov. 2013, Peer-reviewed

Molecular Level Study of Negative Thick-Film Resist in MEMS by Employing a Coarse-Grained Molecular Dynamics Simulation
HIRAI Yoshikazu; YAGYU Hiromasa; MAKINO Yoshihide; UESUGI Akio; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
The Journal of the Institute of Electrical Engineers of Japan, Aug. 2013, Peer-reviewed

Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
Electronics and Communications in Japan, May 2013, Peer-reviewed

Phenotypic and Transcriptional Modulation of Human Pluripotent Stem Cells Induced by Nano/Microfabrication Materials
Ken-Ichiro Kamei; Yoshikazu Hirai; Momoko Yoshioka; Yoshihide Makino; Qinghua Yuan; Minako Nakajima; Yong Chen; Osamu Tabata
Advanced Healthcare Materials, Feb. 2013, Peer-reviewed

（110）単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響
Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, Jan. 2013, Peer-reviewed

Body on a chip: Re-creation of a living system in vitro
Ken-Ichiro Kamei; Yoshikazu Hirai; Osamu Tabata
IEEE Nanotechnology Magazine, 2013, Peer-reviewed

Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics
Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
POLYMER, Sep. 2012, Peer-reviewed

Mechanical and electrical clamping of DEP assembled SWCNT using electroless gold deposition
Tatsuya Kataoka; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed

Tensile test on (110) <110> thin film single crystal silicon with different processing conditions
Akio Uesugi; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
IEEJ Transactions on Sensors and Micromachines, 2012, Peer-reviewed

Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
Kazuya Tsujimoto; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
IEEJ Transactions on Sensors and Micromachines, 2011, Peer-reviewed

Embedded Microstructure Fabrication Using Developer-Permeability of Semi-Cross-Linked Negative Resist
Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Oct. 2010, Peer-reviewed
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Component Modeling of 2DOF Comb Transducer for Equivalent Circuit Using Built-in Displacement Detection
TOKUSAKI Hiroyuki; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
The Journal of the Institute of Electrical Engineers of Japan, Sep. 2010, Peer-reviewed

A three-dimensional microstructuring technique exploiting the positive photoresist property
Hirai, Y.; Sugano, K.; Tsuchiya, T.; Tabata, O.
Journal of Micromechanics and Microengineering, Jun. 2010, Peer-reviewed
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Moving mask UV lithography for three-dimensional structuring
Yoshikazu Hirai; Yoshiteru Inamoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Feb. 2007, Peer-reviewed
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Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithography
Y Hirai; S Hafizovic; N Matsuzuka; JG Korvink; O Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Feb. 2006, Peer-reviewed
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A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D2XRL)
Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata
Journal of Micromechanics and Microengineering, 01 Nov. 2005, Peer-reviewed
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Process Simulation System for 3D X-Ray Lithography and Development
平井義和; Hafizovic Sadik; Jan G. Korvink; 田畑修
電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）, Sep. 2003, Peer-reviewed

Misc.

Simultaneous optimization of electric current and layout of actuators for shape control
佐藤勇気; 八巻侑外; 泉井一浩; 山田崇恭; 西脇眞二; 平井義和; 田畑修
日本機械学会最適化シンポジウム(CD-ROM), 2018

Fluorescence spectrum measurement of NV center in a microfluidic device
舌雅也; 渡辺嵩都; 四竈泰一; 亀井謙一郎; 土屋智由; 田畑修; 平井義和
応用物理学会秋季学術講演会講演予稿集(CD-ROM), 2022

光ポンピング原子磁気センサによる微小磁気計測 III-グラディオメータ型での計測-
市原直; 田上周路; 柏井茂達; 石川潔; 石川潔; 杉岡秀行; 水谷夏彦; 平井義和; 田畑修; 小林哲生
応用物理学関係連合講演会講演予稿集, 2008

光ポンピング原子磁気センサによる微小磁気計測 II-マグネトメータ型での計測-
田上周路; 市原直; 柏井茂達; 石川潔; 石川潔; 杉岡秀行; 水谷夏彦; 平井義和; 田畑修; 小林哲生
応用物理学関係連合講演会講演予稿集, 2008

光ポンピング原子磁気センサによる微小磁気計測 I-磁気光学回転角の基礎的検討-
柏井茂達; 田上周路; 市原直; 石川潔; 石川潔; 杉岡秀行; 水谷夏彦; 平井義和; 田畑修; 小林哲生
応用物理学関係連合講演会講演予稿集, 2008

2201 Process Parameters Determination with Numerical Approach on Double Exposure Deep X-ray Lithography
Hirai Yoshikazu; Matsuzuka Naoki; Tabata Osamu
Conference on Information, Intelligence and Precision Equipment : IIP, 21 Mar. 2005

Molecular Detection by Surface-Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimers Formed by Sacrificial DNA Origami Technique
山下直輝; PARK Seongsu; 川合健太郎; 平井義和; 土屋智由; 田畑修
センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 2019

心臓拍動を模倣した圧力刺激印加による肝オルガノイド成熟化を目指すマイクロ流体デバイス
三浦大知; 平井義和; 亀井謙一郎; 土屋智由
化学とマイクロ・ナノシステム学会研究会講演要旨集, 2021

OS1418-467 Dynamic stress measurement of single crystal silicon microstructures using micro Raman spectroscopy
TSUCHIYA Toshiyuki; KOGITA Yusuke; HIRAI Yoshikazu; TABATA Osamu
M&M材料力学カンファレンス, 21 Nov. 2015

731 Sensitivity matrix measurement of MEMS three-axis accelerometer using single-axis shaker
TSUCHIYA Toshiyuki; NAKANO Atsushi; HIRAI Yoshikazu; TABATA Osamu; UMEDA Akira
Dynamics and Design Conference : D & D, 25 Aug. 2015

29pm1-F-2 Integration of Silicon Nanowire to SOI-MEMS and Diameter Control Using Thermal Oxidation
HEMMI Tetsuya; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
マイクロ・ナノ工学シンポジウム, 21 Oct. 2015

29pm3-PN-49 Tensile Fracture Behaviors of (110) Silicon Microstructures at High Temperature
UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
マイクロ・ナノ工学シンポジウム, 21 Oct. 2015

J2210406 Time-resolved micro-Raman stress measurement using electrostatic MEMS optical chopper
TSUCHIYA Toshiyuki; KOGITA Yusuke; HIRAI Yoshikazu; TABATA Osamu
Mechanical Engineering Congress, Japan, 13 Sep. 2015

J2210404 Tensile-Mode Fatigue Testing of Silicon Micro Structure with Integrated Strain Gauge
UESUGI Akio; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
Mechanical Engineering Congress, Japan, 13 Sep. 2015

Sacrificial DNA Origami Technique and its Application to Gold Nanoparticle Dimers with Nanogap
山下直輝; 朴晟洙; 馬志鵬; 川合健太郎; 平井義和; 土屋智由; 田畑修
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017

Rapid molecular sensing based on on-chip size-separation process of DNA origami
Park Seongsu; Ma Zhipeng; Yamashita Naoki; Hirai Yoshikazu; Tsuchiya Toshiyuki; Tabata Osamu
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017

Development of Low X-ray Scattering Chamber for Recording Single-Molecule Conformational Changes of Proteins with the Diffracted X-ray Tracking Method
清水啓史; 田渕友樹; 田原樹生; 岩本真幸; 平井義和; 土屋智由; 田畑修
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], 31 Oct. 2017

Development of Cs Vapor Cell Microfabricated with Porous Alumina Dispenser for Chip-Scale Atomic Clock
寺島健太; 平井義和; 土屋智由; 田畑修
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], 02 Oct. 2016

A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY
松井祐樹; 平井義和; 土屋智由; 田畑修
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015

Development of a Body-on-a-Chip Using 3D Microstructuring Techniques
加藤義基; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], 28 Oct. 2015

Analysis of TEER measurement error depending on electrode patterns using finite element analysis
宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
電気学会全国大会講演論文集(CD-ROM), 2020

非アルコール性脂肪性肝疾患を再現する肝臓-小腸・オン・チップ
亀井謙一郎; 楊建東; 飯田慶; 寺田志穂; 土屋智由; 田畑修; 平井義和
化学とマイクロ・ナノシステム学会研究会講演要旨集, 2020

Design of microelectrode array for transepithelial electrical resistance measurement based on electric current density analysis
宮崎貴史; 平井義和; 亀井謙一郎; 田畑修; 田畑修; 土屋智由
マイクロエレクトロニクスシンポジウム論文集, 2020

Improved Sensitivity of Ionic Liquid-Based Pressure Sensor Embedded in PDMS Microfluidic Devices
辻勇亮; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
マイクロエレクトロニクスシンポジウム論文集, 12 Sep. 2019

Microfabricated Solution Chamber for High Resolution Diffracted X-Ray Tracking Method to Observe Ion-Channel Gating Motion
Ikkei Yamauchi; Tomoki Tabuchi; Yoshikazu Hirai; Masayuki Iwamoto; Toshiyuki Tsuchiya; Hirofumi Shimizu; Osamu Tabata
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 01 Jun. 2019

Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation
Masaki Shimofuri; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 01 Jun. 2019

有限要素解析を用いた経上皮電気抵抗測定マイクロ流体デバイス内電極形状の設計
宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
電気学会全国大会講演論文集(CD-ROM), 2019

PDMS製マイクロ流体デバイスへ実装可能な高感度イオン液体型圧力センサ
辻勇亮; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
マイクロエレクトロニクスシンポジウム論文集, 2019

A microfluidic device to investigate the effect of shear stress on metastasis
植田啓太; 萩原健; 平井義和; 近藤純平; 井上正宏; 土屋智由; 亀井謙一郎; 田畑修
日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2019

Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells
Yoshikazu Hirai; Katsuo Nokamura; Yuichi Kimoto; Toshiyuki Tsuchiya; Osamu Tabata
IFCS 2018 - IEEE International Frequency Control Symposium, 31 Dec. 2018

Vacuum emission in large-area nanogap fabricated by MEMS-controlled cleavage of single crystal silicon
Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
2018 31st International Vacuum Nanoelectronics Conference, IVNC 2018, 01 Nov. 2018

Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
Yunyi Shu; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings, 11 May 2018

Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography
Yoshikazu Hirai; Yusuke Tsuji; Ken-Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 24 Apr. 2018

Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array
Akiko Uno; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 24 Apr. 2018
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Fabrication of microfluidic device with integrated Ag/AgCl electrode for trans-epithelial electrical resistance measurement
宮崎貴史; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
電気学会研究会資料, 2018

3次元リソグラフィを応用したイオン液体型高感度圧力センサの作製と特性評価
辻勇亮; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2018

Microfabrication of Cs-filled MEMS cell using sequential plasma activated bonding
Kenta Terashima; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings, 27 Oct. 2017

Formation of gold nanoparticle dimers on silicon by sacrificial DNA origami technique
Naoki Yamashita; Zhipeng Ma; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata; Kentaro Kawai
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, 25 Aug. 2017

MEMS based fabrication of conformal electrode pairs for thermotunneling cooling
Amit Banerjee; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
IMFEDK 2017 - 2017 International Meeting for Future of Electron Devices, Kansai, 31 Jul. 2017

Thermomechanical noise of arrayed capacitive accelerometers with 300-NM-gap sensing electrodes
Toshiyuki Tsuchiya; Yuki Matsui; Yoshikazu Hirai; Osamu Tabata
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 26 Jul. 2017
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Low temperature, wafer-level process of alkali-metal vapor cells for micro-fabricated atomic clocks
Yoshikazu Hirai; Kenta Terashima; Katsuo Nakamura; Toshiyuki Tsuchiya; Osamu Tabata
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 26 Jul. 2017

Revealing the Influential Factor on Dimerizing of Triangular DNA Origami by Linker
稲垣達也; 朴晟洙; 山下直輝; 馬志鵬; 川合健太郎; 平井義和; 土屋智由; 田畑修
電気学会研究会資料. MSS, 29 Jun. 2017

Tuning porosity and radial mechanical properties of DNA origami nanotubes via crossover design
Zhipeng Ma; Kentaro Kawai; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
Japanese Journal of Applied Physics, 01 Jun. 2017

可変形状ミラーデバイスにおけるアクチュエータ配置最適化のためのヒューリスティクスの提案
八巻侑外; 佐藤勇気; 泉井一浩; 山田崇恭; 西脇眞二; 平井義和; 田畑修
2017年度精密工学会春季大会，精密工学会，2017年3月13日 - 15日，神奈川，設計の方法論（製品，サービス，PSS）, Mar. 2017

TENSILE PROPERITIES OF SINGLE-CRYSTAL-SILICON FULLY COATED WITH SUBMICROMETER-THICK PECVD DLC
Wenlei Zhang; Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017

国際会議報告：EUROSENSORS 2016
平井義和
電学論Ｅ, 2017

心筋細胞外電位測定のためのPDMS埋め込み型電極アレイ
大牧達矢; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
電気学会全国大会講演論文集(CD-ROM), 2017

心筋細胞外電位計測を目指したPDMS埋め込み型電極アレイの作製プロセス
大牧達也; 平井義和; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
化学とマイクロ・ナノシステム学会研究会講演要旨集, 2017

微小圧力計測を目的としたPDMS製イオン液体型圧力センサ
辻勇亮; 中野優; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
化学とマイクロ・ナノシステム学会研究会講演要旨集, 2017

有限要素解析を用いたイオン液体型圧力センサの感度特性評価
辻勇亮; 中野優; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM), 2017

抗がん剤の副作用を再現する生体外ヒトモデルBody on a Chip
亀井謙一郎; 平井義和; 加藤義基; 土屋智由; 田畑修
バイオエンジニアリング講演会講演論文集(CD-ROM), 2017

Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper
Toshiyuki Tsuchiya; Yusuke Kogita; Akira Taniyama; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Feb. 2016

Photoresist Micro-Chamber for the Diffracted X-ray Tracking Method Recording Single-Molecule Conformational Changes
Kio Tahara; Yoshikazu Hirai; Hirohumi Shimizu; Toshiyuki Tsuchiya; Osamu Tabata
PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016, 2016
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MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Akiko Uno; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2016

Simulation study of SU-8 structures realized by single-step projection photolithography
K. Nakamura; Y. Hirai; T. Tsuchiya; O. Tabata; F. Larramendy; O. Paul
2016 IEEE SENSORS, 2016

研究室だより：京都大学大学院田畑・土屋（ナノ・マイクロシステム工学）研究室
平井義和
電学論Ｅ, 2016

抗がん剤副作用を再現する生体外モデルBody on a Chipの開発
亀井謙一郎; 平井義和; 平井義和; 加藤義基; 土屋智由; 田畑修
組織培養研究, 2016

Tensile fracture of integrated single-crystal silicon nanowire using MEMS electrostatic testing device
Toshiyuki Tsuchiya; Tetsuya Hemmi; Jun-ya Suzuki; Yoshikazu Hirai; Osamu Tabata
21ST EUROPEAN CONFERENCE ON FRACTURE, (ECF21), 2016

Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 degrees C of (110) Single Crystal Silicon Microstructures
Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
21ST EUROPEAN CONFERENCE ON FRACTURE, (ECF21), 2016

MEMS3軸加速度センサのマトリックス感度並列計測
土屋智由; 中野篤; 平井義和; 田畑修; 梅田章
第62回応用物理学会春季学術講演会, Mar. 2015

DNAオリガミ架橋構造のシリコン基板への選択的形成
朴晟洙; 馬志鵬; 平井義和; 土屋智由; 田畑修; 森裕都
平成27年電気学会全国大会, Mar. 2015

Optimization methods for 3D lithography process utilizing DMD-based maskless grayscale photolithography system
Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris van Kempen; Fred van Keulen; Toshiyuki Tsuchiya; Osamu Tabata
OPTICAL MICROLITHOGRAPHY XXVIII, 2015

Alkali Metal Source Tablet for Vapor Cells of Atomic Magnetometers
Kazuhiro Ban; Akira Terao; Natsuhiko Mizutani; Kazuya Tsujimoto; Yoshikazu Hirai; Tetsuo Kobayashi; Osamu Tabata
2015 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & THE EUROPEAN FREQUENCY AND TIME FORUM (FCS), 2015

SIZE EFFECT ON BRITTLE-DUCTILE TRANSITION TEMPERATURE OF SILICON BY MEANS OF TENSILE TESTING
A. Uesugi; Y. Hirai; T. Tsuchiya; O. Tabata
2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015

FET PROPERTIES OF SINGLE-WALLED CARBON NANOTUBES INDIVIDUALLY ASSEMBLED UTILIZING SINGLE STRAND DNA
Kosuke Hokazono; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 2015

Direct characterization of radial modulus of DNA nanotube by AFM nanoindentation
Zhipeng Ma; Young-Joo Kim; Seongsu Park; Yoshikazu Hirai; Toshiyuki Tsuchiya; Do-Nyum Kim; Osamu Tabata
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2015

Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography
X. Ma; Y. Kato; F. Kempen; Y. Hirai; T. Tsuchiya; F. Keulen; O. Tabata
EUROSENSORS 2015, 2015
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A SUB-MICRON-GAP SOI CAPACITIVE ACCELEROMETER ARRAY UTILIZING SIZE EFFECT
Y. Matsui; Y. Hirai; T. Tsuchiya; O. Tabata
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015

MICROFLUIDIC DEVICE TO INTERCONNECT MULTIPLE ORGANS VIA FLUIDIC CIRCULATION: TOWARDS BODY-ON-A-CHIP
Y. Kato; Y. Hirai; K. Kamei; T. Tsuchiya; O. Tabata
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015

SELECTIVE ASSEMBLY OF DNA NANOSTRUCTURE BRIDGING ONTO A TRENCHED SILICON SUBSTRATE
Y. Mori; Z. Ma; S. Park; Y. Hirai; T. Tsuchiya; O. Tabata
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015

抗がん剤副作用を生体外で再現するBody on a Chipの開発
亀井謙一郎; 平井義和; 平井義和; 加藤義基; 土屋智由; 田畑修
化学とマイクロ・ナノシステム学会研究会講演要旨集, 2015

灌流システムを搭載した副作用検査デバイス〜ヒトES/iPS由来のBody on a chipを目指して〜
加藤義基; 平井義和; 亀井謙一郎; 土屋智由; 田畑修
細胞アッセイ技術の現状と将来, Jan. 2015

The diffracted X-ray tracking method for recording the single-molecule conformational changes of the KcsA potassium channel in a sub-millisecond time resolution
H. Shimizu; M. Iwamoto; Y. Oota; Yoshikazu Hirai; Osamu Tabata; S. Oiki
The 45th Natl Inst Physiol Sci (NIPS) International Symposium, Nov. 2014

X線1分子動態計測法で用いる低ノイズ観測チャンバの開発
平井義和; 田畑修; 清水啓史
化学とマイクロ・ナノシステム学会第30回研究会, 化学とマイクロ・ナノシステム学会, Oct. 2014

An Optimization Tool for 3D Lithography Utilizing DMD-based Maskless Exposure System
Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris van Kempen; Fred van Keulen; Toshiyuki Tsuchiya; Osamu Tabata
第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014

単結晶シリコンマイクロ構造体の引張応力下における脆性延性遷移
上杉晃生; 平井義和; 土屋智由; 田畑修
第6回「マイクロ・ナノ工学シンポジウム」, Oct. 2014

一本鎖DNAにより孤立アセンブルした単層カーボンナノチューブの電気特性
外薗洸佑; 鈴木淳也; 平井義和; 土屋智由; 田畑修
第6回「集積化 MEMS シンポジウム」, Oct. 2014

Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature
A. Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
The 27th International Microprocesses and Nanotechnology Conference, Fukuoka, Japan (4-7 October, 2014), Oct. 2014

Revealing the radial elastic modulus of multi-layered DNA origami by AFM nanoindentation
Zhipeng Ma; Seongsu Park; Yuto Mori; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
第58回日本学術会議材料工学連合講演会, 日本学術会議材料工学委員会,他関連34学協会, Oct. 2014

J2240303 High-Temperature Tensile Testing of Single Crystal Silicon Micro Structure in Vacuum Using Concentrated Infrared Light Heating
UESUGI Akio; YASUTOMI Takahiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
Mechanical Engineering Congress, Japan, 07 Sep. 2014

多段ICP-RIEプロセスにより一括作製したシリコンナノワイヤのMEMS引張試験
土屋智由; 鈴木淳也; 平井義和; 田畑修
日本機械学会2014年度年次大会,, Sep. 2014

時間分解顕微ラマン分光のための両側静電駆動MEMS光チョッパ
小北雄亮; 谷山彰; 平井義和; 土屋智由; 田畑修
日本機械学会2014年度年次大会, Sep. 2014

赤外集光加熱を用いた単結晶シリコンマイクロ構造体の真空中高温引張試験
上杉晃生; 安富貴浩; 平井義和; 土屋智由; 田畑修
日本機械学会2014年度年次大会, Sep. 2014

MEMS3軸加速度センサの並列校正手法の検討
土屋智由; 中野篤; 平井義和; 田畑修
Dynamics and Design Conference 2014(D&D2014), 日本機械学会, Aug. 2014

エキシマレーザ照射による単結晶シリコンマイクロ構造の表面改質おび引張強度向上
土屋智由; Mohamed E. Mitwally; 平井義和; 田畑修; Sherif Sedky
日本機械学会M&M2014材料力学カンファレンス,, Jul. 2014

An optimization approach for 3D photolithography utilizing DMD maskless exposure system
Xiaoxu Ma; Yoshiki Kato; Yoshikazu Hirai; Floris Kempen; Fred Keulen; Toshiyuki Tsuchiya; Osamu Tabata
The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Jun. 2014

Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C
Akio Uesugi; Takahiro Yasutomi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Jun. 2014

5-アミノレブリン酸による蛍光検出を使った膀胱癌細胞分別マイクロ流体システム
平井義和; 高木大介; 穴井智; 千原良友; 土屋智由; 藤本清秀; 平尾佳彦; 田畑修
平成26年度電気学会センサ・マイクロマシン部門総合研究会(バイオ・マイクロシステム研究会), 電気学会, May 2014

蛍光検知とマイクロ流路を用いた光力学尿細胞診
高木大介; 平井義和; 穴井智; 千原良友; 土屋智由; 藤本清秀; 平尾佳彦; 田畑修
第23回泌尿器科分子・細胞研究会, 泌尿器科分子・細胞研究会, Mar. 2014

Photoresist-Based Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
Yoshikazu Hirai; Daisuke Takagi; Satoshi Anai; Yoshitomo Chihara; Toshiyuki Tsuchiya; Kiyohide Fujimoto; Yoshihiko Hirao; Osamu Tabata
28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014

DOUBLE-SIDE-DRIVE ELECTROSTATIC OPTICAL CHOPPER FOR TIME-RESOLVED RAMAN SPECTROSCOPY
Yusuke Kogita; Yoshikazu Hirai; Osamu Tabata; Toshiyuki Tsuchiya
2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014

LARGE-DISPLACEMENT ELECTROSTATIC DEFORMABLE MIRROR USING MOVABLE BOTTOM ELECTRODES
Toshiyuki Tsuchiya; Vijay Kumar Singh; Yoshikazu Hirai; Osamu Tabata
2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2014

Tensile Testing with Concentrated Infrared Light Heating in Vacuum for Single Crystal Silicon Mechanical Characterization at High Temperature
上杉晃生; 平井義和; 土屋智由; 田畑修
日本実験力学会講演論文集, Jan. 2014

蛍光検出とマイクロ流路を用いた尿中癌細胞分別システム
高木大介; 平井義和; 穴井智; 千原良友; 藤本清秀; 土屋智由; 平尾佳彦; 田畑修
化学とマイクロ・ナノシステム学会第28回研究会, 化学とマイクロ・ナノシステム学会, Dec. 2013

粗視化モデルを用いたMEMS化学増幅型ネガレジストの分子構造依存性解析
成瀬圭介; 柳生裕聖; 平井義和; 土屋智由; 田畑修
第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, Nov. 2013

微細構造体を用いたアルカリ金属の生成反応
藩和宏; 辻本和也; 平井義和; 水谷夏彦; 田畑修
化学工学会第45回秋季大会, 化学工学会, Sep. 2013

(100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性
上杉晃生; 平井義和; 菅野公二; 土屋智由; 田畑修
日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013

多段ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工
鈴木淳也; 平井義和; 菅野公二; 土屋智由; 田畑修
日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013

ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル
外薗洸佑; 鈴木淳也; 平井義和; 菅野公二; 土屋智由; 田畑修
日本機械学会2013年度年次大会, 日本機械学会, Sep. 2013

3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価
中野篤; 平井義和; 菅野公二; 土屋智由; 田畑修
Dynamics and Design Conference 2013(D&D2013), 日本機械学会, Aug. 2013

Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations
Akio Uesugi; Yoshikazu Hirai; Koji Sugan; Toshiyuki Tsuchiya; Osamu Tabata
ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), Jul. 2013

Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography
Y. Kato; Yoshikazu Hirai; F. van Kempen; F. van Keulen; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology, Apr. 2013

節付きBoschプロセスによるシリコン3層構造の作製
北村彰男; 平井義和; 菅野公二; 土屋智由; 田畑修
平成25年電気学会全国大会, Mar. 2013

グレースケールDMD露光用3次元微細加工プロセスシミュレータ
加藤義基; 平井義和; Floris van Kempen; Fred van Keulen; 菅野公二; 土屋智由; 田畑修
平成25年電気学会全国大会, Mar. 2013

Microfluidic Cell Sorter for Photodynamic Urine Diagnosis
Daisuke Takagi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata; Satoshi Anai; Yoshitomo Chihara; Kiyohide Fujimoto; Yoshihiko Hirao
2013 IEEE 7TH INTERNATIONAL CONFERENCE ON NANO/MOLECULAR MEDICINE AND ENGINEERING (NANOMED), 2013

Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table
Atsushi Nakano; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Akira Umeda
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2013, Peer-reviewed

DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY
T. Akishiba; N. Tamura; T. Ichii; Y. Hirai; K. Sugano; T. Tsuchiya; H. Sugimura; O. Tabata
26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 2013, Peer-reviewed

Automatic process design for 3D thick-film grayscale photolithography
F. C.M. Van Kempen; Y. Hirai; F. Van Keulen; O. Tabata
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013

SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection
K. Sugano; H. Katayama; Y. Hirai; T. Tsuchiya; O. Tabata
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013

Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon
A. Uesugi; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013

A MEMS Optical Chopper for Dynamic Stress Measurement of Single Crystalline Silicon Resonator Using Time-Resolved Micro Raman Spectroscopy
小北雄亮; 谷山彰; 平井義和; 土屋智由; 田畑修
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], Jan. 2013

New fabrication method and evaluation of alkali-metal vapor cells for atomic magnetometer
辻本和也; 平井義和; 菅野公二; 土屋智由; 田畑修
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], Jan. 2013

Angular rate sensitivity of SOI capacitive three-axis accelerometer
中野篤; 平井義和; 土屋智由; 田畑修
「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編], Jan. 2013

Dynamic response of pull-in type MEMS optical chopper for time-resolved micro-Raman spectroscopy
谷山彰; 小北雄亮; 平井義和; 菅野公二; 土屋智由; 田畑修
日本実験力学会講演論文集, Jan. 2013, Peer-reviewed

AS-2-9 Atomic MEMSのための新規なアルカリ金属蒸気セル作製手法(AS-2.超小型量子発振器・センサ,シンポジウムセッション)
辻本和也; 平井義和; 菅野公二; 土屋智由; 藩和宏; 水谷夏彦; 田畑修
電子情報通信学会ソサイエティ大会講演論文集, Jan. 2013

Material Characterizations of Negative Photoresist for Bio-MEMS Applications
Yoshikazu Hirai
The 2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012), Oct. 2012, Invited

粗視化分子動力学シミュレーションによる架橋度制御ネガレジストの分子透過係数解析
柳生裕聖; 平井義和; 牧野圭秀; 菅野公二; 土屋智由; 田畑修
第29回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2012

単層カーボンナノチューブの MEMS 引張試験における顕微ラマン分光を用いたひずみ測定
鈴木淳也; 片岡達哉; 平井義和; 菅野公二; 土屋智由; 田畑修
第4回「マイクロ・ナノ工学シンポジウム」, Oct. 2012

702 Evaluation of Effects of Rotational Motion on Vibration Table in Sensitivity Matrix Calibration of 3-axis Accelerometer
NAKANO Atsushi; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu; UMEDA Akira
Dynamics & Design Conference, 18 Sep. 2012

Automated optimization of gray-scale masks for 3D micro-structuring
F. van Kempen; Yoshikazu Hirai; F. van Keulen; Osamu Tabata
The 6th European Congress on Computional Methods in Applied Sciences and Engineering (ECCOMAS 2012), Sep. 2012

Optimization techniques for gray-scale photolithography
F. van Kempen; Yoshikazu Hirai; F. van Keulen; Osamu Tabata
The 9th ASMO UK / ISSMO conference on Engineering Design Optimization Product and Process Improvement, Jul. 2012

Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist
Daimon Matsui; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), Jul. 2012

Fabrication of nanogap electrodes by gold nanorod growth on substrate
NISHINO So; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu; TAKENAKA Yoshiko
電気学会マイクロマシン・センサシステム研究会資料, 11 Jun. 2012

Analysis of aggregation reaction for silver nanoparticle dimers toward highly sensitive SERS
KATAYAMA Hiroshi; SUGANO Koji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
電気学会マイクロマシン・センサシステム研究会資料, 11 Jun. 2012

Evaluation of negative photoresists on phenotypes of human induced pluripotent stem cells (hiPSCs)
K. Kamei; Yoshikazu Hirai; Y. Makino; L. Liu; Q. Yuan; M. Yoshioka; Y. Chen; Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012

Temperature dependency of DNA origami self-assembly rate
C. Huang; T. Akishiba; N. Tamura; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012

Fabrication of nanogap electrodes by gold nanorod growth on substrate
S. Nishino; Y. Takenaka; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012

Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics
H. Yagyu; Yoshikazu Hirai; A. Uesugi; Y. Makino; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012

Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer
T. Kataoka; Yoshikazu Hirai; K. Sugano; Toshiyuki Tsuchiya; Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Mar. 2012

自己変位検出型静電櫛歯等価回路モデルを用いたMEMS振動ジャイロ解析
徳崎裕幸; 平井義和; 菅野公二; 田畑修; 土屋智由
応用物理学会第59回応用物理学関係連合講演会, Mar. 2012

HIGH-SPEED PULSED MIXING WITH HIGH-FREQUENCY SWITCHING OF PUMPING FROM THREE MICROPUMPS
Koji Sugano; Akihiro Nakata; Hideaki Yoshimune; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2, 2012, Peer-reviewed

Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation
Hiromasa Yagyu; Yoshikazu Hirai; Yoshihide Makino; Koji Sugano; Tsuchiya Toshiyuki; Osamu Tabata
26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, Peer-reviewed
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Phenotypic modulation of pluripotent stem cells (PSCs) induced by microfabrication materials
Ken Ichiro Kamei; Yoshikazu Hirai; Yoshihide Makino; Momoko Yoshioka; Li Liu; Minako Nakajima; Qinghua Yuan; Yong Chen; Osamu Tabata
Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012, 01 Jan. 2012

ARE NONLINEAR RESONATORS SUITABLE FOR ENERGY HARVESTING?-EQUIVALENT CIRCUIT ANALYSIS OF NONLINEAR RESPONSE OF MEMS RESONATOR
A. Kitamura; Y. Hirai; K. Sugano; O. Tabata; T. Tsuchiya
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012, Peer-reviewed

Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application
Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
Materials Research Society Symposium Proceedings, 2012, Peer-reviewed

Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS
Toshiyuki Tsuchiya; Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
IFIP Advances in Information and Communication Technology, 2012

Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist
Hiromasa Yagyu; Yoshikazu Hirai; Akio Uesugi; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
Proceedings of International Workshop on Micro/Nano-Engineering, Dec. 2011

Sealing technique of potassium vapor cells for chip-scale atomic magnetometer
HIRAI Yoshikazu; TSUJIMOTO Kazuya; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
電気学会電子回路研究会資料, 21 Nov. 2011

Evaluation of Negative Photoresists for Culturing Mouse and Human Pluripotent Stem Cells
KAMEI KEN-ICHIRO; HIRAI YOSHIKAZU; MAKINO YOSHIHIDE; LIU LI; YUAN QINGHUA; CHEN YONG; TABATA OSAMU
センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 26 Sep. 2011

フォトレジスト基板のマウス・ヒト多能性幹細胞に与える影響の評価
亀井謙一郎; 平井義和; 牧野圭秀; Li Liu; Qinghua Yuan; Yong Chen; 田畑修
第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011

誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング
片岡達也; 平井義和; 菅野公二; 土屋智由; 田畑修
第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011

MEMS厚膜ネガレジストの粗視化分子動力学モデル
平井義和; 柳生裕聖; 上杉晃生; 牧野圭秀; 菅野公二; 土屋智由; 田畑修
第28回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011

ナノギャップ電極の作製に向けた金ナノロッドの基板上成長
西野聡; 菅野公二; 武仲能子; 田畑修; 土屋智由; 平井義和
日本化学会第63回コロイドおよび界面化学討論会, Sep. 2011

エポキシ系ネガレジスト機械的特性の架橋度依存性
上杉晃生; 牧野圭秀; 柳生裕聖; 平井義和; 菅野公二; 土屋智由; 田畑修
日本機械学会2011年度年次大会, Sep. 2011

ガラスフリットリフローによる犠牲マイクロ流路気密封止技術の確立と小型原子磁気センサ実装への応用
辻本和也; 平井義和; 菅野公二; 土屋智由; 田畑修
関西ワークショップ2011, エレクトロニクス実装学会,, Jul. 2011

High-precision and High-yield Self-Assembly of Gold Nanoparticles using Nano-scale Trenches
SUGANO Koji; HIRAOKA Ryoji; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011

Synthesis of Gold Nanoparticle using High-speed Pulsed Mixing Microfluidic Device
SUGANO Koji; YOSHIMUNE Hideaki; NAKATA Akihiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011

Equivalent Circuit Analysis of Nonlinearity Response in Electrostatic Comb Resonator
KITAMURA Akio; HIRAI Yoshikazu; SUGANO Kouji; TSUCHIYA Toshiyuki; TABATA Osamu
電気学会マイクロマシン・センサシステム研究会資料, 01 Jul. 2011

電気等価回路を用いた静電櫛歯型MEMS振動子の非線形応答解析
北村彰男; 平井義和; 菅野公二; 土屋智由; 田畑修
平成23年度電気学会マイクロマシン・センサシステム部門総合研究会, Jun. 2011

Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane
平井義和; 上杉晃生; 牧野圭秀; 柳生裕聖; 菅野公二; 土屋智由; 田畑修
The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011),, pp. 62-63, Jun. 2011, Peer-reviewed

高速脈動混合マイクロ流体デバイスを用いた均一粒子径金ナノ粒子の合成
吉宗秀晃; 中田哲博; 平井義和; 菅野公二; 土屋智由; 田畑修
平成23年電気学会全国大会, Mar. 2011

Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique
K.Tsujimoto; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
International workshop on micro/nano-engineering, 2011, Peer-reviewed

LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY
A. Taniyama; Y. Hirai; K. Sugano; O. Tabata; T. Ikehara; T. Tsuchiya
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed

SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER
K. Tsujimoto; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, Peer-reviewed

Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics
Y. Hirai; A. Uesugi; Y. Makino; H. Yagyu; K. Sugano; T. Tsuchiya; O. Tabata
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed

High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis
K. Sugano; H. Yoshimune; A. Nakata; Y. Hirai; T. Tsuchiya; O. Tabata
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, Peer-reviewed

High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels
Koji Sugano; Hideaki Yoshimune; Akihiro Nakata; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed

Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection
Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed

Epoxy-based permeable membrane fabrication for 3D microfluidic device
Yoshikazu Hirai; Yusuke Nakai; Yoshihide Makino; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011, Peer-reviewed

mESC and hiPSC Proliferation on Negative Photoresists for Microfluidics
Yoshikazu Hirai; Ken-ichiro Kamei; Yoshihide Makino; Li Liu; Qinghua Yuan; Yong Chen; Osamu Tabata
EUROSENSORS XXV, 2011

Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS
Toshiyuki Tsuchiya; Hiroyuki Tokusaki; Yoshikazu Hirai; Koji Sugano; Osamu Tabata
2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 2011, Peer-reviewed

国際会議報告：IEEE-NEMS2011 報告
平井義和
IEEJ Transactions on Sensors and Micromachines, 2011
Access this misc :

DNA Mediated self-assembly of micro-scale components and sites
Ryo Sato; Tomoki Tanemura; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 01 Dec. 2010, Peer-reviewed

MNM-3A-4 Crystallographic anisotropy analysis in fracture of micro-sized (110) single crystal silicon using Weibull statistics
Wakita Taku; Hirai Yoshikazu; Sugano Koji; Tabata Osamu; Ikehara Tsuyoshi; Tsuchiya Toshiyuki
日本機械学会マイクロ・ナノ工学シンポジウム講演論文集, 12 Oct. 2010

MNM-P11-3 Performance analysis of vibrating gyroscope using equivalent circuit of electrostatic comb transducer with built-in displacement detection
TOKUSAKI Hiroyuki; HIRAI Yoshikazu; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
マイクロ・ナノ工学シンポジウム, 12 Oct. 2010

チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術
辻本和也; 平井義和; 菅野公二; 土屋智由; 田畑修
第27回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2010

T0302-1-1 Crystal anisotropy on fracture behavior of (110) single-crystal silicon on tensile testing
Wakita Taku; Hirai Yoshikazu; Sugano Koji; Tabata Osamu; Tsuchiya Toshiyuki; Ikehara Tsuyoshi
The proceedings of the JSME annual meeting, 04 Sep. 2010

T0302-2-2 Local stress analysis of single-crystalline resonator using micro Raman spectroscopy
TANIYAMA Akira; HIRAI Yoshikazu; SUGANO Koji; TABATA Osamu; IKEHARA Tsuyoshi; TSUCHIYA Toshiyuki
The proceedings of the JSME annual meeting, 04 Sep. 2010

顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析
谷山彰; 平井義和; 菅野公二; 田畑修; 池原毅; 土屋智由
日本機械学会2010年度年次大会, Sep. 2010

Crystal anisotropy on strength of single crystal silicon measured by tensile testing
Taku,Wakita; Yoshikazu,Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tsuyoshi,Ikehara
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 44, Jul. 2010, Peer-reviewed

Component modelling of 2DOF comb transducer for equivalent circuit using built-in displacement detection
Hiroyuki,Tokusaki; Yoshikazu,Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 160, Jul. 2010, Peer-reviewed

Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell
Kazuya,Tsujimoto; Yoshikazu,Hirai; 菅野公二; Tsuchiya, Toshiyuki; Tabata, Osamu
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 211, Jul. 2010, Peer-reviewed

High-Speed Mixing of Two Solutions using Alternate Pulsed Flow from Three Inlets Microchannels
SUGANO Koji; NAKATA Akihiro; HIRAI Yoshikazu; TSUCHIYA Toshiyuki; TABATA Osamu
電気学会マイクロマシン・センサシステム研究会資料, 17 Jun. 2010

Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices Using Developer Permeability of Negative Thick-Film Resists
Y. Hirai; Y. Nakai; K. Sugano; T. Tsuchiya; O. Tabata
EUROSENSORS XXIV CONFERENCE, 2010

DNA-grafted-polymer mediated self-assembly of micro components
Guillermo Lopez; Tomoki Tanemura; Ryo Sato; Takahiro Saeki; Yoshikazu Hirai; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata; Masahiro Fujita; Mizuo Maeda
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 2010, Peer-reviewed

Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication(2009)
Yoshikazu Hirai
The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Oct. 2009, Invited

厚膜ネガレジストの埋め込み型流路作製のためのフォトリソグラフィ条件の決定手法
平井義和; 菅野公二; 土屋智由; 田畑修
第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 533-538, Oct. 2009, Peer-reviewed

Exposure and Development Simulation for Deep X-Ray LIGA
Jan G. Korvink; Sadik Hafizovic; Yoshikazu Hirai; Pascal Meyer
LIGA and its Applications, 05 Aug. 2009

Mixing speed- and temperature-controlled Microreactor for Gold Nanoparticle Synthesis
SUGANO Koji; UCHIDA Yuki; TSUCHIYA Toshiyuki; TABATA Osamu
電気学会マイクロマシン・センサシステム研究会資料, 23 Jul. 2009

平成21年度電気学会センサ・マイクロマシン部門総合研究会
菅野公二; 内田雄喜; 平井義和; 土屋智由; 田畑修
平成21年度電気学会センサ・マイクロマシン部門総合研究会, Jul. 2009

MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity
Yoshikazu Hirai; Hideaki Yoshimune; Kazuya Tsujimoto; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata
The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 2009, Peer-reviewed

Single-exposure and Single-development Process of Single-layer Negative Photoresist for Low-cost Microfluidic System Fabrication
Yoshikazu Hirai
The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009), Tainan,Taiwan, 2009, Peer-reviewed

Automated Optimization of Light Dose Distribution for Moving-Mask Lithography
Fred van Keulen; Yoshikazu Hirai; Osamu Tabata
EUROSIME 2009: THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS, 2009, Peer-reviewed

Capacitive micromachined ultrasonic transducers with novel membrane design
M. Sato; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009

Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist
Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009, Peer-reviewed

Objective function and adjoint sensitivities for moving-mask lithography
Fred Van Keulen; Fred Van Keulen; Yoshikazu Hirai; Osamu Tabata
12th AIAA/ISSMO Multidisciplinary Analysis and Optimization Conference, MAO, 01 Dec. 2008, Peer-reviewed

Effective Fabrication Method for Monolithic 3-dimensional Embedded Microstructure using the Moving-mask UV Lithography Technique
HIRAI Yoshikazu; INAMOTO Yoshiteru; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
Proc Sens Symp Sens Micromachines Appl Syst, 22 Oct. 2008, Peer-reviewed

3-dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property
Yoshikazu, Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
The 22nd international conference EUROSENSORS (EUROSENSORS XXII),, pp. 1559-1602, Sep. 2008, Peer-reviewed

Measurement of Biomagnetic Fields in Small Animals by use of an Optical Pumping Atomic Magnetomete
Shuji Taue; Sunao Ichihara; Yasuyuki Sugihara; Kiyoshi Ishikawa; Hideyuki Sugioka; Natsuhiko Mizutani; Shujie Liu; Yoshikazu Hirai; Osamu Tabata; Tetsuo Kobayashi
The 16th International Conference on Biomagnetism, Aug. 2008

ポジ型厚膜レジストの溶解速度の露光波長依存性と３次元加工への応用
平井義和; 菅野公二; 土屋智由; 田畑修
電気学会マイクロマシン・センサシステム研究会資料, 12 Jun. 2008, Peer-reviewed

レジスト現像特性の露光波長依存性を応用した厚膜レジストの３次元微細加工技術
平井義和; 菅野公二; 土屋智由; 田畑修
電気学会全国大会,3, pp. 138-139, Mar. 2008, Peer-reviewed

生体ファントムを用いた光ポンピング原子磁気センサによる微小磁場分布計測
杉原靖幸; 田上周路; 市原直; 石川潔; 水谷夏彦; 平井義和; 田畑修; 小林哲生
生体医工学シンポジウム2008, 2008

A simulation study on magneto-optical rotation in optical pumping atomic magnetometer
柏井茂達; 田上周路; 石川潔; 石川潔; 市原直; 杉岡秀行; 平井義和; 田畑修; 小林哲生
電気学会マグネティックス研究会資料, Oct. 2007

3308 3-D Microfabrication of Positive-tone Thick Photoresist Using Moving-mask UV Lithography and Profile Simulation
HIRAI Yoshikazu; INAMOTO Yoshiteru; SUGANO Koji; TSUCHIYA Toshiyuki; TABATA Osamu
The proceedings of the JSME annual meeting, Sep. 2007

Development profile simulation tool adopting Fast Marching Method for the Moving-mask UV lithography method
HIRAI Yoshikazu; INAMOTO Yoshiteru; TSUCHIYA Toshiyuki; TABATA Osamu
電気学会総合研究会, Jul. 2007

Moving-mask UV lithography and embedded microchannels
Yoshireru, Inamoto; Yoshikazu, Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
The 7th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2007),, pp. 31-32, Jun. 2007, Peer-reviewed

移動マスクUV露光法による埋め込み型流路の作製
稲本好輝; 平井義和; 菅野公二; 土屋智由; 田畑修
平成19年，電気学会全国大会, Mar. 2007

Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring
Y. Hirai; Y. Inamoto; K. Sugano; T. Tsuchiya; O. Tabata
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007, Peer-reviewed

移動マスクUV露光法による厚膜レジストの三次元微細加工技術
平井義和; Inamoto; 菅野公二; 土屋智由; 田畑修
Proceedings of the 23rd Sensor Symposium, Oct. 2006

Prediction method of 3-D shape fabricated by double exposure technique in deep X-ray lithography ((DXRL)-X-2)
N Matsuzuka; Y Hirai; O Tabata
MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006

微細噴孔ノズルによる微粒化過程の解析−移動Ｘ線マスク露光法による微細噴孔製作と噴霧観察−
大久保陽一郎; 井戸田芳典; 河村清美; 田畑修; 平井義和
日本液体微粒化学会第14回微粒化シンポジウム(微粒化の可能性への挑戦), Nov. 2005

Study on 3-D Microfabrication by Double Exposure Method in Deep X-ray Lithography (D2XRL)
Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata
PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, Oct. 2005

Analytical Method for Process Parameters Determination on Double Exposure Deep X-Ray Lithography
Yoshikazu Hirai; Naoki Matsuzuka; Osamu Tabata
High Aspect Micro Structure Technology, Jun. 2005

A New Experimental Technique for Process Parameters Determination on X-ray Lighography
Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata
High Aspect Micro Structure Technology, Jun. 2005

Ｘ線二重露光法における加工パラメータ決定手法の提案とその検証
平井義和; 松塚直樹; 田畑修
機械学会情報知能部門会議, Mar. 2005

A novel fabrication process of 3-D microstructures by double exposure in standard deep x-ray lithography
N Matsuzuka; Y Hirai; O Tabata
MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, Peer-reviewed

3-D Micro-machining Technique by Double Exposure in Normal Deep X-ray Lithography
Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata
第21回「センサ・マイクロマシンと応用システム」シンポジウム, 2004

3D simulation system for moving mask deep X-ray lithography
Y Hirai; N Matsuzuka; S Hafizovic; JG Korvink; O Tabata
MHS2003: PROCEEDINGS OF 2003 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 2003

X3D: 3D X-ray lithography and development simulation for MEMS
S Hafizovic; Y Hirai; O Tabata; JG Korvink
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003

Measurement of PMMA Dissolution Rate and System Calibration for Predictive 3-D Simulation of Moving Mask Deep X-Ray Lithography
Yoshikazu Hirai; Osamu Tabata; Sadik Hafizovic; Jan. G. Korvink
High Aspect Micro Structure Technology, Jan. 2003

移動マスクＸ線リソグラフィーにおけるX3Dの有用性
平井義和; 松塚直樹; 田畑修; Sadik Hafizovic; Jan G. Korvink
第20回「センサ・マイクロマシンと応用システム」シンポジウム, 2003

Effect of Development Process in Moving Mask Deep X-ray Lithography for 3D Microfabrication
Naoki Matsuzuka; Yoshikazu Hirai; Osamu Tabata; Sadik Hafizovic; Jan G. Korvink
High Aspect Micro Structure Technology, 2003

X線応用3次元加工用シミュレーションシステムの開発
平井義和; Sadik Hafizovic; Jan G.Korvink; 田畑修
電気学会マイクロマシン・センサシステム研究会, 2002

Books and Other Publications

LIGA and its applications
Saile, Volker
Wiley-VCH, 2009
Find Kyoto University's collection of books :

Industrial Property Rights

特願2022-143731, 金属ガス封入セル
平井義和清瀬俊

特許7217521, 特開2020-146015, 特願2019-48928, マイクロ流体デバイス
亀井謙一郎; 平井義和; 田畑修; 宮崎貴史

特許7107528, 特開2020-099211, 特願2018-238405, 細胞培養容器
福江久美子; 亀井謙一郎; 平井義和; 田畑修

WO2022/097557, 特願2020-185571, 金属ガス封入セル及びその製造方法
平井義和; 清瀬俊

特開W02014/132651, 特願PCT/JP2014/001059, アルカリ金属セルの製造方法，アルカリ金属の製造方法，およびアルカリ金属セル
田畑修; 藩和宏; 水谷夏彦; 平井義和; 辻本和也

Awards

15 Mar. 2024
日本機械学会関西支部, JSME Kansai Academic Award
平井義和、亀井謙一郎、田畑修
ナノマイクロ加工を応用したボディ・オン・チップの創製

08 Nov. 2023
電気学会・E部門大会　第40回「センサ・マイクロマシンと応用システム」シンポジウム, 最優秀技術論文賞
Japan, Japan society

11 Mar. 2021
応用物理学会・集積化MEMS技術研究会, 優秀ポスター賞

01 Feb. 2021
日本機械学会マイクロ・ナノ工学部門, 優秀講演論文表彰

06 Mar. 2020
コニカミノルタ科学技術振興財団, 令和元年度コニカミノルタ画像科学奨励賞

21 Nov. 2019
The Institute of Electrical Engineers of Japan, 優秀技術論文賞

01 Feb. 2019
日本機械学会マイクロ・ナノ工学部門, 優秀講演論文表彰

15 Jun. 2017
新化学技術推進協会, 第6回新化学技術研究奨励賞

02 Jun. 2017
The Institute of Electrical Engineers of Japan, 第73回電気学術振興賞論文賞

17 Feb. 2017
文部科学省「ナノテクノロジープラットフォーム」, 平成28年度秀でた利用6大成果賞

04 Feb. 2017
Journal of Micromechanics and Microengineering, Outstanding Reviewer Award in 2016

26 Oct. 2016
The Institute of Electrical Engineers of Japan, 最優秀技術論文賞

01 Apr. 2016
The Institute of Electrical Engineers of Japan, IEEJ Excellent Presentation Award

30 Oct. 2015
The Institute of Electrical Engineers of Japan, The Igarashi Award

22 Mar. 2003
The Japan Society of Mechanical Engineers, The Hatakeyama Award

External funds: Kakenhi

Gut-Liver-on-a-Chip to investigate the progression mechanisms of non-alcoholic fatty liver diseases
Grant-in-Aid for Scientific Research (B)
Basic Section 27040:Biofunction and bioprocess engineering-related
Kyoto University
Ken-ichiro Kamei
From 01 Apr. 2021, To 31 Mar. 2024, Project Closed
非アルコール性脂肪肝疾患;組織チップ;腸肝連関;ヒト多能性幹細胞;マイクロ流体デバイス;オルガノイド;センサ;非アルコール性脂肪肝炎;病態モデル;多組織チップ;肝臓;小腸;分化誘導;非アルコール性脂肪性肝疾患
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21H01728/

"Body-on-a-chip" integrated recirculation system mimicking human body rhythms
Grant-in-Aid for Scientific Research (B)
Basic Section 28050:Nano/micro-systems-related
Kyoto University
Yoshikazu Hirai
From 01 Apr. 2019, To 31 Mar. 2022, Project Closed
Body on a Chip;組織チップ;マイクロ流体デバイス;圧力センサ;微細加工;グレースケールリソグラフィ;設計工学
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-19H02572/

Japanese-German Joint Research on Real Time Monitoring Technology of Cellular Metabolism in Vitro Model Device
Fund for the Promotion of Joint International Research (Fostering Joint International Research (B))
Medium-sized Section 90:Biomedical engineering and related fields
Kyoto University of Advanced Science;Kyoto University
OSAMU TABATA
From 09 Oct. 2018, To 31 Mar. 2022, Project Closed
生体模倣システム;細胞代謝;マイクロシステム;量子センシング;リアルタイムモニタリング;オルガノイド;細胞;細胞微小環境モデル;生体外モデルデバイス;生体外モデル;メタボリックシンドローム;Analytic BoC;リアルタイム計測;磁気共鳴イメージング
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18KK0306/

Development of a method for simultaneous recordings of single channel dynamics and currents
Grant-in-Aid for Scientific Research (B)
Basic Section 48020:Physiology-related
University of Fukui
Hirofumi Shimizu
From 01 Apr. 2018, To 31 Mar. 2021, Project Closed
1分子計測;蛋白質;X線回折;Ｘ線回折
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18H02596/

Advanced 3D tissue engineering with microfluidic technology
Grant-in-Aid for Scientific Research (B)
Kyoto University
Ken-ichiro Kamei
From 01 Apr. 2017, To 31 Mar. 2020, Project Closed
多能性幹細胞;マイクロ流体デバイス;オルガノイド;肝臓;分化;ヒト多能性幹細胞;成熟化;組織工学;幹細胞;血管網
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17H02083/

Develoepment of Microfabricated Vapor Cells Fabrication for High-Performance Chip Scale Atomic Devices
Grant-in-Aid for Young Scientists (B)
Kyoto University
Yoshikazu HIRAI
From 01 Apr. 2016, To 31 Mar. 2018, Project Closed
ナノマイクロ加工;原子時計;原子磁気センサ;CPT共鳴;三次元微細加工;ガスセル;MEMS;アルカリ金属;計測工学;マイクロ・ナノデバイス;先端機能デバイス;応用光学・量子光工学
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16K17502/

Body on a Chip as an in-vitro model of endangered animals
Grant-in-Aid for Challenging Exploratory Research
Kyoto University
Ken-ichiro Kamei
From 01 Apr. 2016, To 31 Mar. 2018, Project Closed
Body on a Chip;iPS細胞;マイクロ流体デバイス;絶滅危惧種;動物保全;リプログラミング;分化;マイクロ・ナノデバイス;動物;細胞・組織;獣医学
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16K14660/

Development of a method for simultaneous recordings of single channel dynamics and currents
Grant-in-Aid for Scientific Research (B)
University of Fukui
Hirofumi Shimizu
From 01 Apr. 2015, To 31 Mar. 2018, Project Closed
1分子計測;蛋白質;X線回折;イオンチャネル;タンパク質;X線;１分子計測(SMD);マイクロ・ナノデバイス;Ｘ線
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-15H04675/

Development of the DXT method by Photolithography
Grant-in-Aid for Challenging Exploratory Research
University of Fukui
Hirofumi SHIMIZU
From 01 Apr. 2013, To 31 Mar. 2015, Project Closed
Single molecule;Ion channel protein;dynamics;1分子計測;イオンチャネル;蛋白質;MEMS
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-25670107/

Fabrication of epoxy-based molecular permeable membrane and analysis of membrane characteristics using coarse-grained molecular dynamics simulation
Grant-in-Aid for Young Scientists (B)
Kyoto University
Yoshikazu HIRAI
From 01 Apr. 2011, To 31 Mar. 2013, Project Closed
リソグラフィ;粗視化分子動力学;分子透過膜;フォトレジスト;弾性率;マイクロ・ナノデバイス;高分子構造・物性;シミュレーション工学;マイクロマシン;先端機能デバイス;フィルタ
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23710148/

蛋白質の立体構造にタイムスタンプを付し構造遷移過程の全容を解明する手法の確立
Grant-in-Aid for Challenging Research (Pioneering)
Medium-sized Section 48:Biomedical structure and function and related fields
University of Fukui
清水啓史
From 30 Jun. 2022, To 31 Mar. 2025, Granted
1分子計測;蛋白質;X線回折;単粒子構造解析
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22K18376/

X線1分子動態計測による膜蛋白質マルチセンシング機構の動的解明
Grant-in-Aid for Scientific Research (B)
Basic Section 48020:Physiology-related
University of Fukui
清水啓史
From 01 Apr. 2023, To 31 Mar. 2026, Granted
1分子計測;蛋白質;X線回折
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23H02664/

Construction of in vitro human liver disease model capable of real-time temperature mapping and its application to elucidation of disease mechanisms
Grant-in-Aid for Scientific Research (A)
Medium-sized Section 28:Nano/micro science and related fields
Kyoto University of Advanced Science
田畑修
From 01 Apr. 2023, To 31 Mar. 2027, Granted
生体外ヒトモデル;オルガノイド;量子温度センシング;マイクロ流体チップ;非アルコール性脂肪性肝疾患
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23H00260/

マイクロ流体デバイスを応用した新規非侵襲的着床前診断法の構築
Grant-in-Aid for Scientific Research (C)
Basic Section 56040:Obstetrics and gynecology-related
Osaka University
佐治史惠
From 01 Apr. 2024, To 31 Mar. 2027, Granted
マイクロ流体デバイス;niPGT-A;cfDNA
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-24K12602/

Brain-Gut-Liver-on-a-Chip to investigate the progression of Alzheimer's disease in NAFLD patients
Grant-in-Aid for Scientific Research (A)
Medium-sized Section 90:Biomedical engineering and related fields
Kyoto University
亀井謙一郎
From 01 Apr. 2024, To 31 Mar. 2027, Granted
アルツハイマー病;組織チップ;幹細胞;組織連関
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-24H00797/

X線1分子動態計測による膜蛋白質マルチセンシング機構の動的解明
Grant-in-Aid for Scientific Research (B)
Basic Section 48020:Physiology-related
University of Fukui
清水啓史
From 01 Apr. 2023, To 31 Mar. 2026, Granted
1分子計測;蛋白質;X線回折
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23K27355/

温度感受性イオンチャネルの多様な刺激応答運動を可視化する１分子計測技術の新展開
Grant-in-Aid for Scientific Research (B)
Basic Section 28050:Nano/micro-systems-related
Kyoto University
平井義和
From 01 Apr. 2025, To 31 Mar. 2028, Adopted
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-25K01637/

External funds: others

Beyond5Gを支える原子時計チップの超小型ガスセル製造技術の開発 (2024年度分)
経済産業省, 官民による若手研究者発掘支援事業費助成金
From 01 Apr. 2024, To 31 Mar. 2025
代表

超スマート社会を支える超小型原子時計のガスセル製造技術
大学発新産業創出基金事業プロジェクト推進型起業実証支援

Beyond5Gを支える原子時計チップの超小型ガスセル製造技術の開発 (2023年度分)
経済産業省, 官民による若手研究者発掘支援事業費助成金
From 01 Apr. 2023, To 31 Mar. 2024
代表

６G社会実現をリードする原子時計チップの革新的な超小型ガスセルの研究開発 (2023年度分)
経済産業省, 官民による若手研究者発掘支援事業費助成金
From 01 Apr. 2023, To 31 Mar. 2024
代表

６G社会実現をリードする原子時計チップの革新的な超小型ガスセルの研究開発 (2022年度分)
経済産業省, 官民による若手研究者発掘支援事業費助成金
From 01 Apr. 2022, To 31 Mar. 2023
代表

生体外実験モデルの構築に向けた高精度イオン液体型圧力センサ
荏原畠山記念文化財団・ 2019年度研究助成
平井義和

Flow FISH sorterの開発と革新的がん早期診断への展開
テルモ生命科学振興財団・2019年度研究助成（医療機器研究）
峰晴陽平

3次元微細加工を応用した超小型原子時計用ガスセルのプロセス開発
村田学術振興財団・平成30年度研究助成
平井義和

概日リズムをMEMS技術で模倣した革新的「ボディ・オン・チップ」の開発
京都大学教育研究振興財団・平成30年度研究活動推進助成
平井義和

シリコン3次元微細加工を応用した超高感度原子センサ素子の開発
京都技術科学センター・平成30年度研究開発助成金
平井義和

生体適合性材料の成形加工を用いた高感度イオン液体型圧力センサの開発
御器谷科学技術財団・平成29年度研究助成金
平井義和

IoT社会の実現に向けた高精度チップスケール原子時計の作製技術に関する研究
日本板硝子材料工学助成会・平成28年度研究助成
平井義和

「Body on a Chip」を用いた創薬スクリーニングの開発
テルモ科学技術振興財団・平成24年度特定研究助成
亀井謙一郎

３次元リソグラフィ用プロセス最適化シミュレータの開発
平成２４年度第２回「研究成果最適展開支援プログラム(A-STEP)」探索タイプ
平井義和

紫外線リソグラフィによるエポキシ樹脂系分子フィルタ作製技術の開発
平成２３年度第１回「研究成果最適展開支援プログラム(A-STEP)」探索タイプ
平井義和

Last Updated :2025/05/27

Education

Teaching subject(s)

From 01 Apr. 2019, To 31 Mar. 2020
機械製作実習
Fall, 工学部

From 01 Apr. 2018, To 31 Mar. 2019
機械製作実習
Fall, 工学部

From 01 Apr. 2017, To 31 Mar. 2018
機械製作実習
Fall, 工学部

From 01 Apr. 2024, To 31 Mar. 2025
Exercise on Project Management in Engineering
i059, Fall, Graduate School of Engineering, 2

From 01 Apr. 2024, To 31 Mar. 2025
Project Management in Engineering
i049, Spring, Graduate School of Engineering, 2

From 01 Apr. 2024, To 31 Mar. 2025
Exercise in Practical Scientific English I
i034, Spring, Graduate School of Engineering, 2

From 01 Apr. 2024, To 31 Mar. 2025
Mathematics for Computation
5003, Spring, Faculty of Engineering, 2

From 01 Apr. 2024, To 31 Mar. 2025
Advanced Modern Science and Technology (4 times course)
i055, Fall, Graduate School of Engineering, 0.5

From 01 Apr. 2024, To 31 Mar. 2025
Frontiers in Modern Scinece and Technology (6H course)
i051, Spring, Graduate School of Engineering, 0.5

From 01 Apr. 2024, To 31 Mar. 2025
Global Leadership Seminar I (Study for methodology in a company)
2403, Year-long, Faculty of Engineering, 1

From 01 Apr. 2024, To 31 Mar. 2025
Global Leadership Seminar II (Innovation and its commercialization)
2503, Fall, Faculty of Engineering, 1

From 01 Apr. 2024, To 31 Mar. 2025
Frontiers in Modern Scinece and Technology (12H course)
i052, Spring, Graduate School of Engineering, 1

From 01 Apr. 2024, To 31 Mar. 2025
Exercise in Practical Scientific English II
i046, Fall, Graduate School of Engineering, 1

From 01 Apr. 2024, To 31 Mar. 2025
Advanced Modern Science and Technology (8 times course)
i056, Fall, Graduate School of Engineering, 1

From 01 Apr. 2024, To 31 Mar. 2025
Advanced Modern Science and Technology (12 times course)
i060, Fall, Graduate School of Engineering, 1.5

From 01 Apr. 2023, To 31 Mar. 2024
Mathematics for Computation
5003, Spring, Faculty of Engineering, 2

From 01 Apr. 2023, To 31 Mar. 2024
Exercise on Project Management in Engineering
i059, Fall, Graduate School of Engineering, 2

From 01 Apr. 2023, To 31 Mar. 2024
Project Management in Engineering
i049, Spring, Graduate School of Engineering, 2

From 01 Apr. 2023, To 31 Mar. 2024
Advanced Modern Science and Technology (4 times course)
i055, Fall, Graduate School of Engineering, 0.5

From 01 Apr. 2023, To 31 Mar. 2024
Frontiers in Modern Scinece and Technology (6H course)
i051, Spring, Graduate School of Engineering, 0.5

From 01 Apr. 2023, To 31 Mar. 2024
Global Leadership Seminar II (Innovation and its commercialization)
2503, Fall, Faculty of Engineering, 1

From 01 Apr. 2023, To 31 Mar. 2024
Global Leadership Seminar I (Study for methodology in a company)
2403, Year-long, Faculty of Engineering, 1

From 01 Apr. 2023, To 31 Mar. 2024
Frontiers in Modern Scinece and Technology (12H course)
i052, Spring, Graduate School of Engineering, 1

From 01 Apr. 2023, To 31 Mar. 2024
Exercise in Practical Scientific English I
i045, Spring, Graduate School of Engineering, 1

From 01 Apr. 2023, To 31 Mar. 2024
Professional Scientific Presentation Exercises
i041, Year-long, Graduate School of Engineering, 1

From 01 Apr. 2023, To 31 Mar. 2024
Advanced Modern Science and Technology (8 times course)
i056, Fall, Graduate School of Engineering, 1

From 01 Apr. 2023, To 31 Mar. 2024
Advanced Modern Science and Technology (12 times course)
i060, Fall, Graduate School of Engineering, 1.5

From 01 Apr. 2022, To 31 Mar. 2023
Mechanical and System Engineering Laboratory 2
5057, Fall, Faculty of Engineering, 1

From 01 Apr. 2022, To 31 Mar. 2023
Exercise in Practical Scientific English II
i046, Fall, Graduate School of Engineering, 1

From 01 Apr. 2022, To 31 Mar. 2023
Professional Scientific Presentation Exercises
i041, Year-long, Graduate School of Engineering, 1

From 01 Apr. 2022, To 31 Mar. 2023
Exercise on Project Management in Engineering
i059, Fall, Graduate School of Engineering, 2

From 01 Apr. 2022, To 31 Mar. 2023
Exercise in Practical Scientific English I
i045, Spring, Graduate School of Engineering, 1

From 01 Apr. 2022, To 31 Mar. 2023
Mechanical and System Engineering Laboratory 2
5057, Spring, Faculty of Engineering, 1

From 01 Apr. 2022, To 31 Mar. 2023
Global Leadership Seminar I (Study for methodology in a company)
2403, Year-long, Faculty of Engineering, 1

From 01 Apr. 2022, To 31 Mar. 2023
Project Management in Engineering
i049, Spring, Graduate School of Engineering, 2

From Apr. 2014, To Mar. 2015
Mechanical and System Engineering Laboratory 2
Fall, 工学部

From Apr. 2015, To Mar. 2016
Mechanical and System Engineering Laboratory 2
Fall, 工学部

From Apr. 2016, To Mar. 2017
Mechanical and System Engineering Laboratory 2
Spring, 工学部

From Apr. 2016, To Mar. 2017
Mechanical and System Engineering Laboratory 2
Fall, 工学部

From Apr. 2017, To Mar. 2018
Mechanical and System Engineering Laboratory 2
Spring, 工学部

From Apr. 2017, To Mar. 2018
Mechanical and System Engineering Laboratory 2
Fall, 工学部

From Apr. 2018, To Mar. 2019
Mechanical and System Engineering Laboratory 2
Spring, 工学部

From Apr. 2018, To Mar. 2019
Mechanical and System Engineering Laboratory 2
Fall, 工学部

From Apr. 2019, To Mar. 2020
Mechanical and System Engineering Laboratory 2
Spring, 工学部

From Apr. 2019, To Mar. 2020
Mechanical and System Engineering Laboratory 2
Fall, 工学部

From Apr. 2020, To Mar. 2021
Mechanical and System Engineering Laboratory 2
Spring, 工学部

From Apr. 2020, To Mar. 2021
Mechanical and System Engineering Laboratory 2
Fall, 工学部

From Apr. 2021, To Mar. 2022
Mechanical and System Engineering Laboratory 2
Spring, 工学部

From Apr. 2021, To Mar. 2022
Mechanical and System Engineering Laboratory 2
Fall, 工学部

Student achievements: Awards

優秀論文発表賞
宮崎貴史, 電気学会, 01 Apr. 2021

奨励賞
宮崎貴史, 電気学会E部門大会, 27 Oct. 2020

研究奨励賞
木元雄一, エレクトロニクス実装学会, 27 Jun. 2019

Outstanding Paper Award Finalists
山内一慶, Transducers2019, 12 Sep. 2019

優秀発表賞
山内一慶, 化学とマイクロ・ナノシステム学会, 28 May 2019

優秀論文発表賞
Jiaxu Wu, 電気学会, 01 Apr. 2019

奨励賞
Jiaxu Wu, 電気学会E部門大会, 01 Nov. 2018

奨励賞
楊建東, 電気学会E部門大会, 11 Nov. 2021

Last Updated :2025/05/27

Administration

Faculty management (title, position)

From 01 Apr. 2021, To 31 Mar. 2023
桂事業場環境安全衛生委員会　委員

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Hirai, Yoshikazu

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External funds: Kakenhi

External funds: others

Education

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